JPH0537208Y2 - - Google Patents
Info
- Publication number
- JPH0537208Y2 JPH0537208Y2 JP17893786U JP17893786U JPH0537208Y2 JP H0537208 Y2 JPH0537208 Y2 JP H0537208Y2 JP 17893786 U JP17893786 U JP 17893786U JP 17893786 U JP17893786 U JP 17893786U JP H0537208 Y2 JPH0537208 Y2 JP H0537208Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ceramic
- conductive material
- electrode part
- impedance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 13
- 239000000843 powder Substances 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 8
- 229910052697 platinum Inorganic materials 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000011195 cermet Substances 0.000 description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 description 2
- 239000011224 oxide ceramic Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
【考案の詳細な説明】
(産業上の利用分野)
本考案は、セラミツクス製の測定管を有するセ
ラミツクス電磁流量計に関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a ceramic electromagnetic flowmeter having a measuring tube made of ceramics.
更に詳述すれば、本考案は電磁流量計の電極部
分の改良に関するものである。 More specifically, the present invention relates to an improvement in the electrode portion of an electromagnetic flowmeter.
(従来の技術)
第2図は従来より一般に使用されている従来例
の構成説明図である。(Prior Art) FIG. 2 is a diagram illustrating the configuration of a conventional example that has been commonly used.
図において、1はセラミツクス製の円筒状の測
定管である。11,12は導電性粉末を混合し測
定管1と一体に焼成することにより形成された柱
状のサーメツトの電極である。 In the figure, 1 is a cylindrical measuring tube made of ceramics. Reference numerals 11 and 12 denote columnar cermet electrodes formed by mixing conductive powder and firing the mixture together with the measuring tube 1.
(考案が解決しようとする問題点)
このような電極においては、
導電性粉末の材質としては、導電性粉末の融点
が、セラミツク製の測定管の焼成温度より高いこ
と、かつ、高耐食性を有することが必要で、たと
えば、アルミナ(Al2O3)、ジルコニア(ZrO2)
等の酸化物セラミツクスに白金(Pt)あるいは
パラジウム(Pd)を混合する組み合わせが適当
である。(Problems to be solved by the invention) In such an electrode, the material of the conductive powder must be one that has a melting point higher than the firing temperature of the ceramic measuring tube and has high corrosion resistance. For example, alumina (Al 2 O 3 ), zirconia (Z r O 2 )
A suitable combination is mixing platinum (Pt) or palladium (Pd) with oxide ceramics such as oxide ceramics.
次に、混合する導電性粉末の割合は、シール性
能の信頼性及びコストの面からは導電性が得られ
る範囲内でなるべく少い方が良い。電極部11,
12と測定管1との境界でのシール性能からは、
導電性微粉末の含有率は少なければ少いほどよ
い。なぜならば、含有率が増すほど焼成時の収縮
率が小さくなり、周囲の素地セラミツクスとの収
縮率差が大きくなり、シール性の信頼性が低下す
る。このため、導電性が得られる範囲内で含有率
はなるべく少い方がよい。 Next, the proportion of the conductive powder to be mixed is preferably as small as possible within the range that provides conductivity from the viewpoint of reliability of sealing performance and cost. electrode part 11,
From the sealing performance at the boundary between 12 and measuring tube 1,
The lower the content of the conductive fine powder, the better. This is because the higher the content, the smaller the shrinkage rate during firing, and the larger the difference in shrinkage rate with the surrounding base ceramics, reducing the reliability of sealing performance. Therefore, the content should be as low as possible within the range that provides conductivity.
またコストの面からは、白金やパラジウム等の
高価な金属粉末を使用する場合、特に少ない方が
よい。 Furthermore, from the viewpoint of cost, the smaller the amount, the better, especially when using expensive metal powders such as platinum and palladium.
一方、接液部の抵抗は、導電性粉末の体積含有
率が高い方が小さくなる。なぜならば、接液抵抗
は導電性微粉末と測定流体との接触面積が大きい
ほど、小さくなるからである。 On the other hand, the resistance of the liquid-contacted part becomes smaller as the volume content of the conductive powder is higher. This is because the contact resistance becomes smaller as the contact area between the conductive fine powder and the measurement fluid increases.
接液インピーダンスが大きくなると、性能面に
関し、次の問題点が発生する。 When the wetted impedance increases, the following problems occur in terms of performance.
第2図において、eoは外部の誘導電圧、Zsは信
号源インピーダンス、Zoは誘導源と信号線間のイ
ンピーダンスとする。ここで、サーメツト電極1
1,12内の抵抗は、導電性物質の連続相が形成
されることにより導電性を得ているため、十分小
さく無視できる。(導電性物質の導電性とほぼ同
じ)。 In FIG. 2, e o is the external induced voltage, Z s is the signal source impedance, and Z o is the impedance between the induction source and the signal line. Here, the cermet electrode 1
The resistance within 1 and 12 is sufficiently small and can be ignored because conductivity is obtained by forming a continuous phase of a conductive substance. (Almost the same as the conductivity of conductive substances).
検出器からの誘導による出力電圧eは
e=Zs/Zs+Zoeo
となり、信号源インピーダンスZsが大きいほど、
誘導の影響を受け易いことになる。信号源インピ
ーダンスZsは、測定液のインピーダンスと接液イ
ンピーダンスの和である。したがつて、接液イン
ピーダンスが大きくなると、信号源インピーダン
スZsは大きくなる。 The output voltage e due to induction from the detector is e = Z s / Z s + Z o e o , and the larger the signal source impedance Z s is,
This means that it is easily influenced by induction. The signal source impedance Z s is the sum of the impedance of the measurement liquid and the wetted impedance. Therefore, as the wetted impedance increases, the signal source impedance Zs increases.
以上の結果、接液しない部分はなるべく導電性
微粉末の含有率を小さくして、高い気密性を確保
し、接液部分は含有率を高くすることにより接液
抵抗を小とし、耐ノイズ性を確保することが望ま
しい。 As a result of the above, the content of conductive fine powder is kept as low as possible in the parts that do not come in contact with liquid to ensure high airtightness, and the part that comes into contact with liquid is made to have a high content to reduce the contact resistance and improve noise resistance. It is desirable to ensure that
本考案は、この点に着目したものである。 The present invention focuses on this point.
本考案の目的は、セラミツクス電磁性流量計に
おいて、電極部分の接液インピーダンスを小さく
し、しかも、低コストの高信頼性を有するセラミ
ツク電磁流量計を提供するにある。 An object of the present invention is to provide a ceramic electromagnetic flowmeter in which the impedance of electrode portions in contact with liquid is reduced, and which is low-cost and highly reliable.
(問題点を解決するための手段)
この目的を達成するために、本考案は、測定流
体が流れるセラミツクス製の測定管中の電極部に
導電性物質が埋め込み焼成されたセラミツクス電
磁流量計において、前記電極部の接液部分が高濃
度の導電性物質から構成され該電極部の他の部分
が低濃度の導電性物質から構成されたことを特徴
とするセラミツクス電磁流量計を構成したもので
ある。(Means for solving the problem) In order to achieve this object, the present invention provides a ceramic electromagnetic flowmeter in which a conductive substance is embedded and fired in the electrode part of a ceramic measuring tube through which a measuring fluid flows. The ceramic electromagnetic flowmeter is characterized in that a part of the electrode part in contact with the liquid is made of a highly concentrated conductive material, and another part of the electrode part is made of a low concentration conductive material. .
(作用)
以上の構成において、電極部の接液部は導電性
が大であるので、測定流体に対する接液インピー
ダンスが低くでき、耐ノイズ性を改善することが
できる。同時に、電極部の他の部分は導電性物質
が低濃度で測定管と同様な焼成時の収縮率を有す
るので、シール性も確保できる。(Function) In the above configuration, since the liquid contact portion of the electrode portion has high conductivity, the liquid contact impedance to the measurement fluid can be lowered, and noise resistance can be improved. At the same time, since the other parts of the electrode part have a low concentration of conductive material and have the same shrinkage rate during firing as the measurement tube, sealability can also be ensured.
以下、実施例に基づき詳細に説明する。 Hereinafter, a detailed explanation will be given based on examples.
(実施例)
第1図は、本考案の一実施例の要部構成説明図
である。(Embodiment) FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention.
図において、第2図と同一記号は同一機能を示
す。 In the figure, the same symbols as in FIG. 2 indicate the same functions.
以下、第2図と相違部分のみ説明する。 Hereinafter, only the differences from FIG. 2 will be explained.
図において、2は電極である。21は電極にお
いて、電気的導通の得られる、最低限必要な導電
性をもたせる程度、白金あるいはパラジウムの粉
末がセラミツク材に混合された本体部分である。
ここでは、たとえは、白金の20%体積含有率を有
する。22は電極部分2において、測定流体との
接液部分において、接液インピーダンスを低くす
るように、白金又はパラジウムの金属粉末の含有
率を高くした接液部分である。ここでは、たとえ
ば、白金の体積含有率を50%にした部分である。 In the figure, 2 is an electrode. Reference numeral 21 denotes a main body portion of the electrode in which platinum or palladium powder is mixed with ceramic material to the extent necessary to provide electrical conductivity.
Here, the example has a 20% volume content of platinum. Reference numeral 22 denotes a part of the electrode part 2 in which the content of platinum or palladium metal powder is increased so as to lower the impedance in contact with the liquid to be measured. Here, for example, the volume content of platinum is 50%.
このように構成された装置においては、接液部
分22は接液インピーダンスは低くでき、耐ノイ
ズ性を改善する事でできる。一方、本体部分21
は導通性は確保しつつ金属の体積含有率は低いの
で、低コストにし得ると共に、シール性について
高信頼性を確保することができる。 In the device configured in this way, the impedance of the liquid contacting portion 22 can be lowered and the noise resistance can be improved. On the other hand, the main body part 21
Since the metal volume content is low while ensuring electrical conductivity, the cost can be reduced and high reliability can be ensured in terms of sealing performance.
(考案の効果)
以上説明したように、本考案は測定流体が流れ
るセラミツクス製の測定管中の電極部に導電性物
質が埋め込み焼成されたセラミツクス電磁流量計
において、前記電極部の接液部分が高濃度の導電
性物質から構成され該電極部の他の部分が低濃度
の導電性物質から構成されたことを特徴とするセ
ラミツクス電磁流量計を構成したので、接液部分
は接液インピーダンスを低く確保でき、耐ノイズ
性が改善し得ると共に電極の他の部分は導電性の
確保してリードとしての機能を果すと共にシール
性について高信頼性が得られると共に、低コスト
を確保できる。(Effects of the Invention) As explained above, the present invention provides a ceramic electromagnetic flowmeter in which a conductive material is embedded and fired in the electrode part of a ceramic measurement tube through which a measuring fluid flows, and the liquid contact part of the electrode part is A ceramic electromagnetic flowmeter is constructed in which the electrode part is made of a conductive material with a high concentration, and the other part of the electrode part is made with a conductive material with a low concentration. It is possible to improve the noise resistance, ensure conductivity in other parts of the electrode and function as a lead, and achieve high reliability in terms of sealing performance, as well as ensure low cost.
したがつて、本考案によれば、電極部分の接液
インピーダンスを低くし得ると共に、シール性の
高信頼性と低コスト化し得るセラミツクス電磁流
量計を実現することができる。 Therefore, according to the present invention, it is possible to realize a ceramic electromagnetic flowmeter in which the impedance of the electrode portion in contact with liquid can be lowered, and the sealing performance can be highly reliable and the cost can be reduced.
第1図は本考案の一実施例の要部構成説明図、
第2図は従来より一般に使用されている従来例の
構成説明図、第3図は第2図の説明図である。
1……測定管、2……電極、21……本体部
分、22……接液部分。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
FIG. 2 is an explanatory diagram of the configuration of a conventional example that has been generally used, and FIG. 3 is an explanatory diagram of FIG. 2. 1... Measuring tube, 2... Electrode, 21... Main body part, 22... Liquid contact part.
Claims (1)
電極部に導電性物質が埋め込み焼成されたセラミ
ツクス電磁流量計において、前記電極部の接液部
分が高濃度の導電性物質から溝成され該電極部の
他の部分が低濃度の導電性物質から構成されたこ
とを特徴とするセラミツクス電磁流量計。 In a ceramic electromagnetic flowmeter in which a conductive material is embedded and fired in the electrode part of a ceramic measuring tube through which the measuring fluid flows, the liquid contact part of the electrode part is made of a highly concentrated conductive material with a groove formed in the electrode part. A ceramic electromagnetic flowmeter characterized in that the other parts are made of a low concentration conductive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17893786U JPH0537208Y2 (en) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17893786U JPH0537208Y2 (en) | 1986-11-20 | 1986-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6383620U JPS6383620U (en) | 1988-06-01 |
| JPH0537208Y2 true JPH0537208Y2 (en) | 1993-09-21 |
Family
ID=31121540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17893786U Expired - Lifetime JPH0537208Y2 (en) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0537208Y2 (en) |
-
1986
- 1986-11-20 JP JP17893786U patent/JPH0537208Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6383620U (en) | 1988-06-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103998922A (en) | Gas sensor electrodes and gas sensors | |
| JPS63738B2 (en) | ||
| US4138881A (en) | Resistor-type solid electrolyte oxygen sensor | |
| JP2003517605A (en) | Electrochemical measurement sensor | |
| JPH0537208Y2 (en) | ||
| JPS5965758A (en) | Electrochemical device and cell | |
| CA1098586A (en) | Probe for an electrochemical, oxygen measurement pickup | |
| JPH0542336Y2 (en) | ||
| JPH0542335Y2 (en) | ||
| JPH07128282A (en) | Hydrogen ion concentration detector | |
| JP2004503674A (en) | Platinum metal-containing cermet electrode for electrochemical reduction of oxygen | |
| JPS6326569A (en) | Ion selective electrode device | |
| JPH0542334Y2 (en) | ||
| JPH0462463A (en) | Sensor probe having solid reference material | |
| JPS5888645A (en) | Measuring sensor for content of oxygen in gas | |
| JPH067317Y2 (en) | Ceramic electromagnetic flowmeter | |
| JPH0537210Y2 (en) | ||
| JPH0542337Y2 (en) | ||
| JPH0226028Y2 (en) | ||
| JPH0541375Y2 (en) | ||
| JPS61155853A (en) | Element for measuring oxygen concentration | |
| JPH0298660A (en) | Gas concentration sensor | |
| JPS5819554A (en) | Oxygen concentration detector | |
| JPH0743615Y2 (en) | Electromagnetic flowmeter detector | |
| JPH0355866Y2 (en) |