JPH054000Y2 - - Google Patents
Info
- Publication number
- JPH054000Y2 JPH054000Y2 JP17241285U JP17241285U JPH054000Y2 JP H054000 Y2 JPH054000 Y2 JP H054000Y2 JP 17241285 U JP17241285 U JP 17241285U JP 17241285 U JP17241285 U JP 17241285U JP H054000 Y2 JPH054000 Y2 JP H054000Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- irradiation device
- vacuum
- beam irradiation
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
この考案は、真空排気機器を気密性の函体内に
一括して収納した電子線照射装置に関する。[Detailed Description of the Invention] [Industrial Application Field] This invention relates to an electron beam irradiation device in which vacuum evacuation equipment is collectively housed in an airtight box.
第２図は、従来の電子線照射装置の一例を示す
概略図である。この装置は、搬送ライン２上を搬
送される例えばテープ状、シート状等をした被照
射物１１に、電子線加速器１から電子線Ｅを照射
するようになつている。そして当該電子線加速器
１には、その内部を真空排気するために、真空配
管４および仕切用のゲートバルブ５を介して高真
空引用の油拡散ポンプ６が接続されており、当該
油拡散ポンプ６にはフレキシブルチユーブ８を介
して荒引用の油回転ポンプ７が接続されており、
当該油回転ポンプ７からは排気ダクト９が出され
ている。また電子線加速器１には、その内部の真
空度を計るための真空ゲージ１０が取り付けられ
ている。
FIG. 2 is a schematic diagram showing an example of a conventional electron beam irradiation device. In this apparatus, an electron beam E is irradiated from an electron beam accelerator 1 onto an irradiated object 11 in the shape of a tape, sheet, etc., which is conveyed on a conveyance line 2 . In order to evacuate the inside of the electron beam accelerator 1, an oil diffusion pump 6 for high vacuum is connected via a vacuum pipe 4 and a partition gate valve 5. An oil rotary pump 7 for rough pumping is connected to the pump through a flexible tube 8.
An exhaust duct 9 is extended from the oil rotary pump 7. Further, a vacuum gauge 10 is attached to the electron beam accelerator 1 to measure the degree of vacuum inside the electron beam accelerator 1.
一方、電子線加速器１、搬送ライン２、真空配
管４等の周囲はＸ線漏れを防止するためにＸ線遮
蔽体３で覆われており、更に真空配管４もＸ線漏
れを防止するために曲管を使用している。 On the other hand, the surroundings of the electron beam accelerator 1, transport line 2, vacuum piping 4, etc. are covered with an X-ray shield 3 to prevent X-ray leakage, and the vacuum piping 4 is also covered with an X-ray shield 3 to prevent X-ray leakage. A bent pipe is used.
近年、磁気テープの磁性塗膜の硬化等のような
コンバーテイング分野等において、電子線照射装
置の防爆仕様が望まれている。これは、電子線照
射装置を、溶剤等を扱つている火気禁止の部屋に
設置する等のためである。
In recent years, explosion-proof specifications for electron beam irradiation equipment have been desired in the field of converting, such as hardening of magnetic coatings on magnetic tapes. This is because the electron beam irradiation device is installed in a room where solvents and the like are handled and where fire is prohibited.
ところが、第２図に示したような従来の電子線
照射装置の構造では、真空ポンプ６，７や真空ゲ
ージ１０等が、より具体的にはその電気接続部分
等がむき出しになつているため、好ましくない。 However, in the structure of the conventional electron beam irradiation device as shown in FIG. Undesirable.
この考案の電子線照射装置は、真空排気機器を
気密性の函体内に一括して収納したことを特徴と
する。
The electron beam irradiation device of this invention is characterized in that the vacuum evacuation equipment is housed all together in an airtight box.
第１図は、この考案の一実施例に係る電子線照
射装置を示す概略図である。第２図と同等部分に
は同一符号を付してその説明を省略する。
FIG. 1 is a schematic diagram showing an electron beam irradiation device according to an embodiment of this invention. Components equivalent to those in FIG. 2 are given the same reference numerals and their explanations will be omitted.
この実施例においては、前述したゲートバルブ
５、油拡散ポンプ６、油回転ポンプ７、真空ゲー
ジ１０等の真空排気機器を気密性の函体１２内に
一括して収納して、排気ダクト９の先端部のみを
当該函体１２外に引き出している。従つて構造が
非常に単純となる。更にこの実施例では函体１２
に設けられた空気吸込み口１３から空気Ａを内部
に吹き込んで（即ちエアーパージして）当該函体
１２内を適当な正圧に保つようにしており、これ
によつてJISの防爆基準（例えばJIS C0903−83）
で定める防爆仕様に合致させている。 In this embodiment, the evacuation equipment such as the gate valve 5, oil diffusion pump 6, oil rotary pump 7, vacuum gauge 10, etc. described above is housed in an airtight case 12, and the exhaust duct 9 is closed. Only the tip portion is pulled out of the case 12. Therefore, the structure is very simple. Furthermore, in this embodiment, the box 12
Air A is blown into the box 12 from the air suction port 13 provided in the box 12 (that is, air purge is performed) to maintain an appropriate positive pressure inside the box 12, thereby complying with JIS explosion-proof standards (e.g. JIS C0903−83)
It meets the explosion-proof specifications stipulated in .
更にこの実施例においては、函体１２はＸ線遮
蔽体を兼ねる構造として構造が更に簡素化されて
おり、しかも函体１２がＸ線遮蔽体を兼ねている
ため、電子線加速器１とゲートバルブ５との間の
接続は従来と違つて直管の真空配管１４で最短距
離で行うことができる。その結果当該真空配管１
４の部分のコンダクタンスが良くなるため、電子
線加速器１の真空排気も良好に行える。 Furthermore, in this embodiment, the structure is further simplified as the box 12 also serves as an X-ray shield, and since the box 12 also serves as an X-ray shield, the electron beam accelerator 1 and the gate valve Unlike the conventional method, the connection between the main body and the main body 5 can be made in the shortest distance using a straight vacuum pipe 14. As a result, the vacuum pipe 1
Since the conductance of the portion 4 is improved, the electron beam accelerator 1 can be evacuated well.
以上のようにこの考案によれば、単純な構成の
電子線照射装置が得られる。
As described above, according to this invention, an electron beam irradiation device with a simple configuration can be obtained.
第１図は、この考案の一実施例に係る電子線照
射装置を示す概略図である。第２図は、従来の電
子線照射装置の一例を示す概略図である。
１……電子線加速器、５……ゲートバルブ、６
……油拡散ポンプ、７……油回転ポンプ、１０…
…真空ゲージ、１１……被照射物、１２……函
体、Ｅ……電子線、Ａ……空気。
FIG. 1 is a schematic diagram showing an electron beam irradiation device according to an embodiment of this invention. FIG. 2 is a schematic diagram showing an example of a conventional electron beam irradiation device. 1...Electron beam accelerator, 5...Gate valve, 6
...Oil diffusion pump, 7...Oil rotary pump, 10...
...Vacuum gauge, 11...Irradiated object, 12...Case, E...Electron beam, A...Air.
Claims (1)
器と、当該電子線加速器の内部を真空排気するた
めの真空排気機器を有し、前記真空排気機器を気
密性の函体内に一括して収納したことを特徴とす
る電子線照射装置。 It has an electron beam accelerator for irradiating an object to be irradiated with an electron beam, and a vacuum exhaust device for evacuating the inside of the electron beam accelerator, and the vacuum exhaust device is housed all together in an airtight box. An electron beam irradiation device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241285U JPH054000Y2 (en) | 1985-11-09 | 1985-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241285U JPH054000Y2 (en) | 1985-11-09 | 1985-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6281100U JPS6281100U (en) | 1987-05-23 |
| JPH054000Y2 true JPH054000Y2 (en) | 1993-01-29 |
Family
ID=31108922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17241285U Expired - Lifetime JPH054000Y2 (en) | 1985-11-09 | 1985-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH054000Y2 (en) |
-
1985
- 1985-11-09 JP JP17241285U patent/JPH054000Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6281100U (en) | 1987-05-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH054000Y2 (en) | ||
| JP3207993B2 (en) | Semiconductor manufacturing equipment | |
| JP2868542B2 (en) | Vacuum piping | |
| CN217262028U (en) | A kind of copper foil roll end anti-oxidation packaging | |
| JP3099441B2 (en) | Supply method of special material gas | |
| JPH0510480A (en) | Gas piping and execution method therefor | |
| JPH11260298A (en) | Electron beam length measuring device | |
| JPH0324773B2 (en) | ||
| JPS6332935Y2 (en) | ||
| JPS5812700B2 (en) | electron beam equipment | |
| JPS5531473A (en) | Lining of inside of pipe | |
| JPS5549136A (en) | Continuous working apparatus during pressure reduction | |
| CN214064211U (en) | Muffler with regulatory function | |
| JPH0245920A (en) | Semiconductor manufacturing device | |
| JPS5857940U (en) | Leak inspection device | |
| JP2000117093A (en) | Ultra-high vacuum environment apparatus and method for forming ultra-high vacuum environment | |
| JPS6128942Y2 (en) | ||
| KR930003231Y1 (en) | Evacuation device for crt | |
| JPS6243674Y2 (en) | ||
| JPS62193099A (en) | Vacuum chamber | |
| JPS59145563U (en) | Film forming equipment | |
| JP3079068U (en) | Stagnant gas ventilator | |
| JPS5839320B2 (en) | Irradiation window cooling method | |
| SU435411A1 (en) | METHOD OF FASTENING THE INSULATION ON THE CASE OF THE AIRWAY | |
| JPH0136901B2 (en) |