JPH0540442Y2 - - Google Patents

Info

Publication number: JPH0540442Y2
Authority: JP; Japan
Prior art keywords: gas; differential pressure; pressure sensor; sensitive diaphragm; valve
Prior art date: 1988-08-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP11149788U

Other languages

English (en)

Japanese (ja)

Other versions

JPH0232044U (fr

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-08-25

Filing date

1988-08-25

Publication date

1993-10-14

1988-08-25 Application filed filed Critical

1988-08-25 Priority to JP11149788U priority Critical patent/JPH0540442Y2/ja

1990-02-28 Publication of JPH0232044U publication Critical patent/JPH0232044U/ja

1993-10-14 Application granted granted Critical

1993-10-14 Publication of JPH0540442Y2 publication Critical patent/JPH0540442Y2/ja

2003-08-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

239000000126 substance Substances 0.000 claims description 11
238000005192 partition Methods 0.000 claims description 2
239000007789 gas Substances 0.000 description 54
238000005259 measurement Methods 0.000 description 10
239000012528 membrane Substances 0.000 description 8
238000007789 sealing Methods 0.000 description 4
230000000694 effects Effects 0.000 description 3
239000000463 material Substances 0.000 description 3
239000003566 sealing material Substances 0.000 description 3
238000001179 sorption measurement Methods 0.000 description 3
238000004140 cleaning Methods 0.000 description 2
238000004891 communication Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000035699 permeability Effects 0.000 description 2
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000003795 desorption Methods 0.000 description 1
229910001882 dioxygen Inorganic materials 0.000 description 1
239000007788 liquid Substances 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000000034 method Methods 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
239000012466 permeate Substances 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
229920002050 silicone resin Polymers 0.000 description 1
229920002379 silicone rubber Polymers 0.000 description 1
239000004945 silicone rubber Substances 0.000 description 1

Landscapes

Measuring Fluid Pressure (AREA)
Examining Or Testing Airtightness (AREA)

JP11149788U 1988-08-25 1988-08-25 Expired - Lifetime JPH0540442Y2 (fr)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP11149788U JPH0540442Y2 (fr)	1988-08-25	1988-08-25

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP11149788U JPH0540442Y2 (fr)	1988-08-25	1988-08-25

Publications (2)

Publication Number	Publication Date
JPH0232044U JPH0232044U (fr)	1990-02-28
JPH0540442Y2 true JPH0540442Y2 (fr)	1993-10-14

Family

ID=31349596

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP11149788U Expired - Lifetime JPH0540442Y2 (fr)	1988-08-25	1988-08-25

Country Status (1)

Country	Link
JP (1)	JPH0540442Y2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5402103B2 (ja) *	2009-03-09	2014-01-29	凸版印刷株式会社	ガス透過度測定装置

1988
- 1988-08-25 JP JP11149788U patent/JPH0540442Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH0232044U (fr)	1990-02-28

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