JPH0540915A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0540915A JPH0540915A JP3216295A JP21629591A JPH0540915A JP H0540915 A JPH0540915 A JP H0540915A JP 3216295 A JP3216295 A JP 3216295A JP 21629591 A JP21629591 A JP 21629591A JP H0540915 A JPH0540915 A JP H0540915A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic
- lambda
- sigma
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 53
- 239000010408 film Substances 0.000 claims abstract description 16
- 239000011162 core material Substances 0.000 claims abstract description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 230000035882 stress Effects 0.000 description 15
- 230000005415 magnetization Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ハードディスク等の
磁気記録媒体に使用される薄膜磁気ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head used for a magnetic recording medium such as a magnetic hard disk.
【０００２】[0002]
【従来の技術】従来より、磁気ハードディスクの高密度
化に対応できる磁気ヘッドとして、薄膜磁気ヘッドが知
られている。この薄膜磁気ヘッドの電磁変換特性はコア
材として使われている磁性薄膜の磁気特性に大きく依存
している。2. Description of the Related Art Conventionally, a thin film magnetic head has been known as a magnetic head capable of coping with high density of a magnetic hard disk. The electromagnetic conversion characteristics of this thin film magnetic head largely depend on the magnetic characteristics of the magnetic thin film used as the core material.
【０００３】ところで、この磁性薄膜の磁気特性の不安
定要因の一つとして磁性薄膜の磁歪がある。したがっ
て、この薄膜の材料として磁歪定数（λ）がゼロの材料
が望ましい。Incidentally, magnetostriction of the magnetic thin film is one of the causes of the unstable magnetic properties of the magnetic thin film. Therefore, a material having a magnetostriction constant (λ) of zero is desirable as the material of this thin film.
【０００４】しかし、この薄膜の材料として磁歪定数
（λ）がゼロの材料を仮に用いたとしても、この磁性薄
膜は他の材料（絶縁部材）に密着して存在するため、何
らかの応力エネルギーを受けることになる。However, even if a material having a magnetostriction constant (λ) of zero is used as the material of this thin film, this magnetic thin film is in close contact with another material (insulating member) and therefore receives some stress energy. It will be.
【０００５】[0005]
【発明が解決しようとする課題】この発明は薄膜磁気ヘ
ッドのコア材となる磁性薄膜の持つ膜応力（真応力＋熱
応力）（σ）に対して、磁歪定数（λ）の適正範囲を設
定し、電磁変換特性が安定する薄膜磁気ヘッドを提供す
ることを目的とする。SUMMARY OF THE INVENTION The present invention sets an appropriate range of magnetostriction constant (λ) with respect to film stress (true stress + thermal stress) (σ) of a magnetic thin film which is a core material of a thin film magnetic head. In addition, it is an object of the present invention to provide a thin film magnetic head having stable electromagnetic conversion characteristics.
【０００６】[0006]
【課題を解決するための手段】上記課題を解決するため
に、請求項１記載の発明は、磁性薄膜をコア材とする薄
膜磁気ヘッドであって、印加磁界方向におけるコア材の
膜応力（σ）（dyn/cm2 ）と磁歪定数（λ）との関係が
下記の式からなる薄膜磁気ヘッド。 λ＝ａ×σ 但し、ａ＝−１．７×１０-16 〜−３．８×１０-16 In order to solve the above-mentioned problems, the invention according to claim 1 is a thin film magnetic head using a magnetic thin film as a core material, wherein the film stress (σ) of the core material in the direction of the applied magnetic field is ) (Dyn / cm 2 ) and the magnetostriction constant (λ) have the following formula: λ = a × σ where a = −1.7 × 10 −16 to −3.8 × 10 −16
【０００７】[0007]
【作用】上記構成によれば、薄膜磁気ヘッドのコア材と
なる磁性薄膜の持つ膜応力（σ）の大きさ及び方向に対
して、電磁変換特性が安定する磁歪定数（λ）を得るこ
とができる。According to the above structure, a magnetostriction constant (λ) that stabilizes the electromagnetic conversion characteristics can be obtained with respect to the magnitude and direction of the film stress (σ) of the magnetic thin film that is the core material of the thin film magnetic head. it can.
【０００８】[0008]
【実施例】本実施例に係る薄膜磁気ヘッドは、図１に示
すように、Ａｌ2 Ｏ3 −ＴｉＣ等からなるセラミック基
板1 と、この基板1 上に積層されたＡｌ2 Ｏ3 ，ＳｉＯ
2 等からなる下部絶縁層2 と、この絶縁層2 上に積層さ
れた下部コア材となる下部磁性薄膜部材3 、この薄膜部
材3 上に積層され、一端が上記薄膜部材3 の一端に連な
り、他端が上記薄膜部材3 の他端にギャップ層Ｇを介し
て対向する上部コア材となる上部磁性薄膜部材4 と、こ
の薄膜部材4 上に積層されたＡｌ2 Ｏ3 ，ＳｉＯ2 等か
らなる保護層となる上部絶縁層5 と、これら各薄膜部材
3,4 との間を貫通するように配置された薄膜コイル導体
6 とから構成されている。EXAMPLE As shown in FIG. 1, a thin film magnetic head according to this example has a ceramic substrate 1 made of Al 2 O 3 —TiC or the like and Al 2 O 3 , SiO 2 laminated on the substrate 1.
A lower insulating layer 2 composed of 2 etc., a lower magnetic thin film member 3 serving as a lower core material laminated on this insulating layer 2, laminated on this thin film member 3, one end of which is connected to one end of the above thin film member 3, The other end is composed of an upper magnetic thin film member 4 serving as an upper core material facing the other end of the thin film member 3 via the gap layer G, and Al 2 O 3 , SiO 2 and the like laminated on the thin film member 4. The upper insulating layer 5 serving as a protective layer and each of these thin film members
Thin film coil conductor arranged so as to penetrate between 3 and 4.
It consists of 6 and.
【０００９】上記各磁性薄膜部材3,4 の磁気特性材料は
同一につき、以下上部磁性薄膜部材4 について説明す
る。Since the magnetic characteristic materials of the magnetic thin film members 3 and 4 are the same, the upper magnetic thin film member 4 will be described below.
【００１０】上部磁性薄膜部材4 は透磁率の高い磁性材
料であるＮｉ−Ｆｅ二元合金、あるいはＣｏ，Ｎｉ，Ｆ
ｅ三元合金，Ｃｏ系アモルファスＦｅ系膜センダストet
c でスパッタ形成されている。また、この薄膜部材4 に
は単軸磁気異方性が付与されている。The upper magnetic thin film member 4 is a Ni--Fe binary alloy, which is a magnetic material having high magnetic permeability, or Co, Ni, F.
e Ternary alloy, Co-based amorphous Fe-based film Sendust et
It is sputtered by c. The thin film member 4 is provided with uniaxial magnetic anisotropy.
【００１１】この薄膜部材4 にあっては、図２に示すよ
うに、磁化容易軸Ｘを記録媒体のトラック幅方向に向け
るとともに、上記磁化容易軸Ｘと直交するように磁化困
難軸Ｙが励磁方向に向けられている。このように上記各
磁化軸Ｘ，Ｙを設定することにより、磁化回転による磁
化反転が行われ、この薄膜部材4の使用周波数領域であ
る高周波領域での透磁率を大きくしている。In the thin film member 4, as shown in FIG. 2, the easy magnetization axis X is oriented in the track width direction of the recording medium, and the hard magnetization axis Y is excited so as to be orthogonal to the easy magnetization axis X. Is oriented. By setting the respective magnetization axes X and Y in this manner, the magnetization reversal is performed by the magnetization rotation, and the magnetic permeability in the high frequency region which is the operating frequency region of the thin film member 4 is increased.
【００１２】ところで、本実施例の薄膜磁気ヘッドの使
用時、この磁性薄膜部材4 には、図２中矢印Ａ方向に磁
界が印加される。なお、この方向を印加磁界方向と言
う。そして、この磁性薄膜部材4 には上記印加磁界方向
と同方向（図２中矢印Ｂ方向）に膜応力（σ）が生じ
る。この磁性薄膜部材4 の膜応力（σ）（dyn/cm2 ）と
磁歪定数（λ）との関係を下記式のように設定した。 λ＝ａ×σ 但し、ａ＝−１．７×１０-16 〜−３．８×１０-16 上記式によれば、膜応力（σ）と磁歪定数（λ）との間
には、図３に示すような関係が得られ、膜応力（σ）の
大きさ及び方向により、磁歪定数（λ）の大きさが、正
側と負側間でシストする。図３中ハッチングにて示す値
の範囲が、電磁変換特性が安定する範囲である。When the thin film magnetic head of this embodiment is used, a magnetic field is applied to the magnetic thin film member 4 in the direction of arrow A in FIG. This direction is called the applied magnetic field direction. A film stress (σ) is generated in the magnetic thin film member 4 in the same direction as the applied magnetic field direction (direction of arrow B in FIG. 2). The relationship between the film stress (σ) (dyn / cm 2 ) and the magnetostriction constant (λ) of this magnetic thin film member 4 was set as in the following formula. λ = a × σ However, according to a = -1.7 × 10 -16 ~- 3.8 × 10 -16 above equation, between the film stress and (sigma) and magnetostriction constant (lambda), FIG. The relationship as shown in FIG. 3 is obtained, and the magnitude of the magnetostriction constant (λ) is shifted between the positive side and the negative side depending on the magnitude and direction of the film stress (σ). The range of values shown by hatching in FIG. 3 is the range in which the electromagnetic conversion characteristics are stable.
【００１３】また、この磁性薄膜部材4 の磁歪定数
（λ）と保磁力（Ｈｃ）（Ｏｅ）との関係は、図４に示
すような関係にあり、σ＝−４×１０9（dyn/cm2 ）〜
−６×１０9 （dyn/cm2 ）の場合、磁歪定数（λ）が正
側では１７×１０-7以下、負側では−１７×１０-7以上
において、保磁力（Ｈｃ）（Ｏｅ）が薄膜部材4 にとっ
て適正値、すなわち（Ｈｃ）＝０．３Ｏｅ以下となる。The relationship between the magnetostriction constant (λ) and the coercive force (Hc) (Oe) of the magnetic thin film member 4 is as shown in FIG. 4, and σ = -4 × 10 9 (dyn / cm 2 ) ~
In the case of −6 × 10 9 (dyn / cm 2 ), the coercive force (Hc) (Oe) is obtained when the magnetostriction constant (λ) is 17 × 10 −7 or less on the positive side and −17 × 10 −7 or more on the negative side. Is an appropriate value for the thin film member 4, that is, (Hc) = 0.3 Oe or less.
【００１４】このように、磁歪定数（λ）が８×１０-7
〜１７×１０-7（応力は引張り応力）あるいは−８×１
０-7〜−１７×１０-7（応力は圧縮応力）であれば電磁
変換特性が安定する薄膜磁気ヘッドを得ることができ
る。Thus, the magnetostriction constant (λ) is 8 × 10 -7
~ 17 × 10 -7 (stress is tensile stress) or -8 × 1
If it is 0 −7 to −17 × 10 −7 (stress is compressive stress), a thin film magnetic head with stable electromagnetic conversion characteristics can be obtained.
【００１５】[0015]
【発明の効果】上述した実施例からも明らかなように、
本発明によれば、コア材となる磁性薄膜の膜応力（σ）
の大きさ及び方向に対して、磁歪定数（λ）の適正範囲
を設定することにより、電磁変換特性が安定した薄膜磁
気ヘッドを提供することが出来る。As is apparent from the above embodiment,
According to the present invention, the film stress (σ) of the magnetic thin film used as the core material
By setting an appropriate range of the magnetostriction constant (λ) with respect to the size and the direction, it is possible to provide a thin film magnetic head with stable electromagnetic conversion characteristics.
【図１】本発明の一実施例を示す断面図FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】上部磁性薄膜部材を示す斜視図FIG. 2 is a perspective view showing an upper magnetic thin film member.
【図３】上部磁性薄膜部材の膜応力（σ）と磁歪定数
（λ）との関係を示す特性図FIG. 3 is a characteristic diagram showing the relationship between the film stress (σ) and the magnetostriction constant (λ) of the upper magnetic thin film member.
【図４】上部磁性薄膜部材の磁歪定数（λ）と保磁力
（Ｈｃ）との関係を示す特性図FIG. 4 is a characteristic diagram showing the relationship between the magnetostriction constant (λ) and the coercive force (Hc) of the upper magnetic thin film member.
４ 上部磁性薄膜部材 ３ 下部磁性薄膜部材 4 Upper magnetic thin film member 3 Lower magnetic thin film member
Claims (1)
であって、印加磁界方向におけるコア材の膜応力（σ）
（dyn/cm2 ）と磁歪定数（λ）との関係が下記の式から
なる薄膜磁気ヘッド。 λ＝ａ×σ 但し、ａ＝−１．７×１０-16 〜−３．８×１０-16 1. A thin film magnetic head using a magnetic thin film as a core material, wherein the film stress (σ) of the core material in the direction of an applied magnetic field.
A thin film magnetic head in which the relationship between (dyn / cm 2 ) and the magnetostriction constant (λ) is expressed by λ = a × σ where a = −1.7 × 10 −16 to −3.8 × 10 −16
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3216295A JPH0540915A (en) | 1991-08-02 | 1991-08-02 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3216295A JPH0540915A (en) | 1991-08-02 | 1991-08-02 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0540915A true JPH0540915A (en) | 1993-02-19 |
Family
ID=16686300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3216295A Withdrawn JPH0540915A (en) | 1991-08-02 | 1991-08-02 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0540915A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100390860C (en) * | 2005-03-11 | 2008-05-28 | 株式会社东芝 | vertical disk device |
-
1991
- 1991-08-02 JP JP3216295A patent/JPH0540915A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100390860C (en) * | 2005-03-11 | 2008-05-28 | 株式会社东芝 | vertical disk device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19981112 |