JPH0542371Y2 - - Google Patents
Info
- Publication number
- JPH0542371Y2 JPH0542371Y2 JP1987126578U JP12657887U JPH0542371Y2 JP H0542371 Y2 JPH0542371 Y2 JP H0542371Y2 JP 1987126578 U JP1987126578 U JP 1987126578U JP 12657887 U JP12657887 U JP 12657887U JP H0542371 Y2 JPH0542371 Y2 JP H0542371Y2
- Authority
- JP
- Japan
- Prior art keywords
- tip
- plasma torch
- plasma
- cooling gas
- gas pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、高周波誘導結合プラズマ発光分析
(以下ICPと称する)用プラズマトーチの改良に
関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of a plasma torch for high-frequency inductively coupled plasma emission spectrometry (hereinafter referred to as ICP).
ICPは、主成分中に不純物として含まれる多く
の微量元素を溶液状態のまま精度良く分析できる
ので、広く利用されている。ICP装置ではArガス
やN2ガスを燃料ガスとして用い、これを高周波
加熱することによつて数千度の高温プラズマを
得、このプラズマ中に試料溶液を導入して励起状
態の元素にし、該元素のエネルギー準位が基底状
態に落ちる時に生じる光を分光分析するようにな
つている。そのため、IPC装置では、高温のプラ
ズマに耐えられるようにプラスマ作成部材として
は石英製のプラズマトーチが使用されているが、
これは試料吸引管を中心にしてその外側に燃料ガ
ス管、冷却ガス管が順に同芯的に配置されている
と共に、前記三管の各先端面が外側に向うに従い
順に高くなるように構成されているものであつ
た。
ICP is widely used because it can accurately analyze many trace elements contained as impurities in the main components in solution state. The ICP device uses Ar gas or N2 gas as a fuel gas, and generates a high-temperature plasma of several thousand degrees by heating this with high frequency. A sample solution is introduced into this plasma to make the elements in an excited state, and the The light produced when the energy level of an element falls to its ground state is now analyzed spectroscopically. Therefore, in IPC equipment, a quartz plasma torch is used as a plasma creation member to withstand high-temperature plasma.
This is structured such that a fuel gas pipe and a cooling gas pipe are arranged concentrically in order around a sample suction pipe on the outside thereof, and the tip surfaces of each of the three pipes become higher in order toward the outside. It was something I had.
ところが、プラズマ着火時にはプラズマが安定
しないことが多いため、プラズマがゆれてプラズ
マトーチの先端部即ち冷却ガス管の先端部に触れ
てしまうことにより、該先端部を溶融変形せしめ
て着火を困難にし且つプラズマの正常な形が得ら
れなくしたり、又試料中の元素が冷却ガス管の先
端部内壁に付着して該先端部を脆弱化せしめたり
するなど、分析に不都合が生じ易く、その場合は
高価なプラズマトーチ全体を交換しなければなら
ず、極めて不経済であつた。 However, when plasma is ignited, the plasma is often unstable, so the plasma swings and touches the tip of the plasma torch, that is, the tip of the cooling gas pipe, melting and deforming the tip, making ignition difficult. Inconveniences tend to occur in the analysis, such as not being able to obtain the normal shape of the plasma, or elements in the sample adhering to the inner wall of the tip of the cooling gas tube and weakening the tip, which can be expensive. The entire plasma torch had to be replaced, which was extremely uneconomical.
本考案は、上記問題点に鑑み、プラズマトーチ
先端部が溶融変形したり脆弱化してもプラズマト
ーチ全体を交換する必要がなく、非常に経済的な
高周波誘導結合プラズマ発光分析用プラズマトー
チを提供することを目的とする。 In view of the above-mentioned problems, the present invention provides a very economical plasma torch for high-frequency inductively coupled plasma emission analysis, which eliminates the need to replace the entire plasma torch even if the tip of the plasma torch melts and deforms or becomes brittle. The purpose is to
試料吸引管を中心にしてその外側に燃料ガス
管、冷却ガス管を順に同芯的に配置すると共に、
前記三管の各先端面が外側に向うに従い順に高く
なるように構成して成る高周波誘導結合プラズマ
発光分析用プラズマトーチにおいて、前記冷却ガ
ス管の本体は前記燃料ガス管の先端面より突出し
た位置にあるすり合わせ調整された接触面におい
て先端部と分離可能であり、かつ前記先端部に
は、フランジ付きで外周部に高周波コイルが巻回
されている前記先端部よりも若干長い筒状キヤツ
プが被嵌せしめられていることにより、プラズマ
トーチの先端部即ち冷却ガス管の先端部が溶融変
形や脆弱化した場合該先端部だけの交換で済むよ
うにしたものである。
A fuel gas pipe and a cooling gas pipe are placed concentrically in order around the sample suction pipe, and
In the plasma torch for high-frequency inductively coupled plasma emission analysis, which is configured such that the tip surfaces of the three tubes become higher in order as they go outward, the main body of the cooling gas tube is located at a position protruding from the tip surface of the fuel gas tube. The cap is separable from the tip at a ground-adjusted contact surface, and the tip is covered with a cylindrical cap that is slightly longer than the tip and has a flange and has a high-frequency coil wound around the outer periphery. By being fitted, if the tip of the plasma torch, that is, the tip of the cooling gas pipe becomes melted and deformed or becomes brittle, only the tip needs to be replaced.
以下図示した一実施例に基づき本考案を詳細に
説明する。
The present invention will be explained in detail below based on an embodiment shown in the drawings.
図面は本案プラズマトーチの一実施例の縦断面
図を示しており、1は下端部に入口1aを上端部
(先端部)に出口1bを夫々有する試料吸引管、
2は試料吸引管1の外側に同芯的に配置されてい
て下端部に入口2aを上部の広げた部分の上端部
(先端部)に出口2bを夫々有する燃料ガス管、
3は燃料ガス管2の外側に同芯的に配置されてい
て下端部に入口3aを上端部(先端部)に出口3
bを夫々有する冷却ガス管である。そして、試料
吸引管1、燃料ガス管2、冷却ガス管3の各先端
面は外側に向うに従い順に高くなるように構成さ
れていると共に、冷却ガス管3の燃料ガス管2の
先端面より先の部分(先端部3c)は交換可能と
なつている。すなわち、冷却ガス管3の本体3d
は、燃料ガス管2の先端面より先のすり合わせ調
整した接触面3eにおいて、先端部3cと分離で
きる。4は冷却ガス管3の先端部に被嵌せしめら
れた、先端部3cよりも若干長い筒状でフランジ
付きのキヤツプ、5はキヤツプ4の外周部に巻回
せしめられた高周波コイルである。 The drawing shows a longitudinal sectional view of an embodiment of the plasma torch of the present invention, in which 1 is a sample suction tube having an inlet 1a at the lower end and an outlet 1b at the upper end (tip);
2 is a fuel gas tube which is arranged concentrically outside the sample suction tube 1 and has an inlet 2a at the lower end and an outlet 2b at the upper end (tip) of the enlarged upper part;
3 is arranged concentrically on the outside of the fuel gas pipe 2, with an inlet 3a at the lower end and an outlet 3 at the upper end (tip).
cooling gas pipes each having b. The tip surfaces of the sample suction tube 1, the fuel gas tube 2, and the cooling gas tube 3 are configured to become higher in order toward the outside, and the tip surface of the cooling gas tube 3 is higher than the tip surface of the fuel gas tube 2. The portion (tip portion 3c) is replaceable. That is, the main body 3d of the cooling gas pipe 3
can be separated from the tip portion 3c at the contact surface 3e which is adjusted to fit in front of the tip surface of the fuel gas pipe 2. 4 is a cylindrical flanged cap that is slightly longer than the tip 3c and is fitted onto the tip of the cooling gas pipe 3; 5 is a high frequency coil wound around the outer circumference of the cap 4;
次に本案プラズマトーチの使用法について説明
する。 Next, how to use the plasma torch of the present invention will be explained.
まず、冷却ガス管3の本体3dの上端面にに先
端部3cを乗せ、接触面3e間に隙間(空気が侵
入してプラズマを消してしまう)が生じないよう
に擦り合わせを行い、接触面3e同志を密着させ
る。次に予め高周波コイル5が巻回されたキヤツ
プ4を図示した如く冷却ガス管3の本体3dの上
端部と先端部3cとに被嵌せしめて先端部3cを
該上端部に固定する。次にArガスを燃料ガス管
2及び冷却ガス管3内に流してプラズマトーチの
先端部から噴出せしめ、ガス流が安定した後高周
波コイル5によつて高周波の電磁場をかけつつ図
示しないテスラー放電器で着火しイオン化してプ
ラズマを形成する。すると、霧吹きの原理によ
り、Arガスの流れにより試料溶液が試料吸引管
1を介してその出口から吸い出され気化せしめら
れてプラズマ内に導入され、その時発光した光が
従来と同様にして分光分析される。この時、もし
着火状態が悪くてプラズマが不安定となつて先端
部3cに触れ、該先端部3cが溶融変形したり脆
弱化した場合は、先端部3cのみを交換すれば良
い。従つて、従来のようにプラズマトーチ全体を
交換する必要がないので、非常に経済的である。
又、その際の交換作業も、キヤツプ4を外して先
端部3cを取り換え、再びキヤツプ4を被嵌する
だけで良いので極めて容易であり、分析作業上寄
与するところ著しく大である。 First, place the tip 3c on the upper end surface of the main body 3d of the cooling gas pipe 3, rub it together so that there is no gap between the contact surfaces 3e (which would cause air to enter and extinguish the plasma), and then 3e Bring comrades into close contact. Next, the cap 4, around which the high-frequency coil 5 is wound in advance, is fitted onto the upper end of the main body 3d and the tip 3c of the cooling gas pipe 3, as shown, and the tip 3c is fixed to the upper end. Next, Ar gas is flowed into the fuel gas pipe 2 and the cooling gas pipe 3 to be ejected from the tip of the plasma torch, and after the gas flow is stabilized, a high frequency electromagnetic field is applied by the high frequency coil 5 and a Tesler discharger (not shown) is used. ignites and ionizes to form plasma. Then, according to the principle of atomization, the sample solution is sucked out from the outlet of the sample suction tube 1 by the flow of Ar gas, vaporized, and introduced into the plasma, and the light emitted at that time is used for spectroscopic analysis as in the conventional method. be done. At this time, if the ignition condition is poor and the plasma becomes unstable and touches the tip 3c and the tip 3c melts and deforms or becomes brittle, it is sufficient to replace only the tip 3c. Therefore, it is very economical because there is no need to replace the entire plasma torch as in the conventional method.
Further, the replacement work at that time is extremely easy as it is only necessary to remove the cap 4, replace the tip 3c, and then fit the cap 4 on again, which greatly contributes to the analytical work.
上述の如く、本考案による高周波誘導結合プラ
ズマ発光分析用プラズマトーチは、プラズマトー
チの先端部が溶融変形したり脆弱化してもプラズ
マトーチ全体を交換する必要がなく、非常に経済
的であるという実用上重要な利点を有している。
As mentioned above, the plasma torch for high-frequency inductively coupled plasma emission analysis according to the present invention does not require replacing the entire plasma torch even if the tip of the plasma torch melts and deforms or becomes brittle, making it extremely economical and practical. It has important advantages.
図面は本考案によるプラズマトーチの一実施例
の縦断面図である。
1……試料吸引管、2……燃料ガス管、3……
冷却ガス管、3c……先端部、4……キヤツプ、
5……高周波コイル。
The drawing is a longitudinal sectional view of an embodiment of a plasma torch according to the present invention. 1...Sample suction tube, 2...Fuel gas pipe, 3...
Cooling gas pipe, 3c... tip, 4... cap,
5...High frequency coil.
Claims (1)
管、冷却ガス管を順に同芯的に配置すると共に、
前記三管の各先端面が外側に向かうに従い順に高
くなるように構成して成る高周波誘導結合プラズ
マ発光分析用プラズマトーチにおいて、前記冷却
ガス管の本体は前記燃料ガス管の先端面より突出
した位置にあるすり合わせ調整された接触面にお
いて先端部と分離可能であり、かつ前記先端部に
は、フランジ付きで外周部に高周波コイルが巻回
されている前記先端部よりも若干長い筒状キヤツ
プが被嵌せしめられていることを特徴とするプラ
ズマトーチ。 A fuel gas pipe and a cooling gas pipe are placed concentrically in order around the sample suction pipe, and
In the plasma torch for high-frequency inductively coupled plasma emission analysis, which is configured such that the tip surfaces of the three tubes become higher in order toward the outside, the main body of the cooling gas tube is located at a position protruding from the tip surface of the fuel gas tube. The cap is separable from the tip at a ground-adjusted contact surface, and the tip is covered with a cylindrical cap that is slightly longer than the tip and has a flange and has a high-frequency coil wound around the outer periphery. A plasma torch characterized by being fitted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987126578U JPH0542371Y2 (en) | 1987-08-20 | 1987-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987126578U JPH0542371Y2 (en) | 1987-08-20 | 1987-08-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6433654U JPS6433654U (en) | 1989-03-02 |
| JPH0542371Y2 true JPH0542371Y2 (en) | 1993-10-26 |
Family
ID=31378228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987126578U Expired - Lifetime JPH0542371Y2 (en) | 1987-08-20 | 1987-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542371Y2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5623711B2 (en) * | 1973-02-15 | 1981-06-02 | ||
| JPS61193363U (en) * | 1985-05-24 | 1986-12-02 |
-
1987
- 1987-08-20 JP JP1987126578U patent/JPH0542371Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6433654U (en) | 1989-03-02 |
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