JPH0543068B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a mounted circuit board (hereinafter simply referred to as a circuit board) as an object to be inspected, which is assembled by mounting various electronic components on a flat circuit board. ), and particularly relates to a double-sided circuit board testing device that tests a test object with various electronic components mounted on both sides of the circuit board.

[Conventional technology]

This type of circuit board testing equipment that has already been proposed tests continuity by bringing a number of contact pins, or contact probes, into contact with the circuit board, which has various electronic components mounted on only one side of the circuit board to be tested. .

That is, the circuit board inspection device described above elastically implants a large number of contact pins on a pin board, and moves these contact pins from each electronic component mounted on one side of the circuit board to the other side of the circuit board. The protruding conductor portion is advanced and pressed against the protruding conductor portion from above or below, thereby testing electrical continuity.

In this way, the circuit board used as the object to be tested has various electronic devices mounted on one side, and the other side of the circuit board forms the test circuit surface, so contact pins are inserted from the other side of the object to be tested. The measurement test is performed by contacting and conducting the circuit board.

[Problem that the invention seeks to solve]

However, as the various electronic components used in modern circuit boards are becoming smaller and smaller,
Due to this, the high-density layout is unavoidable, and due to this, the circuit boards are mounted on both sides, that is, both sides. Therefore, continuity testing of these double-sided circuit boards is performed on the top and bottom of the double-sided circuit boards. It is desired to perform a continuity test from all directions in one step.

On the other hand, as electronic components are arranged in a higher density, the arrangement of contact pins is also becoming more dense and the contact pins themselves are becoming thinner. Therefore, if there is even a slight deviation in the relative position of the circuit board and the contact pins, the contact pins will come into contact with a different position on the circuit pattern from the test point to which they should be contacted.

However, no matter how accurately the positioning holes used for positioning the circuit board are made, they are made at a different time from the time when the circuit pattern of the circuit board is manufactured, so there is a manufacturing error in the relative position with respect to the circuit pattern. Easy to occur.

This was made in view of the above-mentioned problems of the present invention,
The purpose is to provide a circuit board testing device that can simultaneously test continuity on both sides of a double-sided circuit board, and that can also accurately bring the tip of a contact pin into contact with a high-density circuit board pattern. It is in.

[Means for solving problems]

The circuit board inspection device of the present invention has a plurality of guide posts established on a support base, supports a fixing plate having an upper pin board having downward contact pins on the top of each guide post, and connects the fixing plate with the support Between the bases, a movable plate having a lower pin board having upward contact pins is supported by each guide column so as to be movable upwardly, above the lower pin boat and below the upper pin boat, A frame-shaped holding member is fit into each of the guide columns so as to be slidable up and down, and an elastic material is interposed between the fixed plate and the holding member and between the movable plate and the holding member, and the elastic material is placed on the holding member. supports a circuit board support table that positions and supports a double-sided circuit board to be inspected with its upper and lower surfaces exposed vertically, and can be finely adjusted horizontally back and forth and left and right. , a circuit board position detection device is provided for detecting the position of the index on the top surface of the double-sided circuit board that is positioned and supported by the circuit board position detection device, and the holding member is provided with a fine adjustment device that finely adjusts the front, rear, left, and right positions of the circuit board support table with respect to the position detection device. It is characterized by having the following.

[Effect]

With the above configuration, in the present invention, when the lower pin board is raised, the circuit board is sandwiched between it and the upper pin board, and both sides of the circuit board are inspected at the same time. In addition, at the same time as the circuit pattern is produced on the circuit board, appropriate marks or indicators are formed on the circuit board, and after the circuit board is mounted on the circuit board support table, the support table is finely adjusted back and forth and left and right. The indicator is brought to a predetermined position, and after this is detected by the circuit board position detection device, an inspection is performed.

〔Example〕

Hereinafter, the present invention will be described with reference to an illustrated embodiment.

In FIG. 1, reference numeral 2 denotes a flat rectangular support base, and four guide columns 3 are installed at each corner of the support base 2. A fixing plate 6 supporting an upper pin board 6a having a large number of downward contact pins 4 is horizontally fixed to the upper part. The upper pin board 6a is supported on the lower surface of the fixed plate 6 via a spacer plate 7 and the like. The upper end of the contact pin 4 is connected to an upper connector (not shown) via a conductive wire 4a. This connector is connected to a continuity test meter (not shown).

On the other hand, below the fixed plate 6, a movable plate 8 that supports the lower pin board 8a via the spacer plate 5 is fitted to each of the guide columns 3 so as to be slidable upward and downward. This lower pin board 8a
There are many contact pins 9 facing upward on the top surface of the
Moreover, it is designed to rise and fall elastically.
Note that the lower end of the contact pin 9 is connected to a lower connector 2 (not shown) through a conductive wire 9a. The movable plate 8 has a bearing 8b with respect to the guide column 3.
Supported by Further, the conductive wire 9a is connected to the aforementioned meter.

Lower pinboard 8a of the upper pinboard 6a
In between, a flat frame-shaped holding member 10 having a large opening 10a in the center is fitted into each guide column 3 so as to be slidable upward and downward via a bearing 10b. 10 is held in a floating state by elastic members such as compression coil springs 14 and 15 interposed between it and the movable plate 8 and between it and the fixed plate 6, respectively, as shown in FIG. . That is, on the movable plate 8,
Each pair of guide pins 11 is erected upward, and each pair of guide pins 12 is vertically penetrated and planted in the holding member 10 located directly above each guide pin 11. ing. Further, a pair of guide pins 13 are vertically provided in a portion of the fixing plate 6 located directly above each guide pin 12 . The coil spring 14 is elastically interposed between each guide pin 11 and the downward protrusion of each guide pin 12 so as to be interposed between the holding member 10 and the movable plate 8. The upper protrusion of each guide pin 12 and the guide pin 1 are
3, the coil spring 15 is elastically interposed between the holding member 10 and the fixed plate 6. In particular, the upper coil spring 15 is interposed between the lower coil spring 15 and the lower coil spring 15. The elasticity is weaker than that of No. 14.

As shown in FIG. 3, a guide sleeve 17 is fixed to the upper pin board 6a.
A sliding pin 16 is provided inside so as to be freely displaceable up and down.
The sleeve 17 is compressed to its downward limit by a compression coil spring 18 interposed between the sleeve 17 and the upper end wall thereof. Such sliding pins 16 are also provided at other locations on the upper pin board 6a, and a protective plate 19 is fixed to the lower ends of these sliding pins 16 to protect the tips, that is, the lower ends of the upper contact pins 4. ing. The lower end of the upper contact pin 4 is slidably inserted through the protection plate 19.

Similarly, the lower pin board 8a is also provided with a guide sleeve 20, a sliding pin 21, and a compression coil spring 22, which have similar functions.
is compressed by a spring 22 to the limit of its upward movement. A protection plate 23 is fixed to the upper end of the sliding pin 21 to protect the tip, that is, the upper end, of the lower contact pin 9, and the upper end of the lower contact pin 9 is slidably inserted through the protection plate 23.

In FIG. 3, a circuit board support table 25 is supported by the holding member 10 so as to be finely adjustable horizontally in the front, rear, left and right directions. The structure for fine adjustment will be described later. The circuit board support table 25 has a plurality of positioning pins 26 planted on the top surface, and the positioning holes of the circuit board W to be inspected on both sides are fitted into the pins 26 to position the circuit board W with respect to the support table 25. Ru. Circuit board support plate 2
5 has a rectangular frame shape, and a base frame 27 is fixed to the lower side of the four sides. Further, a supporting frame 28 is provided around the base frame 27 to accommodate and support the substrate 27, and is fixed to the holding member 10 with bolts 29.

As shown in FIG. 4, the support frame 28 is a rectangular plate-shaped frame, and the circuit board support table 2 is located inside the support frame 28.
5 is also a plate having an opening in the center so that the lower surface of the circuit board W supported thereon can be exposed downward, and similarly forming a rectangular frame.

A pair of opposing elongated X-axis direction guide members 30 and 31 are fixed to the front side and the back side of the support frame 28. These guide members 30, 31 are also shown in the left and right portions of FIG. 5, which shows the - cross section of FIG. 4. And these guide members 3
Elongated guided members 32 and 33 are provided so as to slide while being guided in the X-axis direction (horizontal direction in FIG. 4) along the inside of each of the parts 0 and 31,
These guided members 32 and 33 are fixed to two opposing sides of a rectangular frame 34. Therefore, the rectangular frame 34 can be displaced in the X-axis direction with respect to the supporting frame 28 while being guided by the X-axis direction guide members 30 and 31.

On the outside of the other two opposing sides of the rectangular frame 34,
Elongated Y-axis direction guide members 35 and 36 are fixed. Further, as shown from the left side of FIG. 6 which shows the - cross-section of FIG. equipped. Further, as shown on the right side of FIG. 6, an abutment plate 43 is provided so as to rise integrally from a mounting member 42 that is integral with the rectangular frame 34. On the other hand, a micrometer head MCX is attached to a mounting plate 44 on the support frame 28, and a probe 45 is in contact with the tip of the micrometer head MCX.
Left side of the rectangular frame 34 in the X-axis direction (in FIG. 6)
The displacement to is performed against the elasticity of the compression spring 41.

Y-axis direction guide members 3 on the left and right sides of the rectangular frame 34
Guided members 47 and 48 are located outside of the guide members 5 and 36 and are slidably displaced in the Y-axis direction while being guided by the guide members 47 and 48, respectively. These guided members 47 and 48 are
As shown in the figure, it is fixed to the lower side of the base frame 27 of the circuit board support table 25. Therefore, the circuit board support table 25 supports the Y-axis direction guide member 3
5, 36 and can be slid in the Y-axis direction. On the other hand, the rectangular frame 34 supporting the circuit board support table 25 is
1 in the X-axis direction, the circuit board support table can also be slid in the X-axis direction.

Fine adjustment of the rotary substrate support table 25 in the X-axis direction is performed by circuit operation of the X-axis micrometer head MCX. Micrometer head MCX
By adjusting the rotation of the contact plate 43 in FIG.
is displaced to the left while compressing the compression spring 41, and to the right due to the expansion force of the compression spring 41.

On the other hand, minute adjustments of the rotary substrate support table 25 in the Y-axis direction are performed by rotating the Y-axis micrometer head MCY shown in FIG. As shown in the figure, the micrometer head MCY is attached to a mounting member 51 that protrudes upward from a member 50 integral with the rectangular frame 34, and a member 52 fixed to the lower surface of the rotary board support table 25.
The base end of a columnar member 54 having a probe 53 at its tip is fixed by screwing. In addition, the inner side of the rectangular frame 34 on the side opposite to the micrometer head MCY, and the rotating board support table base frame 2
A compression spring 57 is interposed between the pin 56 and the pin 56 of No. 7. The rotary substrate support table 25 and minute adjustments in the Y-axis direction are made using the Y-axis micrometer head MCY.
This can be done in the same way for the X-axis by rotating the X-axis.

As shown in FIG. 2, a motor M1 with a brake is installed on the rear upper surface of the support base 2, and an output shaft 60 of the motor M1 is provided with an inverted heart-shaped first cam member 61 and a coaxial Two second cam members 62a and 62b are attached.

Each of the second cam members 62a, 62b is basically circular, but has protrusions on a portion of its periphery that abut and actuate an upper limit switch and a lower limit switch, which will be described later. The angular positions of the protrusions are different for the two second cam members.

Further, a bracket 62 is provided at a position on the support base 2 close to the rotation area of the first cam member 61.
An operating lever 63 is pivotally attached to this bracket 62 via a support shaft 64.
Further, a roller at one end 63a of the operating lever 63 is in contact with the periphery of the first cam member 61, and the other end 63b of the operating lever 63 is attached to the bottom surface of the lower plate 8c of the movable plate 8. The coil springs 14 and 15 elastically abut against the abutting member 66 which has been stretched by the elasticity of the coil springs 14 and 15. Furthermore, as shown in FIG. 1, an upper limit switch Sa
and a lower limit switch Sb, and the upper limit switch Sa is connected to the lower pin board 8a as described later.
When the movable plate 8 rises to the upper limit position, the protrusion of the cam 62a is actuated to stop the motor M1, and the lower limit switch Sb is activated when the lower pivot board 8a and the movable plate 8 move to the lower limit position. It is activated by the protrusion of the cam 62b when it is lowered to the position.

As shown in FIG. 2, the upper pin port 6a and the contact pin tip protection plate 19 supported under the upper pin port 6a are movable between an operating position shown by a solid line in the same figure and a position retreated from the working position shown by a chain line. There is.
To enable such movement, the upper ends of the spacer plates 7 at both ends of the upper pin board 6a are connected to a moving plate 70 as shown in FIG.
is supported so as to be movable along a guide 72 fixed to the lower surface of the fixed plate 6 in the front-rear direction via a metal fitting 71 fixed to the upper surface thereof.

As shown in FIG. 2, stoppers 74 and 75 are fixed to the front and rear portions of the lower surface of the fixed plate 6, which contact protrusions (not shown) of the movable plate 70 to define the forward and backward positions of the movable plate 70. has been done. Further, detection switches 76 and 77 are attached to the lower surface of the fixed plate 6 to detect the forward end position and the backward end position of the movable plate 70.

A reversible motor M2 is installed on the rearward extension of the fixed plate 6 in order to move the upper pin board 6a between the solid line position and the chain line position in FIG. A rotary drive shaft of the reversible motor M2 protrudes below the fixed plate 6, and a drive pulley 80 is fixed to it as shown in the plan view of FIG. On the other hand, a floating pulley 81 is attached to the lower front part of the fixed plate 6, and both ends of a wire rope 82 stretched around these pulleys 80, 81 are attached to the sides of the metal fitting 71 at positions 83, 84. are connected to each other. Therefore, rotation of the motor M2 in one direction causes the movable plate 70 and the upper pin board 6a to advance, and rotation of the motor M2 in the other direction causes the movable plate 70 and the upper pin board 6a to retreat.

When the upper pin board 6a reaches the forward end position, it comes into contact with the stopper 74 and stops, and the rotation of the motor M2 in one direction is stopped by the detection operation of the detection switch 76. On the other hand, the upper pinboard 6a is
When the rear end position is reached, the motor M2 comes into contact with the stopper 75 and stops, and the detection operation of the detection switch 77 stops the rotation of the motor M2 in the other direction.

As shown in FIG. 2, brackets 86 are fixed to both sides of the upper surface of the fixing plate 6, and pins 87 are attached to the brackets 86.
The middle of the lever 88 is pivotally mounted by the lever 88. One end of the lever 88 is connected to the solenoid drive device SL (first
It is connected via a link 91 to a plunger 90 shown in FIGS. The lowering limit of the one end of the lever 88 is determined by a cushion stopper 92. The other end of the lever 88 is in contact with the upper end of the positioning pin 93. The positioning pin 93 is vertically slidable within a sleeve 94 that receives it, and is always urged upward by a coil spring 95.

On the other hand, a positioning pin receiver 96 having an upward hole is fixed to the movable plate 70.

When the upper pin board 6a reaches the forward position shown by the solid line in FIG. 2 and stops, the proximity switch 98 (upper right in FIG. 1) is actuated to activate both solenoid drive devices.
Activate SL. This causes the plunger 90 to retreat, the lever 88 to rotate counterclockwise in FIG. 2, and the end of the lever 88 to push down the positioning pin 93 against the force of the spring 95.
It is engaged into the upward hole of the positioning pin receiver 96. As a result, the movable plate 70 and the upper pin board 6a are locked at a predetermined forward position. Further, when the upper pin board 6a is retracted, the solenoid drive device SL is turned off, and the positioning pin 93 is moved by the spring 95.
The movable plate 70 of the upper pin board 6a is pushed up by
The lock is released.

Both sides of the circuit board W are inspected, and at the same time as the pattern is formed, marks or indicators (for example, a cross mark) are placed near both ends of the circuit board W. Since this index is formed at the same time as the pattern, it is always in a constant positional relationship with respect to the pattern. Separately from the formation of the pattern and index, a positioning hole into which a circuit board positioning pin 26 shown in FIG. 3 is inserted is formed at an appropriate position on the circuit board W.

In order to detect the position of the index on the circuit board W, circuit board position detection devices 100 are installed at both ends of the fixed plate 6 via mounting members 101. As is clear from FIG. 7, the front central part of the fixing plate 6 is
It is opened as shown at 02, and the circuit board position detection device 100 is provided so as to protrude downward from the opening.

The circuit board position detection device 100 is, for example, a microscope, and the optical system of its lens has a cross mark similar to the index formed on the circuit board. The index of the lens is provided so that when the circuit pattern of the circuit board W takes a predetermined relative position with respect to the contact pins 4 and 9, it precisely matches the position of the index on the circuit board.

Indicator on circuit board W and circuit board position detection device 1
The match of the 00 index can be detected by looking through the microscope with the naked eye.

On the other hand, instead of looking directly through a microscope, as shown in FIGS.
are respectively provided corresponding to the microscope 100,
Matching of the indicators may be confirmed by viewing the screen of the CRT device 105.

Next, the operation of the circuit board inspection apparatus described above will be explained.

Before starting an inspection using this device, the upper pinboard 6a is in the retracted position shown by the chain line in FIG.
Therefore, the upper surface of the circuit board support table 25 is exposed below the front open portion 102 of the fixed plate 6 shown in FIG. Therefore, the circuit board W can be easily placed on the upper surface of the rotary board support table 25 while being positioned using the positioning pins 26 (FIG. 3).

Even if the circuit board W is positioned and mounted in this way,
The relative positions of the circuit pattern and the positioning holes are not always constant due to processing errors. Therefore, while looking through the microscope or the CRT device, until the mark at the correct relative position to the circuit pattern of the circuit board W matches the mark of the optical system of the microscope, which is the circuit board position detection device, The circuit board support table 25 is slightly adjusted back and forth, left and right, that is, in the Y-axis direction and the X-axis direction. This can be done by manually rotating the micrometer heads MCY and MCX.

When the positioning of the circuit board is completed in the above manner, the motor M2 is driven to move the upper pin board 6a, which is in the retracted position, forward to the solid line position in FIG. 2, and to position it above the circuit board W. . As a result, the solenoid drive device SL is actuated, and the positioning pin 93 is lowered to lock the movable plate 70 and the upper pin board 6a in a predetermined position.

As a result, the motor M1 is driven, and the first cam member 61 fixed to the output shaft 60 and the second cam members 62a, 62b rotate together, so that the raised portion of the inverted heart-shaped first cam member 61 is , the operating lever 63 is rotated clockwise in FIG. 2 around the support shaft 64. As a result, this operating lever 6
One end 63a of 3 is pushed downward, and the other end 63a
3b pushes up the movable plate 8 via the contact member 66.

As the movable plate 8 rises due to this pushing up, the lower coil spring 14 applies a pushing force to the holding member 10.
The holding member 10 is also raised. The pushing up force is further transmitted from the holding member 10 to the upper coil spring 15. By the way, the upper end of the upper coil spring 15 is in contact with the fixed plate 6, and since the upper coil spring 15 is weaker than the lower coil spring 14, when the movable plate 8 starts to rise, the upper coil spring 15 first moves upward. begins to be compressed. At this time, the lower coil spring 14 is hardly compressed, and therefore the relative distance between the upward contact pin 9 of the lower pin board 8a on the movable plate 8 and the circuit board W on the holding member 10 changes. There are almost no On the other hand, due to the compression of the upper coil spring 15, the distance between the circuit board W on the holding member 10 and the downward contact pins 4 of the upper pin board 6a gradually decreases, and finally the inspection point on the upper surface of the circuit board W is directed downward. Contact pin 4.

After reaching this state, upper coil spring 1
5 compression stops. Moreover, the upper coil spring 15 has a weak elasticity, and when the downward contact pin 4 first comes into contact with the electronic component on the upper surface of the circuit board W, it performs a soft buffering effect and protects the component. The electronic components on the top surface of the circuit board W are often flat packages, and the many bent conductive arms protruding around them are extremely weak and deform with a force of over 30 grams, for example. The soft buffering effect of the upper coil spring 15 is
To make it possible to bring a contact pin 4 into contact with a weak conductive arm of a flat package with a predetermined weak force, to prevent accidents such as peeling of a conductive adhesive surface, and to ensure accurate pressing force.

In this way, the downward contact pin 4 is brought into contact with the top surface component of the circuit board with a predetermined force and a buffering effect, and after securing a predetermined conductive relationship without undue stress, the lower coil spring 14 is compressed. The movable plate 8 continues to rise further while being deformed, and finally the upper end of the upward contact pin 9 comes into contact with the electronic component on the bottom surface of the circuit board W, creating a predetermined conductive relationship, which is then inspected by the inspection display instrument. It can be read by

In this way, when the movable plate 8 reaches the upper limit position, the upper limit switch Sa (Fig. 1) moves the second cam 62a.
Closed by being pushed by the protrusion. Then, motor M
When the brake is applied to motor M1, motor M1 stops.

On the other hand, as a result, a timer for regulating the measurement and inspection time (not shown) is activated, and the motor M1 starts rotating again after the measurement and inspection time of several seconds to several tens of seconds has elapsed.

Therefore, the first cam member 61 allows the operating lever 63 to rotate counterclockwise in FIG. 2 due to the weight of the lower pin board 8a, the movable plate 8, the holding member 10, etc. When the pin board 8a, the movable plate 8, etc. are lowered to the lower limit position, the protrusion of the second cam member 62b closes the lower limit switch Sb. This causes motor M1 to stop and is braked.

This returns all members to their state before the start of the test. In this state, the inverted heart-shaped first cam member 6
The actuating lever 6 is located in the recess on the opposite side of the protrusion of 1.
The roller at one end 63a of 3 is engaged, and this state is stably maintained.

As described above, the circuit board is tested for continuity on both the upper and lower sides simultaneously by contacting predetermined test points with the upper and lower contact pins 4 and 9. It should be noted that immediately before the tips of the contact pins 4 and 9 come into contact with the test points on the circuit board, the protective plates 19 and 23 shown in FIG. After moving back, the tips of the contact pins 4 and 9 come into contact with the circuit board. In this way, the tip contact portions of the contact pins 4 and 9 are always connected to the protective plate 1.
Protected by 9,23.

In this way, after the inspection is completed, the upper pinboard 6a is moved back to the position shown in chain lines in FIG. 2, so that the upper part of the circuit board support table 25 is opened. Therefore, the inspected circuit board W can be easily removed.

As described above, the continuity test of the double-sided circuit board W is repeatedly and continuously performed.

〔effect〕

As described above, according to the present invention, by simply moving the movable plate toward the fixed plate, it is possible not only to conduct continuity tests on both sides of the circuit board in one step, but also reliably. Since the contact bottle and the electronic component come into contact with each other with a buffering effect due to the elastic material, damage can be prevented. In addition, after positioning the circuit board on the rotating board support table, you can finely adjust the rotating board support table back and forth and left and right to accurately determine the position of the circuit board relative to the contact pins. Pins can always be brought into contact at the correct position.

[Brief explanation of the drawing]

FIG. 1 is a partially sectional front view of a circuit board inspection apparatus according to the present invention, FIG. 2 is a partially sectional side view, FIG. 3 is an enlarged vertical sectional view of a part of FIG. 1, and FIG. 1 with the upper member removed; FIG. 5 is a sectional view taken along the line - - in FIG. 4; FIG. 6 is a sectional view taken along the line - - in FIG. FIG. 8 is a plan view showing the circuit board inspection device, casing, and CRT of the present invention with some parts removed.
FIG. 9 is a front view showing the relationship between the devices, and FIG. 9 is a side view of the same. 2... Support base, 3... Guide column, 4... Upper contact pin, 6... Fixed plate, 6a... Upper pin boat, 8... Movable plate, 8a... Lower pin board, 9... Lower contact Pin, 10... Holding member, 14, 15... Elastic material (coil spring),
19, 23...Contact pin tip protection plate, 2
5... Circuit board support table, 26... Circuit board positioning pin, W... Circuit board, 27... Base frame of circuit board support table, 28... Support frame, 30,3
1... X-axis direction guide member, 32, 33... Guided member, 34... Rectangular frame, 35, 36... Y-axis direction guide member, 40... Pin, 41... Spring,
MCX, MCY...Micrometer head, 47,
48...Guided member, M1...Motor, 61,6
2a, 62b...Cam, 63...Lever, 66...
...Abutting member, 70...Moving plate, M2...Motor,
74, 75... Stopper, 80... Drive pulley,
81... Idle pulley, 82... Wire, SL...
Solenoid drive device, 88... lever, 93...
Positioning pin, 94... Sleeve, 96... Positioning pin receiver, 100... Circuit board position detection device (microscope), 105... CRT device.

Claims (1)

[Scope of Claims] 1. A plurality of guide columns are established on a support base, and a fixed plate having an upper pin board having downward contact pins is supported on the top of each guide column, and the fixed plate and the support base are connected to each other. A movable plate having a lower pin board having upwardly facing contact pins is supported by each guide column in an upwardly movable manner, above the lower pin board and below the upper pin board; A frame-shaped holding member is fit into each of the guide columns so as to be slidable up and down, and an elastic material is interposed between the fixed plate and the holding member and between the movable plate and the holding member, and the elastic material is placed on the holding member. supports a circuit board support table that positions and supports a double-sided circuit board to be inspected with its upper and lower surfaces exposed vertically, and can be finely adjusted horizontally back and forth and left and right. ,
A circuit board position detection device is provided for detecting the position of the index on the upper surface of the double-sided circuit board that is positioned and supported, and the holding member is provided with a fine adjustment device for finely adjusting the front, rear, left, and right positions of the circuit board support table with respect to the position. Circuit board inspection equipment provided. 2. The circuit board inspection device according to claim 1, wherein a circuit board positioning pin is provided protrudingly on the circuit board support table, and the circuit board is positioned by fitting the pin into a positioning hole provided in the circuit board. 3. A pair of parallel, opposing, elongated guide members are fixed to opposite sides of the supporting frame fixed on the holding member, and the rectangular frame is arranged so that the two opposing sides are guided between these guide members. another elongated guide member is fixed to the other two sides of the rectangular frame that do not face the guide member, and a circuit board support table is placed on the guide member so as to be guided by the other guide member. A circuit board inspection device according to claim 1. 4. The circuit board inspection device according to claim 1, wherein the circuit board position detection device is constituted by a microscope provided above the index on the top surface of the circuit board on the circuit board support table. 5. The circuit board support table fine adjustment device includes a micrometer head that moves the circuit board support table, and a micrometer head that moves the rectangular frame that supports the circuit board support table in a direction perpendicular to the moving direction of the circuit board support table. A circuit board inspection device according to claim 3, comprising: 6. The circuit board inspection device according to claim 1, wherein the upper pin port is attached to the lower side of the fixed plate so as to be movable back and forth.