JPH0543469Y2 - - Google Patents

Info

Publication number
JPH0543469Y2
JPH0543469Y2 JP1987149583U JP14958387U JPH0543469Y2 JP H0543469 Y2 JPH0543469 Y2 JP H0543469Y2 JP 1987149583 U JP1987149583 U JP 1987149583U JP 14958387 U JP14958387 U JP 14958387U JP H0543469 Y2 JPH0543469 Y2 JP H0543469Y2
Authority
JP
Japan
Prior art keywords
suction
exposed
mounting table
chuck
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987149583U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6454335U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987149583U priority Critical patent/JPH0543469Y2/ja
Publication of JPS6454335U publication Critical patent/JPS6454335U/ja
Application granted granted Critical
Publication of JPH0543469Y2 publication Critical patent/JPH0543469Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1987149583U 1987-09-30 1987-09-30 Expired - Lifetime JPH0543469Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987149583U JPH0543469Y2 (2) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987149583U JPH0543469Y2 (2) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6454335U JPS6454335U (2) 1989-04-04
JPH0543469Y2 true JPH0543469Y2 (2) 1993-11-02

Family

ID=31421943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987149583U Expired - Lifetime JPH0543469Y2 (2) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0543469Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5289898B2 (ja) * 2008-11-07 2013-09-11 住友重機械工業株式会社 ステージ装置及びプローバ装置

Also Published As

Publication number Publication date
JPS6454335U (2) 1989-04-04

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