JPH0545331A - Oxygen sensor device - Google Patents

Oxygen sensor device

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Publication number
JPH0545331A
JPH0545331A JP3206924A JP20692491A JPH0545331A JP H0545331 A JPH0545331 A JP H0545331A JP 3206924 A JP3206924 A JP 3206924A JP 20692491 A JP20692491 A JP 20692491A JP H0545331 A JPH0545331 A JP H0545331A
Authority
JP
Japan
Prior art keywords
solid electrolyte
platinum
oxygen sensor
sensor element
underlayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3206924A
Other languages
Japanese (ja)
Inventor
Koichi Nemoto
本 好 一 根
Hiroaki Kaneko
子 浩 昭 金
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP3206924A priority Critical patent/JPH0545331A/en
Publication of JPH0545331A publication Critical patent/JPH0545331A/en
Pending legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

(57)【要約】 【目的】 高温の被測定ガスに長時間さらされたときで
も固体電解質と測定電極との間の密着性が低下せず、測
定電極の剥離が生じがたい酸素センサ素子を提供する。 【構成】 固体電解質2の表面に基準電極3と測定電極
5を設け、被測定ガス中の酸素濃度を検知する酸素セン
サ素子1において、測定電極5側の固体電解質2の表面
に、主として固体電解質2と同種の材料4aと白金また
は白金族合金4bよりなる下地層4を形成し、その上に
白金または白金族合金よりなる測定電極5を形成した酸
素センサ素子1。
(57) [Summary] [Purpose] An oxygen sensor element in which the adhesion between the solid electrolyte and the measuring electrode does not deteriorate even when exposed to a high-temperature measurement gas for a long time, and peeling of the measuring electrode does not easily occur. provide. [Constitution] In an oxygen sensor element 1 for detecting a concentration of oxygen in a gas to be measured by providing a reference electrode 3 and a measuring electrode 5 on the surface of a solid electrolyte 2, a solid electrolyte is mainly formed on the surface of the solid electrolyte 2 on the measuring electrode 5 side. An oxygen sensor element 1 in which a base layer 4 made of a material 4a of the same kind as that of 2 and platinum or a platinum group alloy 4b is formed, and a measurement electrode 5 made of platinum or a platinum group alloy is formed thereon.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、各種燃焼機器の酸素
濃度を検知するのに利用される酸素センサ素子に関し、
例えば、自動車等の燃焼機関より排出される排ガスを浄
化する排ガス浄化システムに用いられる空燃比制御用の
酸素センサ素子として利用される酸素センサ素子に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oxygen sensor element used for detecting the oxygen concentration of various combustion equipment,
For example, the present invention relates to an oxygen sensor element used as an oxygen sensor element for air-fuel ratio control used in an exhaust gas purification system for purifying exhaust gas emitted from a combustion engine of an automobile or the like.

【0002】[0002]

【従来の技術】従来の酸素センサ素子において、例え
ば、自動車の排ガス浄化システムに用いられる空燃比制
御用の酸素センサ素子としては、図3に示す酸素センサ
素子11のように、るつぼ形状をなす固体電解質12の
内面にPt等の貴金属を主成分とした基準電極13を形
成すると共に外面に同じくPt等の貴金属を主成分とし
た測定電極14を形成し、排ガスにさらされる測定電極
14の上にはスピネル等のセラミック保護層15が設け
てある構造をなすものである。
2. Description of the Related Art In a conventional oxygen sensor element, for example, an oxygen sensor element for controlling an air-fuel ratio used in an exhaust gas purification system of an automobile has a crucible-shaped solid like an oxygen sensor element 11 shown in FIG. A reference electrode 13 containing a precious metal such as Pt as a main component is formed on the inner surface of the electrolyte 12, and a measuring electrode 14 containing a precious metal such as Pt is also formed on the outer surface, and the measuring electrode 14 is exposed to exhaust gas. Has a structure in which a ceramic protective layer 15 such as spinel is provided.

【0003】このような酸素センサ素子11において、
固体電解質12に形成される電極13,14は、耐熱性
および触媒作用のある金属、例えば、白金等の貴金属よ
りなるものである。そして、これらの電極13,14を
形成する方法としては、真空蒸着法,化学蒸着法,無電
解めっき法等がある。
In such an oxygen sensor element 11,
The electrodes 13 and 14 formed on the solid electrolyte 12 are made of a metal having heat resistance and a catalytic action, for example, a noble metal such as platinum. Then, as a method for forming these electrodes 13 and 14, there are a vacuum vapor deposition method, a chemical vapor deposition method, an electroless plating method and the like.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うな従来の自動車の排ガス浄化システムに用いられる空
燃比制御用の酸素センサ素子11にあっては、高温の排
ガスに長時間さらされることとなるため、特に測定電極
14のシンタリングが進み、固体電解質12の表面との
密着性が低下して測定電極14の剥離が生じる可能性が
ないとはいえないという問題点があり、このような剥離
の可能性をさらになくすことが課題となっていた。
However, the oxygen sensor element 11 for controlling the air-fuel ratio used in such a conventional automobile exhaust gas purification system is exposed to high-temperature exhaust gas for a long time. In particular, there is a problem that the sintering of the measuring electrode 14 progresses, the adhesiveness with the surface of the solid electrolyte 12 is deteriorated, and the measuring electrode 14 may be peeled off. The challenge was to eliminate even more possibilities.

【0005】[0005]

【発明の目的】この発明は、このような従来の課題にか
んがみてなされたもので、高温の排ガスなどの被測定ガ
スに長時間さらされたときでも固体電解質と測定電極と
の間の密着性が低下せず、測定電極の剥離を生じがたい
酸素センサ素子を提供することを目的としている。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and provides the adhesion between the solid electrolyte and the measuring electrode even when exposed to a gas to be measured such as high temperature exhaust gas for a long time. It is an object of the present invention to provide an oxygen sensor element in which the measurement electrode does not deteriorate and peeling of the measurement electrode does not easily occur.

【0006】[0006]

【課題を解決するための手段】この発明は、固体電解質
の表面に基準電極と測定電極を設け、被測定ガス中の酸
素濃度を検知する酸素センサ素子において、測定電極側
の固体電解質の表面に、主として固体電解質と同種の材
料と白金または白金族合金よりなる下地層を形成し、そ
の上に白金または白金族合金よりなる測定電極を形成し
た構成としたことを特徴としており、このような酸素セ
ンサ素子に係わる発明の構成をもって前述した従来の課
題を解決するための手段としている。
The present invention provides an oxygen sensor element for detecting a concentration of oxygen in a gas to be measured by providing a reference electrode and a measurement electrode on the surface of a solid electrolyte, and a solid electrolyte on the surface of the measurement electrode. It is characterized in that an underlayer mainly composed of the same kind of material as the solid electrolyte and platinum or a platinum group alloy is formed, and a measurement electrode composed of platinum or a platinum group alloy is formed thereon. The structure of the invention relating to the sensor element serves as means for solving the above-mentioned conventional problems.

【0007】この発明に係わる酸素センサ素子におい
て、固体電解質としては、ZrO2 にY2 3 やCaO
等の2〜3価の金属酸化物を部分安定化ないしは安定化
する成分比で添加したものが用いられ、これらZrO2
粉とY2 3 やCaO粉との混合粉末を(仮)焼成した
のち再粉砕することによって部分安定化ないしは安定化
ジルコニアとしたものが用いられる。
In the oxygen sensor element according to the present invention, as the solid electrolyte, ZrO 2 is added to Y 2 O 3 or CaO.
A divalent or trivalent metal oxide such as ZrO 2 is used which is added in a partially stabilizing or stabilizing component ratio.
A powder obtained by (temporarily) firing a mixed powder of powder and Y 2 O 3 or CaO powder and then re-pulverizing it to form partially stabilized or stabilized zirconia is used.

【0008】そして、このような部分安定化ないしは安
定化ジルコニアの粉末を加圧成形して仮焼成することに
よって、膜状ないしはるつぼ形状の固体電解質を得るこ
とができる。
A film-shaped or crucible-shaped solid electrolyte can be obtained by pressure-molding and partially calcining such partially stabilized or stabilized zirconia powder.

【0009】そして、この固体電解質の表面に基準電極
と測定電極を設けるが、測定電極を設ける前に、測定電
極側の固体電解質の表面に、主として固体電解質と同種
の材料と白金または白金族合金よりなる下地層を形成
し、この下地層の上に測定電極を設けた構成とする。
A reference electrode and a measurement electrode are provided on the surface of the solid electrolyte. Before the measurement electrode is provided, the surface of the solid electrolyte on the measurement electrode side is mainly made of the same material as the solid electrolyte and platinum or a platinum group alloy. Is formed, and the measurement electrode is provided on the underlayer.

【0010】この場合、下地層を形成する固体電解質の
平均粒径は50μm前後のものであるものとすることが
望ましく、同じく下地層を形成する白金または白金族合
金の粒径は50μm以下であるものとすることが望まし
い。
In this case, the average particle size of the solid electrolyte forming the underlayer is preferably around 50 μm, and the particle size of the platinum or platinum group alloy forming the underlayer is 50 μm or less. It is desirable that

【0011】そして、下地層の室温における電気的な抵
抗は、より望ましくは1キロオーム以上の値を持つよう
にし、起電力の取り出し用電極としては機能しないよう
に固体電解質と同種の材料と白金または白金族合金との
成分比を調整し、適当な有機バインダにより流動性を与
えた混合物として使用することが望ましい。
Further, the electrical resistance of the underlayer at room temperature is more preferably set to a value of 1 kilo ohm or more, and the same kind of material as the solid electrolyte, platinum or platinum is used so as not to function as an electrode for extracting electromotive force. It is desirable to adjust the component ratio with the platinum group alloy and use it as a mixture which is made fluid by an appropriate organic binder.

【0012】この流動性を有する混合物を前記仮焼成し
た固体電解質の表面に印刷ないしはディッピング等によ
り膜状に付着させ、焼成後の厚さが50μm前後となる
ように塗布することが望ましい。
It is desirable that the fluid mixture is adhered to the surface of the pre-calcined solid electrolyte in the form of a film by printing or dipping and is applied so that the calcined thickness is about 50 μm.

【0013】さらに、前記下地層の表面に測定電極を設
けると共に固体電解質の表面に基準電極を設けるに際し
ては、真空蒸着法,化学蒸着法,無電解めっき法等を用
いて白金または白金族合金を厚さ1μm程度の膜状に形
成する。
Further, when the measurement electrode is provided on the surface of the underlayer and the reference electrode is provided on the surface of the solid electrolyte, platinum or platinum group alloy is used by vacuum deposition, chemical vapor deposition, electroless plating or the like. The film is formed in a film thickness of about 1 μm.

【0014】その後、測定電極の表面にスピネルやムラ
イト等のセラミックスをプラズマ溶射等により厚さ10
0μm前後の膜状に形成することによって保護層を設け
た酸素センサ素子とする。
After that, ceramics such as spinel and mullite are formed on the surface of the measuring electrode to a thickness of 10 by plasma spraying or the like.
An oxygen sensor element provided with a protective layer is formed by forming a film having a thickness of about 0 μm.

【0015】このような酸素センサ素子において、固体
電解質と下地層とは互いに同種の材料を含むことによっ
て強固に密着したものとなり、下地層の上に形成した測
定電極は、下地層の凹凸によって前記下地層に対し強固
に密着したものとなり、測定電極の上に形成した保護層
の密着強度も上昇したものとなる。
In such an oxygen sensor element, the solid electrolyte and the underlayer are firmly adhered to each other by containing the same kind of material, and the measuring electrode formed on the underlayer has the above-mentioned unevenness of the underlayer. The film is firmly adhered to the underlayer, and the adhesion strength of the protective layer formed on the measurement electrode is also increased.

【0016】ところで、下地層の室温における電気的な
抵抗値を1キロオーム以上とするのが望ましいのは、仮
に下地層そのものを測定電極として作用させると、下地
層のガス拡散性が良くないこと、下地層の触媒活性が不
足していること、などの理由によって空燃比の変化に対
する応答性が悪くなり、制御性の劣る酸素センサ素子と
なる可能性があることによる。したがって、下地層に対
しては、測定電極や保護層の密着強度を向上させるため
だけの機能をもたせることとして、白金または白金族合
金の成分比率が低くなるようにして、抵抗値が1キロオ
ーム以上となるようにすることが望ましいといえる。
By the way, it is desirable that the electrical resistance value of the underlayer at room temperature be 1 k ohm or more, because if the underlayer itself acts as a measuring electrode, the gas diffusion of the underlayer is not good, This is because there is a possibility that the oxygen sensor element has poor controllability due to poor responsiveness to changes in the air-fuel ratio due to reasons such as insufficient catalytic activity of the underlayer. Therefore, by providing a function only for improving the adhesion strength of the measuring electrode and the protective layer to the underlayer, the component ratio of platinum or a platinum group alloy is lowered, and the resistance value is 1 kΩ or more. It can be said that it is desirable that

【0017】[0017]

【発明の作用】この発明に係わる酸素センサ素子では、
測定電極側の固体電解質の表面に、主として固体電解質
と同種の材料と白金または白金族合金よりなる下地層を
形成し、その上に白金または白金族合金よりなる測定電
極を形成した構成としているので、固体電解質に対する
前記下地層を介した測定電極の密着強度がより一層向上
したものとなり、高温の排ガス等の被測定ガスに長時間
さらされたときでも固体電解質に対する測定電極の密着
性が低下しがたいものとなって、測定電極の剥離が生じ
がたいものとなり、測定電極の剥離によるセンサ起電力
の低下や応答性の悪化などの不具合が防止されるように
なる。
In the oxygen sensor element according to the present invention,
On the surface of the solid electrolyte on the measurement electrode side, an underlayer mainly made of the same material as the solid electrolyte and platinum or platinum group alloy is formed, and the measurement electrode made of platinum or platinum group alloy is formed on it. The adhesion strength of the measurement electrode to the solid electrolyte through the underlayer is further improved, and the adhesion of the measurement electrode to the solid electrolyte is reduced even when exposed to a measured gas such as high-temperature exhaust gas for a long time. As a result, peeling of the measurement electrode hardly occurs, and problems such as a decrease in sensor electromotive force and deterioration of responsiveness due to peeling of the measurement electrode can be prevented.

【0018】[0018]

【実施例】以下、この発明の実施例を図面に基づいて説
明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0019】図1は、この発明の一実施例による酸素セ
ンサ素子を示すものであって、この酸素センサ素子1
は、るつぼ形状をなす部分安定化ジルコニアよりなる固
体電解質2の内面に、大気と接する白金よりなる基準電
極3を設けていると共に、固体電解質2の外面に、主と
して固体電解質2と同種の材料4aと白金または白金族
合金4bよりなる下地層4を形成し、この下地層4の上
に白金よりなる測定電極5を設け、この測定電極5の上
にスピネルよりなるセラミック保護層6を設けた構造を
なすものである。
FIG. 1 shows an oxygen sensor element according to an embodiment of the present invention.
Is provided with a reference electrode 3 made of platinum in contact with the atmosphere on the inner surface of a solid electrolyte 2 made of partially stabilized zirconia in the shape of a crucible, and the outer surface of the solid electrolyte 2 is mainly made of the same material 4a as the solid electrolyte 2. And a platinum or platinum group alloy 4b are formed as an underlayer 4, a measurement electrode 5 made of platinum is provided on the underlayer 4, and a ceramic protective layer 6 made of spinel is provided on the measurement electrode 5. It is what makes up.

【0020】このような構造の酸素センサ素子1を製造
するに際しては、まず、ZrO2 にY2 3 を6mol
%の成分比で混合し、粉砕,仮焼成,再粉砕することで
部分安定化ジルコニア粉末を得たのち、この粉末を一端
が閉じた筒状に加圧成形して仮焼成することによって、
るつぼ形状の固体電解質2とする。
In manufacturing the oxygen sensor element 1 having such a structure, first, ZrO 2 is mixed with 6 mol of Y 2 O 3 .
% To obtain a partially stabilized zirconia powder by crushing, calcination, and re-crushing, and then press-molding this powder into a cylinder with one end closed and calcination
The solid electrolyte 2 has a crucible shape.

【0021】次に、前記固体電解質2と同じ部分安定化
ジルコニア粉末(平均粒径;50μm)と白金粉末(平
均粒径;50μm)との混合粉末を用意し、このとき、
下地層4の室温における電気的な抵抗が1キロオーム以
上の抵抗値を持ち、起電力の取り出し電極としては機能
しないようにこれらの成分比を固体電解質:白金=4:
6に調整し、有機バインダにより流動性を与えた混合物
としたのち、この流動性の混合物を前記仮焼成したるつ
ぼ形状の固体電解質2の表面にディッピングにより付着
させ、焼成後の表面層厚みが50μm前後となるように
塗布した。
Next, a mixed powder of the same partially stabilized zirconia powder (average particle size; 50 μm) and platinum powder (average particle size; 50 μm) as in the solid electrolyte 2 is prepared.
The electrical resistance of the underlayer 4 at room temperature has a resistance value of 1 kilo ohm or more, and the ratio of these components is set so that it does not function as an electromotive force extraction electrode.
The mixture was adjusted to 6 and made fluid by an organic binder, and then the fluid mixture was attached to the surface of the calcined crucible-shaped solid electrolyte 2 by dipping, and the surface layer thickness after firing was 50 μm. It was applied to the front and back.

【0022】次いで、白金を素材とし、真空蒸着法によ
って固体電解質2の内面に厚さ1μmの基準電極3を形
成すると共に、固体電解質2の外面に設けた下地層4の
上に厚さ1μmの測定電極4を形成し、さらに測定電極
5の上に、スピネルを素材とし、プラズマ溶射によって
厚さ100μmの保護層6を形成して、図1に示す構造
の酸素センサ素子1を得た。
Next, using platinum as a material, a reference electrode 3 having a thickness of 1 μm is formed on the inner surface of the solid electrolyte 2 by a vacuum deposition method, and a base electrode 4 having a thickness of 1 μm is provided on the outer surface of the solid electrolyte 2. A measurement electrode 4 was formed, and a protective layer 6 made of spinel and having a thickness of 100 μm was formed on the measurement electrode 5 by plasma spraying to obtain an oxygen sensor element 1 having a structure shown in FIG.

【0023】このようにして得た酸素センサ素子1の表
面には、厚さが約5μm以上の凹凸が存在する下地層4
が得られていた。
On the surface of the oxygen sensor element 1 thus obtained, the underlayer 4 having irregularities with a thickness of about 5 μm or more is present.
Was obtained.

【0024】このような下地層4上に形成した測定電極
5は、下地層4の凹凸により測定電極5そのものが下地
層4に強固に密着したものとなっていた。同様に、測定
電極5の上部に形成した保護層6の密着強度も上昇した
ものとなっていた。
The measurement electrode 5 formed on the underlayer 4 was firmly adhered to the underlayer 4 due to the unevenness of the underlayer 4. Similarly, the adhesion strength of the protective layer 6 formed on the measurement electrode 5 was also increased.

【0025】また、下地層4に混合している白金が測定
電極5とシンタリングして、測定電極5の一部がくさび
のように下地層4に貫入しているため、下地層4との密
着強度が飛躍的に向上する一助となっていた。
Further, since platinum mixed in the underlayer 4 is sintered with the measuring electrode 5 and a part of the measuring electrode 5 penetrates into the underlayer 4 like a wedge, the platinum mixed with the underlayer 4 It helped to dramatically improve the adhesion strength.

【0026】図3は、空気中において1200℃の苛酷
な耐久試験を長時間にわたって行なった結果を例示する
ものであって、図3に示した構造をもつ従来の酸素セン
サ素子11では測定電極14が固体電解質12の表面か
ら剥離を生じたために長時間の耐久試験後に応答時間が
長くなっていて応答性の悪化を生じたのに対して、図1
に示した構造をもつ本発明例の酸素センサ素子1では測
定電極5の剥離がなく、経時劣化による応答性の悪化が
みられる程度であって良好なる結果が得られた。
FIG. 3 exemplifies the result of conducting a severe durability test at 1200 ° C. in air for a long time. In the conventional oxygen sensor element 11 having the structure shown in FIG. Since the peeling occurred from the surface of the solid electrolyte 12 and the response time was long after the long-term durability test, the response was deteriorated.
In the oxygen sensor element 1 of the present invention having the structure shown in FIG. 3, the measurement electrode 5 was not peeled off, and the responsiveness was deteriorated due to deterioration over time, and good results were obtained.

【0027】他の実施例においては、下地層4にAl2
3 やTiO2 のような金属酸化物と白金や白金族合金
との混合物を用い、Al2 3 の平均粒径を固体電解質
と同種の材料(安定化または部分安定化ジルコニア)の
平均粒径の1/2以下とし、20mol%混合した場合
に、Al2 3 粒子が上記ジルコニア粒子の間隙に入り
込むことによってさらに緻密な下地層4を形成すること
が可能であった。
In another embodiment, the underlayer 4 is made of Al 2
Using a mixture of a metal oxide such as O 3 or TiO 2 and platinum or a platinum group alloy, the average particle size of Al 2 O 3 is the same as that of a material (stabilized or partially stabilized zirconia) of the solid electrolyte. When the diameter was ½ or less and 20 mol% was mixed, the Al 2 O 3 particles were allowed to enter the gaps of the zirconia particles to form a more dense underlayer 4.

【0028】[0028]

【発明の効果】この発明に係わる酸素センサ素子では、
測定電極側の固体電解質の表面に、主として固体電解質
と同種の材料と白金または白金族合金よりなる下地層を
形成し、その上に白金または白金族合金よりなる測定電
極を形成した構成としたから、固体電解質表面への下地
層を介した測定電極の密着強度が向上し、長時間の使用
においても測定電極の剥離を防止することができるよう
になるという著しく優れた効果がもたらされる。
According to the oxygen sensor element of the present invention,
On the surface of the solid electrolyte on the measurement electrode side, an underlayer mainly made of the same material as the solid electrolyte and platinum or a platinum group alloy is formed, and the measurement electrode made of platinum or a platinum group alloy is formed on it. Further, the adhesion strength of the measurement electrode to the surface of the solid electrolyte via the underlayer is improved, and the peeling of the measurement electrode can be prevented even during long-term use, which is a remarkably excellent effect.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明に係わる酸素センサ素子の一実施例を
示し、図1の(a)は全体断面説明図、図1の(b)は
部分拡大断面説明図である。
1A and 1B show an embodiment of an oxygen sensor element according to the present invention, FIG. 1A is an overall sectional explanatory view, and FIG. 1B is a partially enlarged sectional explanatory view.

【図2】空気中1200℃での耐久試験結果を示すグラ
フである。
FIG. 2 is a graph showing the results of a durability test at 1200 ° C. in air.

【図3】従来の酸素センサ素子を示し、図3の(a)は
全体断面説明図、図3の(b)は部分拡大断面説明図で
ある。
FIG. 3 shows a conventional oxygen sensor element, FIG. 3 (a) is an overall cross-sectional explanatory view, and FIG. 3 (b) is a partially enlarged cross-sectional explanatory view.

【符号の説明】[Explanation of symbols]

1 酸素センサ素子 2 固体電解質 3 基準電極 4 下地層 4a 固体電解質と同種の材料 4b 白金または白金族合金 5 測定電極 1 Oxygen Sensor Element 2 Solid Electrolyte 3 Reference Electrode 4 Underlayer 4a Same Material as Solid Electrolyte 4b Platinum or Platinum Group Alloy 5 Measuring Electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 固体電解質の表面に基準電極と測定電極
を設け、被測定ガス中の酸素濃度を検知する酸素センサ
素子において、測定電極側の固体電解質の表面に、主と
して固体電解質と同種の材料と白金または白金族合金よ
りなる下地層を形成し、その上に白金または白金族合金
よりなる測定電極を形成したことを特徴とする酸素セン
サ素子。
1. An oxygen sensor element for detecting a concentration of oxygen in a gas to be measured by providing a reference electrode and a measurement electrode on the surface of a solid electrolyte, wherein the surface of the solid electrolyte on the measurement electrode side is mainly made of the same material as that of the solid electrolyte. And an underlayer made of platinum or a platinum group alloy, and a measurement electrode made of platinum or a platinum group alloy formed on the underlayer.
JP3206924A 1991-08-19 1991-08-19 Oxygen sensor device Pending JPH0545331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3206924A JPH0545331A (en) 1991-08-19 1991-08-19 Oxygen sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3206924A JPH0545331A (en) 1991-08-19 1991-08-19 Oxygen sensor device

Publications (1)

Publication Number Publication Date
JPH0545331A true JPH0545331A (en) 1993-02-23

Family

ID=16531335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3206924A Pending JPH0545331A (en) 1991-08-19 1991-08-19 Oxygen sensor device

Country Status (1)

Country Link
JP (1) JPH0545331A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016164498A (en) * 2015-03-06 2016-09-08 株式会社日本自動車部品総合研究所 Gas sensor element and gas sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016164498A (en) * 2015-03-06 2016-09-08 株式会社日本自動車部品総合研究所 Gas sensor element and gas sensor
WO2016143610A1 (en) * 2015-03-06 2016-09-15 株式会社デンソー Gas sensor element and gas sensor

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