JPH0545377Y2 - - Google Patents

Info

Publication number
JPH0545377Y2
JPH0545377Y2 JP1988094638U JP9463888U JPH0545377Y2 JP H0545377 Y2 JPH0545377 Y2 JP H0545377Y2 JP 1988094638 U JP1988094638 U JP 1988094638U JP 9463888 U JP9463888 U JP 9463888U JP H0545377 Y2 JPH0545377 Y2 JP H0545377Y2
Authority
JP
Japan
Prior art keywords
filter unit
casing
fan
clean room
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988094638U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217220U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988094638U priority Critical patent/JPH0545377Y2/ja
Publication of JPH0217220U publication Critical patent/JPH0217220U/ja
Application granted granted Critical
Publication of JPH0545377Y2 publication Critical patent/JPH0545377Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1988094638U 1988-07-19 1988-07-19 Expired - Lifetime JPH0545377Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988094638U JPH0545377Y2 (2) 1988-07-19 1988-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988094638U JPH0545377Y2 (2) 1988-07-19 1988-07-19

Publications (2)

Publication Number Publication Date
JPH0217220U JPH0217220U (2) 1990-02-05
JPH0545377Y2 true JPH0545377Y2 (2) 1993-11-19

Family

ID=31319199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988094638U Expired - Lifetime JPH0545377Y2 (2) 1988-07-19 1988-07-19

Country Status (1)

Country Link
JP (1) JPH0545377Y2 (2)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0113545Y2 (2) * 1985-12-17 1989-04-20
JPH043615Y2 (2) * 1985-12-25 1992-02-04

Also Published As

Publication number Publication date
JPH0217220U (2) 1990-02-05

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