JPH0551434U - Flat plate semipermeable membrane module with frame - Google Patents
Flat plate semipermeable membrane module with frameInfo
- Publication number
- JPH0551434U JPH0551434U JP10494091U JP10494091U JPH0551434U JP H0551434 U JPH0551434 U JP H0551434U JP 10494091 U JP10494091 U JP 10494091U JP 10494091 U JP10494091 U JP 10494091U JP H0551434 U JPH0551434 U JP H0551434U
- Authority
- JP
- Japan
- Prior art keywords
- semipermeable membrane
- membrane module
- frame
- flat plate
- organic solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 57
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000002093 peripheral effect Effects 0.000 claims abstract description 14
- 239000000203 mixture Substances 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 4
- 239000003960 organic solvent Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000935 solvent evaporation Methods 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims description 5
- 230000008929 regeneration Effects 0.000 claims description 4
- 238000011069 regeneration method Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000005373 pervaporation Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 abstract description 28
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 12
- 239000004033 plastic Substances 0.000 description 12
- 229920003023 plastic Polymers 0.000 description 12
- 238000012856 packing Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
(57)【要約】 （修正有）
【目的】多孔スペーサーに通過抵抗を少なくするための
特殊な加工とか、粗目の余分な部材を使用することな
く、透過流体の通過抵抗を少なくすることが可能とな
り、且つ構造を単純にすることが出来て、従来よりも安
価で故障の少ない外圧式平板状半透膜モジュールを提供
する。
【構成】 気体混合物又は液体混合物中に設置し、気体
混合物又は液体混合物中の特定物質を選択的に分離する
半透膜モジュールであって、平板状多孔性支持体の両表
面又は片表面に平板状半透膜３−１，３−２を設置し、
その周辺部を枠１−１，１−２で気密に封止し、該周辺
部の枠に膜を透過した流体を取出すためのサクションノ
ズル４を設けてなる外圧式平板型半透膜モジュールにお
いて、該周辺部の枠内に該平板状多孔性支持体と連通す
る空間を設けることを特徴とする枠付平板状半透膜モジ
ュール。
(57) [Summary] (Modified) [Purpose] It is possible to reduce the passage resistance of the permeated fluid without using special processing to reduce the passage resistance of the porous spacer or using extra coarse material. (EN) Provided is an external pressure type flat plate type semipermeable membrane module which has a simple structure and which is less expensive and has less failures than conventional ones. A semipermeable membrane module, which is installed in a gas mixture or a liquid mixture and selectively separates a specific substance in the gas mixture or the liquid mixture, and is a flat plate on both surfaces or one surface of a flat porous support. -Like semipermeable membranes 3-1 and 3-2 are installed,
In an external pressure type flat plate type semipermeable membrane module in which the peripheral portion is hermetically sealed with frames 1-1 and 1-2, and a suction nozzle 4 for taking out the fluid that has permeated the membrane is provided in the peripheral frame. A frame-shaped plate-shaped semipermeable membrane module, wherein a space communicating with the plate-shaped porous support is provided in the frame of the peripheral portion.
Description
【０００１】[0001]
本考案は、浸透気化（パーベーパレーション）法又は蒸気透過（ベーパパーミ エイション）法によって、液体混合物又は気体混合物中の特定物質を選択的に分 離するために利用される枠付平板状半透膜モジュールに関するものである。 The present invention is a frame-shaped plate-shaped semipermeable membrane used for selectively separating a specific substance in a liquid mixture or a gas mixture by a pervaporation method or a vapor permeation method. It's about modules.
【０００２】[0002]
外圧式平板型半透膜モジュールには、膜を透過した液体を取出すためのサクシ ョンノズルを半透膜周辺部の枠に設ける方式と、半透膜部分に設ける方式とがあ る。 従来の支持体の周辺部の枠にサクションノズルを設ける場合においては、透過 流体を多孔プレート、網目状物或はコルゲート等の平板状支持体（以下、多孔ス ペーサーと略す）を通して枠内のサクションノズル部に集めるので、多孔スペー サーでの通過抵抗を減少させるために種々の工夫が成されている。 There are two types of external pressure flat plate type semipermeable membrane module: a suction nozzle for taking out the liquid that has permeated the membrane in the frame around the semipermeable membrane and a method in the semipermeable membrane part. When a suction nozzle is provided in the frame of the peripheral part of a conventional support, the permeated fluid is passed through a flat plate-shaped support (hereinafter, abbreviated as a porous spacer) such as a perforated plate, a mesh or a corrugated tube, and the suction inside the frame is reduced. Since it is collected in the nozzle part, various measures have been taken to reduce the passage resistance in the porous spacer.
【０００３】 例えば、図５及び図６に見られる如く、多孔スペーサーの一部である２１−１ と２１−２に多数の孔を開けると同時に、該スペーサー２１−１と２１−２の相 対する面に凸形２９部を設けて、相対する先端を接触させることにより、外圧に よる凹みを防ぐ対策を施し、さらに該スペーサーと半透膜２４−１と２４−２（ 以下、説明図において２４−１と２４−２は同じものなので "２４" とする。他 も同様である。）の間に２１の孔２８から離れた位置から透過流体を該孔まで導 くための網目構造のスペーサー２３を設けるなどの工夫がなされている。図５及 び図６において、２１は平板状の多孔スペーサー、２２は裏パッキン、２３はプ ラスチック又は金属の網目構造の多孔スペーサー、２４は半透膜、２５は表パッ キン、２６は押え枠、２７はサクションノズルを夫々示し、又２８は多孔プレー トの孔を、２９は多孔プレート２１−１と２１−２との相対する面を接触させる ことにより、真空による多孔スペーサーの撓みを防ぐための凸形を示す。For example, as shown in FIGS. 5 and 6, a large number of holes are formed in 21-1 and 21-2 which are parts of the porous spacers, and at the same time, the spacers 21-1 and 21-2 are opposed to each other. By providing a convex portion 29 on the surface and contacting the opposite tips, a measure is taken to prevent depression due to external pressure. Further, the spacer and the semipermeable membranes 24-1 and 24-2 (refer to -1 and 24-2 are the same, so they will be referred to as "24. The same applies to the others.)", And a spacer 23 having a mesh structure for guiding the permeated fluid to the hole from a position apart from the hole 28 of 21. It has been devised such as providing. In FIGS. 5 and 6, 21 is a flat plate-shaped porous spacer, 22 is a back packing, 23 is a porous spacer having a plastic or metal mesh structure, 24 is a semipermeable membrane, 25 is a front packing, and 26 is a holding frame. , 27 are suction nozzles respectively, 28 is a hole of a porous plate, and 29 is a surface of the porous plates 21-1 and 21-2. Shows the convex shape of.
【０００４】 また、図７及び図８に見られる如く、使用する多孔スペーサー３２に透過流体 の通過抵抗の少ない粗い目のものを使用し、さらに半透膜３４と該スペーサーの 間に細かい目の布、例えばプラスチックの網構造のスペーサー３３を挟むことに より半透膜３４の外圧による凹みと損傷を防ぐ等の工夫がなされている。図７及 び図８において、３１はプラスチック又は金属より成る枠を、３２は粗めのプラ スチック又は金属の網目構造物或は焼結金属より成る多孔スペーサーを、３４は 半透膜を、３５は透過流体のサクションノズルを夫々示す。Further, as shown in FIGS. 7 and 8, the porous spacer 32 to be used has a coarse mesh with a low permeation resistance of the permeating fluid, and a fine mesh is provided between the semipermeable membrane 34 and the spacer. By sandwiching a spacer 33 having a cloth structure, for example, a plastic net structure, it is devised to prevent the semipermeable membrane 34 from being dented and damaged due to external pressure. 7 and 8, 31 is a frame made of plastic or metal, 32 is a coarse plastic or metal mesh structure or porous spacer made of sintered metal, 34 is a semipermeable membrane, and 35 is Are suction nozzles for the permeated fluid, respectively.
【０００５】 一方、多孔スペーサーの中心付近からサクションノズルを取出す方式の例とし て図９及び図１０がある。該方式の長所は、多孔スペーサー内の透過流体の通路 が短かく、従って通過抵抗が少ないところにある。構造としてはコアー４４と４ ５を設けて、該コアーを介して透過流体を排出するが、多孔スペーサーにプラス チックの網等を使用した場合、このコアーを安定させるために、その部分に剛体 の構造物の補強材４６を組込む必要がある。図９及び図１０において、４１はプ ラスチック又は金属より成る枠を、４２はプラスチック又は金属の網目構造物或 は焼結金属より成る多孔スペーサーを、４３は半透膜を、４４と４５はプラスチ ック又は金属より成るコアーを、４６は該コアーを取付けるための補強部材を、 ４７は透過流体のサクションノズルを夫々示す。On the other hand, there are FIGS. 9 and 10 as an example of the method of taking out the suction nozzle from the vicinity of the center of the porous spacer. The advantage of this method is that the passage of the permeated fluid in the porous spacer is short and therefore the passage resistance is small. As the structure, cores 44 and 45 are provided, and the permeated fluid is discharged through the cores. However, when a plastic net or the like is used for the porous spacers, in order to stabilize the cores, a rigid body is used for the parts. It is necessary to incorporate the structural reinforcement 46. 9 and 10, 41 is a frame made of plastic or metal, 42 is a porous spacer made of plastic or metal mesh structure or sintered metal, 43 is a semipermeable membrane, and 44 and 45 are plastics. And a metal core, 46 is a reinforcing member for mounting the core, and 47 is a permeated fluid suction nozzle.
【０００６】[0006]
サクションノズルを周辺部の枠に設ける方式の外圧式平板型半透膜モジュール の場合は、透過流体を半透膜の中心付近より取出す方式に比べ、透過流体が多孔 スペーサー内を通る距離が長くなる。その為、多孔スペーサーの通過抵抗を減少 させるための工夫が必要となって、厚くて複雑な構造の物となる。 一方、多孔スペーサーの中心付近にサクションノズルを設ける方式の外圧式平 板型半透膜モジュールの場合も、周辺部を液密に封止する他に平膜に孔を開けて サクションノズルを取付けるために、又保持と漏洩封止のためにも構造の改良が 必要となり、その結果複雑な構造になると言った欠点を有している。 このように通過抵抗の減少を図るために多孔スペーサーに複雑な加工を施すか 、或は使用部品点数を多く使用することは、製作費・原材料の比例費の増加をも たらすだけでなく、製造工程の歩留まりを悪くする原因となる。 In the case of the external pressure type flat plate type semi-permeable membrane module in which the suction nozzle is installed in the peripheral frame, the distance that the permeated fluid passes through the porous spacer is longer than in the method in which the permeated fluid is taken out from the vicinity of the center of the semi-permeable membrane. .. Therefore, it is necessary to devise to reduce the passage resistance of the porous spacer, resulting in a thick and complicated structure. On the other hand, in the case of an external pressure type flat plate type semi-permeable membrane module in which a suction nozzle is installed near the center of the porous spacer, in addition to liquid-tightly sealing the peripheral part, a hole is formed in the flat membrane to attach the suction nozzle. In addition, there is a drawback in that the structure needs to be improved for holding and leak sealing, resulting in a complicated structure. In this way, applying complicated processing to the porous spacer in order to reduce the passage resistance or using a large number of used parts not only causes an increase in production costs and proportional costs of raw materials, but also in manufacturing. This will cause the yield of the process to deteriorate.
【０００７】[0007]
本考案は上記の構造が複雑のために製作費が高くなり、且つ故障が多い従来の 半透膜モジュールの問題点を解決する為には、透過流体が多孔スペーサー内を最 も抵抗の少ない流れ方で通過してサクションノズルに到達する事が必要であると 考えて、透過流体を多孔スペーサーの全周辺から取出す事ができれば、透過抵抗 は最小になる事に着目した。そこで、周辺枠内部に多孔スペーサーと連通し、同 時に枠内を好ましくは全周辺、少なくとも部分的に周辺を連通し、サクションノ ズルと連通する流路を設ける事によって、最も抵抗が少ない方法で透過流体を枠 に設けたサクションノズルに導くことが出来ると考えて、本考案を完成するに至 ったものである。 即ち本考案は、気体混合物又は液体混合物中に設置し、気体混合物又は液体混 合物中の特定物質を選択的に分離する半透膜モジュールであって、平板状多孔性 支持体の両表面又は片表面に平板状半透膜を設置し、その周辺部を枠で気密に封 止し、該周辺部の枠に膜を透過した流体を取出すためのサクションノズルを設け て成る外圧式平板型半透膜モジュールにおいて、該周辺部の枠内に該平板状多孔 性支持体と連通する空間を設けることを特徴とする枠付平板状半透膜モジュール に係るものである。 In the present invention, since the above structure is complicated, the manufacturing cost is high, and in order to solve the problems of the conventional semipermeable membrane module, which has many failures, the permeable fluid flows in the porous spacer with the least resistance. Considering that it is necessary to pass through to the suction nozzle to reach the suction nozzle, the permeation resistance is minimized if the permeated fluid can be taken out from the entire periphery of the porous spacer. Therefore, by providing a flow path that communicates with the porous spacer inside the peripheral frame, and at the same time preferably communicates the entire periphery, or at least partly the periphery, and a channel that communicates with the suction nozzle, the method with the least resistance is provided. The present invention has been completed on the assumption that the permeated fluid can be guided to the suction nozzle provided on the frame. That is, the present invention is a semipermeable membrane module which is installed in a gas mixture or a liquid mixture and selectively separates a specific substance in the gas mixture or the liquid mixture. An external pressure type flat plate type semi-permeable membrane that has a flat semi-permeable membrane installed on one surface, its peripheral portion is hermetically sealed with a frame, and a suction nozzle for taking out the fluid that has permeated the membrane is provided in the peripheral frame. The present invention relates to a framed flat plate semipermeable membrane module, characterized in that a space communicating with the flat plate porous support is provided in the frame of the peripheral portion.
【０００８】 具体的には、外圧式平板型半透膜モジュールにおいて、周辺部の枠内に多孔ス ペーサーが四角の場合は１〜４箇所の辺に、円盤の場合は全周又は任意の角度の 周囲に空間を設けることにより、半透膜を通過した透過流体を少ない通過抵抗で サクションノズルに導く方法である。この場合、半透膜を通過した透過流体が中 心より周囲に流れるために断面積が次第に広くなり、平板の中心に透過流体のサ クションノズルを設ける場合より理論上通過抵抗が少ないと言う利点を備えてい る。[0008] Specifically, in the external pressure type flat plate type semipermeable membrane module, if the porous spacer is a square in the frame of the peripheral portion, it is on one to four sides, and if it is a disk, the entire circumference or any angle. This is a method in which the permeated fluid that has passed through the semipermeable membrane is guided to the suction nozzle with less passage resistance by providing a space around the. In this case, since the permeated fluid that has passed through the semipermeable membrane flows from the center to the surroundings, the cross-sectional area gradually increases, and theoretically the passage resistance is smaller than when a suction nozzle for the permeated fluid is provided at the center of the flat plate. Equipped with.
【０００９】 本考案の枠付平板状半透膜モジュールは、有機溶剤の蒸気又は液体に含まれる 水分を蒸気透過法又は浸透気化法によって除去するための有機溶剤再生システム を設けた有機溶剤蒸発槽において、前記有機溶剤再生システムの一部として該有 機溶剤蒸発槽内に設置されて用いられるに適している。この場合半透膜モジュー ルを有する有機溶剤蒸発槽が、電子回路製品の製造工程における水洗工程後に用 いられ、該電子回路製品に付着した水を有機溶剤の蒸気により置換乾燥する洗浄 乾燥装置である場合非常に有用である。この様な有機溶媒再生装置については本 出願人等の出願に係る特願平２−297922及び特願平２−297933にも記載されてい る。The framed flat plate semipermeable membrane module of the present invention is an organic solvent evaporation tank provided with an organic solvent regeneration system for removing water contained in vapor or liquid of an organic solvent by a vapor permeation method or a pervaporation method. In, it is suitable to be installed and used in the organic solvent evaporation tank as a part of the organic solvent regeneration system. In this case, an organic solvent evaporation tank with a semi-permeable membrane module is used after the water washing process in the manufacturing process of electronic circuit products, and the cleaning and drying device is used to replace and dry the water adhering to the electronic circuit products with the vapor of the organic solvent. Very useful in some cases. Such an organic solvent regenerating apparatus is also described in Japanese Patent Application Nos. 2-297922 and 2-297933 filed by the present applicant.
【００１０】 図１、図２、図３及び図４は本考案の具体例を示したものである。これらの図 においてＡの部分が本考案の外枠に仕組んだ空間部である。尚、図２と図４では Ｂ、Ｂ’部は接着構造であるが、膜との封止部分であるＢにパッキンを介在させ て枠をＢ’部で接着しても良く、機械的に組付けても良い。1, FIG. 2, FIG. 3 and FIG. 4 show specific examples of the present invention. In these figures, the portion A is the space portion built into the outer frame of the present invention. 2 and 4, the B and B'portions have an adhesive structure, but the frame may be adhered at the B'portion by interposing a packing at B, which is a sealing portion with the membrane, and mechanically. You may assemble.
【００１１】[0011]
以下、本考案を実施例により説明するが、本考案はこれらの実施例に制限され るものではない。 尚、以下の図を説明するに当って、全ての図における−１と−２は両側に半透 膜を装着する構造の場合の同じ部材の上面と下面を示すもので、以降の説明では 省略する。又、半透膜はこれらの図では両面に使用しているが、片面のみでも良 い。実施例１ 四角形の外圧式平板状半透膜モジュールにおいて、垂直方向にサクションノズ ル４を取付け、枠の３辺に空間Ａを設けた。その場合の平面図を図１に、側断面 図を図２に示す。図１及び図２において、１はプラスチック又は金属より成る枠 を、２はプラスチック又は金属の網目構造物、コルゲート構造物或は焼結体から 成る多孔スペーサーを、３は半透膜を、４は透過流体のサクションノズルを夫々 示す。Hereinafter, the present invention will be described with reference to examples, but the present invention is not limited to these examples. In describing the following figures, -1 and -2 in all the figures show the upper and lower surfaces of the same member in the case where the semipermeable membrane is mounted on both sides, and are omitted in the following description. To do. Also, the semipermeable membrane is used on both sides in these figures, but it is also possible to use only one side. Example 1 In a square external pressure type flat plate semipermeable membrane module, a suction nozzle 4 was attached in a vertical direction, and a space A was provided on three sides of a frame. A plan view in that case is shown in FIG. 1, and a side sectional view thereof is shown in FIG. 1 and 2, 1 is a frame made of plastic or metal, 2 is a porous spacer made of plastic or metal network structure, corrugated structure or sintered body, 3 is a semipermeable membrane, and 4 is a semipermeable membrane. The permeation fluid suction nozzles are shown respectively.
【００１２】実施例２ 円型の外圧式平板状半透膜モジュールにおいて、直角にサクションノズル１４ を取付け、円の全周に空間Ａを設けた。その場合の平面図を図３に、側断面図を 図４に示す。図３及び図４において、１１はプラスチック又は金属より成る枠を 、１２はプラスチック又は金属の網目構造物、コルゲート構造物或は焼結体から 成る多孔スペーサーを、１３は半透膜を、１４は透過流体のサクションノズルを 夫々示す。 Example 2 In a circular external pressure type flat plate type semipermeable membrane module, a suction nozzle 14 was attached at a right angle, and a space A was provided on the entire circumference of the circle. A plan view in that case is shown in FIG. 3, and a side sectional view thereof is shown in FIG. 3 and 4, 11 is a frame made of plastic or metal, 12 is a porous spacer made of plastic or metal mesh structure, corrugated structure or sintered body, 13 is a semipermeable membrane, and 14 is a semipermeable membrane. The permeation fluid suction nozzles are shown respectively.
【００１３】[0013]
本考案により、多孔スペーサーに通過抵抗を少なくするための特殊な加工とか 、粗目の余分な部材を使用することなく、透過流体の通過抵抗を少なくすること が可能となり、且つ構造を単純にすることが出来て、従来よりも安価で故障の少 ない外圧式平板状半透膜モジュールを提供することが可能となる。 本考案は、ＩＣ等の半導体や液晶表示板等の電子回路製品の製造工程における ウェハーや表示基板等の水によるすすぎ洗浄後に用いられる、有機溶媒による洗 浄乾燥装置において、浸透気化法又は蒸気透過法によって、有機溶媒に混入する 水分を除去して、該有機溶媒を再利用するために利用できる。 According to the present invention, it is possible to reduce the passage resistance of the permeated fluid without using special processing for reducing the passage resistance of the porous spacer or using a coarse extra member, and simplifying the structure. As a result, it becomes possible to provide an external pressure type flat plate semipermeable membrane module that is less expensive and has fewer failures than before. The present invention is a permeation vaporization method or a vapor permeation method in an organic solvent washing / drying device used after rinsing and washing of wafers and display substrates with water in the manufacturing process of semiconductors such as ICs and electronic circuit products such as liquid crystal display boards. By the method, the water mixed in the organic solvent can be removed, and the organic solvent can be reused.
【図１】本考案の実施例を示す平面図である。FIG. 1 is a plan view showing an embodiment of the present invention.
【図２】図１の側断面図である。FIG. 2 is a side sectional view of FIG.
【図３】本考案の他の実施例を示す平面図である。FIG. 3 is a plan view showing another embodiment of the present invention.
【図４】図３の側断面図である。FIG. 4 is a side sectional view of FIG.
【図５】従来の半透膜モジュールを示す各平面図の合成
図である。FIG. 5 is a composite view of plan views showing a conventional semipermeable membrane module.
【図６】従来の半透膜モジュールの側断面図である。FIG. 6 is a side sectional view of a conventional semipermeable membrane module.
【図７】従来の別の半透膜モジュールを示す平面図であ
る。FIG. 7 is a plan view showing another conventional semipermeable membrane module.
【図８】図７の側断面図である。FIG. 8 is a side sectional view of FIG.
【図９】従来のもう一つ別の半透膜モジュールを示す平
面図である。FIG. 9 is a plan view showing another conventional semipermeable membrane module.
【図１０】図９の側断面図である。FIG. 10 is a side sectional view of FIG.
１−１・・・枠 １−２・・・枠 ２ ・・・網目構造物 ３−１・・・半透膜 ３−２・・・半透膜 ４ ・・・サクションノズル １１−１・・枠 １１−２・・枠 １２ ・・・網目構造物 １３ ・・・半透膜 １４ ・・・サクションノズル 1-1 ... Frame 1-2 ... Frame 2 ... Network structure 3-1 ... Semipermeable membrane 3-2 ... Semipermeable membrane 4 ... Suction nozzle 11-1 ... Frame 11-2 ... Frame 12 ... Mesh structure 13 ... Semipermeable membrane 14 ... Suction nozzle
Claims (3)
気体混合物又は液体混合物中の特定物質を選択的に分離
する半透膜モジュールであって、平板状多孔性支持体の
両表面又は片表面に平板状半透膜を設置し、その周辺部
を枠で気密に封止し、該周辺部の枠に膜を透過した流体
を取出すためのサクションノズルを設けて成る外圧式平
板型半透膜モジュールにおいて、該周辺部の枠内に該平
板状多孔性支持体と連通する空間を設けることを特徴と
する枠付平板状半透膜モジュール。1. Installation in a gas or liquid mixture,
A semipermeable membrane module for selectively separating a specific substance in a gas mixture or a liquid mixture, in which flat semipermeable membranes are installed on both surfaces or one surface of a flat porous support and the peripheral portion thereof is framed. In an external pressure type flat plate type semipermeable membrane module, which is airtightly sealed with a suction nozzle for taking out fluid that has permeated the membrane in the peripheral frame, the flat plate-shaped porous structure is provided in the peripheral frame. A flat plate-shaped semipermeable membrane module with a frame, characterized in that a space communicating with a support is provided.
を蒸気透過法又は浸透気化法によって除去するための有
機溶剤再生システムを設けた有機溶剤蒸発槽において、
前記有機溶剤再生システムの一部として該有機溶剤蒸発
槽内に設置されて用いられることを特徴とする請求項１
記載の枠付平板状半透膜モジュール。2. An organic solvent evaporation tank provided with an organic solvent regeneration system for removing water contained in a vapor or liquid of an organic solvent by a vapor permeation method or a pervaporation method.
The organic solvent regeneration system is installed and used in the organic solvent evaporation tank as a part of the system.
A flat plate-shaped semipermeable membrane module with a frame as described.
工程における水洗工程後に用いられ、該電子回路製品に
付着した水を有機溶剤の蒸気により置換乾燥する洗浄乾
燥装置であることを特徴とする請求項２記載の枠付平板
状半透膜モジュール。3. The organic solvent evaporation tank is a washing / drying device which is used after a water washing step in a manufacturing process of an electronic circuit product and replaces water adhering to the electronic circuit product with the vapor of the organic solvent to dry it. The flat plate-shaped semipermeable membrane module with a frame according to claim 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10494091U JPH0551434U (en) | 1991-12-19 | 1991-12-19 | Flat plate semipermeable membrane module with frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10494091U JPH0551434U (en) | 1991-12-19 | 1991-12-19 | Flat plate semipermeable membrane module with frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0551434U true JPH0551434U (en) | 1993-07-09 |
Family
ID=14394096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10494091U Pending JPH0551434U (en) | 1991-12-19 | 1991-12-19 | Flat plate semipermeable membrane module with frame |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0551434U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63205118A (en) * | 1987-02-18 | 1988-08-24 | Sanyo Chem Ind Ltd | Gas separating membrane cell |
| JPH0222641A (en) * | 1988-07-08 | 1990-01-25 | Sumitomo Electric Ind Ltd | Hole burning substance and its manufacturing method |
-
1991
- 1991-12-19 JP JP10494091U patent/JPH0551434U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63205118A (en) * | 1987-02-18 | 1988-08-24 | Sanyo Chem Ind Ltd | Gas separating membrane cell |
| JPH0222641A (en) * | 1988-07-08 | 1990-01-25 | Sumitomo Electric Ind Ltd | Hole burning substance and its manufacturing method |
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