JPH0555265B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a static pressure slide table suitable for ultra-precision feeding, and particularly to an improvement of its feeding device.

[Prior art]

In this type of static pressure slide table, a reference guide is provided integrally with the bed, and this reference guide guides and supports the first table so as to be able to reciprocate in the longitudinal direction via the static pressure slide device. There is a device in which the first table is reciprocated by a feed screw via a second table that is guided and supported so as to be slidable back and forth in the longitudinal direction and is floatingly connected to the first table. According to this technology, the sliding resistance of the guide support part of the first table is reduced due to the static pressure slide device and the rigidity is improved, and the first table is reciprocated via the second table connected in a floating manner. Since it is driven, no force other than the feeding force due to bending or eccentricity of the feed screw, mounting error with respect to the reference guide, etc. is applied to the first table, and therefore feeding accuracy can be improved. However, in conventional static pressure slide devices of this type, for example,
As shown in Japanese Patent No. 58-177244, a guide rail for guiding and supporting a second table was provided on the bed in addition to a reference guide for guiding and supporting the first table.

[Problem that the invention seeks to solve]

In this prior art, the guide rail for the second table is provided separately from the reference guide, which complicates the structure and increases manufacturing costs.The relative error between the guide rail and the reference guide also reduces the feed accuracy. There was a problem that there was a risk of deterioration. In order to solve this problem, it is conceivable to guide and support both the first and second tables by a common reference guide, but in order to prevent a decrease in the rigidity of the first table, the guide between the reference guide and the first table is If the support part is made longer, the guide support part between it and the second table becomes shorter, causing tilting movement of the second table due to a force other than the feed component force, making it impossible to obtain sufficient feed accuracy. If the guide support between the second table and the reference guide is made longer, the guide support between the second table and the first table becomes shorter, resulting in a problem that the rigidity of the first table decreases. The present invention solves these problems by improving the arrangement of the guide supports of the first and second tables.

[Means for solving problems]

For this purpose, the static pressure slide table according to the present invention has a reference guide 11 integrally provided with the bed 10, as shown in FIGS. 1 to 5.
1 guides and supports the first table 20 so as to be able to reciprocate in the longitudinal direction via a first static pressure slide device, and is guided and supported by the bed 10 so as to be able to reciprocate in the longitudinal direction and float on the first table 20. The first table 20 via the joined second table 30
In the static pressure slide table which is driven reciprocally by a feed screw 41, the first table 20 is provided with a notch 23 having a pair of static pressure surfaces 24, 24 perpendicular to the longitudinal direction, so that the longitudinal direction inside the first table 20 is adjusted. Both end portions 20a, 20a and center portion 20b
The reference guide 11 is exposed at the portions other than the first table 20, and the first static pressure slide devices 25, 25a are attached to both longitudinal ends 20a, 20a of the first table 20.
and the center part 20b, and the second table 30 is positioned in the notch 23, and the first table 20
Both longitudinal ends 20a, 20a and central portion 20b
The second static pressure slide device 3
2, the second table 30 is guided and supported by the reference guide 11, and both longitudinal end surfaces 36, 3 of the second table 30 are
6 and the static pressure surfaces 24, 24 are characterized in that hydrostatic thrust devices 35, 35 are formed to transmit only the thrust in the longitudinal direction.

[Effect]

The first table 20 and the second table 30 have first and second static pressure slide devices 25 and 25, respectively.
They are guided and supported by a common reference guide 11 via a and 32. The second table 30 is floatingly coupled to the table 20 via hydrostatic thrust devices 35, 35 located in the notch 23 and provided on both longitudinal end faces 36, 36.
1 to reciprocate and drive the first table 20 in a reciprocating manner.

〔Effect of the invention〕

The static pressure slide table according to the present invention has the following features:
Since both the first table and the second table are guided and supported by a common reference guide, the guiding and supporting structure for both is simple and manufacturing costs can be reduced. Since no relative error occurs, there is no decrease in feed accuracy caused by this. In addition, since the first table is guided and supported by the reference guide by the first static pressure slide devices at both longitudinal ends and the center, the support rigidity is sufficiently large even if the length of the first static pressure slide devices at both ends is small. is obtained, while the second
Since the longitudinal spacing of the hydrostatic slide device is increased, tilting movements due to forces other than the feed force are reduced, resulting in stable and higher feed accuracy.

〔Example〕

Examples will be described below with reference to the accompanying drawings.
As shown in the drawings, the elongated bed 10 is integrally provided with a pair of reference guides 11, 11 that face each other and extend in parallel along the longitudinal direction, and each reference guide 11 is connected to an upper guide surface 12, as shown in each drawing. , a lower guide surface 13 and a side guide surface 14. On both sides of the lower part of the first table 20, which is guided and supported by the reference guides 11 and 11 so as to be able to reciprocate and slide in the longitudinal direction, there is a small gap between the upper, lower and side guide surfaces 12, 13 and 14, respectively. Sliding surfaces 26, 26, 26 are formed to slidably engage. As shown in FIGS. 1 and 2, a cutout 23 is provided at the lower center of the first table 20.
3 has a pair of static pressure surfaces 24, 24 that are perpendicular to the longitudinal direction and arranged symmetrically in the longitudinal direction with respect to the center of the first table 20, and that face each other. Both longitudinal ends 20a, 20 inside this notch 23
The sliding surfaces 26, 26, 26 are interrupted in the parts other than a and the central part 20b, and the reference guide 1
Each guide surface 12, 13, 14 of No. 1, 11 is exposed.

As shown in FIG. 2, first static pressure slide devices 25 and 25a are provided on both longitudinal ends 20a and 20a of the first table 20 and on both sides of the central portion 20b. Each first static pressure slide device 25 mainly has sliding surfaces 26, 2 at each end 20a, as shown in FIG.
6, 26 and static pressure pockets 2 provided respectively
7, 27, 27, and each first static pressure slide device 25a mainly includes sliding surfaces 26, 26, 26 of the central portion 20b and static pressure pockets 27a provided respectively, as shown in FIG. 27a, 27
Consists of a. The pressurized lubricating oil from the lubricating oil supply device 50 is supplied to the flexible hose 51 and the connector 5.
1a to the oil passage 52 provided in the first table 20, and is further supplied to each static pressure pocket 27, 27, 27 and 27a through a throttle 55, respectively.
27a, 27a to statically support the first table 20 so as to be slidable relative to the reference guides 11, 11.

The second table 30 is shown in FIGS. 1, 2, and 4.
As shown in the figure, the reference guides 11 and 1 are located in the notch 23 and are connected to the reference guides 11 and 1 through the second static pressure slide device 32.
1, it is guided and supported so as to be slidable in the longitudinal direction. As shown in each figure except FIG. 3, the second table 30 consists of both longitudinal ends 30a, 30a and a slightly thin connecting part 30b passing under the first table. Sliding engagement with the upper, lower, and side guide surfaces 12, 13, and 14 of each reference guide 11 exposed between the longitudinal ends 20a, 20a and the central portion 20b of the first table 20, with slight gaps between them. Each sliding surface 33,
33, 33 are formed, and these sliding surfaces 33, 33,
33 and static pressure pockets 34 provided respectively,
34, 34 form a second static pressure slide device 32. The pressurized lubricating oil from the lubricating oil supply device 50 is transferred from the oil path 52 to the flexible hose 5.
3 and connectors 53a, 53b to the oil passage 54 in the second table 30, and is further supplied to each static pressure pocket 34,
34, 34 to statically support the second table 30 so as to be slidable relative to the reference guides 11, 11.

As shown in FIGS. 1 and 2, the second table 3
Both end surfaces 36, 36 in the longitudinal direction of 0 face the pair of static pressure surfaces 24, 24 provided in the notch 23 with a slight gap between them, and are free to move relative to each other in the surface direction. ,36
Hydrostatic thrust devices 35, 35 are provided between the center portions of the static pressure surfaces 24, 24, respectively, for transmitting only thrust in the longitudinal direction. Each static pressure thrust device 35 consists of an end surface 36 of the second table 30 and a static pressure pocket 37 provided therein.
7, the pressurized lubricating oil in the oil passage 54 flows through the throttle 57.
Supplied via. Thereby, the hydrostatic thrust devices 35, 35 are provided symmetrically in the longitudinal direction and centrally in the width direction with respect to the center of the first table 20, and the second table 30 is floatingly coupled to the first table 20.

As shown in FIG. 1, a feed screw 41 extending parallel to the reference guide 11 is pivotally supported on the bed 10 by a bearing 43, and this feed screw 41 is connected to the second table 3.
Nut 42 fixed to the lower side of the connection part 30b of 0
It is screwed together. Common base 40 with bed 10
A servo motor 45 for rotationally driving the feed screw 41 via a flexible coupling 46 is provided on the bracket 44 supported by the bracket 44 .

When the servo motor 45 operates, the feed screw 41
is rotationally driven, and the second table 30 supported by static pressure on the reference guide 41 is reciprocated via a nut 42. The first table 20, also supported by static pressure on the reference guide 41, is supported by static pressure thrust devices 35, 35
It is reciprocated by the second table 30 via. Therefore, the hydrostatic thrust devices 35, 35 are floatingly coupled to the first table 20 so as to transmit only the thrust in the longitudinal direction of the second table 30, and do not transmit the force in the direction perpendicular thereto. 2. Since the longitudinal distance between the static pressure slide devices 32 and 32 increases, bending and eccentricity of the feed screw 41 and the reference guide 1
The second table does not tilt due to irregular forces other than the feed direction caused by installation errors with respect to the nut 42 or the nuts 42, and such irregular forces do not act on the first table 20. do not have. In addition, the first table 20 and the second table 3
0 are guided and supported by the common reference guide 11, so there is no relative positional error between the two 20 and 30 during sliding. Therefore, the feed accuracy is greatly improved.

In the above-described embodiment, the static pressure thrust device 35 is provided on the outer end surface side of the second table 30.
That is, a static pressure slide device may be provided on the inner end surface side of the second table 30.

Note that since the second table 30 is precisely restrained from movement in directions other than the feed direction by the second static pressure slide device 32, the bearing 43 that pivotally supports the feed screw 41
is sufficient only on the servo motor 45 side, and it is not necessarily necessary to provide a bearing (not shown) on the opposite side.

[Brief explanation of drawings]

The drawings show an embodiment of the static pressure slide table according to the present invention, in which FIG. 1 is a longitudinal sectional view taken along the line - in FIG. 2, FIG. 2 is a partially cutaway plan view, and FIG. 1 is a cross-sectional view of FIG. 1, FIG. 4 is a cross-sectional view of FIG. 1, and FIG. 5 is a cross-sectional view of FIG. 1. Explanation of symbols, 10...Bed, 11...Reference guide, 20...First table, 20a, 20a...
...both ends in the longitudinal direction, 20b... central part, 23...
Notch, 24, 24...Static pressure surface, 25, 25a
...First static pressure slide device, 30...Second table, 32...Second static pressure slide device, 35...Static pressure thrust device, 36, 36...Both end faces in the longitudinal direction, 41...Feed screw.

Claims (1)

[Claims] 1. A reference guide is integrally provided in the bed, the reference guide guides and supports the first table so as to be slidable back and forth in the longitudinal direction via a first static pressure slide device, and the first table is allowed to slide back and forth in the longitudinal direction by the bed. In a static pressure slide table in which a first table is reciprocally driven by a feed screw via a second table that is guided and supported by and floatingly connected to the first table, A notch with a static pressure surface is provided to expose the reference guide at both ends of the first table in the longitudinal direction and at a portion excluding the central portion, and the first static pressure slide device is installed at both ends of the first table in the longitudinal direction. and a central portion, and the second table is located in the notch, and a second table is provided in the exposed portion between the longitudinal ends and the central portion.
A hydrostatic thrust device is formed to be guided and supported by the reference guide via a hydrostatic slide device and to transmit only the thrust in the longitudinal direction between both longitudinal end surfaces of the second table and the static pressure surface. A static pressure slide table.