JPH0555277B2 - - Google Patents

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a method for determining the hole position when a polishing agent supply hole is previously drilled in the pad when the polishing pad is attached to the surface plate of a surface polishing device. The present invention relates to a jig for drilling and attaching a polishing pad, which can be suitably used as a jig for polishing and as a jig for attaching the pad to a surface plate.

[Prior Art] As shown in FIG. 6, a conventionally known surface polishing device is equipped with upper and lower surface plates 1 and 2, a sun gear 3, and an internal gear 4, and both gears 3 and 4 form a planetary gear. There is one in which a workpiece 6 held by a carrier 5 which is driven in the same direction is polished by upper and lower surface plates 1 and 2.

In the surface polishing apparatus having such a configuration, a pad is attached to one of the upper and lower surface plates 1 and 2 or to the polishing surface, and the workpiece is polished by this pad. Drilling the abrasive supply hole was very troublesome. That is, in the past, a non-perforated pad was attached to a surface plate, and supply holes were drilled from the pad side at positions corresponding to the abrasive supply holes provided on the surface plate. However, it was very difficult to position the supply hole, and it was also difficult to drill it. In particular, when attaching pads to the upper surface plate, it is necessary to attach them and drill supply holes while looking up from below, which makes the posture very unstable and makes it difficult to perform accurate work. Not only that, but because the work is under a heavy surface plate,
There were also big problems in terms of safety.

If a supply hole is provided in advance on the pad and then the pad is attached to a surface plate, the installation work becomes very easy. Not only must the supply holes be drilled to correspond accurately to the abrasive supply holes, but the pads must be attached to the surface plate with the supply holes accurately aligned, so their positioning is difficult. is troublesome and requires a lot of work.

[Problems to be Solved by the Invention] An object of the present invention is to determine the accurate hole position for drilling the abrasive supply hole in the pad when the pad in which the abrasive supply hole is previously drilled is mounted on the surface plate. To provide a drilling/attachment jig which can perform the setting and attach a drilled pad to a surface plate with supply holes accurately corresponding to each other.

[Means for Solving the Problems] In order to solve the above problems, the drilling and mounting welding jig of the present invention has a disc-shaped substrate with a large number of holes corresponding to the abrasive supply holes provided in the surface plate. The present invention is characterized in that it is provided with a through hole for hole position setting and a plurality of positioning pins that can be inserted into the supply hole.

[Function] When drilling an abrasive supply hole in the pad, place a jig on the pad, mark the hole position along the through hole for hole position setting, and punch the hole with a punch or the like. Drill the supply hole at the marked position using a drilling tool.

Next, place the pad on the jig with the positioning pin provided on the jig inserted into the supply hole, and insert the jig into the abrasive supply hole of the surface plate. With the pin inserted, press it against the polishing surface of the surface plate, and then stick the pad to the surface plate. As a result, the pad is adhered to the surface plate with the supply holes accurately corresponding to each other.

[Example] Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

Drilling and mounting jig 10 shown in Fig. 1 and Fig. 2
A circular substrate 11 made of a metal plate, a synthetic resin plate, or the like is provided with a large number of through holes 12 for hole position setting, which correspond to the abrasive supply holes provided in the surface plate.
12, . . . are bored at predetermined intervals in the circumferential direction, and a plurality of positioning pins 13, 13, . 13, 13, ... are arranged in the circumferential direction at an angle φ that is an integral multiple of the angle θ that two adjacent through holes 12, 12 make with respect to the center of the substrate 11 at positions that do not overlap with the through holes 12. has been done.

The pin 13 can be fixed to the substrate 11 by suitable means such as screwing or welding, and
The number may be a plurality of pieces, but approximately 2 to 3 pieces is appropriate.

Next, a method of using the jig 10 having the above configuration will be explained.

As shown in FIG. 3, when the polishing pad 14 to be attached to the surface plate of the surface polishing device is prepared,
The jig 10 is superimposed on the pad 14, and hole positions are marked according to the through holes 12. A double-sided adhesive tape 15 for adhering to a surface plate is attached to one side of the pad 14, and a protective sheet is attached to the adhesive surface.

A supply hole 16 is punched at a predetermined position in the pad 14 which has been scribed in this way using a punch or other hole-drilling tool.

Next, as shown in FIG. 4, the drilled pad 14 is attached to the jig 10 with its adhesive surface removed so that the positioning pin 13 provided on the jig 10 is inserted into the supply hole 16. After the protective sheet on the adhesive tape is peeled off, the jig 10 is placed on the abrasive supply hole 18 of the surface plate 1, as shown in FIG.
The pin 13 is inserted and pressed against the polishing surface of the surface plate 1, and the pad 14 is attached. At this time, the pins 13, 13, . The pin 13 is connected to the supply hole 18 of the surface plate 1.
By being fitted into the pad 14,
In this case, the supply holes 16 and 18 are automatically positioned with respect to the surface plate 1 so that they correspond accurately to each other.

[Effects of the Invention] As described above, according to the drilling and pasting jig of the present invention, it is possible to accurately position and drill supply holes corresponding to the abrasive supply holes of the surface plate in the polishing pad. In addition, the perforated pad can be attached to the surface plate with the supply holes accurately corresponding to each other.

[Brief explanation of the drawing]

Figure 1 is a front view showing one embodiment of the present invention, Figure 2 is a front view showing one embodiment of the present invention;
The figure is a sectional view thereof, FIGS. 3 to 5 are explanatory views of how to use the jig of the present invention, and FIG. 6 is a partial sectional view showing the configuration of a surface polishing apparatus. 10... Jig, 11... Board, 12... Through hole, 13... Pin.

Claims (1)

[Claims] 1 A disk-shaped substrate has a large number of through holes for hole position setting corresponding to the abrasive supply holes provided on the surface plate,
A jig for drilling and mounting a polishing pad, characterized in that it is provided with a plurality of positioning pins that can be inserted into the supply hole.