JPH055632B2 - - Google Patents

Info

Publication number
JPH055632B2
JPH055632B2 JP61288023A JP28802386A JPH055632B2 JP H055632 B2 JPH055632 B2 JP H055632B2 JP 61288023 A JP61288023 A JP 61288023A JP 28802386 A JP28802386 A JP 28802386A JP H055632 B2 JPH055632 B2 JP H055632B2
Authority
JP
Japan
Prior art keywords
surface plate
workpiece
wrapping
support
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61288023A
Other languages
Japanese (ja)
Other versions
JPS63144956A (en
Inventor
Isao Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP61288023A priority Critical patent/JPS63144956A/en
Publication of JPS63144956A publication Critical patent/JPS63144956A/en
Publication of JPH055632B2 publication Critical patent/JPH055632B2/ja
Granted legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Description

【発明の詳細な説明】 (発明の属する技術分野) 本発明は、たて軸の平面ラツピング装置におい
て、被加工物が複雑な運動をするためにラツピン
グ加工後の被加工物の所在位置が特定できないの
で、従来は人手作業でなしてきた被加工物の着脱
作業を自動化した装置に関するものである。
Detailed Description of the Invention (Technical field to which the invention pertains) The present invention provides a flat wrapping device with a vertical axis, in which the location of the workpiece after wrapping is specified because the workpiece moves in a complex manner. This relates to a device that automates the work of attaching and detaching workpieces, which has traditionally been done manually.

(従来の技術) この種のラツピング装置は、第2図に上定盤を
省略して示したように、矢印の方向に駆動される
かまたは固定される下定盤4上で、被加工物16
を外周部が歯付けのキヤリヤ24中に従来は人手
で着脱し、駆動される太陽ギヤ20と固定または
駆動されるリングギヤ22との間をこれらとかみ
合うキヤリヤ24が自転、公転をする遊星運動を
行うようになつている。
(Prior Art) As shown in FIG. 2 with the upper surface plate omitted, this type of wrapping device is designed to hold the workpiece 16 on a lower surface plate 4 that is driven or fixed in the direction of the arrow.
Conventionally, the carrier 24, which has a toothed outer periphery, is attached and detached manually, and the carrier 24 that meshes with the sun gear 20, which is driven, and the ring gear 22, which is fixed or driven, rotates and revolves. I'm starting to do it.

これらの上部に上定盤を重ね、上下の定盤の間
に被加工物16が挾まれ、砥粒と加工液の混合物
を上下の定盤と被加工物の間に供給し、加工圧を
加えながら定盤と被加工物14との相対運動を利
用してラツピング加工を行い、加工が終れば上定
盤を移動して被加工物の着脱を人手で行ない、次
のサイクルの加工をするようにしている。
An upper surface plate is stacked on top of these, the workpiece 16 is sandwiched between the upper and lower surface plates, and a mixture of abrasive grains and machining fluid is supplied between the upper and lower surface plates and the workpiece, and the machining pressure is applied. Wrapping is performed using the relative movement between the surface plate and the workpiece 14 while adding the upper surface plate, and when the processing is completed, the upper surface plate is moved and the workpiece is manually attached and detached, and the next cycle of processing is performed. That's what I do.

(発明が解決しようとする問題点) この被加工物14の着脱は、キヤリヤ24が複
雑な運動をするため、被加工物14の所在位置が
不特定となるので、従来は被加工物14の自動着
脱が困難で、人手作業で被加工物14の着脱を行
わざるを得ないため、着脱時間が長くなつてラツ
ピング装置の稼働率が低下し、しかも人手作業を
要するという欠点があつた。
(Problems to be Solved by the Invention) When attaching and detaching the workpiece 14, the carrier 24 makes complicated movements, so the position of the workpiece 14 is unspecified. Since automatic attachment and detachment are difficult and the workpiece 14 must be attached and detached manually, the attaching and detaching time becomes long and the operating rate of the wrapping device decreases, and moreover, manual labor is required.

本発明は、ラツピング加工後の被加工物の所在
位置を視覚カメラで認識し、ロボツトなどの被加
工物着脱装置によつて、従来人手作業によらざる
を得なかつた被加工物の着脱作業を、人手を要し
ないように自動化した平面ラツピング装置を提供
することを目的とする。
The present invention recognizes the location of the workpiece after wrapping using a visual camera, and uses a workpiece attachment/detachment device such as a robot to perform the attachment/detachment work of the workpiece, which conventionally had to be done manually. An object of the present invention is to provide an automated planar wrapping device that does not require manual labor.

(問題点を解決するための手段) 本発明は、たて軸の平面ラツピング装置におい
て、上定盤支持腕に角度間隔をおいて少くとも1
個以上の支持腕を一体に設け、該支持腕に視覚カ
メラなどの被加工物の認識装置を搭載し、平面ラ
ツピング装置の支持柱に回転自在に取付けられた
支持装置となし、該支持装置を駆動機構によつて
回転駆動して、平面ラツピング装置の下定盤に、
上定盤と被加工物の認識装置とを交互に対向させ
るようにしたもので、平面ラツピング装置に隣接
して設けた被加工物の認識装置を搭載したロボツ
トを使用した装置などによる被加工物の着脱装置
を設けたものである。
(Means for Solving the Problems) The present invention provides a planar wrapping device with a vertical axis, in which at least one
The supporting arm is equipped with a workpiece recognition device such as a visual camera, and is rotatably attached to the support column of the flat wrapping device. It is rotated by the drive mechanism and placed on the lower surface plate of the flat wrapping device.
The upper surface plate and the workpiece recognition device are arranged to face each other alternately, and the workpiece can be processed by a device using a robot equipped with a workpiece recognition device installed adjacent to the flat wrapping device. It is equipped with a detachable device.

(作用) 支持装置は駆動機構によつて回転駆動され支持
装置の回転によつて上定盤と下定盤との対向を解
除し、支持装置に搭載した認識装置を下定盤と対
向させ、認識装置と着脱装置との間の相互の信号
伝達によつて、ラツピング加工後の所在位置が特
定できない被加工物を認識して被加工物の自動着
脱を行う。
(Operation) The support device is rotationally driven by a drive mechanism, and the rotation of the support device releases the opposition between the upper surface plate and the lower surface plate, causes the recognition device mounted on the support device to face the lower surface plate, and the recognition device By mutual signal transmission between the machine and the attachment/detachment device, a workpiece whose location cannot be determined after wrapping is recognized, and the workpiece is automatically attached/detachd.

自動着脱後は支持装置を回転させて上定盤と下
定盤とを対向させ認識装置と下定盤との対向を解
除しラツピング加工を行う。
After automatic attachment/detachment, the support device is rotated so that the upper surface plate and the lower surface plate face each other, and the recognition device and the lower surface plate are no longer opposed to each other to perform the wrapping process.

本発明は前記の説明のように、被加工物を自動
的に着脱して人手作業を不要とした平面ラツピン
グ装置である。
As described above, the present invention is a flat wrapping device that automatically attaches and detaches workpieces and eliminates the need for manual labor.

(発明の実施例) 第1図は本発明の実施例を示す斜視図であり、
被加工物の自動着脱をする視覚カメラ付きのロボ
ツトと、回転駆動される支持装置上に上定盤と視
覚カメラとを備えた平面ラツピング装置を示して
いる。
(Embodiment of the invention) FIG. 1 is a perspective view showing an embodiment of the invention,
It shows a robot equipped with a visual camera that automatically attaches and detaches workpieces, and a planar wrapping device that is equipped with an upper surface plate and a visual camera on a rotationally driven support device.

たて軸の平面ラツピング装置2は、下定盤4を
有し一隅に支持柱8を直立して設けている。
The flat wrapping device 2 with a vertical axis has a lower surface plate 4 and a support column 8 provided upright at one corner.

該支持柱8の頂部近傍にほぼ90度の角度間隔を
もつた2本の支持腕上定盤支持腕10と支持腕1
2とを有する支持装置18が回動自在に取付けら
れ、支持柱8の先端部に設けられた駆動機構20
(回転シリンダ20)により回転駆動される。
Near the top of the support column 8, there are two support arms with an angular interval of approximately 90 degrees, a surface plate support arm 10 and a support arm 1.
A drive mechanism 20 provided at the tip of the support column 8 is rotatably attached to the support device 18 having a drive mechanism 20.
(Rotating cylinder 20).

支持装置18の一方の上定盤支持腕10には前
記の下定盤4と対をなしてラツピング加工を行う
上定盤6が、流体圧シリンダ30などの上下動機
構によつて上下に駆動され、さらに回転または静
止できるように支持されており、他方の支持腕1
2には、視覚カメラなどの被加工物14の認識装
置16(以下視覚カメラ16と記す)が搭載され
ている。
The upper surface plate support arm 10 of the support device 18 has an upper surface plate 6 which forms a pair with the lower surface plate 4 and performs the wrapping process, and is driven up and down by a vertical movement mechanism such as a fluid pressure cylinder 30. , further supported so as to be rotatable or stationary, and the other supporting arm 1
2 is equipped with a recognition device 16 (hereinafter referred to as visual camera 16) for the workpiece 14 such as a visual camera.

前記の支持腕12は必要によりさらに多数本設
けてもよい。
A larger number of the support arms 12 may be provided if necessary.

下定盤4上には、第2図に示すように被加工物
14を複数個装着した外周部が歯付きの複数個の
キヤリヤ24が設けられ、駆動される太陽ギヤ3
2と固定または駆動されるリングギヤ34とで遊
星歯車機構を構成している。
As shown in FIG. 2, on the lower surface plate 4, a plurality of carriers 24 with teeth on the outer periphery are provided, on which a plurality of workpieces 14 are mounted, and the sun gear 3 is driven.
2 and a fixed or driven ring gear 34 constitute a planetary gear mechanism.

平面ラツピング装置2に隣接して、視覚カメラ
などの被加工物14の認識装置26と被加工物1
4のつかみ装置28とを備え、図示を省略した被
加工物14の荷受台とキヤリヤ24との間で、被
加工物14の着脱を行わせるロボツトなどの被加
工物の着脱装置22(以下ロボツト22と記す)
が設けられている。
Adjacent to the planar wrapping device 2, a recognition device 26 for the workpiece 14, such as a visual camera, and a workpiece 1 are provided.
A workpiece attachment/detachment device 22 (hereinafter referred to as robot) for attaching and detaching the workpiece 14 between the carrier 24 and a loading platform for the workpiece 14 (not shown) is provided with a gripping device 28 of 4 and 22)
is provided.

平面ラツピング装置2の視覚カメラ16とロボ
ツト22とは、図示を省略した通信回線で接続さ
れて制御信号などの伝送を行い被加工物14の着
脱作業を行う。第3図は被加工物14を例示した
斜視図である。
The visual camera 16 of the planar wrapping device 2 and the robot 22 are connected by a communication line (not shown) to transmit control signals and the like, and to attach and detach the workpiece 14. FIG. 3 is a perspective view illustrating the workpiece 14. As shown in FIG.

前記の支持装置18を駆動する駆動機構20
(以下回転シリンダ20と記す)はその構造を第
4図に示し、aはbのA−A部断面を示す平面
図、bは断面図である。
A drive mechanism 20 that drives the support device 18
The structure of the rotary cylinder 20 (hereinafter referred to as the rotary cylinder 20) is shown in FIG. 4, in which a is a plan view taken along the line A-A in b, and b is a sectional view.

回転シリンダ20は、シリンダ36中に回転す
るピストン38と、ねじ40でシリンダ36に固
定されたスペーサ42が設けられ、シリンダ36
とスペーサ42を貫通して流体配管路44,46
が設けられており、ねじ48で取付け板50がシ
リンダ36に取付けられている構成となつてい
る。
The rotating cylinder 20 is provided with a piston 38 rotating in the cylinder 36 and a spacer 42 fixed to the cylinder 36 with a screw 40.
and the fluid piping passages 44, 46 passing through the spacer 42.
is provided, and a mounting plate 50 is attached to the cylinder 36 with screws 48.

ピストン38の先端部52は角柱状になつてお
り、支持柱8の頂部の角穴にはまつており、支持
柱8に回転自在に取り付けられている支持装置1
8には取付板50がねじ54で固定されている。
The tip 52 of the piston 38 has a prismatic shape, and is fitted into a square hole at the top of the support column 8. The support device 1 is rotatably attached to the support column 8.
A mounting plate 50 is fixed to 8 with screws 54.

流体配管路44,46に交互に加圧流体が導入
されると、ピストン38は支持柱8によつて回動
が止められているので、シリンダ36が回転させ
られ、これに固定されている支持装置18を回転
駆動する。
When pressurized fluid is alternately introduced into the fluid piping paths 44 and 46, since the piston 38 is prevented from rotating by the support column 8, the cylinder 36 is rotated and the support fixed thereto is rotated. The device 18 is driven in rotation.

前記の構成による本発明の平面ラツピング装置
2でラツピング加工を行う作業について以下第1
図により説明する。
The following is a first explanation of the wrapping process performed using the flat wrapping device 2 of the present invention having the above configuration.
This will be explained using figures.

支持装置18を回転させて視覚カメラ16を下
定盤4上に対向させ、空になつているキヤリヤ2
4の被加工物14の装着部の位置を認識し、接続
されている通信回線で制御信号などの伝送をし
て、ロボツト22を運転する。
The support device 18 is rotated so that the visual camera 16 faces the lower surface plate 4, and the empty carrier 2 is
The robot 22 is operated by recognizing the position of the mounting portion of the workpiece 14 of No. 4 and transmitting control signals and the like through the connected communication line.

ロボツト22は、図示を省略した加工前と加工
後の被加工物14を収納するジグを支持する荷受
台とキヤリヤ24との間で、被加工物14を移載
して着脱を行わせる本発明の着脱装置をなすもの
で、視覚カメラ16で被加工物14の着脱位置を
認識し、この認識によつて太陽ギヤ32を駆動し
てキヤリヤ24をロボツト22の作業位置に移動
させ、ロボツト22に備えられた視覚カメラ26
でさらに精密に被加工物14の着脱位置を認識し
てロボツト22を運転制御し、つかみ機構28に
よつて荷受台上のジグの中からつかんできた加工
前の被加工物14aを順次に全部のキヤリヤ24
に装着する。
The robot 22 is a robot 22 of the present invention that transfers and detaches the workpiece 14 between a carrier 24 and a carrier 24 that supports a jig that stores the workpiece 14 before and after processing (not shown). The visual camera 16 recognizes the attachment/detachment position of the workpiece 14, and this recognition drives the sun gear 32 to move the carrier 24 to the working position of the robot 22. equipped visual camera 26
The robot 22 is operated by recognizing the loading and unloading positions of the workpieces 14 more precisely, and the gripping mechanism 28 sequentially grasps all the unprocessed workpieces 14a from the jig on the loading platform. carrier 24
Attach to.

装着が終れば、支持装置18を回転させて、上
昇位置にある上定盤6を下定盤4上に対向させ、
上定盤6を下降させる下定盤4上に重ね、上下の
定盤の間に被加工物14が挾まれた状態とする。
When the installation is completed, the support device 18 is rotated so that the upper surface plate 6 in the raised position faces the lower surface plate 4,
The upper surface plate 6 is stacked on the lower surface plate 4 which is being lowered, and the workpiece 14 is held between the upper and lower surface plates.

砥粒と加工液の混合物を上下の定盤4,6と被
加工物14の間に供給し、加工圧を加えながら上
下の定盤4,6とキヤリヤ24の遊星歯車機構に
よる自転と公転による被加工物14との相対運動
を利用してラツピング加工を行う。
A mixture of abrasive grains and machining fluid is supplied between the upper and lower surface plates 4 and 6 and the workpiece 14, and while machining pressure is applied, the upper and lower surface plates 4 and 6 and the carrier 24 are rotated and revolved by a planetary gear mechanism. Wrapping is performed using relative movement with the workpiece 14.

ラツピング加工が終れば、流体圧シリンダ30
によつて上定盤6を上昇させ、支持装置18を回
転させて再び視覚カメラ16を下定盤4に対向さ
せて加工済の被加工物14bを認識し、この認識
によつて太陽ギヤ32を駆動してキヤリヤ24を
ロボツト22の作業位置に移動させ、ロボツト2
2に備えられた視覚カメラ26で加工済の被加工
物14bを認識してロボツト22を運転制御して
キヤリヤ24中の全部の加工済の被加工物14b
をアンロードして荷受台上のジグに搬送し、次の
サイクルの加工前の被加工物14aを前記の説明
のように順次に空になつた全部のキヤリヤ24に
装着して、次のサイクルのラツピング加工を行
う。
After the wrapping process is completed, the fluid pressure cylinder 30
, the upper surface plate 6 is raised, the support device 18 is rotated, and the visual camera 16 is again opposed to the lower surface plate 4 to recognize the processed workpiece 14b, and by this recognition, the sun gear 32 is The carrier 24 is moved to the working position of the robot 22, and the robot 2
A visual camera 26 provided in the carrier 24 recognizes the processed workpiece 14b and controls the operation of the robot 22 to remove all processed workpieces 14b in the carrier 24.
The workpieces 14a to be processed for the next cycle are sequentially loaded onto all empty carriers 24 as explained above, and then the next cycle is started. Perform wrapping process.

本発明は、前記の説明のように、上定盤6と視
覚カメラ16を設けた支持装置18を回転させて
下定盤4に交互に対向させ、ラツピング加工を終
れば流体圧シリンダ30により上定盤6を上昇さ
せてから支持装置18を回転させると、視覚カメ
ラ16は上定盤6で視野を妨げられることなく被
加工物14が認識でき、ロボツト22も被加工物
14の着脱動作が妨げられることがなく自動的に
被加工物14の着脱ができる。
As described above, the present invention rotates the support device 18 provided with the upper surface plate 6 and the visual camera 16 so that they alternately face the lower surface plate 4, and when the wrapping process is completed, the upper surface plate 6 and the support device 18 provided with the visual camera 16 are rotated to face the lower surface plate 4. When the support device 18 is rotated after raising the plate 6, the visual camera 16 can recognize the workpiece 14 without its field of view being obstructed by the upper surface plate 6, and the robot 22 is also prevented from attaching or detaching the workpiece 14. The workpiece 14 can be automatically attached and detached without being affected.

さらにラツピング加工時には視覚カメラ16は
側方に移動させられるのでラツピング加工を妨げ
ることがない。
Furthermore, since the visual camera 16 is moved laterally during the wrapping process, it does not interfere with the wrapping process.

(発明の効果) 本発明によれば、たて軸の平面ラツピング装置
において、上定盤支持腕に角度間隔をおいて少く
とも1個以上の支持腕を一体に設け、該支持腕に
視覚カメラを搭載し、平面ラツピング装置の支持
柱に回転自在に取付けられた支持装置となし、該
支持装置を駆動機構によつて回転駆動するように
したので、平面ラツピング装置の下定盤に対し、
上定盤と視覚カメラとを交互に対向させることが
でき、上下の定盤の対の組合わせで行うラツピン
グ加工作業と、平面ラツピング装置に隣接して設
けたロボツトを使用した装置などと支持装置に設
けた視覚カメラとによる被加工物の着脱作業と
が、互に干渉することなく行える効果が得られ
る。
(Effects of the Invention) According to the present invention, in a plane wrapping device with a vertical axis, at least one support arm is integrally provided at an angular interval on the upper surface plate support arm, and a visual camera is mounted on the support arm. The support device is mounted rotatably on the support column of the planar wrapping device, and the support device is rotationally driven by a drive mechanism, so that the lower surface plate of the planar wrapping device can be
The upper surface plate and the visual camera can be made to face each other alternately, and the wrapping process can be performed by combining the upper and lower surface plates, and the device using a robot and support device installed adjacent to the flat wrapping device. This provides the effect that workpieces can be attached and detached using the visual camera installed in the machine without interfering with each other.

またキヤリヤが複雑な運動をするため、被加工
物の所在位置が不特定となるので、従来人手作業
で行わざるを得なかつた被加工物の着脱作業を自
動化して人手作業を省き、しかも着脱時間を短縮
して平面ラツピング装置の稼働効率を高める効果
が得られる。
In addition, since the carrier makes complicated movements, the location of the workpiece is unspecified, so we have automated the work of attaching and detaching the workpiece, which previously had to be done manually, to eliminate manual labor. The effect of shortening the time and increasing the operating efficiency of the flat wrapping device can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例を示す斜視図、第2図
は下定盤の上で被加工物を装着するキヤリヤの動
作を示す斜視図、第3図は被加工物を例示した斜
視図、第4図は支持装置を駆動する駆動機構(回
転シリンダ)の構造を示す図でaはbのA−A部
断面を示す平面図、bは断面図である。 2……平面ラツピング装置、4……下定盤、6
……上定盤、8……支持柱、10……上定盤支持
腕、12……支持腕、14……被加工物、16,
26……被加工物の認識装置(視覚カメラ)、1
8……支持装置、20……駆動機構(回転シリン
ダ)、22……被加工物の着脱装置(ロボツト)、
24……キヤリヤ、32……太陽ギヤ、36……
シリンダ、38……ピストン、42……スペー
サ。
FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a perspective view showing the operation of a carrier for mounting a workpiece on a lower surface plate, and FIG. 3 is a perspective view illustrating the workpiece. FIG. 4 is a diagram showing the structure of a drive mechanism (rotary cylinder) for driving the support device, in which a is a plan view taken along the line A-A in b, and b is a sectional view. 2...Flat wrapping device, 4...Lower surface plate, 6
... Upper surface plate, 8 ... Support column, 10 ... Upper surface plate support arm, 12 ... Support arm, 14 ... Workpiece, 16,
26... Workpiece recognition device (visual camera), 1
8... Support device, 20... Drive mechanism (rotating cylinder), 22... Workpiece attachment/detachment device (robot),
24...Carrier, 32...Sun gear, 36...
Cylinder, 38...piston, 42...spacer.

Claims (1)

【特許請求の範囲】 1 たて軸の平面ラツピング装置において、装置
の下定盤と対に組合わされてラツピング加工を行
う上定盤を支持するラツピング装置の支持柱に設
けられた上定盤支持腕に角度間隔をおいて少くと
も1個以上の支持腕を一体に設け該支持腕に被加
工物の認識装置を搭載して前記の支持柱に回転自
在に取付けられた支持装置と、該支持装置を回転
駆動する駆動機構と、平面ラツピング装置に隣接
して設けた被加工物の着脱装置とからなり、前記
の支持装置の回転によつて上定盤と下定盤との対
向を解除して認識装置と下定盤とを対向させ、認
識装置と着脱装置との間の相互の信号伝達によつ
て、下定盤上のキヤリヤに被加工物の自動着脱を
行い、さらに前記の支持装置を回転させて上定盤
と下定盤とを対向させた後認識装置と下定盤との
対向を解除して平面ラツピング加工を行なうよう
にしたことを特徴とする平面ラツピング装置。 2 特許請求の範囲第1項記載の平面ラツピング
装置において、被加工物の着脱装置が被加工物の
認識装置を搭載したロボツトを使用した装置であ
ることを特徴とする平面ラツピング装置。 3 特許請求の範囲第1項記載の平面ラツピング
装置において、支持腕と被加工物の着脱装置とに
搭載した被加工物の認識装置が視覚カメラである
ことを特徴とする平面ラツピング装置。
[Claims] 1. In a vertical axis planar wrapping device, an upper surface plate support arm provided on a support column of the wrapping device that supports an upper surface plate that is combined with a lower surface plate of the device to perform wrapping processing. a support device integrally provided with at least one support arm at angular intervals, a workpiece recognition device mounted on the support arm, and rotatably attached to the support column; and the support device. and a workpiece attachment/detachment device installed adjacent to the flat wrapping device, which releases the opposition between the upper surface plate and the lower surface plate and recognizes the workpiece by rotating the support device. The device and the lower surface plate are opposed to each other, and the workpiece is automatically attached to and removed from the carrier on the lower surface plate by mutual signal transmission between the recognition device and the attachment/detachment device, and the support device is further rotated. A flat wrapping device characterized in that after the upper surface plate and the lower surface plate are opposed to each other, the recognition device and the lower surface plate are released from facing each other to perform the flat wrapping process. 2. A flat wrapping apparatus according to claim 1, wherein the workpiece attachment/detachment device is a device using a robot equipped with a workpiece recognition device. 3. A plane wrapping apparatus according to claim 1, wherein the workpiece recognition device mounted on the support arm and the workpiece attaching/detaching device is a visual camera.
JP61288023A 1986-12-03 1986-12-03 Plane lapping device Granted JPS63144956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61288023A JPS63144956A (en) 1986-12-03 1986-12-03 Plane lapping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61288023A JPS63144956A (en) 1986-12-03 1986-12-03 Plane lapping device

Publications (2)

Publication Number Publication Date
JPS63144956A JPS63144956A (en) 1988-06-17
JPH055632B2 true JPH055632B2 (en) 1993-01-22

Family

ID=17724811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61288023A Granted JPS63144956A (en) 1986-12-03 1986-12-03 Plane lapping device

Country Status (1)

Country Link
JP (1) JPS63144956A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5525792B2 (en) * 2009-10-15 2014-06-18 株式会社 ハリーズ Grinding equipment
TWI476854B (en) * 2012-03-08 2015-03-11 Lg Cns Co Ltd Apparatus and method for supplying lightemitting diode (led) wafer
US9045827B2 (en) 2012-03-09 2015-06-02 Lg Cns Co., Ltd. Apparatus and method for supplying light-emitting diode (LED) wafer
JP6150283B2 (en) * 2013-07-03 2017-06-21 浜井産業株式会社 Work fitting device and fitting method
CN104924197A (en) * 2015-05-28 2015-09-23 海宁奇晟轴承有限公司 Automatic double-disc grinding machine
CN115870868A (en) * 2022-12-27 2023-03-31 西安奕斯伟材料科技有限公司 Loading and unloading device, method and silicon wafer double-sided polishing equipment
JP7769391B2 (en) * 2023-04-13 2025-11-13 株式会社太陽 Double-sided polishing machine

Also Published As

Publication number Publication date
JPS63144956A (en) 1988-06-17

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