JPH056041B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] This invention relates to a method for assembling a linear sliding type hydrostatic bearing, and more specifically, to assembling a slide table that is externally fitted onto a slide guide through a bearing gap with high precision. It is about the method.

[Conventional technology]

Linear sliding type hydrostatic air bearings are used in semiconductor manufacturing equipment, ultra-precision machine tools, etc. that require a highly accurate sliding function.

FIG. 2 shows the cross-sectional structure of a commonly used linear sliding type hydrostatic air bearing.

The above-mentioned static pressure air bearing is constituted by a combination of a slide guide 1 having a rectangular cross section and a rectangular cylinder-shaped slide table 2 which is fitted onto the guide 1. A bearing gap 3 is formed between each bearing gap 3, and pressurized air (static pressure) is fed into each bearing gap through an orifice (not shown) provided in the slide table 2, so that the bearing has a bearing load capacity. There is.

The slide table 2 uses four pieces: an upper plate 4, a lower plate 5, and a pair of side plates 6, 6. The ends of the upper plate 4 and lower plate 5 are overlapped on the end surfaces of the side plates 6, 6, and the overlapping portion is By connecting with bolts 7, it is assembled into a rectangular tube shape.

[Problem that the invention seeks to solve]

By the way, in the above-mentioned linear sliding type hydrostatic air bearing, the dimensions and parallelism accuracy of each bearing gap are extremely important for performance. When processing the guide 1 and the slide table 2, very high manufacturing accuracy is required in terms of dimensional accuracy, perpendicularity, etc., and there is a problem that manufacturing is difficult.

Also, when connecting the side plates 6, 6, upper plate 4, and lower plate 5 of the slide table 2 with the bolts 7, depending on how the bolts are tightened, the force may not be applied uniformly, and the There is a problem in that machining accuracy cannot be fully utilized and assembly requires skilled technology.

This invention was made in order to solve the above-mentioned problems, and it provides a linear sliding type static bearing that can obtain a bearing with a high-precision sliding function without requiring high manufacturing precision for the component parts. The object is to provide a method for assembling a pneumatic bearing.

[Means for solving problems]

In order to solve the above-mentioned problems, the present invention provides a structure in which a pair of opposing members among the upper plate, lower plate, and both side plates constituting the slide table are arranged in a direction perpendicular to the slide guide axis direction. Using a slide table component whose dimension is slightly shorter than the same dimension of the corresponding surface of the guide and a spacer having a thickness twice the bearing gap, the slide table component is formed on all four sides around the slide guide. The two adjacent surfaces of the slide guide are fitted with a spacer interposed between them, and the mating ends of each component are injected into the gaps created between the opposing surfaces, and the mating ends are sealed. After mechanically bonding, the filler is cured.

[Effect]

The slide table constituent members are placed so as to surround the four sides of the slide guide, and spacers are interposed on two adjacent sides of the slide guide.

While maintaining the arrangement of the slide table components, a filler is injected into the gaps created at the mating ends of each component, and after the mating ends are joined with bolts, the filler is hardened and the components are squared. When assembled in a cylindrical shape and the spacer is removed, a bearing gap with high parallelism and dimensional accuracy can be formed between the opposing surfaces of the outer surface of the slide guide and the inner surface of the slide table.

〔Example〕

Embodiments of the present invention will be described below with reference to the accompanying drawings.

As shown in Fig. 1, the linear sliding type static pressure air bearing is composed of a slide guide 1 with a rectangular cross section and a rectangular cylindrical slide table 2 that fits around the guide 1.Assembling the slide table 2 A spacer 11 and a hardening filler 12 are used.

The slide table 2 is formed by an upper plate 13, a lower plate 14, and a pair of side plates 15, 15, and the height dimensions of both side plates 15, 15 are equal to or greater than the height of the slide guide 1 on the opposing surface. It is slightly shorter.

The spacer 11 is for securing the bearing gap 3, and its thickness is set to twice the bearing gap 3. That is, the thickness h of the spacer 11 is
It is set equal to the upper and lower bearing gaps 3a+3b and both side bearing gaps 3c+3d shown in FIG.

To assemble the slide table 2, attach the upper plate 13 so as to surround the four sides of the slide guide 1.
A lower plate 14 and both side plates 15, 15 are arranged, spacers 11 are interposed between the upper surface of the slide guide 1 and the upper plate 13, and between one side surface and the side plate 15, and each of the above-mentioned components is connected to the slide guide 1. between the upper plate 13 and the side plate 15 and the lower plate 1
In the gap l created at each mating end between 4 and the side plate 15,
For example, a hardening filler 12 such as epoxy resin (trade name Araldite) or various adhesives is injected. The mating ends are joined together with bolts 16, a rectangular cylindrical slide table 2 is assembled, and the filler 12 is left to harden or by heating.

After this, when the spacer 11 is removed, the spacer 11 is placed between the two inner surfaces of the slide table 2 and the slide guide 1.
A gap equal to the thickness h of 1 is formed, and by distributing this gap vertically and horizontally, a predetermined bearing gap 3 as shown in FIG. 1 is secured in all directions.

Note that since the filler 12 uses a fluid polymeric material as a hardening agent, if the coating formed by injection becomes too thick, the rigidity will be correspondingly weakened. The gap l leading to the end should be, for example, 1 mm or less.
It is preferable to set the height of the side plates 15, 15.

〔effect〕

As described above, according to the present invention, the constituent members of the slide guide are applied with a spacer interposed between the two adjacent faces of the slide guide, and the mating ends of the constituent members are joined.
The slide guide can be assembled along the highly precisely finished slide guide, and the dimensions and parallelism of the bearing gap can be precisely finished.

In addition, one set of opposing slide table constituent members is made shorter than the dimension in the direction orthogonal to the axial direction of the corresponding surface of the slide guide, and after injecting and hardening a filler between the mating ends of the constituent members, the mating Since the ends are mechanically connected, there is no need for high precision in the dimensions and right angles of the slide table constituent members, making processing and assembly easier.

Furthermore, since the filler is injected and solidified between the synthetic ends of the slide table, the mating ends are firmly fixed, reducing the tightening force of bolts, and eliminating deformation due to strong tightening. , the slide table can be easily assembled.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal sectional view showing the assembly method of the present invention;
FIG. 2 is a sectional view of a linear sliding type hydrostatic air bearing. 1... Slide guide, 2... Slide table, 3... Bearing gap, 11... Spacer, 12... Filler, 13... Upper plate, 14... Lower plate, 15... Side plate, 16... bolt.

Claims (1)

[Claims] 1 A slide table formed by combining four structural members into a rectangular tube shape is fitted onto a slide glass with a rectangular cross section, and a bearing gap is formed between each inner circumferential surface of the slide table and the opposing surface of the slide guide. This is a method of assembling a linear sliding type static pressure air bearing in which pressurized air is sent into this gap, and the dimensions of a pair of opposing members of the slide table component in the direction perpendicular to the slide guide axis direction are A slide table component is formed to be slightly shorter than the same dimensions of the corresponding surface of the guide, and a spacer having a thickness twice the bearing gap is used to surround the slide table component on all four sides of the slide guide. The two adjacent faces of the slide guide are fitted with a spacer interposed between them, and the mating ends of each component are injected with filler into the gap created between the opposing faces, and the mating ends are machined. A method for assembling a linear sliding type hydrostatic bearing, characterized in that the filler is hardened after being bonded.