JPH0560983A - Optical parts for light transmission used for illuminating device for macro-observation optical system - Google Patents

Abstract

PURPOSE:To provide the inexpensive optical parts having simple constitution as the optical parts for light transmission which can illuminate a place apart from a light source of the illuminating device for a macro-observation optical system with high illuminance. CONSTITUTION:The optical parts 4 for light transmission which are formed of a light transparent material, such as acryl, and has the structure consisting in coating the inner peripheral surface 43 and outer peripheral surface 44 thereof with reflectors 46 of vapor deposited aluminum films, etc., are disposed near the circular exit end face 33 of an optical fiber 3. The exit end face 42 of the optical parts 4 for light transmission is worked to a lens, such as convex lens, and the optical axis of the light emitted from its exit end face 42 has an angle smaller than 90 deg. with the optical axis for observation. The light emitted from the optical fiber 3 propagates the thick part of the optical parts 4 for light transmission, by which the light is introduced near to a specimen 7 to efficiently irradiate the specimen 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light guiding optical component used in an illumination device for a magnifying observation optical system such as a microscope.

[0002]

2. Description of the Related Art An optical microscope is a typical one of optical systems for magnifying observation, but it is used not only for the purpose of observing biological specimens but also for inspection of manufactured products. Many. In particular, with the recent development of microelectronics, the use of microscopes in the inspection process of electronic parts and the like has been popular. For example, in the process of mounting an IC chip on a printed circuit board, the quality of soldering after soldering of leads is inspected by a microscope. This is because the width of the leads of the IC chip in recent years is narrow, for example, about 1 mm, and therefore it is not possible to judge whether the soldering is good or bad only by looking directly.

As is well known, microscopes include bright-field microscopes that form an image by transmitted light or reflected light from a sample and dark-field microscopes that form an image by scattered light or diffracted light from a sample. In a bright-field microscope, the numerical aperture of the illumination light is usually smaller than the numerical aperture of the objective lens so that most of the illumination light transmitted through the sample or reflected by the sample enters the objective lens. On the other hand, in a dark field microscope,
To prevent the illumination light from directly entering the objective lens,
The numerical aperture of the irradiation light is made larger than the numerical aperture of the objective lens. In any case, a magnifying observation optical system such as a microscope requires an illuminating device that illuminates a sample with high illuminance.

13 and 14 are explanatory views of a conventional illuminating device for a magnifying observation optical system. FIG. 13 shows an illuminating device of a reflection type bright field microscope, and FIG. 14 shows an illuminating device of a reflection type dark field microscope. Shows.

In the illuminating device of the reflection type bright field microscope shown in FIG. 13, the semi-transparent mirror 67 is arranged on the vertical optical axis A of the objective lens 61 in a state of being inclined by 45 ° with respect to the optical axis A. To do. Then, the light from the light source 1 is guided in the horizontal direction and directed to the semi-transparent mirror 67. A part of the light reaching the semi-transparent mirror 67 is reflected by the semi-transparent mirror 67, and the specimen 7 arranged below is reflected.
And then the specimen 7 is irradiated. The light applied to the sample 7 is reflected by the surface of the sample 7 and travels toward the upper semi-transparent mirror 67. Then, a part of the light passes through the semi-transparent mirror 67 and reaches the objective lens 61, and thereafter, the image of the sample 7 is formed through the objective lens 61 and the eyepiece lens 66.

On the other hand, the illuminating device of the reflection type dark field microscope shown in FIG. 14 has a light source 1 and a collimator lens 68 for collimating the light from the light source 1 and directing it in the horizontal direction.
A ring slit plate 69 for shaping the light from the collimator lens 68 into a predetermined annular light, and a perforated mirror 70 for reflecting the annular light passing through the ring slit plate 69. And an annular condenser lens 71 on which the light reflected by the perforated mirror 70 and directed downward is incident.
Etc. In the illumination device of the reflection type dark field microscope shown in FIG. 14, after the light from the light source 1 is collimated by the collimator 68 lens, it becomes an annular shape by the ring slit plate 69 and is reflected by the perforated mirror 70. After that, the light is condensed by the annular condenser lens 71 and irradiated on the sample 7 to illuminate the sample 7. Illuminated specimen 7
The scattered light of (1) reaches the eyepiece lens 66 through the objective lens 61 arranged at the central opening of the annular condenser lens 71, and forms a magnified image.

The illumination device shown in FIGS. 13 and 14 is
Each of them uses a complicated optical system to guide the light from the light source 1 to the sample 7, and has a drawback that the structure is large and the cost is high. Further, in the case of the illuminating device of the reflection type bright field microscope shown in FIG. 13, since the semi-transparent mirror 67 is used, the light utilization efficiency is considerably lowered. Similarly, in the case of the illumination device of the reflection type dark field microscope shown in FIG. 14, since the ring slit plate 69 is used and only the light passing through the ring slit plate 69 is used, the light utilization efficiency is improved. It has fallen considerably.

In order to eliminate the above-mentioned drawbacks, recently, an illumination device for a magnifying observation optical system using an optical fiber has been widely used. FIG. 15: is explanatory drawing of the conventional illuminating device for magnifying observation optical systems which used an optical fiber. The illuminating device for the magnifying observation optical system shown in FIG. 15 includes a light source 1, an elliptical focusing mirror 2 that focuses the light from the light source 1, and an optical fiber 3 that guides the focused light to the sample 7. It consists of and. Then, the objective lens 6
In order not to mechanically interfere with the objective lens barrel 62 or the like housing 1 therein, the emission end face 33 of the optical fiber 3 is formed in an annular shape, and is arranged so as to surround the optical path of the objective lens 61. The sample 7 is irradiated from around the optical path of the lens 61. In order to realize dark-field illumination, it has been proposed to tilt the emitting end face of the annular optical fiber 3 toward the inside, that is, toward the optical axis of the objective lens 61. The illumination device for the magnifying observation optical system using the optical fiber 3 has the advantages of a simple structure, low cost, and high light utilization efficiency.

[0009]

The magnifying observation optical system equipped with the illuminating device as described above is used in the step of inspecting minute parts or minute parts such as soldering parts of electronic parts as described above. It In this case, it is often practiced to convert the obtained image into an electric signal by an image pickup means such as a CCD camera and display it on a monitor screen such as a CRT.
When the image thus obtained is converted into an electric signal by an image pickup means such as a CCD camera, the sensitivity of the image pickup means such as a CCD camera is not so good, and therefore it is necessary to illuminate the sample with as high an illuminance as possible. Is becoming.

Here, since the light emitted from the emission end surface of the optical fiber spreads as shown in FIG. 15, the illuminance on the irradiation surface, that is, the surface of the sample is inevitably lowered.

One way to increase the illuminance is to bring the exit end face of the optical fiber near the sample. However, the distance from the objective lens body that houses the objective lens to the sample surface is determined according to the focal length of the objective lens, so long as the configuration that attaches the optical fiber emitting section to the objective lens barrel is adopted, This method is impossible.

By holding the output part of the optical fiber by hand,
A method of bringing the emitting end face closer to the sample can be considered, but there is a problem that it becomes difficult to keep the illumination condition constant and the reproducibility of the observation condition deteriorates.

As another method of increasing the illuminance, it is possible to process the emitting end surface of the optical fiber into a convex lens shape so that the emitted light does not spread. However, such processing is very difficult and leads to an increase in cost. The invention of the optical component for light guide of the present application was mainly made in order to solve such a problem, and when it is desired to illuminate a place away from a light source with a high illuminance like an illumination device for magnifying observation. The purpose is to provide a suitable optical component for light guide, which has a simple structure and is inexpensive.

[0014]

In order to achieve the above object, the light guiding optical component according to claim 1 of the present application is a light guiding optical component used in an illuminating device for a magnifying observation optical system. , A light having a cylindrical or semi-cylindrical shape formed of a translucent material, the inner and outer peripheral surfaces of which are covered with a reflector, and the emission end face is lens-processed and emitted from the emission end face. The optical axis of is formed to make an angle smaller than 90 ° with respect to the observation optical axis. In the light guide optical component having the above configuration, light is incident on the incident end face at the upper end thereof. The incident light is guided by propagating inside the thickness of the light guiding optical component and is emitted from the emission end face at the lower end.

[0015]

Embodiments of the present invention will be described below. Figure 1
FIG. 4 is an external view of a light guide optical component according to an example of the present invention. FIG. 2 is a side sectional view of the light guide optical component of FIG.

The light guiding optical component 4 shown in FIGS. 1 and 2 is
It has a cylindrical shape formed of acrylic as a translucent material. As can be seen from the side sectional shape shown in FIG.
The light guide optical component 4 of the present embodiment has a shape such that the lower half is gradually narrowed down. That is, the diameter gradually decreases as it approaches the emission end face. The inner peripheral surface 43 and the outer peripheral surface 44 of the cylindrical light guide optical component 4 are
After being mirror-polished, the aluminum reflection film 4
6 is provided. This aluminum reflection film 46
Is a reflector in this embodiment, and is, for example, a vapor deposition film provided by a vacuum vapor deposition method. The light guide optical component 4 of the present embodiment has a structure in which a protective cover (not shown) made of metal or the like is further covered on the reflective film 46. Needless to say, this protective cover is for protecting the reflective film 46. A mounting frame body 49 is provided on the outer peripheral surface 44 so as to surround the incident end surface 41. The outer peripheral surface of the mounting frame 49 has the light guiding optical component as described later. Is threaded for mounting by screwing. Further, the entrance end face 41 and the exit end face 42 of the light guiding optical component 4 are mirror-polished and lens-shaped into a flat surface.

The method of manufacturing the above-mentioned light guide optical component 4 is as follows. First, a pipe-shaped material made of a translucent material is cut into a predetermined length, and then shaped so that the lower half gradually becomes thinner. Then, after the incident end face, the emitting end face, the inner peripheral surface 43 and the outer peripheral surface 44 are optically polished, the inner peripheral surface 43
A vapor deposition film is applied to the outer peripheral surface 44. In the case of the cylindrical shape shown in FIGS. 1 and 2, it is generally difficult to apply a vapor deposition film to the inner peripheral surface 43 inside thereof. Therefore, in reality, after the shaping as described above, the height direction is once changed to the cutting plane and the cutting is performed in half. In this state, the inner peripheral surface 43
1 and FIG.
Make sure to join them with an adhesive so that the shape becomes like. Of course, it is not necessary to cut into a semi-cylindrical shape if the reflection film can be formed well in the cylindrical shape. After the reflection film is formed in this way, the protective cover is covered to complete the process.
The protective cover is covered by a stretchable metal cover that covers the optical fiber, a thin metal foil, or the like.

FIG. 3 is a schematic explanatory view of a magnifying observation optical system illumination device using the light guiding optical component 4 of FIG. Figure 4
FIG. 4 is an explanatory view of an emission end face of an optical fiber used in the illumination device for the magnifying observation optical system of FIG. 3. The illumination device for the magnifying observation optical system shown in FIG. 3 includes a light source 1, an elliptical focusing mirror 2 that focuses the light from the light source 1, and an optical fiber on which the light focused by the elliptic focusing mirror 2 is incident. 3 and a light guide optical component 4 which receives the light emitted from the optical fiber 3, guides the incident light to the vicinity of the surface of the sample 7, and irradiates the sample 7 with the light.

As the light source 1, for example, a small halogen lamp or a xenon lamp is used. Elliptical focusing mirror 2
Is composed of a so-called cold mirror in which a heat ray transmitting film is applied to a reflecting surface of a glass plate processed into a spheroidal shape. The first focus f1 is the light emitting portion 1 of the light source 1.
It is arranged so as to be at the 0 position. The light source 1 and the elliptical focusing mirror 2 are housed in a box-shaped lamp body 5. On the side surface of the lamp body 5 facing the opening surface of the elliptical focusing mirror 2,
A mounting portion 51 for mounting the incident portion of the optical fiber 3 is provided.

The optical fiber 3 having the incident portion attached to the attachment portion 51 has a second focal point f2 of the elliptical focusing mirror 2.
The incident end face is located at the position.
The optical fiber 3 is a so-called light guide fiber, and is a multimode step index fiber made of a plastic material such as acrylic or a glass material such as multi-component glass or quartz glass. The optical fiber 3 has a structure in which a flexible tube 32 covers an optical fiber bundle 31 formed by bundling about 50 to 100 strands having a diameter of about 250 μm. The optical fiber bundle 31 is bundled in a cylindrical shape on the incident side, but is bundled on the emitting side so that the emitting end face 33 is annular as shown in FIG. That is, as shown in FIG. 4, the individual wires are arranged side by side so that the emission end faces of the wires are located on the same circumference. The entrance portion and the exit portion of the optical fiber bundle 31 having the end faces formed as described above are fixed by the entrance-side fixing tool 34 and the exit-side fixing tool 35 made of resin or metal, and their shapes are retained. That is, the entrance portion and the exit portion of the optical fiber bundle 31 are structured to be embedded inside the entrance-side fixing tool 34 and the exit-side fixing tool 35, respectively. The incident-side fixture 34 is locked to the lamp body 5 as described above, and the exit-side fixture 35 is locked to the objective lens barrel 62 of the magnifying observation optical system 6 as shown in FIG. It That is, since the emitting-side fixture 35 has a circular ring shape, it is fitted so that the cylindrical objective lens barrel 62 is positioned therein, and then, with respect to the outer peripheral surface of the objective lens barrel 62 by a fixing screw (not shown). To fix.

Incident end face 41 of cylindrical light guiding optical component 4
Needless to say, the shape is circular, but the diameter of curvature D2 at the center position of the thickness is formed to be equal to the diameter D1 of the emission end face 33 of the optical fiber 3 shown in FIG. That is, the diameter D1 of the circumference formed by connecting the centers of the strands on the emission end face of the optical fiber shown in FIG. 4 is D2 shown in FIG.
Is consistent with. Then, a cylindrical mounting portion 36 is provided on the lower surface of the emitting side fixture 35 of the optical fiber 3 so as to project downward. This cylindrical mounting portion 36
Has an inner diameter that matches the outer diameter of the mounting frame 49 of the light guide optical component 4, and the inner peripheral surface thereof is screwed into the threaded portion of the outer peripheral surface of the mounting frame 49. Threaded as much as possible. Therefore, the light guide optical component 4 of the present embodiment is fixed to the emission end face 33 of the optical fiber 3 by screwing the portion of the attachment frame 49 into the attachment portion 36. Although various other examples of the light guiding optical component 4 are adopted as will be described later, by providing a threaded mounting portion 49 similar to the mounting frame 49, The light guide optical component 4 can be made replaceable with respect to the emission end face 33 of the optical fiber 3. For example, when the objective lens 61 having different focal lengths is used for the microscope 6, the light guiding optical component 4 having a height corresponding to the microscope 6 is used.

The incident end face 41 of the light guide optical component 4 is
It is also possible to adopt a configuration in which the optical fiber 3 is arranged in contact with the emitting end face 33. According to this structure, there is an effect that there is no light loss due to scattering in the air.

Further, the mounting structure of the light guide optical component 4 is not limited to the above-described screw-in mounting,
As the mount structure of the optical component, various known structures can be adopted. For example, a configuration may be adopted in which a protrusion is provided on the outer peripheral surface 44 of the light guiding optical component 4, and a guide groove having a shape for guiding the protrusion and finally fixing it is provided in the mounting portion 36 in a circumferential shape. You can

When the light guide optical component 4 is fixed to the emitting side fixing member 35 of the optical fiber 3 in this manner, the incident end face 41 of the light guide optical component 4 becomes the emitting end face of the optical fiber 3. It is located immediately below 33 in a close position. For this reason, the light emitted from the emission end face 33 of the optical fiber 3 efficiently enters the incident end face 41 of the light guide optical component 4.
Incident on. As described above, the lower half of the light guiding optical component 4 is gradually thinned, and the diameter (diameter at the center position of the wall thickness) D3 at the lower end, that is, the emission end face is, for example, about 1 mm. The optical axis of the light emitted from the emission end surface 42 of the light guide optical component 4 is formed in a state of being inclined by a predetermined angle φ with respect to the vertical observation optical axis. In this embodiment, the dark field, that is, the scattered light of the illuminated sample 7 is observed, and therefore, the emission end face 42 is
The angle is set so that the light emitted from the emission end face 42 is reflected by the sample 7 and does not directly enter the objective lens 61. This angle φ is appropriately set in the range of, for example, 12 ° to about 90 °, but it goes without saying that the angle φ
Varies depending on whether the observation is performed in the bright field or the dark field, and also varies depending on the numerical aperture of the objective lens 61. Further, it also changes depending on the distance from the emission end face 42 to the surface of the sample 7, and the like.

Next, the magnifying observation optical system 6 in which the above illumination device is used will be described. The magnifying observation optical system 6 in which the illuminating device of this embodiment is used is a well-known one known as a stereomicroscope, and has two observation optical paths P1 and P2 as shown in FIG. That is, the light from the sample 7
After the parallel light is made by the objective lens 61, the objective lens 6
Two prisms 63 arranged symmetrically behind 1
1, 632, it is divided into two observation optical paths P1 and P2, and then the second objective lens 641 of each optical path
642, concave lenses 651, 652, and eyepiece lens 66
1 and 662 to form an image.

As is apparent from FIG. 3, when the two eyepieces 661 and 662 are viewed by the left and right eyes, an enlarged image of the sample 7 is observed with an artificially created parallax angle θ. This makes it possible to perform a three-dimensional observation. Taking advantage of this point, such a stereomicroscope
It is often used for product inspection such as good or bad soldering of C lead. It should be noted that an image pickup means such as a CCD camera may be arranged at the position of the back focus of the eyepieces 661 and 662, and the obtained image may be displayed on an image monitor such as a CRT.

In the above embodiment, it may be desired to irradiate the sample with polarized light or light of a specific color. In this case, a filter such as a polarization filter or a color filter may be mounted on the entrance side or the exit side of the light guiding optical component 4. Since the mounting structure on the incident side of each light guiding component is standardized as described above, a filter having a holding frame suitable for this is used, and the mounting portion 36 of the optical fiber 3 and the light guiding optical component 4 are used. It suffices to interpose it with and by screwing.

Next, another embodiment of the light guide optical component of the present application will be described. 5 to 12 are explanatory views of another embodiment of the light guide optical component.

First, FIG. 5 is a partial side sectional view for explaining the light guide optical component 4 having an improved incident end face. In the light guide optical component 4 shown in FIG. 5, the incident end face 41 is processed into a concave lens shape. That is, after being grooved into a concave shape having a predetermined curvature, it is mirror-polished. When the incident end surface 41 of the light guiding optical component 4 is flat as shown in FIG. 5 and an optical fiber having a relatively large numerical aperture is used, the light emitted from the emitting end surface of the optical fiber is For light having a large divergence angle inside, it is considered that the reflectance at the incident end face of the light guiding optical component 4 becomes high and therefore the incident efficiency is lowered. Therefore, as shown in FIG. 5, the incident end face 41 of the light guiding optical component 4 is formed into a concave shape to increase the incident angle of light. Thereby, the incident efficiency is increased and the loss is reduced. The incident end face 41
A known antireflection film may be provided on the incident end surface 41 in order to reduce the reflection at.

FIG. 6 is a partial side sectional view for explaining the light guide optical component 4 having an improved emission end face. Since the lens processing of the emission end face 42 of the light guide optical component 4 shown in FIGS. 1, 2, and 3 is flat, the light spreads similarly to the emission end face 33 of the optical fiber 3. Therefore, as shown in FIG. 6, the emitting end face 42 is processed into a convex lens shape so that the light emitted from the emitting end face 42 does not spread. Thereby, the illuminance on the surface of the sample 7 can be increased. Since the thickness of the light guiding optical component 4 is larger than the diameter of the optical fiber strand, it is not difficult to process the emitting end face 42 into a convex lens like an optical fiber strand, and the cost is low. It doesn't cost. This lens processing is not limited to a convex lens, but may be another shape such as a concave lens shape in relation to a specific purpose. In addition, as another example of the emission end face 42 of the light guide optical component 4, if it is only desired to uniformly illuminate the surface of the sample 7, the emission end face 42 may be ground glass to be a scattering surface.

Furthermore, in the observation in the dark field using a stereoscopic microscope, the image of the shaded specimen 7 is obtained by irradiating the specimen 7 with light only from a specific direction, and a more stereoscopic observation is possible. It is well known to do. In this case, it is advisable to partially provide a light shield on the emission end face 42 of the light guide optical component 4. For example, a semi-circular light-shielding mask is attached to the emission end face 42.

FIG. 7 is a partial cross-sectional explanatory view of a light guiding optical component suitable for changing the illumination state by vertical movement. As described above, since the light guide optical component 4 in FIG. 3 is attached by screwing the attachment frame 49 into the attachment portion 36, the light guide optical component 4 can be loosened or tightened. The component 4 can be moved up and down. When the light guide optical component 4 is moved up and down, the illumination state can be changed because the sample 7 distance from the emission end face 42 is different. Here, in this embodiment, the exit end face 4
2 has a V-shaped cross section as shown in FIG. When the emission end face 42 having the V-shaped cross section is formed, one face 42 is formed when the emission end face 42 is located at the position A shown in FIG.
Light emitted from both the first surface 422 and the other surface 422 is applied to the sample to form double illumination. In the case of the position shown in B, the illumination by the light emitted from the other surface 422 is dominant. Becomes This makes it possible to bring different contrast to the observed specimen. To move the light guiding optical component up and down, a known moving structure such as a zoom lens may be used to hold the light guiding optical component 4.

FIG. 8 to FIG. 12 are explanatory views of optical components for light guide having different external shapes. The shape of the light guide optical component 4 in which the diameter of the lower half is gradually reduced as shown in FIGS. 1, 2 and 3 reduces the incident angle of the light incident on the surface of the sample 7 as described above. To achieve a dark field. The light guiding optical component 4 in such a state is not limited to the curved shape as shown in FIGS. 1, 2 and 3, but is a shape with “corners” as shown in FIG. But it is practical. Further, in the case of observing the sample in the bright field, a straight cylindrical light guide optical component 4 having no change in diameter as shown in FIG. 9 can also be used.

Next, FIG. 10 is a side sectional view for explaining a light guide optical component suitable for a wide observation area. Figure 10
The light guide optical component 4 shown in (1) is characterized in that the diameter of the cylinder gradually expands and the diameter of the emitting end face 42 becomes larger than the diameter of the incident end face 41. The emission end face 42 having a large diameter is arranged so as to be inclined inward as in the case shown in FIGS. 1, 2 and 3, and the optical axis of the emitted light is also a predetermined distance from the optical axis of the objective lens. It is tilted at an angle.
With the emission end face 42 having such a large diameter, a wide observation region can be illuminated from the surroundings. Here, if the exit end surface 42 of the light guiding optical component 4 of this embodiment is processed into a concave lens shape as shown in FIG. 10, the effect that light can be sufficiently spread over a wide observation region is exhibited. become.

Next, FIG. 11 has a semi-cylindrical shape instead of the cylindrical shape described above, which is suitable for collecting light in a narrow area for efficient illumination. It is an external view of an optical component. Before, in order to obtain an image of the shaded specimen 7 by irradiating the specimen 7 with light only in a specific direction, a light-shielding body such as a semicircular mask is partially provided on the emitting end face 42. Although the configuration described above has been described, the operation by such a configuration can be obtained even by using the semi-cylindrical light guiding optical component 4 as shown in FIG. In this case, one half of the emission end face of the optical fiber is covered with a semi-circular light shielding mask. The light guiding optical component 4 of this embodiment can also be used for an optical fiber in which strands are originally bundled so as to form a semi-annular emission end face.
The light guide optical component 4 in FIG. 11 has a shape like a semi-cylindrical bamboo tube cut obliquely. That is, the shape is such that it is cut from a predetermined height to a predetermined position on the emission end face. Therefore, the emission end face 44 is a small semicircular ring. Optical component 4 for light guide of this embodiment
Is formed by cutting a right-cylindrical acrylic pipe having no change in diameter as shown in FIG. 8 with an NC machine tool or the like. The cut surface 47 is mirror-polished and then the inner peripheral surface 4
3 and the outer peripheral surface 44, a reflective film is applied. In the light guide optical component 4 of the present embodiment having the above-described shape, the light incident from the incident end face is reflected by the reflection film of the inner peripheral surface 43 and the outer peripheral surface 44, and is reflected by the reflection film of the cut surface 47. The light propagates through the thickness while being reflected, and is collected and emitted at the small semicircular emission end face 42. Therefore, it is possible to illuminate from one direction and to illuminate with a very high illuminance although it has a small area. In each configuration of the light guide optical component 4 of each example described above, the translucent material is not limited to acrylic, and various translucent plastics or various kinds of quartz glass, multi-component glass, or the like can be used. Glass can be used.

Next, another illuminating device for the magnifying observation optical system that can use the light guiding optical component 4 of each of the above-described embodiments will be described. FIG. 12 is an explanatory view of another embodiment of the illumination device for the magnifying observation optical system, which uses the light guiding optical component of the embodiment of the present application. In this embodiment, unlike the illuminating device for the magnifying observation optical system shown in FIG. 3, light is incident on the light guiding optical component 4 without using an optical fiber. That is, from the light guiding optical component 4, the light source 1 arranged near the incident end face of the light guiding optical component 4, and the reflecting mirror 20 for reflecting the light from the light source 1 to efficiently enter the light. It is configured. As the configuration of the light source 1 and the reflecting mirror 20, a set of a low power type halogen lamp or xenon lamp and a bowl-shaped reflecting mirror may be circumferentially arranged, or an annular fluorescent lamp or the like may be used. It may be combined with a gutter-shaped reflecting mirror.

Finally, a stereoscopic microscope is adopted as the magnifying observation optical system 6 in which the illumination device of the above embodiment is used.
Not limited to this, the illuminating device of the present embodiment can be used for other various microscopes and other various optical systems for observing a sample by enlarging it.

As described above, according to the configuration of claim 1 of the present application, in the illumination device for magnifying observation,
It is possible to illuminate a place away from the light source with high illuminance, and it is possible to provide an inexpensive one with a simple configuration.

[Brief description of drawings]

FIG. 1 is an external view of a light guide optical component according to an embodiment of the present invention.

FIG. 2 is a side sectional view of the light guide optical component of FIG.

FIG. 3 is a schematic explanatory view of a magnifying observation optical system illumination device using the light guiding optical component of FIG.

4 is an explanatory diagram of an emission end face of an optical fiber used in the illumination device for the magnifying observation optical system in FIG.

FIG. 5 is an explanatory view of another embodiment of the light guiding optical component, and is a partial side sectional view for explaining the light guiding optical component with an improved incident end face.

FIG. 6 is an explanatory view of another embodiment of the light guiding optical component, and is a partial side sectional view for explaining the light guiding optical component with an improved emission end face.

FIG. 7 is an explanatory view of another embodiment of the light guiding optical component, and is a partial cross-sectional explanatory view of the light guiding optical component suitable for changing the illumination state by vertical movement.

FIG. 8 is an explanatory diagram of another embodiment of the light guiding optical component, and is an explanatory diagram of the light guiding optical component having a different external shape.

FIG. 9 is an explanatory view of another embodiment of the light guiding optical component, and is an explanatory view of the light guiding optical component having a different external shape.

FIG. 10 is a side cross-sectional view illustrating an example of a light guide optical component suitable for a wide observation region.

FIG. 11 is an external view of an embodiment of a light guide optical component that has a semi-cylindrical shape and is suitable for collecting light in a narrow area for efficient illumination.

FIG. 12 is an explanatory view of another embodiment of the illumination device for the magnifying observation optical system, which uses the light guide optical component of the embodiment of the present application.

FIG. 13 is an explanatory diagram of a conventional illuminating device for a magnifying observation optical system, showing an illuminating device for a reflective bright-field microscope.

FIG. 14 is an explanatory diagram of a conventional illuminating device for a magnifying observation optical system, showing an illuminating device for a reflective dark-field microscope.

FIG. 15 is an explanatory diagram of a conventional illumination device for a magnifying observation optical system using an optical fiber.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Light source 2 Elliptical condensing mirror 3 Optical fiber 33 Emitting end face of optical fiber 4 Optical component for light guide 41 Incident end face of optical component for light guide 42 Emitting end face of optical component for light guide 43 Inner peripheral face of optical component for light guide 44 Outer peripheral surface of optical component for light guide 46 Reflective film as reflector 5 Lamp 6 Magnification observation optical system 61 Objective lens 62 Objective lens barrel 661 Eyepiece 662 Eyepiece 7 Specimen

Claims (1)

[Claims] 1. A light-guiding optical component used in an illuminating device for a magnifying observation optical system, which has a cylindrical or semi-cylindrical shape formed of a translucent material, and has an inner peripheral surface and an outer peripheral surface. The light guide optics, characterized in that the surface is covered with a reflector, the emission end face is processed into a lens, and the optical axis of the light emitted from the emission end face forms an angle smaller than 90 ° with respect to the observation optical axis. parts.