JPH05623B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a temperature control chamber, and more particularly to a local precision temperature control mechanism within a clean room.

[Background of the Invention] When the equipment installed in a clean room is, for example, a high-precision measuring machine or exposure equipment, it is necessary to precisely control the ambient temperature around the equipment to about 23±0.1°C.

In such cases, conventionally, the temperature within the clean room has been locally controlled using a method as shown in FIG. The cross section of the downflow type clean room shown in Figure 1 is as follows:
Broadly divided, there is a clean area 4 where the device 3 is installed between the floor 1 and the ceiling 2 where the air circulation opening 1a is provided, and a clean area 4 where temperature-controlled cold air is supplied above the ceiling 2. It is divided into a supply chamber 5 and a return chamber 6 through which air discharged from the clean area 4 flows below the floor surface 1.

In this method, the air in the clean area 4 is sucked by the blower 8 through the return duct 7 and blown into the temperature control unit 9. The temperature control unit 9 includes a cooling coil 11 that is cooled by a refrigerator 10, a filter 12 that filters out dust, and this filter 12.
It has a reheat heater 15 whose temperature is precisely controlled by a temperature controller 14 in response to a signal from a temperature sensor 13 disposed below the heater. Therefore, the air blown into the temperature control unit 9 by the blower 8 is cooled by the cooling coil 11, then precisely controlled in temperature by the reheat heater 15, and blown into the clean area 4 through the filter 12. The temperature accuracy in this case is generally about ±0.1°C, allowing very precise temperature control.

However, since this method uses a refrigerator 10, a reheat heater 15, etc., it requires a large installation space, requires heavy construction work, and uses a large amount of energy (electric power).

[Purpose of the invention]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a temperature control chamber that is compact, easy to install, and uses less energy.

[Summary of the invention]

In order to achieve the above object, the present invention provides a temperature control unit having a cold air intake that takes in cold air from a supply chamber and a high temperature circulating air intake that takes in hot air from a return chamber. control means for controlling a mixing ratio of cold air from the cold air intake and high temperature circulating air from the high temperature circulation air intake in accordance with the above, and supplying air controlled by the control means to the clean area. It is characterized by

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG. Note that the same or equivalent members and portions as in FIG. 1 will be described with the same reference numerals. A partition wall 20 having an opening 20a at the bottom is provided on the back side of the device 3. The temperature control unit 21 that blows temperature-controlled air into the clean area 4 includes a cold air intake 21a that takes in cold air from the supply chamber 5 whose temperature is controlled by an air conditioner (not shown), and openings in the return chamber 6 and the clean area 4. High temperature circulating air intake 21 which takes in air through part 20a
b, and the cold air intake port 21a is provided with a damper 23 whose opening amount is controlled by a pneumatic damper operating device 22.
is installed. Further, the temperature control unit 21 has a blower 24 inside and a filter 12 at the air outlet to the clean area 4, and the air blown out from the filter 12 is detected by a temperature sensor 13. The temperature sensor 13 is connected to a controller 25, and the controller 25 outputs an electric signal for controlling the opening amount of the damper 23 based on the temperature of the temperature sensor 13. Controller 2
5 is connected to the pneumatic damper operating device 22 via a converter 26 that converts an electrical signal into pneumatic pressure.

Next, the operation will be explained. When the blower 24 rotates, it takes in cold air from the cold air intake 21a and high temperature air from the high temperature circulating air intake 21b, and the cold air and high temperature air are mixed and blown out from the filter 12 to the clean area 4. The temperature of the air from the filter 12 is detected by the temperature sensor 13, and an electrical signal is input to the converter 26 by the controller 25 so that the temperature of the air blown out from the filter 12 is constant. The electrical signal is converted into pneumatic pressure, and the opening amount of the damper 23 is controlled via the pneumatic damper operating device 22. As a result, the amount of cold air taken in from the cold air intake port 21a is controlled, and the local temperature of the clean area 4 is ±0.1
Precisely controlled to about ℃.

In this way, temperature is controlled by controlling the mixing ratio of cold air and high-temperature circulating air, eliminating the need for conventional refrigerators and reheating heaters. The price will be about 1/4 of that of In addition, by eliminating the need for a refrigerator and reheat heater, the power that conventionally required 16KW becomes less than 0.3KW, significantly reducing energy consumption.

〔Effect of the invention〕

As is clear from the above description, the present invention is compact and inexpensive, and consumes less energy.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a conventional example, and FIG. 2 is an explanatory diagram showing an embodiment of the present invention. 4...Clean area, 5...Supply chamber, 6...Return chamber, 12...Filter,
13... Temperature sensor, 21... Temperature control unit, 21a
...Cold air intake, 21b...High temperature circulating air intake, 2
2...Pneumatic damper operating device, 23...Damper, 24
...Blower, 25...Controller, 26...Converter.

Claims (1)

[Claims] 1 It has a clean area, a supply chamber to which cold air for indoor air conditioning is supplied, and a return chamber to flow high-temperature air discharged from the clean area, and has a temperature-controlled air chamber that supplies temperature-controlled air to the clean area. In the temperature control chamber equipped with a control unit, the temperature control unit includes a cold air intake for taking in cold air from the supply chamber;
a high-temperature circulating air intake that takes in high-temperature air from the return chamber, and a mixing ratio of cold air from the cold air intake and high-temperature circulating air from the high-temperature circulating air intake according to the temperature of the clean area. 1. A temperature control chamber comprising a control means for controlling the temperature, and supplying air controlled by the control means to a clean area.