JPH0562921B2 - - Google Patents

Info

Publication number
JPH0562921B2
JPH0562921B2 JP4674387A JP4674387A JPH0562921B2 JP H0562921 B2 JPH0562921 B2 JP H0562921B2 JP 4674387 A JP4674387 A JP 4674387A JP 4674387 A JP4674387 A JP 4674387A JP H0562921 B2 JPH0562921 B2 JP H0562921B2
Authority
JP
Japan
Prior art keywords
light
light receiving
signal
receiving element
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4674387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63214606A (ja
Inventor
Giichi Ito
Kosaku Mukai
Juichi Shimizu
Saiju Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Advanced Technology Corp
Original Assignee
NTT Technology Transfer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTT Technology Transfer Corp filed Critical NTT Technology Transfer Corp
Priority to JP62046743A priority Critical patent/JPS63214606A/ja
Priority to KR1019870010688A priority patent/KR900006577B1/ko
Priority to US07/101,455 priority patent/US4790660A/en
Priority to EP87114224A priority patent/EP0262646A3/fr
Publication of JPS63214606A publication Critical patent/JPS63214606A/ja
Publication of JPH0562921B2 publication Critical patent/JPH0562921B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP62046743A 1986-10-03 1987-03-03 形状測定器 Granted JPS63214606A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62046743A JPS63214606A (ja) 1987-03-03 1987-03-03 形状測定器
KR1019870010688A KR900006577B1 (ko) 1986-10-03 1987-09-26 형상 측정기
US07/101,455 US4790660A (en) 1986-10-03 1987-09-28 Shape measuring instrument
EP87114224A EP0262646A3 (fr) 1986-10-03 1987-09-29 Instrument pour la mesure d'une forme

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62046743A JPS63214606A (ja) 1987-03-03 1987-03-03 形状測定器

Publications (2)

Publication Number Publication Date
JPS63214606A JPS63214606A (ja) 1988-09-07
JPH0562921B2 true JPH0562921B2 (fr) 1993-09-09

Family

ID=12755814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62046743A Granted JPS63214606A (ja) 1986-10-03 1987-03-03 形状測定器

Country Status (1)

Country Link
JP (1) JPS63214606A (fr)

Also Published As

Publication number Publication date
JPS63214606A (ja) 1988-09-07

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