JPH0562922B2 - - Google Patents

Info

Publication number: JPH0562922B2
Authority: JP; Japan
Prior art keywords: measured; distance; sensor; light; interference
Prior art date: 1987-02-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP3408287A

Other languages

English (en)

Japanese (ja)

Other versions

JPS63201509A (ja

Inventor

Masaaki Adachi

Yasuhide Nakai

Hideji Miki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Kobe Steel Ltd

Original Assignee

Kobe Steel Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-02-17

Filing date

1987-02-17

Publication date

1993-09-09

1987-02-17 Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd

1987-02-17 Priority to JP3408287A priority Critical patent/JPS63201509A/ja

1988-02-17 Priority to PCT/JP1988/000162 priority patent/WO1988006270A1/ja

1988-08-19 Publication of JPS63201509A publication Critical patent/JPS63201509A/ja

1993-09-09 Publication of JPH0562922B2 publication Critical patent/JPH0562922B2/ja

Status Granted legal-status Critical Current

Links

230000003287 optical effect Effects 0.000 claims description 34
230000007246 mechanism Effects 0.000 claims description 21
230000003746 surface roughness Effects 0.000 claims description 20
238000005259 measurement Methods 0.000 claims description 15
238000001514 detection method Methods 0.000 claims description 14
230000008859 change Effects 0.000 claims description 13
238000012545 processing Methods 0.000 description 14
238000004439 roughness measurement Methods 0.000 description 8
238000010586 diagram Methods 0.000 description 7
238000000034 method Methods 0.000 description 6
230000008569 process Effects 0.000 description 5
238000006243 chemical reaction Methods 0.000 description 3
239000008186 active pharmaceutical agent Substances 0.000 description 2
230000004048 modification Effects 0.000 description 2
238000012986 modification Methods 0.000 description 2
NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
230000008602 contraction Effects 0.000 description 1
238000012937 correction Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000009434 installation Methods 0.000 description 1
238000002955 isolation Methods 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
230000036544 posture Effects 0.000 description 1
230000004044 response Effects 0.000 description 1
238000007788 roughening Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
238000013519 translation Methods 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)

JP3408287A 1987-02-17 1987-02-17 表面粗さ測定装置 Granted JPS63201509A (ja)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
JP3408287A JPS63201509A (ja)	1987-02-17	1987-02-17	表面粗さ測定装置
PCT/JP1988/000162 WO1988006270A1 (fr)	1987-02-17	1988-02-17	Dispositif de mesure de la rugosite d'une surface

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP3408287A JPS63201509A (ja)	1987-02-17	1987-02-17	表面粗さ測定装置

Publications (2)

Publication Number	Publication Date
JPS63201509A JPS63201509A (ja)	1988-08-19
JPH0562922B2 true JPH0562922B2 (2)	1993-09-09

Family

ID=12404341

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP3408287A Granted JPS63201509A (ja)	1987-02-17	1987-02-17	表面粗さ測定装置

Country Status (2)

Country	Link
JP (1)	JPS63201509A (2)
WO (1)	WO1988006270A1 (2)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19616245C2 (de) *	1996-04-15	1998-06-18	Zam Zentrum Fuer Angewandte Mi	Verfahren und Anordnung zum zerstörungsfreien, berührungslosen Prüfen und/oder Bewerten von Festkörpern, Flüssigkeiten, Gasen und Biomaterialien
JP2002333311A (ja) *	2001-05-10	2002-11-22	Matsushita Electric Ind Co Ltd	形状測定装置及び方法
CN1322309C (zh) *	2005-08-09	2007-06-20	中国科学院上海光学精密机械研究所	表面粗糙度非接触测量系统
JP5692790B2 (ja) *	2011-02-02	2015-04-01	オプテックス・エフエー株式会社	錠剤の外観検査装置及びｐｔｐ包装機
CN104019773B (zh) *	2014-06-06	2017-10-13	东莞市瀛通电线有限公司	一种线材表面粗糙度测量方法及实施该方法的设备

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58151509A (ja) *	1982-03-05	1983-09-08	Hitachi Ltd	表面あらさの光学的測定方法

1987
- 1987-02-17 JP JP3408287A patent/JPS63201509A/ja active Granted
1988
- 1988-02-17 WO PCT/JP1988/000162 patent/WO1988006270A1/ja not_active Ceased

Also Published As

Publication number	Publication date
WO1988006270A1 (fr)	1988-08-25
JPS63201509A (ja)	1988-08-19

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Legal Events

Date	Code	Title	Description
2004-09-09	LAPS	Cancellation because of no payment of annual fees