JPH0564470A - Production of graded function material and actuator fabricated thereby - Google Patents

Abstract

PURPOSE:To make it possible to produce a graded function material having complex compositional distribution freely by providing means for moving the delivery port of a dispenser in an arbitrary direction at an arbitrary speed and for controlling the delivery amount of viscous material. CONSTITUTION:A control means 5 delivers a signal to a drive mechanism for a supporting unit 1 and initially sets the delivery port 4a of a dispenser 3a at a predetermined position on the surface of a film 2 thus locating the delivery port 4a at an appropriate position. The dispenser 3a is then fed with a signal specifying the delivery amount of ceramic material M and the drive mechanism for the supporting means 1 is fed with a control signal for moving the delivery port 4a at a predetermined speed from the current position. After coating of region A, for example, region C spaced by a distance B therefrom is coated followed by coating of region E spaced by a distance D therefrom. According to the method, a graded function material having complex compositional distribution can be produced freely.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a device that can be formed arbitrarily and easily in a composition distribution of a functionally gradient material, and further relates to an actuator manufactured using this device. ..

<Prior Art> Conventionally, for example, two piezoelectric elements having different piezoelectric constants are alternately arranged on a ring to operate as an ultrasonic motor, or a piezoelectric constant is used as an actuator for performing a complicated movement. Piezoelectric elements of different types are alternately superposed and joined.

<Problems to be solved by the invention> However, it is difficult to manufacture such an actuator by a general doctor blade method.

For this reason, different types of piezoelectric elements, once formed as green sheets, will be manufactured by adhering the side surfaces or end surfaces to each other, but there is a problem in that the adhesive strength is unreliable.

 The present invention has been made in view of the above-mentioned problems of the related art, and is capable of adhering powder members of different types without using an adhesive, and manufacturing a functionally gradient material capable of combining complicated compositions. An object of the present invention is to provide a method and an actuator manufactured by the manufacturing method.

<Means for Solving the Problems> In the structure of the present invention for solving the above-mentioned problems of the prior art, in claim 1, a plurality of kinds of powder members, a binder, and a plurality of kinds of solvents prepared by mixing a solvent are prepared. A viscous body, a plurality of dispensers filled with each of the viscous bodies, a supporting device having a flat surface arranged below the dispenser, and a discharge port of the dispenser for the surface of the supporting device. It is equipped with a control means for controlling the discharge amount of the viscous body in any direction at an arbitrary speed, and by connecting the plural kinds of viscous bodies at an end, a side surface, or a laminated portion, a tilting function is provided. Further, according to the present invention, a plurality of dispensers are provided to fill the different viscous substances of different types and a mixer is arranged at the discharge port. , Multiple The composition of the viscous body formed on the plane of the supporting device is changed by moving the discharge port or the supporting device in any direction at any speed while continuously changing the discharge amount of the viscous substance of the seed. It is characterized in that it is made to change continuously, and in claim 3, a viscous body using the powder member having different thermal expansion coefficients is formed on the plate and the expansion coefficient is increased. The areas of different viscous bodies of different types are formed to be almost the same on the front and back sides, and the viscous bodies are arranged so that the warp due to temperature change does not occur on the surface of the plate. An actuator formed by the manufacturing method according to claim 4, and in claim 4, the parallel portion and the curved portion are combined to form a track shape, and the parallel portion includes a ceramic material having a large piezoelectric constant and a piezoelectric constant. Is small The rectangular plates that form a set by laminating the Lamix materials are joined in the horizontal direction, and the adjacent ceramic materials that are joined are alternately arranged with different piezoelectric constants. At least one set of rectangular plates is formed into two groups with a separation band sandwiched between them, and the other part is formed from one of the above ceramics, and is formed on the ceramic material of the first and second groups. A bending wave having a wavelength λ is generated by adding a sinusoidal wave with a deviation, and the length of the center line of the track is formed to be an integral multiple of λ.

<Action> Prepare a plurality of dispensers containing different types of viscous materials, first apply a predetermined area with one type of viscous material, and then replace with a dispenser containing another type of viscous material. Then, apply an area within a predetermined range. Since viscous bodies are viscous, different types of viscous bodies mix with each other at the edges and side surfaces, forming a graded composition. If the desired thickness cannot be obtained at one time, it is possible to increase the thickness by applying multiple layers, and the laminated surface will also have an inclined composition.

 In addition, a plurality of dispensers containing different types of viscous substances are prepared, a mixer is provided at the discharge port, and the mixture is prepared by continuously changing the proportion of the discharge amount from each dispenser. The success can be changed continuously.

 Also, if the first and second viscous bodies having different thermal expansion coefficients are formed in a plate shape and the areas of these members are formed to be almost the same, warpage due to temperature change can be prevented.

 In addition, ceramic materials with different piezoelectric constants are overlapped and connected in the lateral direction, and adjacent ceramic materials with different piezoelectric constants are used. Group is formed, and the other part is made of any ceramic. If phase-shifted sine waves are applied to the ceramic materials of the first and second groups, and at least one pair of piezoelectric bodies belonging to each group are arranged so as to be warped in opposite directions, A traveling wave due to a bending wave is generated by being coupled by the separation band.

<Example> Hereinafter, the present invention will be described with reference to the drawings. 1 (a) and 1 (b) are configuration perspective views showing an embodiment of a method for producing a functionally gradient material of the present invention. In the figure, reference numeral 1 is a supporting device having a plane portion a, which is moved in the X, Y, Z (or Z, r, θ) directions by a driving mechanism (not shown). Reference numeral 2 is a film made of plastic or the like fixed on the flat surface a, and a release material is applied to its surface. 3 is a dispenser that is detachably supported by a support device (not shown). It is filled with a ceramic material having an appropriate viscosity with a binder and a solvent (two dispensers are prepared, and different It is filled with various types of ceramic materials). This ceramic material is extruded from the tip of the discharge part 4a by an extruding mechanism incorporated in the dispenser 3. Reference numeral 5 is a control means for controlling the discharge amount of the viscous material extruded from the dispenser, the position of the discharge part 4a and the position of the supporting device 1, and 7 is a signal transmission cable.

 In the above structure, the control means 5 sends a signal to the driving mechanism of the supporting device to move the discharge port of the dispenser 3a to a predetermined position on the film with respect to the surface of the film 2 as an initial setting, and at the same time, it is suitable. Position at height.

 Next, a signal for instructing the discharge amount of the ceramic material is issued to the dispenser, and a control signal is issued to the drive mechanism of the supporting means 1 so that the dispenser moves at a predetermined speed from the current position. In the illustrated example, the area A is applied, and then the area C is applied at a distance B, and the area E is applied at an interval D.

 Next, as shown in FIG. 1 (b), after replacing the dispenser with 3b, the discharge part 4a is positioned at the end of the area B, and the area B is applied under the same conditions. Move to perform similar coating.

 Here, the experimental conditions conducted by the applicant will be described.

As the ceramic material, a three-component composite perovskite of Pb (Ni _1/3 Nb _2/3 ) x (TiyZr _1-y ) _1-x O ₃ is used, and x = 0.45 to 0.60 y as the piezoelectric material. = 0.6 to 0.8 (hereinafter referred to as the first ceramic material M), and as the high dielectric constant material x = 0.65 to 0.85 y = 0.6 to 0.8 ( Hereinafter, the second ceramic material N) is used.

30 to 50 g of pure water, 0.5 to 1 g of glycerin, 1 g of EDTA · 2NH ₄ and a few drops of a defoaming agent are added to 100 g of the first and second ceramic materials M and N, respectively. In addition, the mixture is pulverized and mixed by a ball mill for 24 hours, 6 to 12 g of a water-soluble acrylic binder is further added, and pulverized and mixed for about 2 hours to prepare a viscous body.

 Next, the two types of viscous materials are vacuum degassed and adjusted so that their viscosities are 700-2000 Pois. These viscous materials are filled in separate dispensers and coated on the film by the above-mentioned operation. In the coating process, the rotation speed of the 6dq @ d mechanism of the dispenser was adjusted so that the extruded viscous body had the inner diameter and the degree of identification, the speed of the supporting device was 50 to 100 mm / min, and the film and discharge The gap between the parts was 0.8 to 1.2 mm, and the overlapping width of the patterns was -0.5 to +0.5 mm. This overlapping width is adjusted by the viscosity of the viscous material.

 Figures 2 (a) to 2 (d) show how the ceramic viscous material spreads on the film. It spreads apart immediately after application (see Figure a), but gradually spreads (b, c). (See the figure), and finally the integrated state (see Figure d). On the side shown in the figure, it may take some time before the second ceramic material M is applied after the first ceramic material M is applied, so there is a risk that the first applied material may dry, but there are two types of materials. Viscosity should be low enough to fuse with each other. Further, the ends of the two types of ceramic materials may overlap each other.

 FIG. 3 is a structural perspective view showing an embodiment of claim 2. In the figure, the same elements as those in FIG. 1 are designated by the same reference numerals. The difference from FIG. 1 is that two types of dispensers are provided and a mixer 10 is attached to the discharge port of each. In such a structure, it is possible to flow only the first ceramic material M and apply the area A, and then to the area B, and then apply the second ceramic material N. By continuously changing the discharge amount of various types of viscous materials, it is possible to obtain a gradient composition in which the composition changes continuously.

 The ceramic material produced and dried in claims 1 and 2 is peeled from the film, processed into a predetermined shape to form an electrode, and fired through a predetermined heat treatment step. Diffusion occurs due to this firing, and the joints of each ceramics material further enter each other by about 100 μm to form a gradient composition.

 FIG. 4 shows an embodiment of claim 3 and shows an embodiment of an actuator in which different kinds of rectangular ceramic materials are alternately and overlapped and electrodes are formed on the surfaces thereof. In the figure, M is the first ceramic material and N is the second ceramic material. The ceramic materials of M and N have the same thickness, and the areas of M and N on both sides are almost the same. (In the figure, the area of the ceramic material on which the electrodes 21 and 23 are formed is equal to the area of the ceramic material on which the electrode 22 is formed. Therefore, the expansion coefficients of M and N are different. Because the force based on it is balanced, it does not warp due to temperature). In addition, since the joint surface has a graded composition, stress relaxation is ensured and cracks and cracks do not occur. The electrodes 24 are formed on the entire surface on one surface, and the electrodes 21, 22, 23 are formed on the other surface independently for each ceramic material.

 Fig. 5 shows a side view of the actuator shown in Fig. 4 as seen from the direction of the arrow Y and an example of a drive circuit. The + V power supply is applied to the electrodes 21 and 23 formed on the N ceramic material on the upper surface, A -V power source is connected to the electrode 22 formed on the ceramic material, and the output of the voltage adjusting amplifier 30 is connected to the electrode 24 on the lower surface.

 In FIG. 5, when the output of the amplifier 30 is 0, the displacement due to the voltage is balanced and no warpage occurs. Next, when the output of the amplifier is changed to + or –, the balance is lost and the actuator is warped either upward or downward.

 Fig. 6 shows a state in which ceramic materials are alternately connected in the vertical direction and are alternately laminated, and such relatively complicated shapes can be manufactured. Then, it is possible to realize an actuator that performs a complicated operation by forming an electrode at any location of such an element and applying a voltage.

 FIG. 7 is a perspective view (a) showing an embodiment of the actuator of claim 4, a plan view (b) showing an arrangement state of each layer, and a view showing a generation state of a traveling wave due to a bending wave. In these figures, A is a ceramic material having a large piezoelectric constant, and B is a ceramic member having a small piezoelectric constant, and this shape is produced by the apparatus according to claim 1 or 2.

Here, we briefly explain about ceramic materials with different piezoelectric constants. These A, ceramics material B can be obtained by adjusting the mixing ratio of, for example, _{Pb (Nb 2/3 Ni 1/3) O} 3 -P bTiO 3 -PbZrO 3 based ceramics. FIG. 8 shows a phase diagram of the above ceramic material, and the material marked on each vertex of the triangle is 100% of each material. In the figure, each code has the following areas.

A: Antiferroelectric phase Fpc: Ferroelectric phase (pseudo cubic) F _R : Ferroelectric phase (rhombohedral system) F _T : Ferroelectric phase (tetragonal system) P: Paraelectric phase MPB: Phase boundary No. 8 In the figure, it is known that the area surrounded by the dotted line and indicated by B has a large piezoelectric constant, and generally, the piezoelectric constant becomes smaller as the distance from this area increases.

 Returning to FIG. 7, the principle of the actuator of this embodiment will be described.

 In FIGS. 7 (a) and 7 (b), A is a ceramic material having a large piezoelectric constant, and B is a ceramic material having a small piezoelectric constant. A ceramic material having a set of A and B is laminated, The side 1 has a rectangular shape with a side length of 6 mm and a thickness of about 0.3 mm, and is alternately joined in the lateral direction. Of these, the first, second, third, and fourth groups, each of which is composed of four pairs, are separated by a separation band 35 of 1/2 l. The part of the periodic structure other than the separator 35 and each group of the periodic structure is made of either one of A and B, and the ceramic materials sandwiching the separator 35 are arranged so that A and B face each other. .. The length of the center line L of the track is an integral multiple of 2l (λ), and the radii of the arc portions at both ends are 4l (2λ) or more. Reference numeral 36 denotes an electrode formed on one surface of each of the piezoelectric members of the first to fourth groups, and a common electrode is formed on the back surface of the piezoelectric member, although not shown in the drawing.

In the above configuration, the electrodes of the first and third groups have V ₁ = V ₀ sin (ωT), and the electrodes of the second and fourth groups have V ₂ = V ₀ cos (ωT) of 90 ° phase. When a different AC voltage is applied, this actuator causes four adjacent piezoelectric bodies in each group to warp in opposite directions, and a bending wave traveling wave of wavelength λ as shown in Fig. 7 (c) is generated.

 Although only one dispenser is shown in the embodiment shown in FIG. 1, two dispensers are attached, and after the application of the area A is completed by the first dispenser, the discharge port of the second dispenser is changed to B. If it is controlled so that it is located at the end of the area, the area B is applied, and then the discharge port of the first dispenser is controlled so that it is located at the end of the area C, the area that has been applied earlier becomes too dry. It is possible to apply the second ceramics material without doing so.

 Further, in the present embodiment, the two viscous bodies are described as ceramics, but the material is not limited to the material of the embodiment, and may be metal or plastic. Further, in the case of plastic, it may be solidified not only by sintering but also by a polymerization reaction or the like.

 Further, in the present embodiment, the drawing is shown in which the support device side is moved in the X, Y and Z directions to apply, but the support device side may be fixed and the side supporting the dispenser may be moved. In that case, the dispenser may be fixed to something like the arm of a robot.

 Further, in FIG. 7 of the present embodiment, the number of combined piezoelectric bodies forming the groups 1 to 4 is shown as four, but the numbers for generating the bending wave are first and second. The second group alone is sufficient, and the number of piezoelectric bodies constituting the group may be at least one and is not limited to the embodiment.

<Effects of the Invention> According to the present invention as specifically described in connection with the above embodiments, the control means for controlling the discharge amount of the viscous body while moving the discharge port of the dispenser in any direction at any speed. By providing multiple types of viscous materials at the ends, side surfaces, or laminated parts, a mixer is provided at the discharge port of multiple dispensers, and multiple types of viscosity to be discharged to the mixer are provided. By making the discharge rate of the body continuously change, it is possible to freely produce a functionally gradient material having a complicated composition distribution. If viscous bodies with different thermal expansion coefficients are stacked in a plate shape and the surface areas of these members are made almost the same, warpage caused by temperature changes can be prevented and complex actuation is possible. Can form a player.

 In addition, ceramics with different piezoelectric constants are overlapped and connected in the lateral direction, and adjacent ceramics materials with different piezoelectric constants are used. A traveling wave is generated in a track by forming a group and applying sinusoidal waves with a phase shift to the ceramic materials of the first and second groups. This movement becomes an elliptical movement when one point on the surface is focused.

Therefore, if a pipe filled with liquid is brought into contact with this track, the liquid will move in the direction opposite to the direction of travel of the traveling wave due to the reaction of the motion of the traveling wave, and thus a fluid carrier can be constructed.

[Brief description of drawings]

 FIG. 1 is a perspective view showing the construction of an embodiment of claim 1 of the present invention, FIG. 2 is a view showing the spread of a ceramic viscous material coated on a film, and FIG. FIG. 4, FIG. 5, and FIG. 5 are views showing one embodiment of claim 3, FIG. 6 is a cross-sectional view showing another embodiment of claim 3, and FIG. 4A is a perspective view showing one embodiment of FIG. 4, FIG. 8B is a plan view showing the arrangement state of each layer, and FIG. 8C is a diagram showing a generation state of a traveling wave due to a bending wave. It is a figure which shows a figure. DESCRIPTION OF SYMBOLS 1 ... Supporting device, 2 ... Film, 3 ... Dispenser, 4a, 4b ... Discharge part, 5 ... Control means, 10 ... Mixer. A, B, M, N ... Ceramic material, 35 ... Separation band, 36 ... Electrode.

Claims (4)

[Claims] 1. A plurality of types of viscous bodies prepared by mixing a plurality of types of powder members, a binder, and a solvent, a plurality of dispensers filled with the respective viscous bodies, and a discharge port below the dispensers. An indicator device having a flat surface arranged in the above, and a control means for controlling the discharge amount of the viscous body while moving the discharge port of the support device or the dispenser in any direction at any speed. A method of manufacturing a functionally graded material, which is characterized in that a plurality of types of viscous bodies are joined at the end, side surface, or laminated portion. 2. A mixer provided at the outlets of the plurality of dispensers, and the outlets of the mixers are arranged on the supporting device, and the control unit continuously discharges the plurality of viscous substances. The composition of the viscous body formed on the flat surface of the supporting device is continuously changed by moving the discharge port or the supporting device in an arbitrary direction at an arbitrary speed while changing the temperature. Of manufacturing a functionally graded material to be used. 3. A viscous body using the powder member having different thermal expansion coefficients is formed in a plate-like shape, and the areas of the viscous bodies having different expansion coefficients are formed to be substantially the same on the front and back sides, and The actuator formed by the manufacturing method according to claim 1 or 2, wherein the viscous body is arranged so that the surface of the plate does not warp due to a temperature change. 4. A rectangular shape which is formed by combining a parallel portion and a curved portion into a track shape, and a ceramic member having a large piezoelectric constant and a ceramic member having a small piezoelectric constant are superposed on the parallel portion to form a set. Shaped plates are laterally joined, and adjacent ceramic members that are joined are alternately arranged so that the piezoelectric constants are different, and at least one set of these rectangular plates is grouped together. 2 groups are formed by sandwiching the separator, and the other part is formed by one of the ceramics described above, and a sinusoidal wave with a phase shift is added to the ceramic materials of the 1st and 2nd groups to bend at the wavelength λ. An actuator formed by the manufacturing method according to claim 1 or 2, wherein the length of the center line of the track is formed to be an integral multiple of λ while generating a wave.