JPH0565802B2 - - Google Patents
Info
- Publication number
- JPH0565802B2 JPH0565802B2 JP59052179A JP5217984A JPH0565802B2 JP H0565802 B2 JPH0565802 B2 JP H0565802B2 JP 59052179 A JP59052179 A JP 59052179A JP 5217984 A JP5217984 A JP 5217984A JP H0565802 B2 JPH0565802 B2 JP H0565802B2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- insulator
- conductive film
- spiral groove
- hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012212 insulator Substances 0.000 claims 9
- 239000012530 fluid Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、空気通路内の質量流量を一度温度に
加熱した抵抗体によつて検出する空気流量計にお
いて特に自動車のエンジンに供給される空気流量
を計測する空気流量計に利用される。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an air flow meter that detects the mass flow rate in an air passage by a resistor that has been heated to a temperature. Used in air flow meters to measure
第１図は、特開昭58−55762などに示されてい
る抵抗体の構造を示したものである。外径0.5mm
長さ２mmのアルミナ製絶縁管２の外周にはスパツ
タリングにより白金の導電膜３が蒸着されてい
る。さらに絶縁管２には外径0.15mmの白金製リー
ド線Ａ５とリード線Ｂ６が互いに接触しないよう
に挿入され導電接着剤９によつて固定されてい
る。この状態で抵抗体１の初期抵抗値20（Ω）を
得るために前記導電膜３の一端からレーザ光線に
より螺旋状の溝４を形成している。こ螺旋状の溝
４の形成は従来絶縁管２の一端よりl1＝0.5mm離れ
た点を溝の始点７としリード線Ａ５とリード線Ｂ
６間の抵抗値を測定しながら、レーザ光線のビー
ムを移動し、さらに抵抗体１を回転して形成して
いた。しかし第２図の抵抗体１の断面図で示すよ
うにスパツクリングで形成した導電膜３の膜厚t1
とt2に約30％のバラツキがあるため、前記螺旋状
の溝４の溝の終点８の位置l2のバラツキが大き
く、第４図のように抵抗体１の温度分布を測定し
た場合、抵抗体１の一部分に加熱部分が集中した
Ａのような温度分布を示していた。この抵抗体を
第５図のように流量計測に使用した場合、流量Ｑ
に対する抵抗変化がばらつき、精度良く流量計測
ができない欠点があつた。
FIG. 1 shows the structure of a resistor disclosed in Japanese Patent Application Laid-Open No. 58-55762. Outer diameter 0.5mm
A platinum conductive film 3 is deposited on the outer periphery of an alumina insulating tube 2 having a length of 2 mm by sputtering. Further, a platinum lead wire A5 and a lead wire B6 having an outer diameter of 0.15 mm are inserted into the insulating tube 2 so as not to touch each other and are fixed with a conductive adhesive 9. In this state, in order to obtain an initial resistance value of 20 (Ω) for the resistor 1, a spiral groove 4 is formed from one end of the conductive film 3 using a laser beam. Conventionally, the spiral groove 4 was formed by setting the starting point 7 of the groove at a point l 1 = 0.5 mm away from one end of the insulating tube 2, and connecting the lead wire A5 and the lead wire B.
The resistor 1 was formed by moving the laser beam and rotating the resistor 1 while measuring the resistance value between the resistors 1 and 6. However, as shown in the cross-sectional view of the resistor 1 in FIG. 2, the thickness t 1 of the conductive film 3 formed by spackle
Since there is a variation of about 30% in t2 and t2 , there is a large variation in the position l2 of the end point 8 of the spiral groove 4, and when the temperature distribution of the resistor 1 is measured as shown in FIG. It showed a temperature distribution as shown in A in which the heated portion was concentrated in a part of the resistor 1. When this resistor is used for flow rate measurement as shown in Figure 5, the flow rate Q
The disadvantage was that the resistance change against the flow rate varied, making it impossible to accurately measure the flow rate.
本発明の目的は前記した従来技術の欠点をなく
し、温度分布の均一な抵抗体を有するホツトフイ
ルム式空気流量計を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art described above and to provide a hot film air flowmeter having a resistor with uniform temperature distribution.
本発明は温度分布の均一な抵抗体を得るために
抵抗体の抵抗値を調整する螺旋状の溝を絶縁管の
両端を始点として形成したことにある。
The present invention resides in that a spiral groove for adjusting the resistance value of the resistor is formed starting at both ends of the insulating tube in order to obtain a resistor with a uniform temperature distribution.
以下本発明の実施例を詳細に説明する。第３図
は本発明の一実施例を示したものである。前記し
たように絶縁管２（φ0.4×２）の表面に導電膜３
が形成されており、さらに絶縁管２には両端にリ
ード線Ａ５、リード線Ｂ６が導電接着剤９によつ
て接続されている。抵抗体１の抵抗値調整は最終
抵抗値20（Ω）の半分10（Ω）を、絶縁管２の一端
よりl1＝0.5mm溝の始点７からレーザ光線により溝
の終点８まで溝４を形成して行い、さらに残りの
10（Ω）を絶縁管２の他端よりl2＝0.5mm溝の始点
７からレーザ光線により溝の終点８まで溝４を形
成して行つている。以上の実施例により絶縁管２
の端面からの溝４の始点の位置をl1＝l2＝0.5mmと
設定することができるので抵抗体１の温度分布を
第４図のＢ特性にすることができる効果がある。
他の応用例としてリード線Ａ５、リード線Ｂ６か
らの熱伝導による熱損失の影響を少くするために
絶縁管２の両端付近の螺旋状の溝４の間隔を狭く
して温度分布をさらに改善することが可能であ
る。
Examples of the present invention will be described in detail below. FIG. 3 shows an embodiment of the present invention. As mentioned above, the conductive film 3 is formed on the surface of the insulating tube 2 (φ0.4×2).
Further, a lead wire A5 and a lead wire B6 are connected to both ends of the insulating tube 2 by a conductive adhesive 9. To adjust the resistance value of resistor 1, add 10 (Ω), half of the final resistance value of 20 (Ω), from one end of insulating tube 2 to l 1 = 0.5 mm. Form and do, then the remaining
10 (Ω) from the other end of the insulating tube 2, l 2 =0.5 mm, by forming the groove 4 from the starting point 7 of the groove to the ending point 8 of the groove using a laser beam. According to the above embodiment, the insulation tube 2
Since the position of the starting point of the groove 4 from the end face of the resistor 1 can be set as l 1 =l 2 =0.5 mm, there is an effect that the temperature distribution of the resistor 1 can be made to have characteristic B in FIG. 4.
As another application example, in order to reduce the effect of heat loss due to heat conduction from the lead wires A5 and B6, the distance between the spiral grooves 4 near both ends of the insulating tube 2 is narrowed to further improve the temperature distribution. Is possible.
本発明により温度分布の均一な抵抗体を有する
ホツトフイルム式空気流量計を提供できる効果が
ある。
The present invention has the advantage of providing a hot film air flowmeter having a resistor with uniform temperature distribution.
第１図は従来型のホツトフイルム式空気流量計
の抵抗体の構造図、第２図は断面図、第３図は本
発明による実施例を示す抵抗体の構造図、第４図
は抵抗体の温度分布特性図、第５図はホツトフイ
ルム式空気流量計の流量計測図を示す。
１……抵抗体、２……絶縁管、３……導電膜、
４……溝、５……リード線Ａ、６……リード線
Ｂ、７……溝の始点、８……溝の終点、９……導
電接着剤。
Fig. 1 is a structural diagram of a resistor of a conventional hot film air flowmeter, Fig. 2 is a sectional view, Fig. 3 is a structural diagram of a resistor showing an embodiment of the present invention, and Fig. 4 is a resistor. Figure 5 shows a flow rate measurement diagram of a hot film air flowmeter. 1... Resistor, 2... Insulating tube, 3... Conductive film,
4... Groove, 5... Lead wire A, 6... Lead wire B, 7... Start point of groove, 8... End point of groove, 9... Conductive adhesive.
Claims (1)
螺旋状の溝を設けて抵抗体とし、この抵抗体に電
流を供給して加熱し、この電流の変化から流体の
流量を検出するホツトフイルム式空気流量計にお
いて、前記螺旋状の溝を前記導電膜の両端近傍を
始点とする２本の溝で、形成したことを特徴とす
るホツトフイルム式空気流量計。 ２ 特許請求の範囲第１項において前記螺旋状の
２本の溝を、前記絶縁体の両端位置を始点として
形成したことを特徴とするホツトフイルム式空気
流量計。 ３ 特許請求の範囲第１項において、前記螺旋状
の溝の始点の位置を、き絶縁体の端面位置と同一
の位置にしたことを特徴とするホツトフイルム式
空気流量計。 ４ 特許請求の範囲第１項及び３項において、前
記螺旋状の溝の始点の位置を前記絶縁体の両端位
置から前記絶縁体の長さの1/4以内に設けたこと
を特徴とするホツトフイルム式空気流量計。 ５ 特許請求の範囲第１乃至第４項において、前
記絶縁体に形成した前記螺旋状の溝の間隔を長手
方向に粗、密に形成したことを特徴とするホツト
フイルム式空気流量計。 ６ 絶縁体の表面に導電膜を形成し、該導電膜に
螺旋状の溝を設けて抵抗体とし、この抵抗体に電
流を供給して加熱し、この電流の変化から流体の
流量を検出するホツトフイルム式空気流量計にお
いて、前記絶縁体の加熱温度分布が、前記絶縁体
の中央部で平坦な分布となるようにしたことを特
徴とするホツトフイルム式空気流量計。[Claims] 1. A conductive film is formed on the surface of an insulator, a spiral groove is provided in the conductive film to form a resistor, a current is supplied to the resistor to heat it, and a change in the current is applied to the resistor. A hot film air flow meter for detecting the flow rate of fluid, characterized in that the spiral groove is formed by two grooves starting near both ends of the conductive film. 2. The hot film air flowmeter according to claim 1, wherein the two spiral grooves are formed starting at both ends of the insulator. 3. The hot film air flowmeter according to claim 1, wherein the starting point of the spiral groove is located at the same position as the end face of the insulator. 4. The hot spring according to claims 1 and 3, characterized in that the starting point of the spiral groove is located within 1/4 of the length of the insulator from both end positions of the insulator. Film air flow meter. 5. The hot film air flow meter according to any one of claims 1 to 4, characterized in that the spiral grooves formed in the insulator are spaced sparsely and densely in the longitudinal direction. 6. Form a conductive film on the surface of an insulator, provide a spiral groove in the conductive film to form a resistor, supply current to the resistor to heat it, and detect the flow rate of fluid from changes in this current. A hot film air flow meter, characterized in that the heating temperature distribution of the insulator is flat at the center of the insulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59052179A JPS60196625A (en) | 1984-03-21 | 1984-03-21 | Hot film air flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59052179A JPS60196625A (en) | 1984-03-21 | 1984-03-21 | Hot film air flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60196625A JPS60196625A (en) | 1985-10-05 |
| JPH0565802B2 true JPH0565802B2 (en) | 1993-09-20 |
Family
ID=12907579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59052179A Granted JPS60196625A (en) | 1984-03-21 | 1984-03-21 | Hot film air flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60196625A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3803276A1 (en) * | 1988-02-04 | 1989-08-17 | Bosch Gmbh Robert | DEVICE FOR SUCTION PIPE PRESSURE DETECTION IN AN INTERNAL COMBUSTION ENGINE |
-
1984
- 1984-03-21 JP JP59052179A patent/JPS60196625A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60196625A (en) | 1985-10-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0118117A1 (en) | Thermal air flow meter | |
| JPH1068646A (en) | Fluid heat mass flow sensor | |
| DE3006584A1 (en) | Thermal measurement of gas or liq. mass throughput - using thin film resistive heaters in metal tube sections | |
| US5398549A (en) | Flowmeter sensor | |
| US5094105A (en) | Optimized convection based mass airflow sensor | |
| JPH0495820A (en) | Thermal mass flowmeter | |
| JPS6215130B2 (en) | ||
| JPH0565802B2 (en) | ||
| CN109282910A (en) | Dual redundant temperature sensor | |
| US2337202A (en) | Resistor | |
| JPH0774790B2 (en) | Sensor used for electric heating method | |
| JP2938700B2 (en) | Thermal flow meter | |
| JP5292201B2 (en) | RTD | |
| Baughn et al. | Instrument for the measurement of heat flux from a surface with uniform temperature | |
| JPH11281445A (en) | Flow detecting element and flow sensor | |
| JP3067118B2 (en) | Thermal flow sensor | |
| JPH0529872B2 (en) | ||
| JPH0814977A (en) | Thermal type flowmeter | |
| JPH05299703A (en) | Coaxial type thermocouple | |
| JPH05215583A (en) | Thermal flow sensor | |
| JP2002310762A (en) | Flow sensor | |
| JP2645153B2 (en) | Thin film temperature sensor element | |
| JPH0442751Y2 (en) | ||
| JPS60104739U (en) | Sheathed thermocouple for simultaneous measurement of temperature and temperature difference | |
| JPH0124719Y2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |