JPH0566887B2 - - Google Patents

Info

Publication number
JPH0566887B2
JPH0566887B2 JP27081085A JP27081085A JPH0566887B2 JP H0566887 B2 JPH0566887 B2 JP H0566887B2 JP 27081085 A JP27081085 A JP 27081085A JP 27081085 A JP27081085 A JP 27081085A JP H0566887 B2 JPH0566887 B2 JP H0566887B2
Authority
JP
Japan
Prior art keywords
quaternary ammonium
silicate
sio
ammonium silicate
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27081085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62132723A (ja
Inventor
Kuniaki Maejima
Shiro Harafuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP27081085A priority Critical patent/JPS62132723A/ja
Publication of JPS62132723A publication Critical patent/JPS62132723A/ja
Publication of JPH0566887B2 publication Critical patent/JPH0566887B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicates, Zeolites, And Molecular Sieves (AREA)
JP27081085A 1985-12-03 1985-12-03 第４アンモニウムシリケ−ト粉末およびその製造法 Granted JPS62132723A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27081085A JPS62132723A (ja) 1985-12-03 1985-12-03 第４アンモニウムシリケ−ト粉末およびその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27081085A JPS62132723A (ja) 1985-12-03 1985-12-03 第４アンモニウムシリケ−ト粉末およびその製造法

Publications (2)

Publication Number Publication Date
JPS62132723A JPS62132723A (ja) 1987-06-16
JPH0566887B2 true JPH0566887B2 (2) 1993-09-22

Family

ID=17491331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27081085A Granted JPS62132723A (ja) 1985-12-03 1985-12-03 第４アンモニウムシリケ−ト粉末およびその製造法

Country Status (1)

Country Link
JP (1) JPS62132723A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5817610A (en) * 1996-09-06 1998-10-06 Olin Microelectronic Chemicals, Inc. Non-corrosive cleaning composition for removing plasma etching residues

Also Published As

Publication number Publication date
JPS62132723A (ja) 1987-06-16

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