JPH0571131B2 - - Google Patents
Info
- Publication number
- JPH0571131B2 JPH0571131B2 JP13373785A JP13373785A JPH0571131B2 JP H0571131 B2 JPH0571131 B2 JP H0571131B2 JP 13373785 A JP13373785 A JP 13373785A JP 13373785 A JP13373785 A JP 13373785A JP H0571131 B2 JPH0571131 B2 JP H0571131B2
- Authority
- JP
- Japan
- Prior art keywords
- ion implantation
- layer
- heat treatment
- lifetime killer
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Bipolar Transistors (AREA)
- Thyristors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13373785A JPS61292327A (ja) | 1985-06-19 | 1985-06-19 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13373785A JPS61292327A (ja) | 1985-06-19 | 1985-06-19 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61292327A JPS61292327A (ja) | 1986-12-23 |
| JPH0571131B2 true JPH0571131B2 (2) | 1993-10-06 |
Family
ID=15111737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13373785A Granted JPS61292327A (ja) | 1985-06-19 | 1985-06-19 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61292327A (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0247874A (ja) * | 1988-08-10 | 1990-02-16 | Fuji Electric Co Ltd | Ｍｏｓ型半導体装置の製造方法 |
-
1985
- 1985-06-19 JP JP13373785A patent/JPS61292327A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61292327A (ja) | 1986-12-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |