JPH0571148B2 - - Google Patents

Info

Publication number
JPH0571148B2
JPH0571148B2 JP61032010A JP3201086A JPH0571148B2 JP H0571148 B2 JPH0571148 B2 JP H0571148B2 JP 61032010 A JP61032010 A JP 61032010A JP 3201086 A JP3201086 A JP 3201086A JP H0571148 B2 JPH0571148 B2 JP H0571148B2
Authority
JP
Japan
Prior art keywords
substrate
stopper
acceleration sensor
semiconductor substrate
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61032010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62190774A (ja
Inventor
Koichi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP61032010A priority Critical patent/JPS62190774A/ja
Publication of JPS62190774A publication Critical patent/JPS62190774A/ja
Publication of JPH0571148B2 publication Critical patent/JPH0571148B2/ja
Granted legal-status Critical Current

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  • Pressure Sensors (AREA)
JP61032010A 1986-02-18 1986-02-18 加速度センサ Granted JPS62190774A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61032010A JPS62190774A (ja) 1986-02-18 1986-02-18 加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61032010A JPS62190774A (ja) 1986-02-18 1986-02-18 加速度センサ

Publications (2)

Publication Number Publication Date
JPS62190774A JPS62190774A (ja) 1987-08-20
JPH0571148B2 true JPH0571148B2 (it) 1993-10-06

Family

ID=12346901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61032010A Granted JPS62190774A (ja) 1986-02-18 1986-02-18 加速度センサ

Country Status (1)

Country Link
JP (1) JPS62190774A (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01233372A (ja) * 1988-03-14 1989-09-19 Murata Mfg Co Ltd 圧電型加速度センサ
DE3814952A1 (de) * 1988-05-03 1989-11-23 Bosch Gmbh Robert Sensor
BR8907573A (pt) * 1989-05-24 1991-06-18 Tselevoi N Tekhn Kooperativ St Maquina de deslocamento giratoria
JPH0413975A (ja) * 1990-05-07 1992-01-17 Nec Corp 半導体加速度センサ
JPH057006A (ja) * 1991-06-28 1993-01-14 Mitsubishi Electric Corp 半導体加速度検出装置

Also Published As

Publication number Publication date
JPS62190774A (ja) 1987-08-20

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