JPH0571559B2 - - Google Patents

Info

Publication number
JPH0571559B2
JPH0571559B2 JP6998088A JP6998088A JPH0571559B2 JP H0571559 B2 JPH0571559 B2 JP H0571559B2 JP 6998088 A JP6998088 A JP 6998088A JP 6998088 A JP6998088 A JP 6998088A JP H0571559 B2 JPH0571559 B2 JP H0571559B2
Authority
JP
Japan
Prior art keywords
inner container
container
heater
single crystal
vapor pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6998088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01242489A (ja
Inventor
Masayuki Mori
Hiromasa Yamamoto
Osamu Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIKKO KYOSEKI KK
Original Assignee
NIKKO KYOSEKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIKKO KYOSEKI KK filed Critical NIKKO KYOSEKI KK
Priority to JP6998088A priority Critical patent/JPH01242489A/ja
Publication of JPH01242489A publication Critical patent/JPH01242489A/ja
Publication of JPH0571559B2 publication Critical patent/JPH0571559B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6998088A 1988-03-23 1988-03-23 単結晶成長装置 Granted JPH01242489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6998088A JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6998088A JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Publications (2)

Publication Number Publication Date
JPH01242489A JPH01242489A (ja) 1989-09-27
JPH0571559B2 true JPH0571559B2 (fr) 1993-10-07

Family

ID=13418320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6998088A Granted JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Country Status (1)

Country Link
JP (1) JPH01242489A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020132491A (ja) * 2019-02-22 2020-08-31 インパクト エスアー 単結晶成長装置およびｉｉｉ−ｖ族半導体単結晶の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0261965U (fr) * 1988-10-27 1990-05-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020132491A (ja) * 2019-02-22 2020-08-31 インパクト エスアー 単結晶成長装置およびｉｉｉ−ｖ族半導体単結晶の製造方法

Also Published As

Publication number Publication date
JPH01242489A (ja) 1989-09-27

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