JPH01242489A - 単結晶成長装置 - Google Patents

単結晶成長装置

Info

Publication number
JPH01242489A
JPH01242489A JP6998088A JP6998088A JPH01242489A JP H01242489 A JPH01242489 A JP H01242489A JP 6998088 A JP6998088 A JP 6998088A JP 6998088 A JP6998088 A JP 6998088A JP H01242489 A JPH01242489 A JP H01242489A
Authority
JP
Japan
Prior art keywords
inner container
container
single crystal
crystal growth
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6998088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571559B2 (fr
Inventor
Masayuki Mori
雅之 森
Hiromasa Yamamoto
山本　裕正
Osamu Oda
修 小田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining Co Ltd filed Critical Nippon Mining Co Ltd
Priority to JP6998088A priority Critical patent/JPH01242489A/ja
Publication of JPH01242489A publication Critical patent/JPH01242489A/ja
Publication of JPH0571559B2 publication Critical patent/JPH0571559B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6998088A 1988-03-23 1988-03-23 単結晶成長装置 Granted JPH01242489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6998088A JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6998088A JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Publications (2)

Publication Number Publication Date
JPH01242489A true JPH01242489A (ja) 1989-09-27
JPH0571559B2 JPH0571559B2 (fr) 1993-10-07

Family

ID=13418320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6998088A Granted JPH01242489A (ja) 1988-03-23 1988-03-23 単結晶成長装置

Country Status (1)

Country Link
JP (1) JPH01242489A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0261965U (fr) * 1988-10-27 1990-05-09

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7483240B2 (ja) * 2019-02-22 2024-05-15 インパクト エスアー 単結晶成長装置およびｉｉｉ－ｖ族半導体単結晶の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0261965U (fr) * 1988-10-27 1990-05-09

Also Published As

Publication number Publication date
JPH0571559B2 (fr) 1993-10-07

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