JPH0575007A - Resin-sealed semiconductor device - Google Patents
Resin-sealed semiconductor deviceInfo
- Publication number
- JPH0575007A JPH0575007A JP3234439A JP23443991A JPH0575007A JP H0575007 A JPH0575007 A JP H0575007A JP 3234439 A JP3234439 A JP 3234439A JP 23443991 A JP23443991 A JP 23443991A JP H0575007 A JPH0575007 A JP H0575007A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- mold resin
- tab
- semiconductor chip
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
(57)【要約】
【目的】 樹脂封止型半導体装置におけるパッケージの
耐湿性を向上することが可能な技術を提供する。
【構成】 タブの上に半導体チップを搭載し、リードと
半導体チップとを電気的に接続し、モールド樹脂で封止
する樹脂封止型半導体装置において、前記タブ及びタブ
吊りリードと、リードが異なる材料で構成されている。
【効果】パッケージを基板に面実装する際、モールド樹
脂に吸湿した水分によってタブとレジンの界面に生じた
水蒸気は、タブ吊りリードを伝わって外部に排出される
ので、モールド樹脂吸湿水分の気化に伴って、モールド
樹脂と半導体チップ界面に働く応力は緩和され、パッケ
ージクラックやモールド樹脂と半導体チップ表面との
間、モールド樹脂とリードとの間の密着性劣化の低減を
はかることができる。
(57) [Summary] [Object] To provide a technique capable of improving the moisture resistance of a package in a resin-sealed semiconductor device. In a resin-sealed semiconductor device in which a semiconductor chip is mounted on a tab, the lead and the semiconductor chip are electrically connected and sealed with a molding resin, the tab and the tab suspension lead are different from the lead. Composed of materials. [Effect] When the package is surface-mounted on the substrate, water vapor generated at the interface between the tab and the resin due to the moisture absorbed by the mold resin is transmitted to the outside through the tab suspension leads, so that moisture absorbed by the mold resin is vaporized. Along with this, the stress acting on the interface between the mold resin and the semiconductor chip is relaxed, and it is possible to reduce package cracks and deterioration of adhesion between the mold resin and the surface of the semiconductor chip and between the mold resin and the leads.
Description
【0001】[0001]
【産業上の利用分野】本発明は、樹脂封止型半導体装置
に関し、特に、樹脂封止型半導体装置のパッケージに適
用して有効な技術に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin-encapsulated semiconductor device, and more particularly to a technique effectively applied to a package of a resin-encapsulated semiconductor device.
【0002】[0002]
【従来の技術】近年、電子機器の小型化の要求から、半
導体デバイスの小型化、薄型化が顕著である。最近のよ
うに小型化、薄型化されてくると半導体チップ表面での
水分濃度が飽和値に達する時間は非常に早まる。面実装
パッケージでは、製品を基板に実装する際、樹脂封止型
半導体装置(パッケージ)全体が高温となるため、構成
材料の熱膨張係数の差によりその界面に隙間が生じ、レ
ジン等のモールド樹脂とリードとの間、モールド樹脂と
半導体チップ表面との間の密着性が劣化する。特に、実
装前の保管時にモールド樹脂が吸湿している場合、この
吸湿水分は実装時の熱により気化して水蒸気となって膨
張し、半導体チップ表面とモールド樹脂との間に大きな
力が働く。その結果モールド樹脂ラックやリードとモー
ルド樹脂、半導体チップとモールド樹脂との密着性劣化
が発生し易くなる。2. Description of the Related Art In recent years, due to the demand for miniaturization of electronic equipment, miniaturization and thinning of semiconductor devices have been remarkable. With the recent miniaturization and thinning, the time required for the moisture concentration on the surface of the semiconductor chip to reach a saturation value becomes very short. In the surface mount package, when the product is mounted on the board, the temperature of the entire resin-sealed semiconductor device (package) becomes high, so a gap is created at the interface due to the difference in the thermal expansion coefficient of the constituent materials, and the mold resin such as resin And the leads and between the mold resin and the surface of the semiconductor chip deteriorate. In particular, when the mold resin absorbs moisture during storage before mounting, the absorbed moisture is vaporized by the heat during mounting to expand into steam, and a large force acts between the semiconductor chip surface and the mold resin. As a result, the adhesiveness between the mold resin rack or the lead and the mold resin, and the adhesion between the semiconductor chip and the mold resin are likely to deteriorate.
【0003】例えば、スモール・アウトライン・パッケ
ージの基板実装に際しては、量産性の高い赤外リフロー
法VPS法がしばしば用いられている。製品を基板実装
するこの方法では、パッケージ全体が高温となるため、
構成材料の熱膨張係数の差によりその界面に隙間が生
じ、モールド樹脂とリードとの間、モールド樹脂と半導
体チップの表面との間の密着性が劣化する。特に、実装
前の保管時にモールド樹脂が吸湿している場合、この吸
湿水分は、実装時の熱で気化して水蒸気となり、材料界
面に圧力を与え、密着性劣化の一大要因となっている。For example, when mounting a small outline package on a substrate, the infrared reflow method VPS method, which has high mass productivity, is often used. With this method of mounting the product on the board, the entire package becomes hot, so
A gap is created at the interface due to the difference in the coefficient of thermal expansion of the constituent materials, and the adhesion between the mold resin and the leads and between the mold resin and the surface of the semiconductor chip deteriorates. In particular, when the mold resin absorbs moisture during storage before mounting, this absorbed moisture is vaporized by the heat during mounting and becomes water vapor, which gives pressure to the material interface and is a major cause of poor adhesion. .
【0004】そこで、プラスチックICのアイランドサ
ポートの表面部分にモールド樹脂との密着性を低下させ
るような加工を施した構造にすることにより、加熱の際
に生ずる膨張した水分を逃がして、モールド樹脂の亀裂
の発生を防止する手段が開示されている(特開昭60−
208846号)。Therefore, a structure is applied to the surface portion of the island support of the plastic IC so as to reduce the adhesiveness with the mold resin, so that the expanded water generated during heating is released and the mold resin A means for preventing the occurrence of cracks has been disclosed (Japanese Patent Laid-Open No. 60-
208846).
【0005】[0005]
【発明が解決しようとする課題】しかしながら、前記従
来技術では、プラスチックICのアイランドサポートの
表面部分にモールド樹脂との密着性を低下させるような
加工を施した構造であるので、モールド樹脂との密着性
が低くなっているため、長時間使用した場合温度サイク
ル等により、モールド樹脂とリードとの間に隙間が発生
して水分が侵入するという問題があり、決定的な解決策
は見い出されていない。However, in the above-mentioned prior art, since the surface portion of the island support of the plastic IC is processed so as to reduce the adhesiveness with the mold resin, the adhesiveness with the mold resin is reduced. However, due to its low performance, there is a problem that when it is used for a long period of time, due to temperature cycling, etc., a gap occurs between the mold resin and the lead and moisture enters, and no definitive solution has been found. .
【0006】本発明の目的は、樹脂封止型半導体装置の
パッケージの耐湿性を向上することが可能な技術を提供
することにある。An object of the present invention is to provide a technique capable of improving the moisture resistance of the package of the resin-sealed semiconductor device.
【0007】本発明の前記ならびにその他の目的と新規
な特徴は、本明細書の記述及び添付図面によって明らか
になるであろう。The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.
【0008】[0008]
【課題を解決するための手段】本願において開示される
発明のうち代表的なものの概要を簡単に説明すれば、下
記の通りである。The outline of the representative one of the inventions disclosed in the present application will be briefly described as follows.
【0009】タブの上に半導体チップを搭載し、リード
と半導体チップとを電気的に接続し、モルード樹脂で封
止する樹脂封止型半導体装置において、前記タブ及びタ
ブ吊りリードと、リードが異なる材料で構成されてい
る。In a resin-sealed semiconductor device in which a semiconductor chip is mounted on a tab, the lead and the semiconductor chip are electrically connected and sealed with a mold resin, the tab and the tab suspension lead are different from the lead. Composed of materials.
【0010】[0010]
【作用】前記した手段によれば、樹脂封止型半導体装置
を基板に面実装する際、モールド樹脂に吸湿した水分に
よってタブとモールド樹脂の界面に生じた水蒸気は、タ
ブ吊りリードを伝わって外部に排出されるので、モール
ド樹脂吸湿水分の気化に伴って、モールド樹脂と半導体
チップ界面に働く応力は緩和され、モールド樹脂クラッ
クやモールド樹脂と半導体チップ表面との間、モールド
樹脂とリードとの間の密着性劣化の低減をはかることが
できる。これにより、モールド樹脂クラックの発生を防
止することができる。According to the above-mentioned means, when the resin-sealed semiconductor device is surface-mounted on the substrate, the water vapor generated at the interface between the tab and the mold resin by the moisture absorbed by the mold resin is transmitted through the tab suspension lead to the outside. As the moisture absorbed by the mold resin evaporates, the stress acting on the interface between the mold resin and the semiconductor chip is relieved, and the mold resin cracks or between the mold resin and the semiconductor chip surface, or between the mold resin and the leads. It is possible to reduce the deterioration of the adhesiveness. As a result, the occurrence of mold resin cracks can be prevented.
【0011】[0011]
【実施例】以下、本発明の実施例を図面を参照して詳細
に説明する。Embodiments of the present invention will now be described in detail with reference to the drawings.
【0012】図1は、本発明の一実施例であるスモール
・アウトライン・パッケージのリードフレーム構造を示
す平面図、図2は、本発明の樹脂封止型半導体装置の一
実施例の概略構成を示す断面図である。FIG. 1 is a plan view showing a lead frame structure of a small outline package which is an embodiment of the present invention, and FIG. 2 shows a schematic structure of an embodiment of a resin-sealed semiconductor device of the present invention. It is sectional drawing shown.
【0013】本実施例の樹脂封止型半導体装置は、図2
に示すように、タブ1の上に半導体チップ2を搭載し、
リード3と半導体チップ2とをボンディングワイヤ4に
より電気的に接続し、モールド樹脂5で封止されてい
る。The resin-sealed semiconductor device of this embodiment is shown in FIG.
As shown in, mounting the semiconductor chip 2 on the tab 1,
The lead 3 and the semiconductor chip 2 are electrically connected by a bonding wire 4 and sealed with a molding resin 5.
【0014】本実施例のリードフレームは、図1に示す
ように、リード3Aの材質と、タブ1及びタブ吊りリー
ド1Aの材質が異なる材料で構成されている。例えば、
タブ1及びタブ吊りリード1Aの材料としては、Fe系
の42アロイ(42%Ni・Fe合金又は50%Ni・Fe合
金)を用い、リード3Aの材料としては、Cu系のCu/
2%Sn/0.2%Ni(Cuの上に2%Snを被覆しその
上に0.2%Niを被覆したものである)を用いる。In the lead frame of this embodiment, as shown in FIG. 1, the material of the lead 3A is different from the material of the tab 1 and the tab suspension lead 1A. For example,
The tab 1 and the tab suspension lead 1A are made of Fe-based 42 alloy (42% Ni.Fe alloy or 50% Ni.Fe alloy), and the lead 3A is made of Cu-based Cu /
2% Sn / 0.2% Ni (2% Sn on Cu, 0.2% Ni on it) is used.
【0015】このように、タブ1及びタブ吊りリード1
Aの材料として、Fe系の42アロイを用いた場合、図
3図(温度サイクル試験結果を示す図)からわかるよう
に、樹脂封止型半導体装置の温度サイクル特性(寿命)
を向上することができる。また、信号用リードの材質と
しては、Fe系に比べCu系が安定して耐湿性の良い結
果が得られているが、そのメカニズムについては解明さ
れていない。As described above, the tab 1 and the tab suspension lead 1
When Fe-based 42 alloy is used as the material of A, as shown in FIG. 3 (a diagram showing the results of the temperature cycle test), the temperature cycle characteristics (lifetime) of the resin-sealed semiconductor device are shown.
Can be improved. As for the material of the signal leads, Cu-based materials have more stable and better moisture resistance than Fe-based materials, but the mechanism has not been clarified.
【0016】以上の説明からわかるように、本実施例に
よれば、リード3の材料としてモールド樹脂5との密着
性の良いCu系の材質、タブ1及びタブ吊りリード1A
の材料としてCu系の材質に比べ密着性の弱いFe系の
材質を使用しているため、Cu系の材質のみで構成され
る構造に比べ、実装時にタブ1とレジン等のモールド樹
脂5との界面に生じた水蒸気は、タブ吊りリード1Aを
伝わって外部に達し易い。この効果により、実装時にモ
ールド樹脂5に吸湿した水分の気化に伴って、モールド
樹脂5と半導体チップ2との界面に働く応力は緩和さ
れ、モールド樹脂クラックや密着性劣化に対する信頼性
は、現時点で耐湿性の良いと言われているCu系の材質
のみからなるタブ1,タブ吊りリード1A及びリード3
を用いたパッケージ構造よりもさらに高めることができ
る(図3を参照)。As can be seen from the above description, according to this embodiment, the lead 3 is made of a Cu-based material having good adhesion to the mold resin 5, the tab 1 and the tab suspension lead 1A.
Since a Fe-based material, which has a weaker adhesiveness than the Cu-based material, is used as the material of, the tab 1 and the mold resin 5 such as resin are mounted at the time of mounting as compared with the structure composed of only the Cu-based material. The water vapor generated at the interface easily reaches the outside through the tab suspension lead 1A. Due to this effect, the stress acting on the interface between the mold resin 5 and the semiconductor chip 2 is relieved as the moisture absorbed by the mold resin 5 is vaporized at the time of mounting, and the reliability against the mold resin crack and the adhesion deterioration is at present. A tab 1, a tab suspension lead 1A and a lead 3 which are made of only a Cu-based material which is said to have good moisture resistance.
Can be further enhanced than the package structure using (see FIG. 3).
【0017】以上、本発明を実施例にもとづき具体的に
説明したが、本発明は、前記実施例に限定されるもので
はなく、その要旨を逸脱しない範囲において種々変更可
能であることは言うまでもない。Although the present invention has been specifically described based on the embodiments, it is needless to say that the present invention is not limited to the embodiments and various modifications can be made without departing from the scope of the invention. ..
【0018】[0018]
【発明の効果】本願において開示される発明のうち代表
的なものによって得られる効果を簡単に説明すれば、下
記の通りである。The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
【0019】樹脂封止型半導体装置を基板に面実装する
際、モールド樹脂に吸湿した水分によってタブとレジン
の界面に生じた水蒸気は、タブ吊りリードを伝わって外
部に排出されるので、モールド樹脂吸湿水分の気化に伴
って、モールド樹脂と半導体チップ界面に働く応力は緩
和され、モールド樹脂クラックやモールド樹脂と半導体
チップ表面との間、モールド樹脂とリードとの間の密着
性劣化の低減をはかることができる。これにより、モー
ルド樹脂クラックの発生を防止することができ、樹脂封
止型半導体装置の信頼性を向上することができる。When the resin-encapsulated semiconductor device is surface-mounted on the substrate, water vapor generated at the interface between the tab and the resin due to moisture absorbed by the mold resin is discharged to the outside through the tab suspension leads. The stress acting on the interface between the mold resin and the semiconductor chip is relieved as the absorbed moisture evaporates, and the crack of the mold resin and the deterioration of the adhesion between the mold resin and the surface of the semiconductor chip and between the mold resin and the leads are reduced. be able to. As a result, the occurrence of mold resin cracks can be prevented, and the reliability of the resin-sealed semiconductor device can be improved.
【図1】 図1は、本発明の一実施例であるスモール・
アウトライン・パッケージのリードフレーム構造を示す
平面図、FIG. 1 is a perspective view of a small type according to an embodiment of the present invention.
A plan view showing the lead frame structure of the outline package,
【図2】 図2は、本発明の樹脂封止型半導体装置の一
実施例の概略構成を示す断面図、FIG. 2 is a sectional view showing a schematic configuration of an embodiment of a resin-sealed semiconductor device of the present invention,
【図3】 本実施例の温度サイクル試験結果を示す図。FIG. 3 is a diagram showing a result of a temperature cycle test of this example.
1…タブ、1A…タブ吊りリード、2…半導体チップ、
3…リード、4…ボンディングワイヤ、5…モールド樹
脂。1 ... tab, 1A ... tab suspension lead, 2 ... semiconductor chip,
3 ... Lead, 4 ... Bonding wire, 5 ... Mold resin.
Claims (1)
ドと半導体チップとを電気的に接続し、モールド樹脂で
封止する樹脂封止型半導体装置において、前記タブ及び
タブ吊りリードと、リードが異なる材料で構成されてい
ることを特徴とする樹脂封止型半導体装置。1. A resin-sealed semiconductor device in which a semiconductor chip is mounted on a tab, the lead and the semiconductor chip are electrically connected to each other, and the semiconductor chip is sealed with a mold resin. A resin-encapsulated semiconductor device, characterized in that is composed of different materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3234439A JPH0575007A (en) | 1991-09-13 | 1991-09-13 | Resin-sealed semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3234439A JPH0575007A (en) | 1991-09-13 | 1991-09-13 | Resin-sealed semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0575007A true JPH0575007A (en) | 1993-03-26 |
Family
ID=16971029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3234439A Pending JPH0575007A (en) | 1991-09-13 | 1991-09-13 | Resin-sealed semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0575007A (en) |
-
1991
- 1991-09-13 JP JP3234439A patent/JPH0575007A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6177718B1 (en) | Resin-sealed semiconductor device | |
| JPH11135679A (en) | Electronic devices and semiconductor packages | |
| KR0148080B1 (en) | Lead frame manufacture method and the use semiconductor package manufactur mathod | |
| US20080283978A1 (en) | Leadframe For a Semiconductor Device | |
| US6576491B1 (en) | Methods for producing high reliability lead frame and packaging semiconductor die using such lead frame | |
| JP3075617B2 (en) | Semiconductor integrated circuit device | |
| WO2004030075A1 (en) | Method for manufacturing semiconductor device | |
| JPH0274065A (en) | Lead frame | |
| JPH0345542B2 (en) | ||
| JPH0338057A (en) | Flagless lead frame, and package using it, and manufacture | |
| JPS6329960A (en) | Lead frame for resin seal type semiconductor device | |
| JPH01209751A (en) | Lead frame | |
| JPH02178953A (en) | Resin-sealed semiconductor device | |
| JPH05136183A (en) | Integrated circuit device | |
| JP3287327B2 (en) | Manufacturing method of semiconductor resin sealed package | |
| JPH06349983A (en) | Manufacture of semiconductor device | |
| JPH0637221A (en) | Resin-sealed semiconductor device | |
| JPH06334106A (en) | Resin-sealed semiconductor device | |
| JPH0945804A (en) | Semiconductor package | |
| JPH0661379A (en) | Semiconductor device | |
| JPH07263468A (en) | Semiconductor integrated circuit device and lead frame | |
| JPH08279585A (en) | Lead frame and semiconductor device thereof | |
| JPH0870089A (en) | Semiconductor device and manufacturing method thereof | |
| JPS62249461A (en) | Resin-sealded semiconductor device | |
| JPH0982879A (en) | Resin-sealed semiconductor device |