JPH0575279B2 - - Google Patents
Info
- Publication number
- JPH0575279B2 JPH0575279B2 JP61219313A JP21931386A JPH0575279B2 JP H0575279 B2 JPH0575279 B2 JP H0575279B2 JP 61219313 A JP61219313 A JP 61219313A JP 21931386 A JP21931386 A JP 21931386A JP H0575279 B2 JPH0575279 B2 JP H0575279B2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- ray
- vacuum
- rays
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005192 partition Methods 0.000 claims description 29
- 239000011888 foil Substances 0.000 claims description 17
- 238000007493 shaping process Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 11
- 230000005469 synchrotron radiation Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 101700004678 SLIT3 Proteins 0.000 description 1
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 1
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 1
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219313A JPS6375600A (ja) | 1986-09-19 | 1986-09-19 | 広帯域低損失ｘ線スリツト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219313A JPS6375600A (ja) | 1986-09-19 | 1986-09-19 | 広帯域低損失ｘ線スリツト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6375600A JPS6375600A (ja) | 1988-04-05 |
| JPH0575279B2 true JPH0575279B2 (it) | 1993-10-20 |
Family
ID=16733527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61219313A Granted JPS6375600A (ja) | 1986-09-19 | 1986-09-19 | 広帯域低損失ｘ線スリツト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375600A (it) |
-
1986
- 1986-09-19 JP JP61219313A patent/JPS6375600A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6375600A (ja) | 1988-04-05 |
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