JPH058674Y2 - - Google Patents

Description

[Detailed explanation of the invention] (Field of industrial application) This invention is a method for depositing and etching on semiconductor circuit boards.
The present invention relates to a device that externally inputs rotational power for moving a substrate into a vacuum chamber for performing etching.

(Prior technology) Electrons generated in an ion source in a vacuum chamber are vibrated by microwaves, and highly ionized plasma is generated within the ion source using electron cyclotron resonance, and electrons and ions are extracted from the ion source. Semiconductor circuit forming apparatuses for depositing or etching semiconductor circuits are well known. Normally, when forming such semiconductor circuits, it is necessary to rotate or move the substrate and other components inside the vacuum chamber, and these operations utilize rotational power input into the vacuum chamber from the outside. It is being done.

2. Description of the Related Art Conventionally, devices shown in FIGS. 2 to 4 are well known as devices for applying rotational power into a vacuum chamber from the outside. Each of these devices includes an electric motor 1 that generates rotational force outside the vacuum chamber, and a power transmission mechanism 2 that transmits the rotational force of the electric motor 1 to the inside of the vacuum chamber. The device shown in FIG. 2 transmits the rotation of an electric motor 1 to an input transmission shaft 4 via a coupling 3, and the oscillation movement of this input transmission shaft 4 is transmitted to an interposed metal fitting 5.
The rotational motion is transmitted to the output transmission shaft 6 via the rotary motion. The joint between the input transmission shaft 4 and the output transmission shaft 6 is housed in a holding case 7 that is airtightly fixed to the wall 21 of the vacuum chamber through a gasket 22 with a mounting screw or the like. As a result of the end of the bellows 9 being hermetically fixed to the shaft hole 8 of the metal fitting 5 and the holding case 7 by welding or the like, the output transmission shaft 6 is shielded from the outside air, and the rotational force of the electric motor 1 is transferred into the vacuum chamber. This allows input.

In addition, the device shown in FIG.
A transmission shaft 11 is inserted therein to transmit the rotation of the sleeve case 10 and the transmission shaft 11, and airtightness between the sleeve case 10 and the transmission shaft 11 is ensured by an elastomer material 12.

Furthermore, the apparatus shown in FIG.
The rotor 1 is housed in a shielding case 13 that is airtightly fixed to the
4 is provided rotatably, while this shielding case 13
A rotating case 16 having a magnet 15 on its outer periphery.
are rotatably fitted through bearings, and the rotating case 16 is rotated by the electric motor 1. The rotation of the rotating case 16 generates a rotating magnetic field by the magnet 15, which rotates the rotor 14 and inputs rotational force into the vacuum chamber.

In each of the above devices, the rotational force input into the vacuum chamber is transmitted to the substrate fixing table etc. via a desired intermediary device (not shown), and the substrate is rotated.

(Problems to be solved by the invention) However, each of the above-mentioned conventional devices is a separate and independent device consisting of an electric motor 1 that generates rotational force and a power transmission mechanism 2 that transmits the generated rotational force into the vacuum chamber. Since the apparatus is configured by combining the above, there is a problem in that the apparatus has a complicated structure and cannot be avoided from increasing in size and weight.

The present invention was made in order to solve the above conventional problems, and its purpose is to provide a rotary power input device for vacuum equipment that can simplify the equipment configuration and effectively reduce the size and weight of the equipment. It is about providing.

(Means for solving the problems) In order to achieve the above object, the present invention is configured as follows. That is, the present invention includes a shielding case that is airtightly installed on the wall of a vacuum chamber to shield the outside air, a rotor that is rotatably supported within the shielding case, and a shielding case that is placed opposite to the rotor. This is a rotary power input device for a vacuum apparatus, which includes a stator that applies rotational force to a rotor using a rotating magnetic field provided around the wall surface of the rotor.

(Function) In the present invention having the above configuration, rotational power is input into the vacuum chamber as follows. First, by applying a voltage to the stator, a rotating magnetic field is generated in the stator, and an electromotive force is induced in the rotor by electromagnetic induction due to this rotating magnetic field, and the current flowing due to the electromotive force and the rotating magnetic field are Rotational force acts on the rotor due to the interaction of This rotational force causes the rotor to rotate, and in this case, by extending the rotor's rotating shaft into the vacuum chamber, the rotational power of the rotor is directly input into the vacuum chamber.

(Example) Hereinafter, an example of the present invention will be described based on the drawings. FIG. 1 shows a cross-sectional view of an embodiment of the present invention, in which a shielding case 17 is attached to a wall 21 of a vacuum chamber in which deposition and etching for semiconductor circuit formation are performed via a packing 22 for mounting screws, etc. It is airtightly fixed. The shielding case 17 is formed of a metal such as non-magnetic shielding stainless steel 304 into a cylindrical shape with one end open and the other end closed, and a step is formed at each of the closed end and the open end, and both steps are formed. Bearings 18a and 18b are fitted and fixed to the shielding case 17 using a retaining ring 23 as necessary, and the rotor 19 is rotatably supported with respect to the shielding case 17 via the bearings 18a and 18b. . A stator 20 formed of a coil or the like is provided around the outer peripheral surface of the shielding case 17 so as to face the outer peripheral surface of the rotor 14 .

Therefore, by applying a voltage to the coil of the stator 20, a rotating magnetic field is generated in the stator 20, and this rotating magnetic field induces an electromotive force in the rotor 19, and the current due to this electromotive force and the rotating magnetic field are Rotational force is generated in the rotor 19 due to the interaction.

By the way, the rotating shaft 19a on one side of the rotor 19
extends into the vacuum chamber through the bearing 18b, and a mediating device (not shown) is connected to the tip of the rotor 19, and the rotational force of the rotor 19 is used to rotate substrates and other objects in the vacuum chamber. The member can be rotated or moved in a straight line.

As explained above, according to this embodiment, by applying a voltage to the coil of the stator 20, it becomes possible to directly input the rotational force of the rotor 19 into the vacuum chamber. Therefore, unlike conventional devices, the device of this embodiment does not require a complicated configuration in which the rotational force of the electric motor is input into the vacuum chamber via a separate power transmission mechanism, and the connection between the electric motor and the power transmission mechanism is reduced. Since both functions are integrated with a simple configuration, it is possible to significantly reduce the size and weight of the device.

(Effects of the invention) Since the present invention is configured as explained above, it is completely different from the configuration of the conventional device, that is, a configuration in which individual electric motors and power transmission mechanisms are combined, and the function of the electric motor and the power transmission mechanism are Since the functions of the mechanism are integrated with a simple configuration, it is possible to effectively reduce the size and weight of the device.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing one embodiment of the present invention;
4 to 4 are cross-sectional views showing the structure of a conventional device. DESCRIPTION OF SYMBOLS 1... Electric motor, 2... Power transmission mechanism, 3... Coupling, 4... Input transmission shaft, 5... Interposition metal fittings, 6... Output transmission shaft, 7... Holding case, 8...
...shaft hole, 9 ... bellows, 10 ... sleeve case, 11 ... transmission shaft, 12 ... elastomer material, 1
3... Shielding case, 14... Rotor, 15... Magnet, 16... Rotating case, 17... Shielding case, 18a, 18b... Bearing, 19... Rotor, 19a... Rotating shaft, 20... ...Stator, 21...
...Wall part, 22...Packskin, 23...Retaining ring.

Claims (1)

[Scope of utility model registration request] A shielding case that is airtightly attached to the wall of the vacuum chamber and blocks outside air, a rotor that is rotatably supported in the shielding case, and a rotor that is installed around the wall of the shielding case opposite to the rotor. A rotary power input device for a vacuum apparatus, comprising a stator that applies rotational force to a rotor using a rotating magnetic field.