JPH059227B2 - - Google Patents

Info

Publication number
JPH059227B2
JPH059227B2 JP58168142A JP16814283A JPH059227B2 JP H059227 B2 JPH059227 B2 JP H059227B2 JP 58168142 A JP58168142 A JP 58168142A JP 16814283 A JP16814283 A JP 16814283A JP H059227 B2 JPH059227 B2 JP H059227B2
Authority
JP
Japan
Prior art keywords
surface plate
wrapping
processing
lap
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58168142A
Other languages
Japanese (ja)
Other versions
JPS6062459A (en
Inventor
Juji Ochiai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58168142A priority Critical patent/JPS6062459A/en
Publication of JPS6062459A publication Critical patent/JPS6062459A/en
Publication of JPH059227B2 publication Critical patent/JPH059227B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

[産業上の利用分野] 本発明は、磁気ヘツド等の2種以上の材質から
成る複合材料のラツピング加工方法に関するもの
である。 [従来の技術] 磁気ヘツドのような高精度部品の仕上には通常
ラツピング加工が採用されている。 磁気ヘツドには、硬さの異なる異種材質から成
る複合材料が用いられるが、従来はこの材料ごと
の加工性の違いにより生じる加工量の差、いわゆ
る加工段差についれは何ら考慮されていなかつ
た。例えば、磁気ヘツドにおいては、磁性体が他
の材料より窪んでしまうと、磁性媒体との距離が
大きくなり電気特性が悪くなる。このため加工段
差は極力小さくする必要がある。 このように複合材料のラツピング加工において
は、長期間にわたり加工面の形状精度を高く加工
するとともに、表面粗さや加工段差などの精度よ
く加工することが求められる。 また、硬さの異なる異種材料から構成される複
合材料をラツピング加工する場合、加工物はラツ
プ定盤の形状が転写されるためラツプ定盤の形状
を高精度に保つ必要がある。 しかしながら、ラツピング加工においては、加
工物を加工する際に、ラツプ定盤と加工物の間に
砥粒を介在させ一定加圧状態で相対運動させるた
め、加工物とともにラツプ定盤も削れる。このた
め、加工時間(加工個数)が増すにつれラツプ定
盤の形状が劣化し、加工物の形状も落下する。っ
そして、この加工物の形状劣化を防止するため定
期的にラツプ定盤の形状修正を行なう必要が有
る。従来は、軟質金属のラツプ定盤を用いていた
が、軟らかいため、取扱いがむずかしく、傷が入
りやすいこと、又加工物の加工量に比べ、ラツプ
定盤の摩耗量が多いため、ラツプ定盤の形状劣化
が著しく形状修正の周期が短い欠点があつた。 [発明が解決しようとする課題] 本発明の目的は、加工段差の小さい複合材料の
ラツピング加工方法で提供することにある。 [課題を解決するための手段] 少なくとも1種はセラミツクスより成る2種以
上の異種材質から成る複合材料を、アルミナを主
成分としかつ、かさ比重が3.4〜3.8となるように
砥粒が入り込む程度の空孔を均一に分散させたラ
ツプ定盤によりラツピングすることにより、加工
段差を小さくすることを特徴とする。 [作用] ラツプ定盤に均一に分散させた空孔に微研磨砥
粒が入り込み、保持されるため、定盤上に散在す
る砥物により比較的柔らかい材質が早く研磨され
ることによつて生じる加工段差を防止すると共
に、定盤の摩耗も防止する。 [実施例] 本発明の具体的実施例を図を用いて説明する。 (実施例1) 加工試料が2種以上の異種材質から成る複合材
料を加工する場合、材料間の加工性の違いにより
段差が発生する。例えばチタンカーボン系アルミ
ナセラミツク材(ビツカース硬度Hv≒2000)の
如き非常に硬い材料とパーマロイ(Hv≒1500)
の如く柔らかい材料より構成された材料を加工す
ると段差が発生する。アルミナセラミツク定盤の
かさ比重と加工段差の関係を表1に示す。かさ比
重が3.9でアルミナ含有率が高いラツプ定盤を用
いて加工した場合は加工段差は大きく0.05〜
0.07μmであつた。定盤の主成分であるアルミナ
にカーボン等の添加の添加物を均一に混入し、ア
ルミナ含有率を低くして、微粉末である砥粒が入
り込める程度の大きさの空孔を定盤上に均一に分
布させる。この定盤上に均一に分散した空孔を多
くするにつれて加工段差は小さくなり、かさ比重
3.55近傍で最小となる。さらに小さくすると均一
に分布した空孔同士が干渉するため逆に段差は大
きくなる。 微小すきまを保ちつつ読み書きする磁気デイス
ク装置用浮動磁気ヘツドの場合、加工段差が大き
いと電気特性が劣化するので、0.05〜0.06μm以下
にする必要がある。上述した結果からかさ比重
は、3.4〜3.8が最適範囲である。
[Industrial Field of Application] The present invention relates to a wrapping method for a composite material made of two or more materials, such as a magnetic head. [Prior Art] Wrapping is usually used to finish high-precision parts such as magnetic heads. Composite materials made of different materials with different hardnesses are used in the magnetic head, but in the past, no consideration was given to the differences in processing amount caused by the differences in workability of each material, so-called processing steps. For example, in a magnetic head, if the magnetic material is recessed relative to other materials, the distance from the magnetic medium increases and the electrical characteristics deteriorate. For this reason, it is necessary to make the processing step difference as small as possible. As described above, in the wrapping process of composite materials, it is required to process the processed surface with high shape accuracy over a long period of time, and to process the surface roughness and processing steps with high precision. Furthermore, when wrapping a composite material made of different materials having different hardnesses, the shape of the wrapping plate is transferred to the workpiece, so it is necessary to maintain the shape of the wrapping plate with high precision. However, in lapping processing, when processing a workpiece, abrasive grains are interposed between the lapping surface plate and the workpiece, and the lapping surface plate is moved relative to the workpiece under constant pressure, so that the lapping surface plate is also ground together with the workpiece. For this reason, as the machining time (number of pieces to be machined) increases, the shape of the lap surface plate deteriorates and the shape of the workpiece also falls. In order to prevent deterioration of the shape of the workpiece, it is necessary to periodically correct the shape of the lap surface plate. Conventionally, a lap surface plate made of soft metal was used, but because it is soft, it is difficult to handle and easily scratches, and the amount of wear on the lap surface plate is large compared to the amount of workpiece processed. The disadvantage was that the shape deterioration was significant and the shape correction cycle was short. [Problems to be Solved by the Invention] An object of the present invention is to provide a method for wrapping a composite material with small processing steps. [Means for solving the problem] A composite material consisting of two or more different materials, at least one of which is ceramic, is made of alumina as a main component, and abrasive grains are inserted so that the bulk specific gravity is 3.4 to 3.8. The process is characterized in that the processing steps are reduced by lapping with a lapping surface plate in which holes are evenly distributed. [Effect] Fine abrasive grains enter and are held in the pores uniformly distributed on the lap surface plate, so relatively soft materials are quickly polished by the abrasive particles scattered on the surface plate. This prevents machining steps and also prevents surface plate wear. [Example] Specific examples of the present invention will be described with reference to the drawings. (Example 1) When processing a composite material in which the processing sample is made of two or more different materials, a difference in level occurs due to the difference in workability between the materials. For example, very hard materials such as titanium carbon-based alumina ceramic materials (Vickers hardness Hv≒2000) and permalloy (Hv≒1500)
When processing a material made of a soft material such as, a step occurs. Table 1 shows the relationship between the bulk specific gravity of the alumina ceramic surface plate and the processing step. When machining is performed using a lap surface plate with a bulk specific gravity of 3.9 and a high alumina content, the machining level difference is large, from 0.05 to 0.05.
It was 0.07μm. Additives such as carbon are evenly mixed into alumina, which is the main component of the surface plate, to lower the alumina content and create holes on the surface plate that are large enough to allow the abrasive grains, which are fine powder, to enter. Evenly distributed. As the number of holes evenly distributed on this surface plate increases, the processing step becomes smaller and the bulk specific gravity becomes smaller.
It becomes minimum near 3.55. If it is made even smaller, the evenly distributed holes will interfere with each other, so the level difference will become larger. In the case of a floating magnetic head for a magnetic disk device that reads and writes while maintaining a minute gap, if the processing step is large, the electrical characteristics will deteriorate, so it is necessary to keep the gap to 0.05 to 0.06 μm or less. From the above results, the optimum bulk specific gravity range is 3.4 to 3.8.

【表】 表2にラツプ定盤材質として錫と、アルミナセ
ラミツクの加工特性の比較を示す。加工試料は、
チカンカーボン系のアルミナセラミツク材で、ラ
ツプ砥粒はダイヤモンド粉末を用いた。加工表面
のあらさは錫ラツプで0.01μmRmaxに対し、ア
ルミナセラミツク材では0.015μRmaxであるが、
加工能率、加工面形状は大差ない。ただし、ラツ
プ定盤の寿命を、加工面の真直度が0.05μm/
4nmを満たす加工個数と定義して比較すると、錫
ラツプの場合100〜200個に対し、アルミナセラミ
ツクでは400個以上と2倍以上長く使用できる。
[Table] Table 2 shows a comparison of the processing characteristics of tin and alumina ceramic as lap surface plate materials. The processed sample is
It is made of carbon-based alumina ceramic material, and the lap abrasive grains are made of diamond powder. The roughness of the machined surface is 0.01μmRmax for tin lap, while it is 0.015μRmax for alumina ceramic material.
There is not much difference in machining efficiency and machined surface shape. However, the life of the lap surface plate is limited by the straightness of the machined surface of 0.05μm/
Defining and comparing the number of processed parts satisfying 4nm, tin wraps have 100 to 200 parts, while alumina ceramics have more than 400 parts, which can be used for more than twice as long.

【表】 (実施例2) 実施例1におけるかさ比重3.55のアルミナセラ
ミツクの材料を用い図1に示すラツプ定盤を作成
する。図1において、1はラツプ定盤上部位で、
a面はラツプ加工面であり、鋳込み成形などの方
法で作成する。2はラツプ定盤下部位で、3は冷
却又は加熱するための流体を誘導する溝であり、
泥奨法などの方法で作製する。4は流体導入口、
5は流体排出口であり、1と2は、成形接合にて
一体化する。 本ラツプを用い、ダイヤモンド砥粒を用いてチ
タニア系アルミナセラミツク材(Hv≒1200)と
パーマロイより構成された材料を加工した結果、
室温(約20℃)では、加工段差が0.09μmである
が、ラツプ定盤を5℃以下に冷却して加工した結
果、加工段差は0.03μm以下と低減でき、冷却溝
による冷却効果があることがわかつた。又加工面
の平面度は、0.03μm/4mmと良好であり、温度
変化によるラツプ定盤の変形も少ないことがわか
つた。 アルミナセラミツク定盤のかさ比重が3.4〜3.8
の範囲であれば、上記したと同様な効果があるこ
とは明らかである。また実施例1において使用し
たチタンカーボン系アルミナセラミツク材とパー
マロイの組合せをはじめジルコニア系セラミツク
スとパーマロイの組合せなど、ビツカース硬度の
比が13倍前後の2種類以上の異種材質から成る複
合材料でも、加工段差を低減するという効果が得
られることは明らかである。 [発明の効果] 本発明によれば、硬さの異なる異種材質より成
る複合材料のラツピング加工において、現状のラ
ツプに比べ定盤の形状劣化の割合を少なくし、長
い期間高精度加工ができる効果がある。さらに、
硬いため取扱い中に傷等が入りにくく、作業性の
向上も認められる。 又、冷却、加熱に伴うラツプ定盤の変形は、同
一材料より構成されているため非常に少なくラツ
プ定盤の管理を容易にし、複合材料のラツピング
加工において、高精度の加工を再現性良く出来る
効果がある。
[Table] (Example 2) Using the alumina ceramic material of Example 1 with a bulk specific gravity of 3.55, a lap surface plate shown in FIG. 1 was created. In Fig. 1, 1 is the part on the lap surface plate;
The a-side is a lapped surface and is created by a method such as casting. 2 is a lower part of the lap surface plate; 3 is a groove for guiding fluid for cooling or heating;
It is made using methods such as the Doshoho method. 4 is a fluid inlet;
5 is a fluid discharge port, and 1 and 2 are integrated by molding and joining. As a result of processing a material composed of titania-based alumina ceramic material (Hv≒1200) and permalloy using diamond abrasive grains using this lap,
At room temperature (approximately 20℃), the machining step is 0.09μm, but as a result of cooling the lap surface plate to 5℃ or less, the machining step can be reduced to 0.03μm or less, and the cooling groove has a cooling effect. I understood. Furthermore, the flatness of the machined surface was good at 0.03 μm/4 mm, and it was found that there was little deformation of the lap surface plate due to temperature changes. Bulk specific gravity of alumina ceramic surface plate is 3.4 to 3.8
It is clear that within the range of , the same effects as described above can be obtained. In addition, even composite materials made of two or more different materials with a Vickers hardness ratio of around 13 times, such as the combination of titanium carbon-based alumina ceramic material and permalloy used in Example 1, and the combination of zirconia-based ceramics and permalloy, can be processed. It is clear that the effect of reducing the level difference can be obtained. [Effects of the Invention] According to the present invention, in lapping processing of composite materials made of different materials with different hardnesses, the rate of shape deterioration of the surface plate is reduced compared to the current wrapping, and high precision processing can be performed for a long period of time. There is. moreover,
Because it is hard, it is difficult to get scratches during handling, and it is also recognized to improve workability. In addition, the deformation of the lapping surface plate due to cooling and heating is extremely small because it is made of the same material, making it easy to manage the lapping surface plate, and enabling high-precision processing with good reproducibility in wrapping processing of composite materials. effective.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、a,bは、ラツプ定盤の各平面及び
正面断面図である。 符号の説明、3……流体誘導溝、4,5……流体
導入、排出口。
In FIG. 1, a and b are plane and front sectional views of the lap surface plate. Explanation of symbols: 3...Fluid guide groove, 4, 5...Fluid introduction, discharge port.

Claims (1)

【特許請求の範囲】 1 少なくとも1種はセラミツクスより成る2種
以上の異種材質から成る複合材料を、アルミナを
主成分としかつ、かさ比重が3.4〜3.8となるよう
に砥粒が入り込む程度の空孔を均一に分散させた
ラツプ定盤によりラツピングすることを特徴とす
る複合材料のラツピング加工方法。 2 前記ラツプ定盤に流体誘導用の溝を設け、冷
却しながら加工することを特徴とする特許請求の
範囲第1項記載の複合材料のラツピング加工方
法。
[Scope of Claims] 1. A composite material consisting of two or more different materials, at least one of which is ceramic, is made of alumina as a main component, and is made of a material having a bulk density of 3.4 to 3.8. A method for wrapping a composite material, which is characterized by wrapping using a wrapping surface plate with uniformly distributed holes. 2. The method for wrapping a composite material according to claim 1, wherein grooves for guiding fluid are provided in the wrapping surface plate, and the wrapping is performed while cooling.
JP58168142A 1983-09-14 1983-09-14 Ceramic lapping surface plate Granted JPS6062459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58168142A JPS6062459A (en) 1983-09-14 1983-09-14 Ceramic lapping surface plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58168142A JPS6062459A (en) 1983-09-14 1983-09-14 Ceramic lapping surface plate

Publications (2)

Publication Number Publication Date
JPS6062459A JPS6062459A (en) 1985-04-10
JPH059227B2 true JPH059227B2 (en) 1993-02-04

Family

ID=15862606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58168142A Granted JPS6062459A (en) 1983-09-14 1983-09-14 Ceramic lapping surface plate

Country Status (1)

Country Link
JP (1) JPS6062459A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101972998A (en) * 2010-08-30 2011-02-16 兰州瑞德实业集团有限公司 Lower polishing disk of polishing machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033624B2 (en) * 1976-06-09 1985-08-03 東芝セラミツクス株式会社 Silicon wafer polishing jig

Also Published As

Publication number Publication date
JPS6062459A (en) 1985-04-10

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