JPH0592343A - Movable guiding device - Google Patents

Abstract

(57) [Abstract] [Purpose] The Joule heat generated from the coil portion of the linear motor in the moving guide device of the moving body is cooled by using the linear motor in the semiconductor manufacturing equipment or the precision machine tool as the driving means, and the heat generated by the driving means is generated. The purpose of this is to prevent the thrust from decreasing and to maintain a stable temperature for the entire stage to enable highly accurate position movement control. [Structure] For example, in the first driving means, the cooling fluid filled in the first stator 62 in the first driving means 23 is connected to one end of the first stator 62. Through the circulation path 66 of the first circulation means 68 by the suction force of the first circulation means 68. As a result, the heat generated in the coil is conducted to the stator. In order to remove this heat efficiently, a fin structure is provided inside the first stator 62 in order to maximize the area in contact with the cooling fluid. The stator 62 can be cooled. It is possible to prevent the thrust from decreasing due to heat generation of the coil surrounding the first stator 62 and keep the entire stage at a steady temperature. The same applies to the second drive means 26.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving guide device for a moving body in a semiconductor manufacturing apparatus, a precision machine tool or the like.

[0002]

2. Description of the Related Art Conventionally, in a movement guide device for moving a conveyed object to a predetermined position, a stage capable of reciprocating on a fixed bed, for example, in directions of two orthogonal axes, a guide for holding these stages, and a drive for driving the stages. It is configured by means. Generally, a ball screw and a step motor, for example, are used as the driving means.However, in the case of high-precision positioning, friction acting between the ball screw and the nut and residual vibration due to low rigidity of the ball screw occur in the above configuration. The positioning time may be long. For this reason, recently, many movement guide devices have been adopted in which a linear motor that does not cause friction and has high rigidity is used as a drive means. FIG. 6 is a diagram showing the configuration of a movement guide device using a linear motor. On the fixed bed 7, the first stage 1 is held and guided by the guide 2 and reciprocates in the directions X1 and X2 by the first driving means 3. On the first stage, the second stage 4 is held and guided by the guide 5 and reciprocates in the directions Y1 and Y2 by the second driving means 6. Therefore, the second stage 4 on which the transported object is placed is X1, by the first stage and itself.
It is possible to move in the X2, Y1, and Y2 directions to move the conveyed product to a predetermined position. The driving means 3 and 6 show the structure of a linear motor, and the stator 5 around which a coil is wound.
2, 55 and movable elements 50, 53 to which permanent magnets are fixed are shown in FIG. 7 and FIG. 8 which are sectional views of the driving means in the Y1, Y2 directions and the X1, X2 directions.

[0003]

However, in such a structure, when the first stage 1 and the second stage 4 are moved to move the transported object to a predetermined position,
An electric current flows through the stators 52 and 55 to generate Joule heat from the coils. The generated heat reduces the efficiency of the driving means and reduces thrust. Moreover, the generated heat causes a temperature distribution that causes thermal deformation. This temperature distribution adversely affects the mechanical accuracy of the stages, guides, etc., and there is a problem that the prescribed performance cannot be obtained.

In view of the above problems, the present invention cools the Joule heat generated in the coil of the stator of the driving means of the stage to prevent the thrust of the driving means from lowering, and keeps the entire stage at a steady temperature to move the position with high accuracy. It is intended to provide a movement guide device that enables control.

[0005]

In order to solve the above problems, a first invention of the present invention is a moving guide device for moving a conveyed object to a predetermined position on a fixed bed, which is on the fixed bed. A first guide fixed parallel to one direction, a first stage capable of linear reciprocating motion on the first guide in the first direction, and a first stage on the first stage A second guide fixed in parallel to a second direction perpendicular to the second direction and linearly reciprocating in the second direction on the second guide, and on which an article to be conveyed is placed. A second stage, first driving means on the fixed bed for driving the first stage in the first direction and second stage on the first stage in the second direction And a second drive means for driving the first and second drive means. The means includes a first stator and a second stator each having a coil wound around them, and a first magnet and a second magnet that linearly move along the first and second stators, respectively. Of the first and second stators, the first and second stators each have a fin structure, and the cooling fluid flowing in the first and second stators, and the first and second stators. A first circulation path and a second circulation path through which the cooling fluid flows, connecting both ends of the two stators, and the cooling fluid is circulated in the middle of the first and second circulation paths. And a second circulation means.

The second invention of the present invention is the first invention of the present invention.
The movement guide device of the invention of the invention is provided with a first cooling means and a second cooling means for cooling the cooling fluid in the middle of the first and second circulation paths, respectively.

[0007]

According to the first aspect of the present invention, the Joule heat generated in the coil during the driving of the linear motor is cooled by the cooling fluid to cool the stator and the coil to prevent the thrust from decreasing due to heat generation, and to keep the entire stage steady. Therefore, it is possible to maintain high temperature and perform highly accurate position movement control.

The operation of the second aspect of the present invention is such that the cooling fluid is circulated and a cooling means is provided in the middle of the circulation path to keep the temperature of the cooling fluid more accurate and constant to prevent the temperature rise in the coil. It enables accurate positioning control.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A movement guide device according to an embodiment of the first invention of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the overall configuration of a movement guide device according to a first embodiment of the present invention.

On the fixed bed 20, the first stage 21 is held and guided by the first guide 22, and is linearly reciprocated in the directions X1 and X2 by the first driving means 23.
The second stage 24 is held and guided by the second guide 25 and reciprocates in the directions Y1 and Y2 by the second driving means 26. Therefore, the second stage 24 on which the conveyed product is placed can move in the directions X1, X2, Y1, and Y2 to move the conveyed product to a predetermined position. The first and second driving means 23 and 26 have the structure of a linear motor, and are provided with first and second stators (coil side) 62 and 65, a first magnet 40 and a second magnet 41. The first and second moving means 23 and 26 are composed of the first and second movers (permanent magnet side) 50 and 53, and the cross sections of the first and second driving means 23 and 26 are shown in FIGS.

FIG. 4 is a view showing a longitudinal cross section of the first stator 62, for example. The inside of the first stator 62 is composed of fins that are intricate like a labyrinth in order to efficiently cool the cooling fluid (for example, nitrogen) that flows in from one end. The second stator 65 has the same configuration. Further, as shown in FIG. 1, a first circulating means 66 and a second circulating means 67 are connected to both ends of the first stator 62 and the second stator 65, respectively. There is a first circulation means 68 and a second circulation means 69 for circulating the cooling fluid in the middle of the circulation means.

The operation of the movement guide device configured as described above will be described below with reference to FIGS. 1 and 4.

The cooling fluid filled in the first stator 62 in the first driving means 23 is first circulated in the first circulation path 66 connected to one end of the first stator 62. Means 6
It is forced to flow by the suction force of 8. As a result, the heat generated in the coil is conducted to the stator, but in order to remove this heat efficiently, in order to increase the area in contact with the cooling fluid as much as possible, as shown in FIG. Therefore, the first stator 62 can be cooled. It is possible to prevent the thrust from decreasing due to heat generation of the coil surrounding the first stator 62 and keep the entire stage at a steady temperature. The cooling fluid filled in the second stator 65 is forced to flow in the second circulation path 67 connected to one end of the second stator 65 by the suction force of the first circulation means 69. .. As a result, the heat generated in the coil is conducted to the stator. In order to remove this heat efficiently, a fin structure is provided inside the second stator 65 in order to maximize the area in contact with the cooling fluid. The stator 65 can be cooled. It is possible to prevent the thrust from decreasing due to heat generation of the coil surrounding the second stator 65 and to keep the entire stage at a steady temperature.

As described above, according to the present embodiment, the fin structure is provided inside the stator to increase the area in which the cooling fluid flows into the stator of the stage driving means and contacts the cooling fluid. The Joule heat generated in the coil can be removed. As a result, the temperature rise can be prevented and the entire stage can be maintained at a steady temperature.

An embodiment of the second invention of the present invention will be described below with reference to FIG.
Shown in. In FIG. 5, a first cooling means 70 and a second cooling means 71 are provided in the middle of the first and second circulation paths 66 and 67, respectively.

The operation of the movement guide device configured as described above will be described below with reference to FIGS. 5, 2 and 3.

First, the cooling fluid in the first stator 62 is forcibly forced by the suction force of the first circulation means 68 in the first circulation path 66 inserted into one end of the first stator 62. Flowing. During that time, the cooling fluid is cooled by the first cooling means 70 and is controlled to a constant temperature with high accuracy, and the circulation path 6 is again provided.
Returning from 6 to the first stator 62. Also, the second stator 6
The cooling fluid in 5 is forced to flow in the second circulation path 67 inserted into one end of the stator by the suction force of the second circulation means 69. In the middle of that, the cooling fluid is the second cooling means 7
It is cooled by 1 and controlled to a constant temperature with high precision, and then returns to the second stator 65 from the circulation path 67 again.

As described above, the circulation means for forcibly circulating the cooling fluid and the circulation path are provided, and the cooling means for keeping the temperature of the cooling fluid at a constant temperature is installed in the middle of the circulation path. It is possible to cool the generated heat, prevent the thrust from decreasing, and control the inside of the driving means to a constant temperature with high accuracy, and maintain the entire stage at a steady temperature.

In the first embodiment, the first guide 22 and the second guide 25 have a V-V groove structure, but the first guide 22 and the second guide 25 have a V-groove-flat groove structure. Good.

In the second embodiment, the first guide 22 and the second guide 25 have a V-V groove structure, but the first guide 22 and the second guide 25 have a V-groove-flat groove structure. Good.

[0021]

As described above, according to the first aspect of the present invention, the cooling fluid is introduced from one end of the stator having the fin structure into the stage driving means, and the cooling fluid is circulated to drive the driving means. The heat generation from the coil is reduced to prevent the thrust from decreasing, and the heat generated can directly stabilize the temperature distribution of the entire stage by directly cooling the generation source, which has a great effect.

According to the second aspect of the present invention, the cooling means for keeping the temperature of the cooling fluid constant is installed in the middle of the circulation path for forcedly circulating the cooling fluid, so that it is generated in the coil in the driving means. It is possible to cool the heat and prevent the thrust from decreasing, and also to control the inside of the driving means to a constant temperature with high accuracy and keep the entire stage at a steady temperature.

[Brief description of drawings]

FIG. 1 is a perspective view of a movement guide device according to a first embodiment of the present invention.

FIG. 2 is a detailed view of driving means.

FIG. 3 is a detailed view of driving means.

[Fig. 4] Detailed view of the stator

FIG. 5 is a perspective view of a movement guide device according to a second embodiment of the present invention.

FIG. 6 is a perspective view of a movement guide device in a conventional example.

FIG. 7 is a detailed view of driving means in a conventional example.

FIG. 8 is a detailed view of drive means in a conventional example.

[Explanation of symbols]

 20 Fixed Bed 21 First Stage 22 First Guide 23 First Driving Means 24 Second Stage 25 Second Guide 26 Second Driving Means 40 First Magnet 41 Second Magnet 50 First Movable Child 53 Second movable element 62 First stator 65 Second stator 66 First circulation path 67 Second circulation path 68 First circulation means 69 Second circulation means 70 First cooling means 71 Second cooling means

Claims (2)

[Claims] 1. A moving guide device for moving a conveyed object to a predetermined position on a fixed bed, the first guide fixed on the fixed bed in parallel with a first direction, and the first guide. A first stage that is capable of linear reciprocating motion in the first direction, and a second guide that is on the first stage and is fixed in parallel to a second direction that is orthogonal to the first direction. The second stage, which is on the second guide, is capable of linear reciprocating motion in the second direction, and on which the transported object is placed, and the first stage, which is on the fixed bed, are the first stage The first and second driving means on the first stage and the second driving means for driving the second stage in the second direction. Is a first stator and a second stator around which a coil is wound, and the first stator And a first mover and a second mover respectively having a first magnet and a second magnet that linearly move along the second stator, and the first and second stators are internal. A fin structure for connecting the cooling fluid flowing in each of the first and second stators to the first circulation path through which the cooling fluid flows by connecting both ends of each of the first and second stators. A movement guide device comprising: two circulation paths; a first circulation means and a second circulation means for circulating the cooling fluid in the middle of the first and second circulation paths. 2. The movement guide device has first cooling means and second cooling means for cooling the cooling fluid in the middle of the first and second circulation paths. Movement guidance device.