JPH0592949U - Electron microscope sample equipment - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] To provide a sample device for an electron microscope in which a sample surface forms 45 ° with respect to an electron beam and corners of the sample surface are easily positioned at a eucentric position. [Structure] Support member 8 is attached to base member 16 of the tilt holder.
Are fixed, and the support member 8 has a guide hole 4 formed therein. The upper surface and the lower surface of the guide hole 4 form approximately 45 ° and −45 ° with respect to the optical axis, respectively. Insert the sample 8 into the guide hole 4 so that the corner portion 9 thereof projects, and
By simply pressing the sample 8 toward the guide hole 4 via the pressing member 10 by means of 2, the corner portion 9 of the sample 8 is positioned at the optimum position.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a sample device for an electron microscope suitable for observing a semiconductor sample or the like.

[0002]

[Prior Art]

 In the field of semiconductor manufacturing, thin film manufacturing technology has advanced, and it has become possible to manufacture components by stacking atomic layers on the order of a single atomic layer on a gallium arsenide (GaAs) substrate. FIG. 1 shows a plate-shaped sample obtained by cleaving such a component. In FIG. 1, reference numeral 30 indicates a substrate, and 31 indicates a stack of atomic layers. The sample obtained by this cleavage is an extremely small sample of, for example, 1.5 mm × 1.5 mm × 0.2 mm. As shown in FIG. 2, the edge portion 33 of the (110) plane of such a sample is irradiated with an electron beam, and the composition is quantitatively measured by the change in the intensity distribution of the equal thickness interference fringes obtained by this irradiation. Is being done. In order to mount such a sample on the sample device, conventionally, as shown in FIG. 3, the sample 18 is fixed to the sample fixing jig 17 with an adhesive or the like.

[0003]

[Problems to be solved by the device]

 In the past, when bonding the sample, it was necessary to adjust the bonding position so as to satisfy the following requirements. The tip of the edge of the sample to be observed should come to the focusable position of the electron microscope. The end face of the sample should be near the required observation angle (usually 45 °) for the electron beam. The tip of the edge of the sample to be observed should be at the eucentric position of sample inclination.

Therefore, it was complicated and it took a long time to bond the sample to the jig so as to satisfy the above-mentioned various conditions.

An object of the present invention is to solve the above-mentioned conventional drawbacks and to provide a sample apparatus for an electron microscope capable of easily positioning a sample so as to satisfy the above-mentioned various conditions.

[0006]

[Means for Solving the Problems]

 A sample tilting stage is provided with a support member for supporting a plate-shaped sample, and the support member is provided with a guide hole for inserting the plate-shaped member with its corner portion first, and is inserted into the guide hole. And a mechanism for pressing the plate-shaped sample toward the inner surface of the guide hole, wherein the upper surface and the lower surface of the guide hole form approximately 45 ° and −45 ° with respect to the optical axis, respectively. Electron microscope sample in which the position and size of the guide hole are selected so that the corners of the sample protruding from the guide hole are located at the predetermined positions on the optical axis necessary for the ucentric observation of the electron microscope image. It features a device.

[0007]

[Action]

 The upper and lower surfaces of the guide hole form approximately 45 ° and −45 ° with respect to the optical axis, respectively, and the corners of the sample have predetermined angles on the optical axis necessary for eucentric observation of the electron microscope image. Since the position and size of the guide hole are selected so that they are positioned at the desired position, simply inserting the sample into the guide hole and pressing the sample into the guide hole with the pressing mechanism makes it extremely easy to obtain the sample. It can be positioned in any position.

[0008]

【Example】

 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 4 is an overall view of an embodiment of the present invention, and FIG. 5 is a perspective view showing an enlarged main part of FIG.

In FIG. 4, reference numeral 1 denotes a sample holder main body which is inserted from a direction orthogonal to the optical axis, and the sample holder main body 1 has an inclined stage rotatable about an axis (not shown) perpendicular to the paper surface. 15 is attached. The tilt stage 15 is provided with a hole 2 for passing an electron beam. A sample holding member 3 is fixed to the base member 4 of the tilt stage 15. As is clear from FIG. 5, the sample holding member 3 is provided with a guide hole 4. The upper surface 5 of the guide hole 4 forms 45 ° with respect to the optical axis 6, while the lower surface 7 of the guide hole 4 forms −45 ° with respect to the optical axis 6. Reference numeral 8 shows a plate-shaped sample, which was cut out from a semiconductor component or the like so that the corners were formed at right angles by cleavage. The sample 8 is inserted into the guide hole 4 with its corner 9 first. A pressing member 10 is provided for pressing the sample inserted into the guide hole 4 toward the inner surface of the guide hole. The pressing member 10 is attached to the pressing member support 11 by a coil spring 12. The pressing member 10 has a recess for receiving the sample. The base member 4 is provided with a guide groove 13 for guiding the movement of the pressing member support 11. A ball 14 that is pressed against the side surface of the pressing member support body 11 by an elastic force is attached to the side surface of the guide groove 13, while a concave portion matching the ball 14 is formed on the side surface of the pressing member support body 11. Has been done. When the sample 8 is inserted into the guide hole 4, the corner thereof projects from the hole 4, but the projected corner 9 is positioned so as to be located at a predetermined position on the optical axis necessary for observing a eucentric electron microscope image. The position and size of the guide hole 4 are selected.

In such a configuration, first, the sample 8 is inserted into the guide hole 4 with the pressing member support 11 pulled away from the optical axis 6. This insertion is performed so that the corner portion 9 of the sample 8 projects from the guide hole 4. After inserting the sample 8 into the guide hole 4, the pressing member support 11 is moved so as to approach the optical axis 6. By doing so, the corners of the sample 8 are fitted into the recesses of the pressing member 10, the pressing force of the coil spring is applied to the sample 8 via the pressing member 10, and the sample 8 is pressed against the inner surface of the guide hole 4. .. When the pressing member support 11 is further moved toward the optical axis 6, the ball 14 is inserted into the recess of the pressing member support 11 and the pressing member support 11 is fixed.

In this state, the corner portion of the sample 8 is located at a eucentric position with respect to the sample tilt, and therefore the tilt stage 15 is arranged so that the sample surface forms an angle of 45 ° with respect to the electron beam. When the sample 8 is irradiated with an electron beam by finely adjusting the inclination angle of, the interference fringes due to the electron beam diffracted by the sample 8 are projected on the fluorescent plate. Therefore, the sample is analyzed by analyzing the interference fringes.

The above-described embodiment is only one embodiment of the present invention, and can be modified and implemented.

For example, in the above-described embodiment, the pressing member 10 is applied with the force by the coil spring, but a leaf spring may be used.

If the coil spring is selected so that the moving stroke of the pressing member can be long, it is not necessary to make the pressing member support 11 movable.

[0016]

[Effect of the device]

 As is clear from the above description, according to the electron microscope sample apparatus of the present invention, the corner portion of the sample can be removed by a simple operation of inserting the plate-shaped sample into the guide hole and pressing it with the pressing member. It can be easily positioned at the eucentric observation position, and the work of irradiating the sample surface with an electron beam at an angle of 45 ° and analyzing the sample based on the diffracted electron beam becomes extremely easy. ..

[Brief description of drawings]

FIG. 1 is a diagram for illustrating a sample to be analyzed.

FIG. 2 is a diagram showing a positional relationship between an electron beam necessary for analysis and a sample.

FIG. 3 is a diagram for illustrating a sample device of a conventional electron microscope.

FIG. 4 is a diagram showing an overall view of an embodiment of the present invention.

FIG. 5 is an enlarged view showing a main part of an embodiment of the present invention.

[Explanation of symbols]

 1 sample holder body 2 electron beam passage hole 3 sample holding member 4 guide hole 5 guide hole upper surface 6 optical axis 7 guide hole lower surface 8 sample 9 corner portion 10 pressing member 11 pressing member support 12 coil spring 13 guide groove 14 ball 15 tilt stage 16 Base member

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hideo Kobayashi, 3-1-2 Musashino, Akishima-shi, Tokyo Nihon Denshi Co., Ltd. (72) Inventor, Toru Kasai 3-1-2, Musashino, Akishima-shi, Tokyo JEOL Within the corporation

Claims (1)

[Scope of utility model registration request] 1. A supporting member for supporting a plate-shaped sample is provided on a sample tilting stage, and the supporting member is provided with a guide hole for inserting the plate-shaped member with its corner portion first. A mechanism for pressing the plate-shaped sample inserted into the guide hole toward the inner surface of the guide hole is provided, and the upper surface and the lower surface of the guide hole are approximately 45 ° and −45 with respect to the optical axis, respectively.
The position and size of the guide hole are selected so that the corner of the sample protruding from the guide hole is located at a predetermined position on the optical axis necessary for eucentric observation of an electron microscope image. Electron microscope sample device.