JPH0593524U - Vacuum pressure filter - Google Patents

Abstract

(57) [Summary] (Modified) [Purpose] To provide a filter for an adsorption device that can forcibly clean the filter element without disassembling the filter. [Structure] A pipe 3 and a vacuum gauge 4 which communicate with the suction section penetrate through the body, a cylinder 1 which is deeply squeezed at one end and communicates with a drain pipe, and a tube 8 which communicates with a vacuum generator and a vacuum gauge 9 penetrate through the cylinder 1. The inside of the cylinder 1 has a hole 5a in the center.
A baffle plate 5 with a space is attached closer to the vacuum generator than the tube attachment part 3a and the vacuum gauge attachment part 4a, and on a seat 6 attached to the inner wall of the cylinder closer to the vacuum generator than the baffle plate 5 A filter element 7 is swayably mounted on the cylinder 1, and a cylinder 1 and a lid 2 are fixed by sandwiching a seal 10. Further, an opening / closing valve and a communication pipe 8 are connected to the adsorption unit communication pipe 3 via a switching valve and, respectively. Communicate with blower and vacuum generator.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a vacuum filter used in a device that adsorbs under vacuum pressure.

[0002]

[Prior Art]

 For example, in the manufacturing process of semiconductor wafers, semiconductor wafers are often vacuum-adsorbed and processed, transported, or moved due to restrictions on their materials, shapes, and the like. Therefore, the state of the adsorption surface and the atmosphere around it are also different. Therefore, in the case of a clean adsorption surface or atmosphere, the rabbit should be used as a corner, and if there is a deposit on the adsorption surface or if the cleanliness around the adsorption part is poor, a filter is required between the adsorption part and the vacuum generator. is there.

For example, in a chamfering process, which is one of the manufacturing processes of semiconductor wafers, the front surface of the wafer is adsorbed in a state of being wet with a cutting fluid mixed with cutting powder, and sometimes a piece of the wafer is also aspirated. is there. In the lapping process, cutting powder and lapping abrasive particles are adsorbed in a wet state with cutting oil mixed with each other.

However, the conventional filter has only one type of object to be filtered and is of the cartridge type.

[0005]

[Problems to be solved by the device]

 Therefore, the conventional one is not suitable for use in a process in which various things are attached to the surface to be adsorbed, such as the above manufacturing process. That is, if there are many kinds of objects to be filtered, it is necessary to install many filters or a filter having a multi-stage and complicated structure.

Further, in the case of the cartridge type, once the cartridge is clogged, it is necessary to replace each cartridge, and therefore, the operation of the device must be stopped and the filter must be disassembled, which is time and cost-related. There's a problem.

[0007]

[Means for Solving the Problems]

 The present invention has been made to solve the above problems. That is, it consists of a cylinder and a lid.In the body of the cylinder, a tube communicating with the adsorption section and one vacuum gauge are arranged, one end of the cylinder is deeply squeezed and communicated with the drain tube, and the lid is A tube communicating with the vacuum generator and the other vacuum gauge are provided. Inside the cylinder, a baffle plate with a hole in the center is attached closer to the vacuum generator than the attachment part of the tube communicating with the adsorption part to the cylinder and one vacuum gauge attachment part. Furthermore, a seat is attached to the inner wall near the vacuum generator, and the filter element is mounted on it without being fixed. Further, a seal is sandwiched between the cylinder and the lid, and the cylinder and the lid are fixed by, for example, bolts.

The vacuum pressure filter as described above is provided.

In addition, an opening / closing valve is attached to the pipe communicating with the adsorption part of the vacuum pressure filter, and a switching valve is attached to the pipe communicating with the vacuum generator so that one flow passage is communicated with the blower. It also provides a filter.

[0010]

[Action]

 In the process of vacuum-adsorbing the surface of a variety of things that adheres to the adsorption surface, if the above vacuum pressure filter is installed between the adsorption part and the vacuum generator to perform vacuum adsorption, The following movements occur in the filter. That is, the suctioned and relatively heavy ones directly fall to the drain side, and the relatively light ones hit the filter element through the hole formed in the center of the baffle plate and adhere. Also, objects of intermediate weight will hit the baffle and stick or fall.

[0011] Usually, the vacuum suction work is a repeated work of suction and release, so that the vacuum pressure and the atmospheric pressure are repeated inside the filter. Therefore, if the inside of the filter becomes atmospheric pressure, most of the substances attached to the filter element will fall to the drain side, and will fall to the drain side on the baffle plate or through the hole in the center of the baffle plate, and what has fallen on the baffle plate. Accumulate in the collected material depositing part provided on the periphery. Most of what adhered to the lower side of the baffle fell to the bottom and accumulated on the drain side.

Self-cleaning of the filter is performed by repeating the above process. Furthermore, an opening / closing valve is attached to the pipe communicating with the adsorption unit, a switching valve is attached to the pipe communicating with the vacuum generator, and one flow path is attached to the pipe communicating with the adsorption unit in the vacuum pressure filter connected to the blower. If the on-off valve is closed and the switching valve attached to the pipe that communicates with the vacuum generator is connected to the blower, the blockage of the filter will fall to the drain side, and the collected material on the baffle will accumulate. Anything that accumulates in the part will fly up, fall down through the hole in the center of the baffle plate, and fall down to the drain side. In this way, the clogging of the filter element is released.

A clogged state of the filter element because the clogging of the filter is large if the difference in the pressure indication value between the vacuum gauge attached to the cylinder and the vacuum gauge attached to the lid is large. The vacuum gauge attached to the lid can be used to evaluate the suction force of the vacuum generator.

[0014]

【Example】

 Hereinafter, a specific example of the present invention will be described with reference to the drawings.

FIG. 1 is a partial sectional view showing an embodiment of the present invention, which is used in the vertical direction of FIG.

The parts are roughly divided into a cylinder 1 and a lid 2. The cylinder 1 has a collar 1a for attaching the lid 2, the opposite side of the collar 1a is deeply squeezed so that the collected matter flows smoothly, and the tip has a drain port 1b communicating with the drain pipe.

A tube 3 communicating with an adsorption section (not shown) and a vacuum gauge 4 for evaluating the clogging state of the filter element 7 are arranged in the body of the cylinder 1 so as to penetrate the cylinder 1. 3 is inclined downward, and the opening surface 3a is cut substantially horizontally.

A baffle plate 5 is attached to the inner circumference of the cylinder slightly above the pipe mounting portion 3b to the cylinder 1, and a hole 5a is opened in the center with the basin upside down. The upper part has a concave collected matter depositing portion 5b.

A seat 6 (ring-shaped or multi-point support structure) is attached to the inner wall of the cylinder further above the baffle plate 5, and the filter element 7 is placed thereon. The number of combinations of the seat 6 and the filter element 7 can be increased to 2 pairs and 3 pairs depending on the substance attached to the adsorption portion, that is, the collected substance.

On the other hand, a tube 8 communicating with a vacuum generator and a vacuum gauge 9 for evaluating suction pressure are attached to the lid 2. A seal 10 is sandwiched between the cylinder 1 and the lid 2 in such a state, and the flange 1a of the cylinder 1 and the lid 2 are attached by a plurality of bolts 11.

The seal 10 can be selected according to the material of the cylinder 1 such as an O-ring, packing, and gasket and the processing method. The material of the cylinder may be a metal or a synthetic resin, but a transparent synthetic resin is desirable so that the amount of trapped substances in the filter can be seen from the outside.

Second Embodiment In addition to the first embodiment, an opening / closing valve 21 is attached to the pipe 3 communicating with the adsorbing section, and switching valves 22 and 23 are attached to the pipe 8 communicating with the vacuum generator, so that one flow The passage communicates with a blower (not shown). A specific example is shown in FIG. Then, when the open / close valve of the pipe 3 is closed and the switching valve 22 of the pipe 8 is communicated in the blower direction, the deposits on the filter element 7 are forcibly removed. The adsorption operation is the same as in FIG.

[0023]

[Effect of the Invention] When the vacuum pressure filter of the present invention is installed between the suction part and the vacuum generator and the vacuum suction work is performed, various kinds of miscellaneous materials are attached to the suction surface of the object to be adsorbed, for example, the semiconductor wafer and its periphery. Even if pollutants are attached, the filter element can be forcibly cleaned without disassembling the filter as in the conventional case, so that the following effects are obtained.

(1) The suction work is always performed with a predetermined suction pressure.

(2) Almost no replacement or cleaning of the filter element is required. Therefore, there is almost no need to stop the operation of the adsorption equipment and work man-hours.

[Brief description of drawings]

FIG. 1 is a partial sectional front view showing a specific example of the present invention.

FIG. 2 is a front view showing another embodiment of the present invention.

[Explanation of reference numerals] 1 cylinder 1a collar 1b drain port 2 lid 3 tube 3a opening face 3b tube mounting part 4 vacuum gauge 4a vacuum gauge mounting part 5 baffle plate 5a hole 5b trap deposit part 6 seat 7 filter element 8 tube 9 Vacuum gauge 10 Seal 11 Bolt 21 Open / close valve 22,23 Switching valve 24 Drain valve

Claims (2)

[Scope of utility model registration request] 1. A pipe (3) communicating with an adsorption part and a vacuum gauge (4) are penetrated from a body part, and one end is deeply squeezed to communicate with a cylinder (1) communicating with a drain pipe and a vacuum generator. A baffle plate (5) having a tube (8) and a lid (2) penetrating from a vacuum gauge (9) and having a hole (5a) in the center is formed inside the cylinder (1). (3a) and the vacuum gauge mounting portion (4a), closer to the vacuum generator, and further to the vacuum generator than the baffle plate (5), the filter element is mounted on the seat (6) mounted on the inner wall of the cylinder. (7)
A vacuum pressure filter in which a cylinder (1) and a lid (2) are fixed by sandwiching them with a seal (10) interposed therebetween. 2. An on-off valve (2) is attached to a pipe (3) communicating with the adsorption section.
The vacuum pressure filter according to claim 1, wherein the switching valve (22) and (23) are attached to a pipe (8) which is attached with 1) and communicates with a vacuum generator, and one of the flow passages is communicated with a blower. .