JPH059657Y2 - - Google Patents
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- Publication number
- JPH059657Y2 JPH059657Y2 JP16351786U JP16351786U JPH059657Y2 JP H059657 Y2 JPH059657 Y2 JP H059657Y2 JP 16351786 U JP16351786 U JP 16351786U JP 16351786 U JP16351786 U JP 16351786U JP H059657 Y2 JPH059657 Y2 JP H059657Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- voltage
- optical fiber
- side optical
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013307 optical fiber Substances 0.000 claims description 33
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 17
- 238000005259 measurement Methods 0.000 description 12
- 239000000084 colloidal system Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000001962 electrophoresis Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Measurement Of Current Or Voltage (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
Description
【考案の詳細な説明】
Ａ 産業上の利用分野
本考案は、電気泳動現象を利用してコロイド溶
液中を透過する光の透過量の変化を測定すること
により電圧を測定する光コロイド電圧センサに関
する。[Detailed description of the invention] A. Industrial application field The present invention relates to an optical colloid voltage sensor that measures voltage by measuring changes in the amount of light transmitted through a colloid solution using electrophoresis. .
Ｂ 考案の概要
本考案は、コロイド溶液内に配置した一対の電
極に電圧を印加すると、コロイド溶液内のコロイ
ド粒子が一方の電極の方へ移動する現象、即ち電
気泳動を応用したものである。つまり、一方の電
極の方へ移動するコロイド粒子のコロイド溶液と
の境界面移動速度は、電極に印加される電圧に比
例して増加する。また、コロイド溶液中に光を透
過させた際に透過する光の透過量も、コロイド粒
子の移動と共に増加するので、コロイド溶液中を
透過する光の透過量は、電極に印加される電圧に
比例して増加する。B. Overview of the Invention This invention applies the phenomenon that when a voltage is applied to a pair of electrodes placed in a colloidal solution, colloidal particles in the colloidal solution move toward one of the electrodes, i.e., electrophoresis. In other words, the speed at which colloidal particles move toward one of the electrodes at the interface with the colloidal solution increases in proportion to the voltage applied to the electrodes. In addition, the amount of light transmitted when light is transmitted through the colloidal solution also increases with the movement of the colloidal particles, so the amount of light transmitted through the colloidal solution increases in proportion to the voltage applied to the electrodes.
従つて、予め、電極に印加される電圧と、コロ
イド溶液中を透過する光の透過量との関係を測定
して記憶しておくことにより、コロイド溶液中を
透過する光の透過量から、電極に印加される電圧
（測定電圧）を求めることができる。 Therefore, by measuring and storing the relationship between the voltage applied to the electrode and the amount of light transmitted through the colloidal solution in advance, it is possible to determine the relationship between the electrode and the amount of light transmitted through the colloidal solution. The voltage applied to (measured voltage) can be determined.
Ｃ 従来の技術
従来より電圧測定を行う測定器には、可動コイ
ル形等の各種タイプが用いられている。C. Prior Art Conventionally, various types of measuring instruments, such as a moving coil type, have been used for measuring voltage.
しかしながら、従来の電圧測定器はいずれも電
磁ノイズの影響を受けやすいので、電磁ノイズが
多い環境下での電圧測定は測定値に誤差が生じる
不都合があつた。 However, all conventional voltage measuring instruments are easily affected by electromagnetic noise, so voltage measurements in environments with a lot of electromagnetic noise have the disadvantage of causing errors in measured values.
Ｄ 考案が解決しようとする問題点
本考案は上記した電磁ノイズによつて測定値に
誤差が生じる問題点を解決する目的でなされ、電
気泳動現象を利用してコロイド溶液中を透過する
光の透過量の変化を測定することにより、電磁ノ
イズの影響を受けることなく電圧を測定できる新
規の光コロイド電圧センサを提供しようとするも
のである。D. Problems to be solved by the invention The invention was made to solve the above-mentioned problem in which errors occur in measured values due to electromagnetic noise, and uses electrophoresis to transmit light through a colloid solution. The present invention aims to provide a novel photocolloid voltage sensor that can measure voltage without being affected by electromagnetic noise by measuring changes in quantity.
Ｅ 問題点を解決するための手段
前記問題点の解決にあたつて本考案は、少なく
とも内面が電気絶縁材よりなるコロイド溶液を密
封した容器の対向する一方の面に発光部を備えた
送光側光フアイバを接続すると共に、同軸線上に
位置して対向する他方の面に受光部を備えた受光
側光フアイバを接続し、更に前記容器内に、外部
から電圧が印加される一対の電極を、前記送光側
光フアイバと受光側光フアイバ間を通る前記発光
部からの光の進行方に対して直交方向に対設した
ことを特徴とする。E. Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides a light emitting device which is equipped with a light emitting section on one opposing surface of a sealed container containing a colloidal solution whose inner surface is made of an electrically insulating material. In addition to connecting the side optical fibers, a light-receiving side optical fiber located on the coaxial line and having a light-receiving portion on the other surface facing each other is connected, and a pair of electrodes to which a voltage is applied from the outside is provided in the container. , characterized in that the optical fibers are disposed opposite to each other in a direction perpendicular to the direction in which light from the light emitting section travels between the light transmitting side optical fiber and the light receiving side optical fiber.
Ｆ 実施例
以下、本考案を図示の実施例により詳細に説明
する。F. Embodiments Hereinafter, the present invention will be explained in detail with reference to illustrated embodiments.
第１図ａは本考案に係る光コロイド電圧センサ
の第１実施例を示す断面図、第１図ｂは同光コロ
イド電圧センサの斜視図である。同図に示すよう
に、内面が電気絶縁材１ａよりなるパイプ状の容
器１内には、粒径の整つた粒子を等方的に分散さ
せたコロイド溶液２が密封されている。このコロ
イド溶液２としては、シリカ砥粒（SiO2）等の
表面に電気二重層を形成しやすい粒径の整つた微
粒子を、等方的に分散させた溶液が用いられる。
また、容器１内の対向する上下の面には、長手方
向に沿つて一対の電極３ａ，３ｂが対設されてい
る。更に、この一対の電極３ａ，３ｂに対して直
角方向において、容器１の一方の端には断面円形
状の送光側光フアイバ４を挿入して接続し、他方
の端面には断面円形状の送光側光フアイバ４と同
径の受光側光フアイバ５を、送光側光フアイバ４
に対して同軸線上に位置するように挿入して接続
されている。そして、送光側光フアイバ４の先端
には、レーザー発信器やLED等の発光素子を有
する発光部６が備えられ、受光側光フアイバ５の
先端には、発光部６からの光を受光するフオトダ
イオードやフオトトランジスタ等の受光素子を有
する受光部７が備えられている。尚、８は電極３
ａに接続された端子（正端子）であり、９は電極
３ｂに接続された端子（負端子）である。図では
端子９はアース端子である。 Fig. 1a is a cross-sectional view showing a first embodiment of the optical colloid voltage sensor according to the present invention, and Fig. 1b is a perspective view of the same optical colloid voltage sensor. As shown in the figure, a colloid solution 2 in which particles of uniform size are isotropically dispersed is sealed in a pipe-shaped container 1 whose inner surface is made of an electrical insulating material 1a. As the colloid solution 2, a solution in which fine particles of uniform size that easily form an electric double layer on the surface, such as silica abrasive grains ( SiO2 ), are isotropically dispersed is used.
A pair of electrodes 3a, 3b are provided along the longitudinal direction on the opposing upper and lower surfaces inside the container 1. Furthermore, a light-transmitting optical fiber 4 having a circular cross section is inserted and connected to one end of the container 1 in a direction perpendicular to the pair of electrodes 3a, 3b, and a light-receiving optical fiber 5 having the same diameter as the light-transmitting optical fiber 4 having a circular cross section is inserted and connected to the other end.
The light-transmitting optical fiber 4 is inserted and connected to the electrode 3 so that it is positioned on the same axis. The tip of the light-transmitting optical fiber 4 is provided with a light-emitting unit 6 having a light-emitting element such as a laser transmitter or an LED, and the tip of the light-receiving optical fiber 5 is provided with a light-receiving unit 7 having a light-receiving element such as a photodiode or a phototransistor for receiving light from the light-emitting unit 6.
In the figure, terminal 9 is a ground terminal.
次に、上記のように構成された本考案の光コロ
イド電圧センサの動作について説明する。まず、
電極３ａ，３ｂ間に電圧を印加する前は第２図ａ
に示すように、容器１内のコロイド溶液２中のコ
ロイド粒子２ａは均一に懸濁（分散）した状態と
なつているので、光の透過性が良くない。次に、
第２図ｂに示すように、測定しようとする電圧
（正電圧）V0を端子（正端子）８を介して電極３
ａに印加すると、前述した電気泳動現象により、
コロイド溶液２中のコロイド粒子２ａは電極３ａ
の方向へ移動する。すると、コロイド溶液２中に
境界面２ｂが形成されてコロイド粒子２ａを含ん
だ不透明の上部境界層２ｃと、コロイド粒子２ａ
を含まない透明の下部境界層２ｄとに分離され、
時間の経過とともに境界面２ｂは電極３ａ方向に
移動する（第１図ａ参照）。つまり、コロイド粒
子２ａを含まない透明な下部境界層２ｄの領域は
時間の経過に比例して増大し、光を透過しやすく
なる。このため、発光部６より出射された光Ａ
は、送光側光フアイバ４中を伝播して容器１内の
下部境界層２ｄ中を透過し、受光側光フアイバ５
中を伝播して受光部７に導入される。この際、受
光部７に導入される光A′は時間に比例して増加
し、受光部７からの出力電圧V1も増加する。こ
のことにより、第３図に示すように、コロイド溶
液２中の下部境界層２ｄの移動と共に移動する境
界面２ｂの移動速度ｖは、電極３ａに印加される
測定電圧V0に比例する。また、コロイド溶液２
中のコロイド粒子２ａの径が大きいほど境界面２
ｃの移動速度ｖは速くなる。 Next, the operation of the photocolloid voltage sensor of the present invention configured as described above will be explained. first,
Figure 2a before applying voltage between electrodes 3a and 3b
As shown in FIG. 2, the colloidal particles 2a in the colloidal solution 2 in the container 1 are in a uniformly suspended (dispersed) state, so that the light transmittance is not good. next,
As shown in Figure 2b, the voltage to be measured (positive voltage) V 0 is applied to the electrode 3 through the terminal (positive terminal) 8.
When applied to a, due to the electrophoretic phenomenon described above,
Colloidal particles 2a in colloidal solution 2 are electrodes 3a
Move in the direction of. Then, a boundary surface 2b is formed in the colloidal solution 2, and an opaque upper boundary layer 2c containing the colloidal particles 2a and the colloidal particles 2a are formed.
and a transparent lower boundary layer 2d that does not contain
As time passes, the boundary surface 2b moves toward the electrode 3a (see FIG. 1a). In other words, the area of the transparent lower boundary layer 2d that does not contain the colloidal particles 2a increases in proportion to the passage of time, and becomes easier to transmit light. Therefore, the light A emitted from the light emitting section 6
propagates through the light transmitting side optical fiber 4, passes through the lower boundary layer 2d in the container 1, and passes through the light receiving side optical fiber 5.
The light propagates inside and is introduced into the light receiving section 7. At this time, the light A' introduced into the light receiving section 7 increases in proportion to time, and the output voltage V1 from the light receiving section 7 also increases. As a result, as shown in FIG. 3, the moving speed v of the boundary surface 2b that moves with the movement of the lower boundary layer 2d in the colloidal solution 2 is proportional to the measurement voltage V 0 applied to the electrode 3a. In addition, colloid solution 2
The larger the diameter of the colloidal particles 2a inside, the more the boundary surface 2
The moving speed v of c becomes faster.
以上、前記したように、予め電極３ａに印加さ
れる測定電圧V0と、コロイド溶液２中を透過す
る発光部６から出射される光Ａの透過量（出力電
圧V1）との関係を測定して記憶しておくことに
より、測定時におけるコロイド溶液２中を透過す
る光A′の透過量（出力電圧V1）から電極３ａに
印加される測定電圧V0を求めることができる。
また、受光素子７から出力される出力電圧V1を
コンピユータ（不図示）に入力し、単位時間で分
割してサンプリングすることにより、高精度の測
定を行うことができる。そして、送光側光フアイ
バ４及び受光側光フアイバ５は、適当な長さに形
成して発光部６及び受光部７を電界の影響のない
場所に設置する。 As described above, the relationship between the measurement voltage V 0 applied to the electrode 3a in advance and the amount of transmitted light A emitted from the light emitting part 6 that passes through the colloidal solution 2 (output voltage V 1 ) is measured. By storing this value, the measurement voltage V 0 applied to the electrode 3a can be determined from the amount of light A' transmitted through the colloidal solution 2 (output voltage V 1 ) at the time of measurement.
Further, by inputting the output voltage V 1 output from the light receiving element 7 into a computer (not shown) and dividing and sampling it in unit time, highly accurate measurement can be performed. The light-transmitting optical fiber 4 and the light-receiving optical fiber 5 are formed to have appropriate lengths, and the light-emitting section 6 and the light-receiving section 7 are installed in a place where they are not affected by electric fields.
尚、電極３ｂに設けた端子（負端子）９はアー
ス端子に限られるものではなく、端子（正端子）
８に対する負極側の端子である。更に、前記実施
例とは逆に端子８を負端子、端子９を正端子とし
た場合は、コロイド粒子２ａの移動方向が前記実
施例とは逆方向になり、負電圧を測定することが
てきる。 Note that the terminal (negative terminal) 9 provided on the electrode 3b is not limited to the earth terminal, but can also be used as a terminal (positive terminal).
This is the terminal on the negative side with respect to 8. Furthermore, if the terminal 8 is set as a negative terminal and the terminal 9 is set as a positive terminal, contrary to the above embodiment, the direction of movement of the colloidal particles 2a becomes opposite to that of the above embodiment, and a negative voltage can be measured. Ru.
また、容器１、送光側光フアイバ４、受光側光
フアイバ５は、断面円形状に限られるものでな
く、断面形状がだ円形状や角形状でも良い。 Further, the container 1, the light transmitting side optical fiber 4, and the light receiving side optical fiber 5 are not limited to circular cross sections, but may have elliptical or angular cross sections.
更に、第３図に示したように、コロイド粒子２
ａの粒子径の大きさによつて、測定電圧V0と境
界面移動速度ｖとの関係が異なるので、適当なコ
ロイド粒子２ａの径を選択することにより、測定
する電圧のレベルに応じたセンサを得ることがで
きる。 Furthermore, as shown in FIG. 3, colloid particles 2
Since the relationship between the measurement voltage V 0 and the boundary surface movement speed v differs depending on the particle size of a, by selecting an appropriate diameter of the colloidal particles 2a, the sensor can be adjusted according to the voltage level to be measured. can be obtained.
第４図ａは本考案の第２実施例を示す断面図、
第４図ｂはそのＢ−Ｂ線断面図である。尚、第１
図ａ，ｂで示した第１実施例と同一部分には、同
一符号を付してその説明は省略する。 FIG. 4a is a sectional view showing a second embodiment of the present invention;
FIG. 4b is a sectional view taken along the line B--B. Furthermore, the first
Components that are the same as those in the first embodiment shown in FIGS.
この実施例においては、断面円形状の送光側光
フアイバ１３及び受光側光フアイバ１４は、コロ
イド粒子２ａを含まない透明な下部境界層２ｄの
領域に相当する位置に対向して設けられている。
そして、前記実施例と同様にして測定電圧V0を
測定することができる。 In this embodiment, the light transmitting side optical fiber 13 and the light receiving side optical fiber 14 having a circular cross section are provided facing each other at a position corresponding to a region of the transparent lower boundary layer 2d that does not contain colloidal particles 2a. .
Then, the measurement voltage V 0 can be measured in the same manner as in the above embodiment.
また、容器１と送光側光フアイバ１３との接合
面１ｂにレンズ系（不図示）を配置することによ
り、コロイド溶液２中を透過する発光部６からの
光の指向性を高めることができる。 Furthermore, by arranging a lens system (not shown) on the joint surface 1b between the container 1 and the light-transmitting optical fiber 13, the directivity of the light from the light emitting part 6 that passes through the colloidal solution 2 can be increased. .
更に、第４図ｃに示すように、複数の小径の光
フアイバ束を用いて、電極３ａに電圧を印加した
際に形成される下部境界層２ｄの断面形状に対応
した送光側光フアイバ束（不図示）及び受光側光
フアイバ束１４′を容器１に接続しても良い。こ
れによつて、コロイド溶液２中を透過する発光部
６から出射される光の光量の増加を図ることがで
きる。 Furthermore, as shown in FIG. 4c, a plurality of small-diameter optical fiber bundles are used to form a light-transmitting side optical fiber bundle corresponding to the cross-sectional shape of the lower boundary layer 2d formed when voltage is applied to the electrode 3a. (not shown) and the receiving side optical fiber bundle 14' may be connected to the container 1. This makes it possible to increase the amount of light emitted from the light emitting section 6 that passes through the colloidal solution 2.
第５図ａは本考案の第３実施例を示す断面図、
第５図ｂはそのＣ−Ｃ線断面図である。尚、第１
図ａ，ｂで示した第１実施例と同一部分には、同
一符号を付してその説明は省略する。 FIG. 5a is a sectional view showing a third embodiment of the present invention;
FIG. 5b is a sectional view taken along the line CC. Furthermore, the first
Components that are the same as those in the first embodiment shown in FIGS.
この実施例においては、容器１′を断面四角状
に形成し、この容器１′を挟んでコロイド溶液２
の上部境界層２ｃ及び下部境界層２ｄにそれぞれ
２本づつの送光側光フアイバ１５ａ，１５ｂ，１
５ｃ，１５ｄ及び受光側光フアイバ１６ａ，１６
ｂ，１６ｃ，１６ｄが対向するようにして配設す
る。各送光側光フアイバ１５ａ〜１５ｄにはそれ
ぞれ発光部６が接続され、各受光側光フアイバ１
６ａ〜１６ｄにはそれぞれ受光部７が接続されて
いる。そして、前記実施例と同様にして測定電圧
V0を測定することができる。この際、上部境界
層２ｃにおける各受光部７での出力電圧V11と、
下部境界層２ｄにおける各受光部７での出力電圧
V12との平均値を求めることにより更に精度良く
測定電圧V0を測定することができる。 In this embodiment, the container 1' is formed to have a square cross section, and the colloidal solution 2 is placed between the containers 1'.
Two light transmission side optical fibers 15a, 15b, 1 are provided in the upper boundary layer 2c and the lower boundary layer 2d of the
5c, 15d and receiving side optical fibers 16a, 16
b, 16c, and 16d are arranged so as to face each other. A light emitting section 6 is connected to each light transmitting side optical fiber 15a to 15d, and each light receiving side optical fiber 1
A light receiving section 7 is connected to each of 6a to 16d. Then, the measured voltage is
V 0 can be measured. At this time, the output voltage V 11 at each light receiving section 7 in the upper boundary layer 2c,
Output voltage at each light receiving section 7 in the lower boundary layer 2d
By finding the average value with V 12 , the measurement voltage V 0 can be measured with higher accuracy.
尚、この実施例に限らず、上部境界層２ｃ及び
下部境界層２ｄに、それぞれ１本づつ又は３本以
上の送光側光フアイバ及び受光側光フアイバを配
設してそれに対応した発光部及び受光部をそれぞ
れ設ける構成でも良い。 Incidentally, the present invention is not limited to this embodiment, and the upper boundary layer 2c and the lower boundary layer 2d may be provided with one or more light-transmitting side optical fibers and three or more light-receiving side optical fibers, respectively, and corresponding light-emitting parts and A configuration in which a light receiving section is provided respectively may be used.
Ｇ 考案の効果
以上実施例とともに具体的に説明したように本
考案によれば、電気泳動現象を利用してコロイド
溶液中を透過する光の透過量の変化を測定するこ
とによつて測定電圧を求める構成により、電磁ノ
イズ等の影響を受けることなく高精度の測定がで
きる。G. Effects of the invention As explained above in detail with the examples, according to the invention, the measurement voltage can be determined by measuring the change in the amount of light transmitted through the colloidal solution using the electrophoresis phenomenon. The desired configuration allows highly accurate measurements without being affected by electromagnetic noise.
また、構造が簡単なのでコストの低減及び小
型・軽量化を図ることができる。 Furthermore, since the structure is simple, it is possible to reduce costs, size, and weight.
更に、コロイド粒子の種類を選ぶことにより、
測定電圧を正電圧用又は負電圧用に容易に切替え
ることができる。 Furthermore, by selecting the type of colloid particles,
Measurement voltage can be easily switched to positive voltage or negative voltage.
第１図ａは本考案に係る光コロイド電圧センサ
の第１実施例を示す断面図、第１図ｂは同光コロ
イド電圧センサの斜視図、第２図ａは電極に電圧
を印加する前の状態を示す第１図ａのＡ−Ａ線断
面図、第２図ｂは電極に電圧を印加した後の状態
を示す第１図ａのＡ−Ａ線断面図、第３図は測定
電圧と境界面移動速度との関係を示す図、第４図
ａは本考案の第２実施例を示す断面図、第４図ｂ
は第４図ａのＢ−Ｂ線断面図、第４図ｃは第２実
施例に係る他の実施例を示す断面図、第５図ａは
本考案の第３実施例を示す断面図、第５図ｂは第
５図ａのＣ−Ｃ線断面図である。
図面中、１は容器、１ａは電気絶縁材、２はコ
ロイド溶液、２ａはコロイド粒子、２ｂは境界
面、２ｃは上部境界層、２ｄは下部境界層、３
ａ，３ｂは電極、４は送光側光フアイバ、５は受
光側光フアイバ、６は送光部、７は受光部、８，
９は端子である。
FIG. 1a is a sectional view showing the first embodiment of the photocolloid voltage sensor according to the present invention, FIG. 1b is a perspective view of the same photocolloid voltage sensor, and FIG. Figure 1a is a cross-sectional view taken along the line A-A in Figure 1a showing the state, Figure 2b is a cross-sectional view taken along the line A-A in Figure 1a showing the state after voltage is applied to the electrode, and Figure 3 is the measured voltage and Figure 4a is a cross-sectional view showing the second embodiment of the present invention, Figure 4b is a diagram showing the relationship with the moving speed of the boundary surface.
is a sectional view taken along the line B-B in FIG. 4a, FIG. 4c is a sectional view showing another embodiment of the second embodiment, and FIG. 5a is a sectional view showing a third embodiment of the present invention. FIG. 5b is a sectional view taken along the line CC in FIG. 5a. In the drawing, 1 is a container, 1a is an electrical insulating material, 2 is a colloidal solution, 2a is a colloidal particle, 2b is a boundary surface, 2c is an upper boundary layer, 2d is a lower boundary layer, 3
a, 3b are electrodes, 4 is a transmitting side optical fiber, 5 is a light receiving side optical fiber, 6 is a light transmitting section, 7 is a light receiving section, 8,
9 is a terminal.
Claims (1)
溶液を密封した容器の対向する一方の面に発光部
を備えた送光側光フアイバを接続すると共に、同
軸線上に位置して対向する他方の面に受光部を備
えた受光側光フアイバを接続し、更に前記容器内
に、外部から電圧が印加される一対の電極を、前
記送光側光フアイバと受光側光フアイバ間を通る
前記発光部からの光の進行方向に対して直交方向
に対設したことを特徴とする光コロイド電圧セン
サ。 A light transmitting side optical fiber with a light emitting part is connected to one opposing surface of a container sealed with a colloidal solution whose at least the inner surface is made of an electrically insulating material, and a light receiving part is located on the same axis and is located on the other opposing surface. A pair of electrodes to which a voltage is applied from the outside is connected in the container, and a pair of electrodes to which a voltage is applied from the outside is connected to the light receiving side optical fiber provided with the light emitting section. A photocolloid voltage sensor characterized in that it is installed oppositely in a direction perpendicular to the direction of travel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16351786U JPH059657Y2 (en) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16351786U JPH059657Y2 (en) | 1986-10-27 | 1986-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6370084U JPS6370084U (en) | 1988-05-11 |
| JPH059657Y2 true JPH059657Y2 (en) | 1993-03-10 |
Family
ID=31091786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16351786U Expired - Lifetime JPH059657Y2 (en) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059657Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7643861B2 (en) | 2020-10-30 | 2025-03-11 | 株式会社荏原製作所 | Method, device, and program for determining timing for removing a substrate from a cassette in a substrate processing apparatus, and substrate processing apparatus |
-
1986
- 1986-10-27 JP JP16351786U patent/JPH059657Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6370084U (en) | 1988-05-11 |
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