JPH05973A - Method for purifying perfluorocarbon - Google Patents
Method for purifying perfluorocarbonInfo
- Publication number
- JPH05973A JPH05973A JP18185791A JP18185791A JPH05973A JP H05973 A JPH05973 A JP H05973A JP 18185791 A JP18185791 A JP 18185791A JP 18185791 A JP18185791 A JP 18185791A JP H05973 A JPH05973 A JP H05973A
- Authority
- JP
- Japan
- Prior art keywords
- perfluorocarbon
- liquid
- gas
- mmhg
- initial fraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000007788 liquid Substances 0.000 claims abstract description 38
- 239000012808 vapor phase Substances 0.000 claims abstract description 4
- 230000008016 vaporization Effects 0.000 claims description 12
- 239000000126 substance Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 28
- 238000007872 degassing Methods 0.000 description 16
- 238000000746 purification Methods 0.000 description 10
- 238000009835 boiling Methods 0.000 description 9
- 238000009834 vaporization Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000012071 phase Substances 0.000 description 6
- 230000006837 decompression Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000007670 refining Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 229960004624 perflexane Drugs 0.000 description 2
- ZJIJAJXFLBMLCK-UHFFFAOYSA-N perfluorohexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZJIJAJXFLBMLCK-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、パーフルオロカーボン
の効率的な精製方法に関する。FIELD OF THE INVENTION The present invention relates to an efficient method for purifying perfluorocarbons.
【0002】[0002]
【従来の技術】環境破壊問題が指摘されるフロンの代替
物として、パーフルオロカーボンに期待が寄せられてい
る。しかしながら、空気や炭酸ガス等の非凝縮性ガスの
溶存量が特に多く、フロンに準じて凍結法等により非凝
縮性ガスの泡が発生しなくなるまで減圧脱気しても、ヒ
ートパイプ等に適用できる高度に脱気されたパーフルオ
ロカーボンが得られず、従来の方法では充分に精製でき
ない問題点があった。2. Description of the Related Art Perfluorocarbons are expected to be used as an alternative to CFCs, which have problems of environmental destruction. However, the amount of dissolved non-condensable gas such as air and carbon dioxide is particularly large, and even if decompression degassing is performed until the bubbles of non-condensable gas are not generated by the freezing method according to CFC, it can be applied to heat pipes. There was a problem that a highly degassed perfluorocarbon could not be obtained and could not be sufficiently purified by the conventional method.
【0003】[0003]
【発明が解決しようとする課題】本発明は、パーフルオ
ロカーボンを効率的に高度に脱気処理できる精製方法の
開発を課題とする。The object of the present invention is to develop a refining method capable of efficiently and highly degassing perfluorocarbon.
【0004】[0004]
【課題を解決するための手段】本発明は、パーフルオロ
カーボンの液体を脱気処理したのち、その処理液上の気
相部における異種ガスの分圧が10mmHg以下の状態のも
とで当該処理液を室温以上の温度で気化させ、その初期
留分を除去することを特徴とするパーフルオロカーボン
の精製方法を提供するものである。According to the present invention, a perfluorocarbon liquid is degassed and then treated under the condition that the partial pressure of a different gas in the gas phase portion on the treatment liquid is 10 mmHg or less. The present invention provides a method for purifying perfluorocarbon, characterized in that the initial fraction is vaporized at a temperature of room temperature or higher.
【0005】[0005]
【作用】パーフルオロカーボンの脱気処理液をその気相
部における異種ガスの分圧が10mmHg以下の状態のもと
で室温以上の温度で気化させることにより、非凝縮性の
溶解残存ガスが急激に放出され、パーフルオロカーボン
の脱気処理液の初期留分中に移る。従って、その初期留
分を除去して残存分を利用することにより高度に脱気処
理されたパーフルオロカーボンが効率よく得られる。[Operation] By vaporizing the perfluorocarbon degassed liquid at room temperature or higher under the condition that the partial pressure of the different gases in the gas phase is 10 mmHg or lower, the non-condensable dissolved residual gas is drastically increased. It is released and transferred into the initial fraction of the perfluorocarbon degassate. Therefore, a highly degassed perfluorocarbon can be efficiently obtained by removing the initial fraction and utilizing the residual fraction.
【0006】[0006]
【発明の構成要素の例示】本発明においては、種々のパ
ーフルオロカーボンの液体が精製対象とされる。就中、
CnF2n+2の化学式で表される平均分子量が100〜1
000、ないし沸点が30〜300℃のものが対象とさ
れる。酸素、窒素、水素の如き異種の元素を1重量%以
下、就中0.1重量%以下含有していてもよい。かかる
パーフルオロカーボンは、例えばフロリナート(商品
名、スリーエム社製)などとして市販されている。Examples of Components of the Invention In the present invention, various perfluorocarbon liquids are targeted for purification. Above all,
Average molecular weight represented by the chemical formula of C n F 2n + 2 is 100 to
000, or those having a boiling point of 30 to 300 ° C. are targeted. It may contain 1% by weight or less, especially 0.1% by weight or less, of different elements such as oxygen, nitrogen and hydrogen. Such perfluorocarbon is commercially available, for example, as Fluorinert (trade name, manufactured by 3M Co., Ltd.).
【0007】本発明においてパーフルオロカーボンの液
体は、先ず脱気処理される。その脱気処理は適宜な方法
で行ってよい。その例としては、凍結法や平衡蒸気圧法
の如き公知の方法のほか、撹拌法ないし振動処理法(特
願平2−193414号)、沸騰法(特願平2−193
415号)、不活性ガスや水素ガスの吹込み法(特願平
2−193416号)などがあげられる。就中、減圧下
での平衡蒸気圧法による脱気処理が好ましい。In the present invention, the perfluorocarbon liquid is first degassed. The degassing treatment may be performed by an appropriate method. Examples thereof include known methods such as a freezing method and an equilibrium vapor pressure method, as well as a stirring method or a vibration treatment method (Japanese Patent Application No. 2-193414) and a boiling method (Japanese Patent Application No. 2-193).
No. 415), a method of blowing an inert gas or hydrogen gas (Japanese Patent Application No. 2-193416). Above all, degassing treatment by the equilibrium vapor pressure method under reduced pressure is preferable.
【0008】脱気処理の程度は、可及的に高度であるほ
ど好ましいが、一般的には各脱気方法において通常の処
理程度でよい。ちなみに前記の平衡蒸気圧法にあって
は、パーフルオロカーボンの液体を冷却した状態、例え
ば0〜−50℃に冷却した状態で、異種ガスの分圧にし
て10〜1/105mmHg、好ましくは1〜1/103mmHg
の減圧下に、1〜30分間撹拌した脱気処理の程度でよ
い。The degree of degassing treatment is preferably as high as possible, but generally, the degree of degassing may be a normal degree in each degassing method. By the way, in the above equilibrium vapor pressure method, the partial pressure of the different gases is 10 to 1/10 5 mmHg, preferably 1 in a state where the liquid of perfluorocarbon is cooled, for example, in a state of being cooled to 0 to −50 ° C. ~ 1/10 3 mmHg
The degassing treatment may be performed by stirring for 1 to 30 minutes under reduced pressure.
【0009】本発明において脱気処理したパーフルオロ
カーボンの液体は次に、その処理液上の気相部における
異種ガスの分圧が10mmHg以下の状態のもとで室温以上
の温度で気化させ、その初期留分を除去する。The deaerated perfluorocarbon liquid in the present invention is then vaporized at a temperature of room temperature or higher under the condition that the partial pressure of the different gas in the vapor phase portion on the treated liquid is 10 mmHg or less, and Remove the initial fraction.
【0010】前記の異種ガスは、処理対象のパーフルオ
ロカーボンの蒸気以外の気体を意味する。また異種ガス
の分圧は、各異種ガスの分圧の合計を意味する。通例の
場合、前記の異種ガスは空気であり、その場合、空気を
構成する気体の各分圧の合計が10mmHg以下であれば、
気相部を減圧処理することなく処理液を気化させてよ
い。一方、上記の脱気処理を大気圧下で行った場合の如
く、気相部における異種ガスの分圧が10mmHgを超える
ときには、異種ガスの分圧が10mmHg以下となるよう減
圧操作を加えたのち処理液を気化させる。The above-mentioned different gas means a gas other than the vapor of perfluorocarbon to be treated. Further, the partial pressure of different gases means the sum of the partial pressures of the different gases. In the usual case, the different gas is air, and in that case, if the total of the partial pressures of the gases forming the air is 10 mmHg or less,
The treatment liquid may be vaporized without depressurizing the vapor phase portion. On the other hand, when the partial pressure of the foreign gas in the gas phase exceeds 10 mmHg, as in the case where the above degassing process is performed under atmospheric pressure, decompression operation is performed so that the partial pressure of the foreign gas is 10 mmHg or less. The processing solution is vaporized.
【0011】パーフルオロカーボンの処理液の気化は、
気相部における異種ガスの分圧が可及的に小さい状態、
就中5mmHg以下の状態、特に1mmHg以下の状態で行うこ
とが好ましい。また気化処理の温度は、室温(20℃)
以上の温度、就中30℃以上の温度、特に沸点(760
mmHg)以上の高温で行うことが好ましい。なお、容器の
耐圧性等の点よりは沸点より50℃高い温度以下での気
化処理が一般的であるが、これに限定されない。The vaporization of the treatment liquid of perfluorocarbon is
In the state where the partial pressure of different gases in the gas phase is as small as possible,
Especially, it is preferable to carry out under 5 mmHg or less, especially under 1 mmHg or less. The temperature of vaporization is room temperature (20 ° C)
Above temperature, especially above 30 ℃, especially boiling point (760
mmHg) or higher temperature is preferable. Note that vaporization treatment is generally performed at a temperature of 50 ° C. or higher higher than the boiling point from the viewpoint of pressure resistance of the container, but not limited to this.
【0012】パーフルオロカーボンの処理液の気化は、
処理液を沸騰させることなく静かに気化させてもよい
し、気化したパーフルオロカーボン蒸気を素早く系外に
留去する方式などにより、処理液の沸騰下に気化させて
もよい。本発明においては一般に、処理液の沸騰下に気
化させる方式がその沸騰による撹拌作用のためか、溶解
残存ガスの早期放出が効果的に達成されて好ましい。The vaporization of the perfluorocarbon treatment liquid is
The treatment liquid may be gently vaporized without being boiled, or the treatment liquid may be vaporized while boiling by a method of quickly distilling the vaporized perfluorocarbon vapor out of the system. In the present invention, generally, the method of vaporizing the treatment liquid under boiling is preferable because the early release of the dissolved residual gas is effectively achieved, probably because of the stirring action by the boiling.
【0013】本発明の精製方法を、減圧下で平衡蒸気圧
法により脱気処理したのち、その処理液を加熱下に気化
して初期留分を除去する場合を例に説明する。図1はそ
の場合に用いる精製装置を例示したものである。1はト
ラップ、2,21は液体窒素等を入れた冷却器、3は排
気管、4は精製容器、5は精製対象のパーフルオロカー
ボン、6は密栓、7は精製液の取出し管、8は初期留分
溜め、9は取出し管である。The refining method of the present invention will be described by taking as an example the case where the degassing treatment is carried out under reduced pressure by the equilibrium vapor pressure method, and then the treated liquid is vaporized under heating to remove the initial fraction. FIG. 1 illustrates a refining device used in that case. 1 is a trap, 2 is a cooler containing liquid nitrogen or the like, 3 is an exhaust pipe, 4 is a purification container, 5 is a perfluorocarbon to be purified, 6 is a stopper, 7 is a purification liquid take-out pipe, and 8 is an initial stage. The distillate is stored, and 9 is a take-out pipe.
【0014】図1において、精製容器4に入れられたパ
ーフルオロカーボンの液体5は、まず平衡蒸気圧法によ
り減圧下に脱気処理される。精製容器4内の減圧は、弁
71と弁72を閉じ、弁31を開いた状態として、排気
管3が連通するトラップ1を介して減圧ポンプ等(図示
せず)により行われる。従って、脱気処理により発生し
たガスは、弁31の開放下、かかる減圧系統を介して系
外に排気される。なお脱気条件は上記に準じてよい。In FIG. 1, the perfluorocarbon liquid 5 contained in the purification container 4 is first degassed under reduced pressure by the equilibrium vapor pressure method. The decompression in the purification container 4 is performed by a decompression pump or the like (not shown) via the trap 1 in which the exhaust pipe 3 communicates with the valve 71 and the valve 72 closed and the valve 31 opened. Therefore, the gas generated by the degassing process is exhausted to the outside of the system through the pressure reducing system while the valve 31 is open. The degassing conditions may be the same as above.
【0015】脱気処理されたパーフルオロカーボンの液
体5(処理液)は、次に加熱下に気化処理される。気化
処理は、精製容器4内の気相部における異種ガスの分圧
が10mmHg以下であることを確認して(多くの場合、ト
ラップ1内の圧力とほぼ等しく(パーフルオロカーボン
の蒸気圧は実質的に無視できる)、その圧力で判断して
よい。)弁31を閉じ、精製容器4等を含む点線内の領
域全体を所定の高温に保持して液体5を加熱することに
より行われる。これにより、精製容器4内の気相部の圧
力がその加熱温度に応じた蒸気圧となる。The deaerated perfluorocarbon liquid 5 (treatment liquid) is then vaporized under heating. In the vaporization process, it was confirmed that the partial pressure of the different gas in the gas phase portion in the purification container 4 was 10 mmHg or less (in many cases, it was almost equal to the pressure in the trap 1 (the vapor pressure of perfluorocarbon was substantially The pressure may be used for the judgment.) The valve 31 is closed, and the entire region within the dotted line including the purification container 4 and the like is maintained at a predetermined high temperature to heat the liquid 5. As a result, the pressure of the gas phase portion in the purification container 4 becomes a vapor pressure according to the heating temperature.
【0016】次いで、弁71を開いて(弁72は閉状態
のまま)液体5の気化を促進させ、気化した初期留分を
初期留分溜め8にトラップする。その際、精製容器4か
ら初期留分溜め8への気化蒸気の移送量を調節すること
により、液体5の静的な気化状態(移送量:少)ないし
沸騰状態(移送量:多)を制御することができる。Then, the valve 71 is opened (the valve 72 is kept closed) to promote vaporization of the liquid 5, and the vaporized initial fraction is trapped in the initial fraction reservoir 8. At that time, the static vaporization state (transfer amount: small) or boiling state (transfer amount: large) of the liquid 5 is controlled by adjusting the transfer amount of the vaporized vapor from the purification container 4 to the initial fraction reservoir 8. can do.
【0017】図の装置では、初期留分51を排気管7を
介して液体窒素等を入れた冷却器21による冷却方式で
初期留分溜め8に捕獲し、再利用できるようになってい
る。初期留分の除去は、非凝縮性の溶存ガスが多いため
であるが、液体(処理液)5中の非凝縮性ガスの溶存量
は気化処理が進むにつれて漸次減少する。In the apparatus shown in the figure, the initial fraction 51 is trapped in the initial fraction reservoir 8 through the exhaust pipe 7 by the cooling system using the cooler 21 containing liquid nitrogen or the like, and can be reused. The removal of the initial fraction is due to the large amount of the non-condensable dissolved gas, but the dissolved amount of the non-condensable gas in the liquid (treatment liquid) 5 gradually decreases as the vaporization process progresses.
【0018】従って、除去する初期留分51の量は、例
えばヒートパイプ等における熱交換媒体やトランス等に
おける絶縁油などの使用目的に要求されるパーフルオロ
カーボンの脱気度に応じて適宜に決定される。一般に
は、気化処理に供したパーフルオロカーボンの5重量%
以上、就中10〜50重量%程度が除去される。必要な
初期留分の除去が終わると、目的とする高純度のパーフ
ルオロカーボンが得られる。Therefore, the amount of the initial fraction 51 to be removed is appropriately determined according to the degassing degree of perfluorocarbon required for the purpose of use such as a heat exchange medium in a heat pipe or insulating oil in a transformer or the like. It Generally, 5% by weight of perfluorocarbon subjected to vaporization treatment
Above all, about 10 to 50% by weight is removed. When the necessary initial fraction is removed, the desired high-purity perfluorocarbon is obtained.
【0019】図示した装置では、排気管7を介して初期
留分の除去が終わると、弁71を閉じると共に弁72を
開放し(弁31は閉状態のまま)、取出し管9を介して
外気との接触を防止しつつ、得られた精製液を目的域、
例えばヒートパイプの製造工程などに供給できるように
なっている。In the illustrated apparatus, when the removal of the initial fraction is completed via the exhaust pipe 7, the valve 71 is closed and the valve 72 is opened (the valve 31 remains closed), and the outside air is taken out via the take-out pipe 9. While preventing contact with the obtained purified solution,
For example, it can be supplied to a heat pipe manufacturing process.
【0020】[0020]
【発明の効果】本発明によれば、簡単な操作でパーフル
オロカーボンの液中に溶存する空気等の非凝縮性物質を
効率よく、かつ高度に除去することができ、高脱気度の
パーフルオロカーボンの液体を能率的に、安定して得る
ことができる。According to the present invention, non-condensable substances such as air dissolved in the liquid of perfluorocarbon can be efficiently and highly removed by a simple operation, and the perfluorocarbon of high degassing degree can be obtained. The liquid can be efficiently and stably obtained.
【0021】[0021]
実施例1 500ml容の容器にテトラデカフルオロヘキサン(平均
分子量340、沸点56℃)100mlを入れ、容器内を
28〜30mmHgの減圧状態(テトラデカフルオロヘキサ
ンの蒸気圧と空気を主体とする異種ガスの分圧との和)
に維持しつつ、−20℃で約5分間脱気処理(平衡蒸気
圧法)した後、その減圧状態(トラップ1中での測定に
基づき1/102mmHg)の維持下に容器全体を60℃に
加熱して沸騰させ、約5mlを初期留分として除した。つ
いで、得られた精製液を外径16mm、内径14mm、長さ
800mmの銅パイプ中に、真空度8/103Torrにて真
空注入し、封止してヒートパイプを得た。Example 1 100 ml of tetradecafluorohexane (average molecular weight 340, boiling point 56 ° C.) was placed in a 500 ml container, and the inside of the container was in a depressurized state of 28 to 30 mmHg (vapor pressure of tetradecafluorohexane and heterogeneous gas mainly composed of air). Sum of partial pressure of
Degassing treatment (equilibrium vapor pressure method) at -20 ° C for about 5 minutes while maintaining at 20 ° C, and then maintaining the reduced pressure state (1/10 2 mmHg based on measurement in trap 1) of the entire container at 60 ° C. It was boiled by heating to about 5 ml and the initial fraction was removed. Then, the obtained purified liquid was vacuum-injected into a copper pipe having an outer diameter of 16 mm, an inner diameter of 14 mm and a length of 800 mm at a vacuum degree of 8/10 3 Torr and sealed to obtain a heat pipe.
【0022】実施例2 約10mlを初期留分として除去したほかは実施例1に準
じてヒートパイプを得た。Example 2 A heat pipe was obtained in the same manner as in Example 1 except that about 10 ml was removed as an initial fraction.
【0023】実施例3 約20mlを初期留分として除去したほかは実施例1に準
じてヒートパイプを得た。Example 3 A heat pipe was obtained in the same manner as in Example 1 except that about 20 ml was removed as an initial fraction.
【0024】実施例4 約50mlを初期留分として除去したほかは実施例1に準
じてヒートパイプを得た。Example 4 A heat pipe was obtained in the same manner as in Example 1 except that about 50 ml was removed as an initial fraction.
【0025】比較例 実施例1に準じて、平衡蒸気圧法による脱気処理のみを
施したものを用いて実施例1に準じてヒートパイプを得
た。Comparative Example According to Example 1, a heat pipe was obtained according to Example 1 by using only the degassing treatment by the equilibrium vapor pressure method.
【0026】評価試験 実施例、比較例で得たヒートパイプについて入力60W
での熱抵抗を調べた。結果を表1に示した。Evaluation test Input of 60 W for the heat pipes obtained in Examples and Comparative Examples
I checked the heat resistance at. The results are shown in Table 1.
【表1】 [Table 1]
【図1】本発明を実施するための精製装置を例示した説
明図。FIG. 1 is an explanatory view illustrating a refining device for carrying out the present invention.
【符号の説明】 3,7:排気管 4:精製容器 5:パーフルオロカーボンの液体[Explanation of Codes] 3, 7: Exhaust pipe 4: Purification container 5: Perfluorocarbon liquid
Claims (1)
したのち、その処理液上の気相部における異種ガスの分
圧が10mmHg以下の状態のもとで当該処理液を室温以上
の温度で気化させ、その初期留分を除去することを特徴
とするパーフルオロカーボンの精製方法。Claims: 1. A perfluorocarbon liquid is degassed, and then the treatment liquid is kept at room temperature under the condition that the partial pressure of a different gas in the vapor phase portion of the treatment liquid is 10 mmHg or less. A method for purifying perfluorocarbon, which comprises vaporizing at the above temperature and removing the initial fraction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3181857A JP2601384B2 (en) | 1991-06-25 | 1991-06-25 | Heat pipe working fluid manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3181857A JP2601384B2 (en) | 1991-06-25 | 1991-06-25 | Heat pipe working fluid manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05973A true JPH05973A (en) | 1993-01-08 |
| JP2601384B2 JP2601384B2 (en) | 1997-04-16 |
Family
ID=16108050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3181857A Expired - Fee Related JP2601384B2 (en) | 1991-06-25 | 1991-06-25 | Heat pipe working fluid manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2601384B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5801294A (en) * | 1996-06-06 | 1998-09-01 | Elf Atochem S.A. | Process for the purification of saturated hydrofluorocarbons |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49104877A (en) * | 1973-02-09 | 1974-10-03 | ||
| JPS60210678A (en) * | 1984-04-04 | 1985-10-23 | Canon Inc | Apparatus for removing oxygen dissolved in ink |
| JPS6193809A (en) * | 1984-10-15 | 1986-05-12 | Mitsubishi Heavy Ind Ltd | Pretreatment of vacuum degassing device |
| JPS61118259A (en) * | 1984-11-14 | 1986-06-05 | Canon Inc | inkjet recording head |
-
1991
- 1991-06-25 JP JP3181857A patent/JP2601384B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49104877A (en) * | 1973-02-09 | 1974-10-03 | ||
| JPS60210678A (en) * | 1984-04-04 | 1985-10-23 | Canon Inc | Apparatus for removing oxygen dissolved in ink |
| JPS6193809A (en) * | 1984-10-15 | 1986-05-12 | Mitsubishi Heavy Ind Ltd | Pretreatment of vacuum degassing device |
| JPS61118259A (en) * | 1984-11-14 | 1986-06-05 | Canon Inc | inkjet recording head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5801294A (en) * | 1996-06-06 | 1998-09-01 | Elf Atochem S.A. | Process for the purification of saturated hydrofluorocarbons |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2601384B2 (en) | 1997-04-16 |
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