JPH06100364A - Production of lead titanate zirconate-based high density ceramic - Google Patents
Production of lead titanate zirconate-based high density ceramicInfo
- Publication number
- JPH06100364A JPH06100364A JP27241792A JP27241792A JPH06100364A JP H06100364 A JPH06100364 A JP H06100364A JP 27241792 A JP27241792 A JP 27241792A JP 27241792 A JP27241792 A JP 27241792A JP H06100364 A JPH06100364 A JP H06100364A
- Authority
- JP
- Japan
- Prior art keywords
- lead
- solid solution
- sintering
- powder
- titanate zirconate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、均質で高密度なチタン
酸ジルコン酸鉛系セラミックスの製造方法に関する。チ
タン酸ジルコン酸鉛系セラミックスは、誘電率が高く、
圧電特性の大きなものが得られることが特徴である。さ
らに材料の諸特性に対する信頼性も高いためエレクトロ
ニクス、メカノエレクトロニクスの分野への様々な用途
が考えられ、例えばその強誘電性を利用してコンデンサ
ー材料に、また圧電性を利用して各種超音波振動子等へ
幅広い実用が知られる。さらにランタンの添加により透
光性が発現し、その電気光学特性を利用して光シャッタ
ー、光メモリーの主要部材にその応用が期待されてい
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a homogeneous and high-density lead zirconate titanate-based ceramics. Lead zirconate titanate-based ceramics have a high dielectric constant,
The feature is that the piezoelectric property is large. In addition, because of the high reliability of various properties of materials, various applications in the fields of electronics and mechanoelectronics are possible. For example, by utilizing its ferroelectricity, it can be used as a capacitor material, and by utilizing piezoelectricity it can be used for various ultrasonic vibrations. A wide range of practical uses are known to children. Furthermore, the addition of lanthanum makes it possible to exhibit translucency, and its electro-optical characteristics are expected to be applied to the main members of optical shutters and optical memories.
【0002】[0002]
【従来の技術】従来からチタン酸ジルコン酸鉛系セラミ
ックスの製造方法として、所定の化学量論比を有する出
発原料を用いこれを乾式法または湿式法(アルコキシド
法、共沈法、化合物沈澱法、スラリー混合法等)により
処理し、加熱して仮焼粉末を得、さらにこの仮焼粉末を
粉砕、成形して圧粉成形体とし、これを熱間静水圧プレ
ス法または常圧焼成法等により焼結して、最終製品を製
造する方法が種々知られている。2. Description of the Related Art Conventionally, as a method for producing lead zirconate titanate-based ceramics, a starting material having a predetermined stoichiometric ratio is used, and a dry method or a wet method (alkoxide method, coprecipitation method, compound precipitation method, Slurry mixing method, etc.) and heat to obtain a calcined powder, which is then crushed and molded into a powder compact, which is then subjected to hot isostatic pressing or normal pressure firing. Various methods are known for sintering to produce a final product.
【0003】これらの製造方法においては、焼結工程で
生じやすい鉛成分の揮発による組成変化を防ぐため各種
の工夫がなされている。すなわち、出発原料中に予め化
学量論量に比べ過剰な鉛成分を添加したり、白金坩堝中
に成形体とともに粉末状の鉛化合物を密封して焼結した
り、あるいは鉛化合物から構成される容器中に成形体を
設置し焼結する技術も知られている。従ってこれらの技
術は白金坩堝や鉛化合物による容器が必要であり、量産
にあたっては鉛化合物の白金容器への密封作業は大きな
障害となっていた。In these manufacturing methods, various measures have been taken in order to prevent the composition change due to volatilization of the lead component which is likely to occur in the sintering process. That is, an excess amount of lead component compared to the stoichiometric amount is added to the starting material in advance, or a powdered lead compound is sealed and sintered together with a compact in a platinum crucible, or composed of a lead compound. A technique is also known in which a molded body is placed in a container and sintered. Therefore, these techniques require a container made of a platinum crucible or a lead compound, and the sealing work of the lead compound in the platinum container has been a major obstacle in mass production.
【0004】上記従来の製造方法の欠点を改良すること
を目的に、特開平3−295859号が提案された。こ
れは鉛ハロゲン化物粉末を焼結助剤として添加すること
により仮焼粉末を液相焼結するものである。この焼結助
剤の効果により酸化鉛の融点より低い温度で焼結するこ
とが可能になり、このため鉛の揮発量が少ないことを特
徴とする製造方法である。この方法により900℃以下
の低温で充分焼結したセラミックスが得られ、鉛蒸気発
生に対する公害防止設備が不要となる等多くの利点が知
られるようになった。JP-A-3-295859 has been proposed for the purpose of improving the drawbacks of the conventional manufacturing method. This is a liquid-phase sintering of the calcined powder by adding lead halide powder as a sintering aid. Due to the effect of this sintering aid, it becomes possible to sinter at a temperature lower than the melting point of lead oxide, and therefore the production method is characterized in that the amount of lead volatilized is small. By this method, ceramics sufficiently sintered at a low temperature of 900 ° C. or less can be obtained, and many advantages such as eliminating the need for pollution prevention equipment against the generation of lead vapor have come to be known.
【0005】[0005]
【発明が解決しようとする課題】一方、一般的に液相焼
結における焼結温度の設定は高いほうが焼結速度を促進
すると思われるが、鉛化合物においては焼結温度を液相
生成温度から高くしすぎると鉛の揮発が激しくなり液相
が減少する結果、液相を介する焼結に支障を生じ構造の
緻密化が難しくなる。そこで焼結温度の設定は液相生成
温度により制限される。また鉛ハロゲン化物の融点は固
有値であるため、例えばフッ化鉛では855℃、塩化鉛
は501℃、ヨウ化鉛は402℃そして臭化鉛は373
℃であり、液相焼結の温度設定を自由に選ぶことはでき
ない。従って同法によってさえも焼結温度の設定に制限
があるところに課題を残していた。本発明の目的は、上
記従来のチタン酸ジルコン酸鉛系セラミックスの製造技
術にみられる欠点を改善して、高い誘電性、優れた圧電
特性、電気光学特性を有し、かつ品質の安定したチタン
酸ジルコン酸鉛系セラミックスを一層経済的に製造する
方法を提供することにある。On the other hand, it is generally considered that the higher the setting of the sintering temperature in the liquid phase sintering is, the more the sintering rate is accelerated. If it is set too high, the volatilization of lead becomes intense and the liquid phase decreases. As a result, sintering via the liquid phase is hindered and it becomes difficult to densify the structure. Therefore, the setting of the sintering temperature is limited by the liquid phase formation temperature. Further, since the melting point of lead halide is a unique value, for example, lead fluoride is 855 ° C., lead chloride is 501 ° C., lead iodide is 402 ° C., and lead bromide is 373.
Since it is ℃, the temperature setting of liquid phase sintering cannot be freely selected. Therefore, even with this method, there was a problem in that the setting of the sintering temperature was limited. An object of the present invention is to improve the drawbacks found in the above-mentioned conventional manufacturing techniques of lead zirconate titanate-based ceramics, to obtain titanium having high dielectric properties, excellent piezoelectric characteristics, electro-optical characteristics, and stable quality. An object of the present invention is to provide a method for producing a lead zirconate acid-based ceramics more economically.
【0006】[0006]
【課題を解決するための手段】本発明者らは、上記課題
点を解決するため鋭意研究を重ねたところ、上記チタン
酸ジルコン酸鉛系セラミックスの製造工程において、焼
結助剤として異なった種類の鉛ハロゲン化物からなる固
溶体粉末または鉛ハロゲン化物と鉛酸化物からなる固溶
体粉末を使用することによって上記目的を達成し得るこ
とを見い出した。Means for Solving the Problems The inventors of the present invention have conducted extensive studies to solve the above problems, and found that different types of sintering aids were used in the manufacturing process of the lead zirconate titanate ceramics. It was found that the above object can be achieved by using the solid solution powder of lead halide or the solid solution powder of lead halide and lead oxide.
【0007】以下、本発明の効果等に関し、より詳細に
分説する。上記焼結助剤として用いる固溶体の成分は鉛
ハロゲン化物と鉛酸化物からなり、鉛ハロゲン化物とし
てはフッ化鉛、塩化鉛、ヨウ化鉛、臭化鉛が、鉛酸化物
としては酸化鉛が用いることができる。固溶体粉末の組
成比は所望の焼結温度から液相生成温度を決め、固溶体
の相図を基に決める。相図は、例えばNational
Bureau of Standards(USA)
が編集し、American Ceramic Soc
ietyから出版された書籍Phase Diagra
ms for Ceramistsに掲載されている。The effects of the present invention will be described in more detail below. The components of the solid solution used as the sintering aid are lead halides and lead oxides, and lead fluorides include lead fluoride, lead chloride, lead iodide, and lead bromide, and lead oxides include lead oxide. Can be used. The composition ratio of the solid solution powder is determined on the basis of the phase diagram of the solid solution by determining the liquid phase formation temperature from the desired sintering temperature. The phase diagram is, for example, National
Bureau of Standards (USA)
Edited by the American Ceramic Soc
Book Phase Diagra published by iety
It is published in ms for Ceramics.
【0008】これらの固溶体の融点は270〜900℃
までの連続した温度範囲にあるため、所望の温度を得る
には相図から組成比を決定して液相生成温度を上記の範
囲で任意に選択することができる。仮焼粉末への固溶体
の添加量は広い範囲内で選び得るが、少量では上記焼結
促進効果が顕著にみられず、また、大量に添加すると製
品の上記諸特性が悪化し、また経済上、環境保全上も好
ましくないので、仮焼粉末原料中に含まれる鉛量の1〜
60mol%の範囲内であることが必要であるが、好適
にはその経済性を考え3〜30mol%で用いるのがよ
い。チタン酸ジルコン酸鉛系仮焼粉末原料は、その製造
方法の如何を問わず使用することができる。また、粉砕
工程およびその後の成形、加熱、焼結工程においては公
知の種々の技術を適宜使用し得る。The melting point of these solid solutions is 270 to 900 ° C.
In order to obtain a desired temperature, the composition ratio can be determined from the phase diagram and the liquid phase formation temperature can be arbitrarily selected within the above range. The addition amount of the solid solution to the calcined powder can be selected within a wide range, but a small amount does not show the above-mentioned sintering promoting effect remarkably, and addition in a large amount deteriorates the above-mentioned various properties of the product, and economically. Since it is not preferable in terms of environmental protection, the lead content in the calcined powder raw material should be 1 to
It is necessary to be in the range of 60 mol%, but it is preferable to use it in an amount of 3 to 30 mol% in consideration of its economical efficiency. The lead zirconate titanate-based calcination powder raw material can be used regardless of its manufacturing method. In addition, various known techniques can be appropriately used in the crushing step and the subsequent molding, heating, and sintering steps.
【0009】本発明の製造方法に関する反応機構はまだ
完全に解明されているわけではないが、以下のように考
える。チタン酸ジルコン酸鉛系仮焼粉末原料に、異なる
種類の鉛ハロゲン化物からなる固溶体あるいは酸化鉛と
鉛ハロゲン化物からなる固溶体を添加混合するので、加
熱焼結工程では固溶体の融点で固溶体が溶融し、仮焼粉
末粒子間に液相が形成され、この液相を介してチタン酸
ジルコン酸鉛系粒子の成分物質の移動、析出が進行す
る。このためチタン酸ジルコン酸鉛系仮焼粉末原料の焼
結を比較的低温域で著しく促進すると考える。Although the reaction mechanism of the production method of the present invention has not been completely clarified, it is considered as follows. Since a solid solution consisting of different kinds of lead halides or a solid solution consisting of lead oxide and lead halides is added to and mixed with the lead zirconate titanate-based calcined powder raw material, the solid solution melts at the melting point of the solid solution during the heating and sintering process. A liquid phase is formed between the calcined powder particles, and the migration and precipitation of the component substances of the lead zirconate titanate-based particles progress through this liquid phase. Therefore, it is considered that the sintering of the lead zirconate titanate-based calcined powder raw material is significantly promoted in a relatively low temperature range.
【0010】こうして高密度で高い光線透過率や優れた
電気光学特性、融電性または圧電特性を有し、かつ製造
ロット間で品質の安定したチタン酸ジルコン酸鉛系セラ
ミックスを容易に得ることができる。なお、固溶体の融
点に関連して液相焼結時の熱処理温度を任意に設定し得
るため経済的効果が明確である。Thus, lead zirconate titanate-based ceramics having a high density and a high light transmittance, excellent electro-optical characteristics, fusible properties or piezoelectric characteristics, and stable quality between production lots can be easily obtained. it can. The economic effect is clear because the heat treatment temperature during liquid phase sintering can be set arbitrarily in relation to the melting point of the solid solution.
【0011】[0011]
【実施例】以下、実施例および比較例にそって本発明を
例示する。 (実施例) 固溶体の調整 フッ化鉛と酸化鉛の粉末を1:9のモル比でボールミル
混合し、450℃で1時間仮焼した後、らいかい機で粉
砕したものを固溶体1、塩化鉛と臭化鉛の粉末を1:3
のモル比でボールミル混合し、400℃で1時間仮焼し
た後、らいかい機で粉砕したものを固溶体2、ヨウ化鉛
と臭化鉛の粉末を1:9のモル比でボールミル混合し、
350℃で1時間仮焼した後、らいかい機で粉砕したも
のを固溶体3として準備した。 焼結 市販のPLZT仮焼粉末原料(所定組成:Pb0.91La
0.09(Zr0.65Ti0.35)0.9775O3過剰添加Pb:2
重量%、林化学工業製、商品名(HIJIRCO
T))を三分しそれぞれに仮焼粉末原料組成中の鉛成分
の10%相当量の固溶体1、2、3を添加し、それぞれ
別個にポリエチレンポットとジルコニアボールを用いた
ボールミルでアセトンを媒体として20時間混合、湿式
粉砕した。ついで、これらの粉砕された仮焼粉末を乾
燥、造粒後、ゴム型(φ=35mm)に入れ冷間静水圧
法により加圧成形した。得られた成形体をアルミナ坩堝
に入れ、加熱して固溶体1は830℃、固溶体2は54
0℃、固溶体3は440℃で15時間保持し、添加した
固溶体を溶融して焼結を促進させ、ついで、1150℃
で20時間酸素気流中で保持し、上記固溶体を揮発させ
て固相焼結した。得られたPLZTセラミックスを鏡面
研磨した各試料(厚さ1.0mm)について光線透過率
を分光光度計(日立製作所製320型)により測定した
ところ、波長600nmでそれぞれ固溶体1を添加した
試料は63.0%、固溶体2を添加した試料は65.0
%、固溶体3を添加した試料は65.5%の高い透過率
を示した。EXAMPLES The present invention will be illustrated below with reference to Examples and Comparative Examples. (Example) Preparation of solid solution Lead fluoride and lead oxide powders were mixed in a ball mill at a molar ratio of 1: 9, calcined at 450 ° C for 1 hour, and then pulverized by a raker machine to obtain solid solution 1 and lead chloride. And lead bromide powder 1: 3
Ball-milled at a molar ratio of 1, and calcined at 400 ° C. for 1 hour, and then pulverized with a raider machine to solid-solution 2, and lead-iodide and lead-bromide powders were ball-milled at a molar ratio of 1: 9,
A solid solution 3 was prepared by calcination at 350 ° C. for 1 hour and then crushed by a raker. Sintering commercial PLZT calcined powder material (predetermined composition:. Pb 0 91 La
. 0 09 (Zr 0 65 Ti 0 35..) 0 9775 O 3 excessive addition Pb:. 2
% By weight, manufactured by Hayashi Chemical Industry, trade name (HIJIRCO
T)) is divided into three parts, and solid solutions 1, 2, and 3 of 10% of the lead component in the calcined powder raw material composition are added to each, and acetone is used as a medium separately in a ball mill using a polyethylene pot and a zirconia ball. Was mixed for 20 hours and wet pulverized. Then, these pulverized calcined powders were dried, granulated, put into a rubber mold (φ = 35 mm), and pressure-molded by a cold isostatic method. The obtained molded body was put into an alumina crucible and heated to give a solid solution 1 of 830 ° C. and a solid solution 2 of 54.
0 ° C., the solid solution 3 is kept at 440 ° C. for 15 hours, the added solid solution is melted to accelerate the sintering, and then 1150 ° C.
Was held in an oxygen stream for 20 hours to volatilize the above solid solution and perform solid phase sintering. The light transmittance of each sample (thickness 1.0 mm) obtained by mirror-polishing the obtained PLZT ceramics was measured by a spectrophotometer (Model 320 manufactured by Hitachi, Ltd.). As a result, 63 samples to which solid solution 1 was added at a wavelength of 600 nm were obtained. 0.0%, 65.0% for the sample to which solid solution 2 was added
%, The sample to which solid solution 3 was added showed a high transmittance of 65.5%.
【0012】(比較例)実施例と同様の市販のPLZT
仮焼粉末原料を、固溶体を添加せずに実施例と同一条件
で混合、粉砕、乾燥、成形し、1150℃で20時間酸
素気流中で焼成して得られたPLZTセラミックスの鏡
面研磨済み試料(厚さ1.0mm)について、実施例と
同様に光線透過率を測定したところ、波長600nmで
55.0%という実施例と比較して低い透過率を示し
た。COMPARATIVE EXAMPLE Commercially available PLZT similar to the example
Specimen-polished sample of PLZT ceramics obtained by mixing, pulverizing, drying, and shaping the calcined powder raw material under the same conditions as in Example without adding a solid solution, and firing at 1150 ° C. for 20 hours in an oxygen stream ( When the light transmittance was measured in the same manner as in the example for a thickness of 1.0 mm), the transmittance was 55.0% at a wavelength of 600 nm, which was lower than the example.
【0013】以上、本発明の実施例について比較例と対
比して説明したが、本発明のチタン酸ジルコン酸鉛系セ
ラミックスの製造方法は上記実施例に限られるものでは
なく、例えば過剰の鉛成分が添加されていない所定理論
組成の出発原料による仮焼粉末原料や、理論組成の異な
る公知の種々のチタン酸ジルコン酸鉛系仮焼粉末原料を
使用する等本発明の方法の技術的思想を逸脱しない範囲
で種々の改変をなし得る。Although the examples of the present invention have been described in comparison with the comparative examples, the method for producing the lead zirconate titanate-based ceramics of the present invention is not limited to the above examples. A calcination powder raw material with a starting material having a predetermined theoretical composition to which is not added, or various known lead zirconate titanate-based calcination powder raw materials having different theoretical compositions are used, which deviates from the technical idea of the method of the present invention. Various modifications can be made within the range that does not.
【0014】[0014]
【発明の効果】本発明のチタン酸ジルコン酸鉛系セラミ
ックスの製造方法は、上記のとおりチタン酸ジルコン酸
鉛系仮焼粉末原料に異なる種類の鉛ハロゲン化物からな
る固溶体粉末または鉛ハロゲン化物と鉛酸化物からなる
固溶体粉末を添加混合し、成形した後、加熱して固溶体
粉末を溶融しつつ焼結する方法であるから、焼結促進効
果が著しいうえ、固溶体の融点に関連して液相焼結時の
熱処理温度を任意に設定し得るため経済的な手法であ
り、かつ光線透過性や電気光学特性、誘電性および圧電
特性に優れた高密度のチタン酸ジルコン酸鉛系セラミッ
クスを容易に製造することができる。As described above, the method for producing lead zirconate titanate-based ceramics according to the present invention comprises a solid solution powder composed of different kinds of lead halides or a lead halide and lead as a raw material for a lead zirconate titanate calcinated powder. This is a method in which a solid solution powder made of an oxide is added and mixed, shaped, and then heated to melt and sinter the solid solution powder, so that the sintering promoting effect is remarkable and the liquid phase firing is associated with the melting point of the solid solution. This is an economical method because the heat treatment temperature at the time of setting can be set arbitrarily, and it is easy to manufacture high-density lead zirconate titanate-based ceramics with excellent light transmittance, electro-optical properties, dielectric properties, and piezoelectric properties. can do.
Claims (1)
ことによりチタン酸ジルコン酸鉛系セラミックスを製造
する方法において、前記焼結助剤として異なった種類の
鉛ハロゲン化物からなる固溶体粉末または鉛ハロゲン化
物と鉛酸化物からなる固溶体粉末を使用することを特徴
とするチタン酸ジルコン酸鉛系セラミックスの製造方
法。1. A method for producing lead zirconate titanate-based ceramics by adding a sintering aid to a calcined powder and sintering the mixture, comprising different types of lead halides as the sintering aid. A method for producing a lead zirconate titanate-based ceramics, which comprises using a solid solution powder or a solid solution powder comprising a lead halide and a lead oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27241792A JPH06100364A (en) | 1992-09-17 | 1992-09-17 | Production of lead titanate zirconate-based high density ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27241792A JPH06100364A (en) | 1992-09-17 | 1992-09-17 | Production of lead titanate zirconate-based high density ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06100364A true JPH06100364A (en) | 1994-04-12 |
Family
ID=17513623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27241792A Pending JPH06100364A (en) | 1992-09-17 | 1992-09-17 | Production of lead titanate zirconate-based high density ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06100364A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005031887A1 (en) * | 2003-09-25 | 2005-04-07 | Kyocera Corporation | Multilayer piezoelectric device |
| JP2005101274A (en) * | 2003-09-25 | 2005-04-14 | Kyocera Corp | Piezoelectric ceramics, laminated piezoelectric element using the same, and jetting apparatus |
| JP2005183553A (en) * | 2003-12-17 | 2005-07-07 | Kyocera Corp | Multilayer piezoelectric element and injection device |
| JP2011082534A (en) * | 2010-11-09 | 2011-04-21 | Kyocera Corp | Laminated piezoelectric element and injection device using the same |
-
1992
- 1992-09-17 JP JP27241792A patent/JPH06100364A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005031887A1 (en) * | 2003-09-25 | 2005-04-07 | Kyocera Corporation | Multilayer piezoelectric device |
| JP2005101274A (en) * | 2003-09-25 | 2005-04-14 | Kyocera Corp | Piezoelectric ceramics, laminated piezoelectric element using the same, and jetting apparatus |
| US7679272B2 (en) | 2003-09-25 | 2010-03-16 | Kyocera Corporation | Multi-layer piezoelectric element |
| US7759847B2 (en) | 2003-09-25 | 2010-07-20 | Kyocera Corporation | Multi-layer piezoelectric device |
| US7902726B2 (en) | 2003-09-25 | 2011-03-08 | Kyocera Corporation | Multi-layer piezoelectric device |
| JP2005183553A (en) * | 2003-12-17 | 2005-07-07 | Kyocera Corp | Multilayer piezoelectric element and injection device |
| JP2011082534A (en) * | 2010-11-09 | 2011-04-21 | Kyocera Corp | Laminated piezoelectric element and injection device using the same |
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