JPH0610699Y2 - Light receiving device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a light receiving device having a plurality of optical filters that transmit different specific wavelengths of light, and relates to a white balance color sensor of a video camera and a color identification device. Used for etc.

(B) Conventional technology A semiconductor light receiving device in which a plurality of optical filters for transmitting light of different specific wavelengths, for example, a red filter, a green filter, a blue filter, a yellow filter, a magenta color filter, and a cyan color filter are arbitrarily combined is provided. JP-A-58-125
It is already known as disclosed in Japanese Patent No. 865.

FIGS. 3 and 4 show a state and a cross-sectional state of a semiconductor light receiving device suitable as a color sensor for white balance of a video camera when viewed from the light receiving surface side. Complementary colors are provided on the light receiving surface side of the transparent supporting substrate (1). In the relationship of, for example, the optical filters of the blue filter (2B) and the yellow filter (2Y) are juxtaposed, and the light-transmitting light is received at each of the blue filter (2B) facing portion and the yellow filter (2Y) facing portion on the back side. The first electrode film (3) that controls the surface electrode,
Semiconductor film with semiconductor junction including semiconductor photoactive layer (4)
And a film-shaped light receiving element (6B) (6Y) formed of a laminate with the second electrode film (5) that controls the back electrode. Therefore, one transparent supporting substrate (1) is divided into two and faces the light receiving surface side, and the blue filter (2B), the transparent supporting substrate (1) and the light receiving element.
The laminated area of (6B) constitutes a blue light receiving area that receives light in the wavelength band that passes through the blue filter (2B), and the yellow filter (2
Y), the transparent substrate (1) and the light receiving element (6Y) are stacked to form a yellow light receiving area for receiving light in the wavelength band that passes through the yellow filter (2Y).

In the semiconductor light receiving device having such a structure, when any light enters from the optical filter side, first the blue / yellow filter (2B)
(2Y) allows only light of different specific wavelength bands to pass through, and the light of these wavelength bands is received by each light receiving element (6B) (6Y)
Photoelectric conversion is performed by and the received light output corresponding to the light intensity is led to the outside. Since the optical filter is composed of the blue color filter (2B) and the yellow color filter (2Y) which are in a complementary color relationship as described above, the light intensity in the two wavelength bands can be calculated by comparing the received light output derived to the outside. Can be detected.

However, in the structure in which the light receiving region is divided into two parts, although the incident light fulfills a predetermined function when the incident light is uniformly incident on the entire light receiving region, the light to be detected usually has a deviation in its intensity distribution. Therefore, it is difficult to accurately detect the ratio of the light intensity of each wavelength band to the actual incident light. That is, when the intensity of incident light in one light receiving region, for example, the blue light receiving region becomes higher than that in the yellow light receiving region which is the other light receiving region, the wavelength band detected in the blue light receiving region of high incident light intensity A large light intensity is output, and an accurate detection output cannot be obtained.

FIGS. 5 and 6 (a) and (b) show that if there is a deviation in the intensity distribution of the light to be detected, the ratio of the light intensity of each wavelength band to the actual incident light can be accurately detected. In order to solve the difficult point, the light receiving device, which was filed by the applicant of the present application as Japanese Patent Application No. 61-70498, is viewed from the light receiving surface side. A feature of such a light receiving device is that the light receiving element provided with an optical filter for transmitting the light of the same specific wavelength is arranged substantially in point symmetry with respect to the light receiving center. That is, on the light receiving surface side of the translucent support substrate (1), for example, in a complementary color relationship,
The blue filter (2B1) (2B2) and the yellow filter (2Y1) (2Y2) are divided into four by the X axis (x) and the Y axis (y) which are orthogonal to each other in the light receiving area, and at the center of the light receiving area. Some X axis (x)
And the Y-axis (y) intersecting point (c), color filters of the same color are arranged to be point-symmetrical. On the other hand, translucent substrate (1)
On the back side of the, the translucent first electrode film of ITO, SnO ₂ or the like is provided so as to face each color filter (2B1) (2B2) (2Y1) (2Y2).
(3) The film-shaped light receiving elements (6B1) (6B2) (6Y1) (6Y2), which are each laminated body of the semiconductor film (4) and the second electrode film (5), are provided.

The effective light receiving area where the above-mentioned light receiving elements (6B1) (6B2) (6Y1) (6Y2) actually receive light is the first electrode film (3B
1) (3B2) (3Y1) (3Y2), a region where the semiconductor film (4) and the second electrode film (5) overlap each other, and therefore, either the first electrode film (3) or the second electrode film (5) One (the first electrode film (3) in this structure) is divided into each element (6B1) (6B2) (6Y1) (6Y2), and the other (the second electrode film (5) in this structure) is divided into each element. Even if the non-divided structure is used as the common electrode, the effective light receiving region of each element is not adversely affected.

On the other hand, the first electrode films (3B1) (3B2) (3Y1) (3Y2) ... Divided for each of the light receiving elements (6B1) (6B2) (6Y1) (6Y2) are point-symmetrical with respect to the light receiving center. Light-receiving elements (6B1), (6B2), (6Y1), and (6Y2) that face and face the same optical filter are transparent substrates.
(1) It is wired so as to be electrically coupled to the above. As a result, when there are two pairs of light receiving elements (6B1) (6B2) (6Y1) (6Y2), the lid also detects the first electrode film (3B1) (3Y1) (3Y2) and the first wiring electrode film (9B) (9Y1). ) (9Y2) through the first output terminal (7B) (7Y)
Is the same as the type of optical filter of specific wavelength
Further, the second output terminal (8) connected to the second electrode film (5) through the second wiring electrode film (10) has only one since the second electrode film (5) has an electrode configuration common to all elements. Becomes

Therefore, according to this structure, the light receiving output can be obtained for each of the same specific wavelengths, but the structure is such that the output terminal is provided at one end of the substrate as shown in FIG. The area of the electrode film varies between them.

In the light receiving device having such a structure, each individual light receiving element (6B1) (6B
2) When looking at (6Y1) and (6Y2), the shapes of the first electrode film (3B1) (3B2) (3Y1) (3Y2) and the second electrode film (5) facing each other across the semiconductor film (4) are slightly However, in reality, the electrode film areas are different from each other as a result. That is, in order to manufacture the film-shaped light receiving elements (6B1) (6B2) (6Y1) (6Y2), first, the first electrode film (3B1) (3B2) (3Y1) (3Y2) is formed on one main surface of the supporting substrate (1). ) And the first output terminals (7B) and (7Y) continuous with the electrode film and the first wiring electrode films (9B) (9Y1) (9Y2) are integrally formed by patterning, and then the first electrode film (3B1) ) (3B2) (3Y1) (3Y2) on the semiconductor film
(4) is overlaid on the lower first electrode film (3B1) (3B2) (3Y1) (3Y2) without exposing the peripheral edge thereof, and finally the second electrode film (5) is formed on the semiconductor film (4). ) Is formed and the electrode film
Support substrate (1) extending from (5) beyond the periphery of semiconductor film (4)
Second wiring electrode film (10) extending to one main surface and the wiring electrode film
The second output terminal (8) connected to (10) is integrally patterned. Therefore, the second electrode film (5) and the first electrode film (3B1) (3B
2) In order to make (3Y1) and (3Y2) face each other across the semiconductor film (4), the patterning of the second electrode film (5) formed later must be performed accurately. The requirements for mask positioning accuracy are strict and require extremely advanced manufacturing technology.

Therefore, in a light-receiving device in which the above-mentioned light-receiving elements (6B1) (6B2) (6Y1) (6Y2) are dispersedly arranged, the shape of the second electrode film (5) which is a common electrode is changed to the above-mentioned mask (for selective vapor deposition). , The first electrode film (3B1) (3B2) (3Y1) (3Y2) divided individually to ease the requirement for positioning accuracy (for photolithography)
Even if the patterning of the second electrode film (5) is slightly larger than the total area of the first electrode film (3B1) (3B1)
2) The common second electrode film (5) is designed to always overlap on (3Y1) and (3Y2). That is, the first electrode film having a small area
(3B1) (3B2) (3Y1) (3Y2) The electrode film area of each light receiving element (6B1)
(6B2) (6Y1) (6Y2) is an effective light-receiving region that contributes to the photoelectric effect, and even if the patterning of the second electrode film (5) is slightly shifted vertically or horizontally, each light-receiving element (6B1) (6B2) ( 6Y1) (6Y2)
The area of the effective light receiving region of is not changed.

However, as described above, the first electrode film (3B1) (3B2) (3Y1) (3Y2)
Even if a slight displacement occurs in the upper second electrode film (5), the second electrode film (5) always overlaps the first electrode film (3B1) (3B2) (3Y1) (3Y2). The first electrode film
(3B1) (3B2) (3Y1) (3Y2) The area of the effective light receiving area equal to the area of the same does not change, but if the second electrode film (5) is slightly displaced in the vertical direction, for example, four light receiving elements (6B1 ) (6B
2) Among the (6Y1) and (6Y2), the yellow light receiving element (6Y
The area of the effective light receiving area only for 2) causes a slight variation. That is, the first wiring electrode film (9Y2) extends vertically from the first electrode film (3Y2) of the yellow light receiving element (6Y2) toward the first output terminal (7Y). The first wiring electrode film (9Y2) faces the peripheral portion of the second electrode film (5) across the semiconductor film (4) at the end of the wiring electrode film (9Y2) on the first electrode film (3Y2) side. As a result, a small effective light receiving region for photoelectrically operating is formed, and the first wiring electrode films (9B) (9Y1) (9Y2) extending toward such first output terminals (7B) (7Y) are formed. The effective light receiving area of the light receiving element (6B1) (6Y1) (6Y2) equipped with
1) In the electrode film area of (3Y1) (3Y2), above the first wiring electrode film (9B)
(9Y1) and (9Y2) are added to the area facing the peripheral portion of the second electrode film (5). Therefore, as described above, in the light receiving device that receives the light only in the different specific wavelength bands and compares the light reception outputs thereof to detect the ratio of the light intensities of the two different wavelength bands, If only the area of the effective light receiving area of the light receiving element (6B1) (6B2) or (6Y1) (6Y2) in the wavelength band changes, the light receiving output proportional to the area of the effective light receiving area also changes. It is not possible to accurately detect the ratio of light intensity in the wavelength band.

(C) Problems to be solved by the present invention The present invention is intended to solve the problem that the areas of the effective light receiving regions that perform photoelectric operation are slightly uneven when receiving light irradiation.

(D) Means for Solving the Problems In order to solve the above problems, the present invention is directed to a semiconductor including a translucent first electrode film and a semiconductor photoactive layer on one main surface of a translucent substrate. An optical filter which is provided with four film-shaped light receiving elements formed by sequentially laminating a film and a second electrode film, and which transmits light of two different specific wavelengths to the other main surface of the substrate,
The film-shaped light-receiving elements are arranged so as to face each other, and the light-receiving element having an optical filter for transmitting light of the same specific wavelength is arranged substantially point-symmetrically with respect to the light-receiving center in the light-receiving region. At least, one of the first electrode film and the second electrode film serves as a common electrode for the plurality of film-shaped light receiving elements, and at least the other electrode film and the space between the electrode films of the plurality of film-shaped light receiving elements are arranged at least. In a light receiving device that spreads so as to cover and the other electrode film is divided for each light receiving element having at least the same optical filter, the light reception output of the other electrode film is derived for each of the specific wavelengths. The output terminal is provided outside the light receiving region and at one end of the substrate, and the other electrode film is connected to the output terminal through the wiring electrode film and extends from the other electrode film. How to extend An electrode film extension extending in the same width as the wiring electrode film in a direction parallel to the light-receiving element provided with the wiring electrode film and having a specific wavelength different from that of the light-receiving element. It is characterized in that it is provided on the other electrode film of the light receiving element having an optical filter for transmitting light.

(E) Action As described above, the electrode film extension extending in the direction parallel to the extending direction of the wiring electrode film extending from the other separated electrode film of each light receiving element is provided with the wiring in the parallel relationship. By providing the light receiving element adjacent to the light receiving element provided with the electrode film, the overlapping portion of the wiring electrode film and the semiconductor film and the common electrode film is increased or decreased, and the light receiving element is effective. Even if the light-receiving area changes, the effective light-receiving area of the light-receiving element adjacent to the light-receiving element also increases or decreases due to the overlap in the electrode film extension portion, and only the effective light-receiving area of one light-receiving element alone. It does not increase or decrease.

(F) Embodiment FIG. 1 shows an embodiment of the light receiving device of the present invention, which is the same as the conventional light receiving device shown in FIG. Similarly, (1) is a transparent support substrate, (2B1) (2B2) is a blue filter, (2Y1) (2Y2) is a yellow filter, and (3B1) (3B2) (3Y1) (3Y2) is a light-receiving surface electrode. A separate first electrode film, (4) a semiconductor film including a semiconductor photoactive layer, (5) a second electrode film that controls a back electrode, (6B1) (6B
2) is a blue light receiving element that receives light that has passed through the blue filters (2B1) (2B2), (6Y1) (6Y2) is a yellow light receiving element that receives light that has passed through the yellow filter (2Y1) (2Y2), (7B) is the first output terminal of the blue light receiving element (6B1) (6B2), (7Y) is the first output terminal of the yellow light receiving element (6Y1) (6Y2), and (8) is the blue / yellow light receiving element ( 6B1) (6B2) ・ (6Y1) (6Y2) common second output terminal, (9B) ・
(9Y1) (9Y2) is the first electrode film (3B1) / (3Y1) (3Y2) and the first output terminal (7B) divided for each light receiving element (6B1), (6Y1) (6Y2)
First wiring electrode film for electrically coupling with (7Y), (10) second electrode film (5) and second output terminal common to each light receiving element (6B1) (6B2) (6Y1) (6Y2) The second wiring electrode film electrically coupling with (8) is different from the first wiring film (3B1) / (3Y1) (3B1) / (6Y1) (3Y1) ( 3Y2) and the first wiring electrode film (9
B) ・ (9Y1) (9Y2) first extending in a direction parallel to the extending direction
Electrode film extension parts (11Y2) (11B21) (11B22) are parallel to the first wiring electrode film (9B) · (9Y1) (9Y2) light receiving element (6B
1) ・ (6Y1) (6Y2) adjacent photo detector (6Y2) ・ (6B2)
It is provided at (6B2).

FIGS. 2 (a) to 2 (d) specifically show the features of the present invention, and in order to simplify the description, they are in a state of facing from the light receiving surface side. The first electrode films (3B1) (3B2) (3Y1) (3Y2) and the first light-receiving elements (6B1) (6B2) (6Y1) (6Y2) divided on the back side of the supporting substrate (1) and the first First wiring electrode formed by patterning at the same time with the same material as the electrode film
(9B) ・ (9Y1) (9Y2) and the first output terminals (7B) ・ (7Y) are drawn by solid lines, and they extend substantially across the light receiving area across the semiconductor film (not shown) to serve as a common electrode. The operating second electrode film (5), second wiring electrode film (10), and second output terminal (8) are drawn by broken lines. The blue and yellow filters (2B1) (2B2) and (2Y1) provided on the light-receiving side of the support substrate (1)
(2Y2) is omitted.

Thus, when the pattern of the second electrode film (5) is vertically displaced within the allowable range of the selective deposition mask or the photomask as shown in FIG. 2 (a), it is provided at the lower right. The semiconductor film (4) and the second electrode film (5) on the first wiring electrode film (9Y2) extending from the first electrode film (3Y2) of the yellow light receiving element (6Y2)
The light receiving area having a small area due to the overlap with the peripheral edge portion of is reduced. On the other hand, the lower left blue light receiving element (6B2) adjacent to the yellow light receiving element (6Y2) has a first electrode film extension (11B22) parallel to the first wiring electrode film (9Y2). That is, assuming that the second electrode film (5) is displaced in the direction in which the overlapping portion of the first wiring electrode film (9Y2) is reduced, the effective light receiving area of only the yellow light receiving element (6Y2) can be seen by looking only at the reduced amount. Although the number is decreased, the yellow light receiving element (6Y2) and the adjacent yellow light receiving element (6B2) are in parallel with the first wiring electrode film (9Y2) and are equal to the first wiring electrode film (9Y2). Since the overlapping portion on the first electrode film extension portion (11B22) having a width is also reduced equally, the effective light receiving area of the blue light receiving element (6B2) is also reduced, and one light receiving element (6Y
2) and (6B2) effective light receiving area alone does not decrease.

Contrary to FIG. 2 (a), FIG. 2 (b) shows a state in which the second electrode film (5) is displaced downward in the vertical direction within the allowable range. That is, when the second electrode film (5) is displaced vertically downward, the overlapping portions on the first wiring electrode film (9Y2) and the first electrode film extension (11B22) are increased. Therefore, even in this case, one of the light receiving elements (6Y2), (6B2)
The effective light-receiving area of 1 does not increase alone.

FIGS. 2 (c) and 2 (d) show a state in which the second electrode film (5) is displaced laterally within the allowable range. That is, for the vertical displacement, the lower right photodetector (6Y
In order to cope with the fluctuation of the effective light-receiving area in the first wiring electrode film (9Y2) that also extends vertically from the first electrode film (3Y2) in 2), the above-mentioned light receiving element (6B2) in the lower left adjacent to the above First electrode film extension (11B22) having the same electrode width as the first wiring electrode film (9Y2)
Were installed in parallel. Therefore, even if the position shifts in the left-right direction, the first wiring electrode film extending in the left-right direction from the first electrode film (3B1) (3Y1) of the upper-right light receiving element (6B1) and the upper-left light receiving element (6Y1)
In order to cope with the fluctuation of the effective light receiving area in (9B1) and (9Y1),
Lower right photodetector (6Y2) or lower left photodetector adjacent to each other
On the first electrode film (3Y2) (3B2) of (6B2), the first wiring electrode film
The first electrode film extension parts (11Y2) (11B21) having the same electrode width as the wiring electrode films (9B1) (9Y1) are provided in parallel with (9B1) (9Y1). That is, the first wiring electrode film (9B
The change in the effective light receiving area due to 1) is canceled by the change in the first electrode film extension (11Y2) provided in parallel with the lower right light receiving element (6Y2), and the first wiring electrode of the upper left light receiving element (6Y1) Membrane (9Y1)
The fluctuation of the effective light receiving area due to can be canceled by the first electrode film extension portion (11B21) provided in parallel with the lower left light receiving element (6B2).

(G) Effect of the Invention As is apparent from the above description, the light receiving device of the present invention increases or decreases the overlapping portion of the wiring electrode film and the semiconductor film and the common electrode film, thereby effectively receiving the light of the light receiving element. Even if the area changes, the overlap between the light receiving element and the adjacent light receiving element increases and decreases, so that only the effective light receiving area of one light receiving element does not increase or decrease independently, and therefore, the light of a specific wavelength different from each other does not exist. It is possible to suppress the variation in the area ratio of the effective light receiving regions between the light receiving elements that receive the light, and it is possible to accurately detect the ratio of the light intensity of the specific wavelength.

[Brief description of drawings]

FIG. 1 is a plan view of an embodiment of the light receiving device of the present invention viewed from the light receiving surface side, and FIGS. 2 (a) to 2 (d) are schematic diagrams for explaining the features of the present invention. FIG. 3 is a plan view of a conventional device,
4 is a sectional view taken along the line AA 'in FIG. 3, FIG. 5 is a plan view of another conventional apparatus, and FIG. 6 (a) is A- in FIG.
6 is a sectional view taken along the line A'and FIG. 6 (b) is a sectional view taken along the line BB 'in FIG. (1) …… Translucent support substrate, (2B1) (2B2) …… Blue filter, (2Y1) (2Y2) …… Yellow filter, (3) (3B1) (3B2) (3Y1)
(3Y2) …… first electrode film, (4) …… semiconductor film, (5) …… second
Electrode film, (6B1) (6B2) (6Y1) (6Y2) ... Photodetector, (7B) (7Y)
...... First output terminal, (9B) (9Y1) (9Y2) ...... First wiring electrode film, (11B21) (11B22) (11Y2) ...... First electrode film extension.

Claims (1)

[Scope of utility model registration request] 1. A transparent first substrate is provided on one main surface of a transparent substrate.
Four film-shaped light receiving elements, which are formed by sequentially stacking an electrode film, a semiconductor film including a semiconductor photoactive layer, and a second electrode film, are provided, and light of two different specific wavelengths is provided on the other main surface of the substrate. An optical filter for transmitting light is arranged so as to face each of the film-shaped light-receiving elements, and the light-receiving element provided with an optical filter for transmitting light of the same specific wavelength with respect to the light-receiving center in the light-receiving region. The first electrode film and the second electrode film are arranged substantially in point symmetry, and one of the first electrode film and the second electrode film serves as a common electrode for the plurality of film-shaped light receiving elements and the other electrode film of the plurality of film-shaped light receiving elements. And a light-receiving device that spreads so as to cover at least the space between the electrode films, and the other electrode film is divided for each light-receiving element including at least the same optical filter, and the light-receiving output of the other electrode film is Conducted for each of the above specified wavelengths An output terminal to be output is provided outside the light receiving region and at one end of the substrate, and the other electrode film is connected to the output terminal via a wiring electrode film and the wiring extending from the other electrode film. An electrode film extension extending in a direction parallel to the extending direction of the electrode film and having the same width as the wiring electrode film is adjacent to the light receiving element provided with the wiring electrode film; A light-receiving device provided on the other electrode film of the above-described light-receiving element, which is provided with an optical filter that transmits light of different specific wavelengths.