JPH06108183A - Metal member for vacuum seal - Google Patents
Metal member for vacuum sealInfo
- Publication number
- JPH06108183A JPH06108183A JP26155492A JP26155492A JPH06108183A JP H06108183 A JPH06108183 A JP H06108183A JP 26155492 A JP26155492 A JP 26155492A JP 26155492 A JP26155492 A JP 26155492A JP H06108183 A JPH06108183 A JP H06108183A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- vacuum
- metal member
- temperature
- vacuum seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002184 metal Substances 0.000 title claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 33
- 230000009466 transformation Effects 0.000 claims abstract description 11
- 229910000734 martensite Inorganic materials 0.000 claims abstract description 10
- 229910001566 austenite Inorganic materials 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 7
- 230000001747 exhibiting effect Effects 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 abstract description 8
- 150000002739 metals Chemical class 0.000 description 5
- 239000010949 copper Substances 0.000 description 3
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Gasket Seals (AREA)
Abstract
(57)【要約】
【目的】 ガス放出が少なく、かつ耐熱性および耐放射
線性に優れた真空シール用金属部材を提供する。
【構成】 熱弾性型マルテンサイト変態を示し、マルテ
ンサイト相からオーステナイト相への変態開始温度が使
用温度より低い金属からなることを特徴とする真空シー
ル用金属部材。(57) [Abstract] [Purpose] To provide a metal member for a vacuum seal, which emits less gas and has excellent heat resistance and radiation resistance. [Structure] A metal member for a vacuum seal, which exhibits a thermoelastic martensitic transformation, and is made of a metal having a transformation start temperature from a martensite phase to an austenite phase lower than an operating temperature.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、真空機器に用いられ
る、Ｏリング、ガスケット、ボルト、ナットおよびワッ
シャー等の真空シール用部材に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum sealing member such as an O-ring, gasket, bolt, nut and washer used in vacuum equipment.
【０００２】[0002]
【従来の技術および発明が解決しようとする課題】最近
の化学技術の発展に伴い、超高真空、または高温もしく
は放射線の下などの特殊な真空の環境下で用いることの
できる真空用シール部材が望まれている。しかしなが
ら、従来から用いられているニトリルゴム、スチレンブ
タジエンゴム、シリコンゴムおよびフッ素ゴム等の有機
化合物によるシール部材では、シール部材からのガス放
出があり、超高真空が得られないという問題があった。2. Description of the Related Art With the recent development of chemical technology, a vacuum sealing member that can be used in an ultra-high vacuum or a special vacuum environment such as high temperature or radiation has been developed. Is desired. However, conventionally used seal members made of organic compounds such as nitrile rubber, styrene-butadiene rubber, silicon rubber, and fluororubber have a problem that ultra-high vacuum cannot be obtained because gas is released from the seal member. .
【０００３】また、一部の特殊な用途には、Ｉｎまたは
Ｐｂ等の金属が使用されているが、このようなシール部
材であっても、高温下で使用できないという問題があっ
たり、あるいは耐放射線性に劣るという問題があった。In addition, metals such as In and Pb are used for some special applications, but even such a sealing member has a problem that it cannot be used at high temperatures, or has a high resistance. There was a problem of poor radiation.
【０００４】この発明の目的は、ガス放出が少なく、か
つ耐熱性および耐放射線性に優れた真空シール用部材を
提供することにある。An object of the present invention is to provide a member for vacuum sealing which emits less gas and is excellent in heat resistance and radiation resistance.
【０００５】[0005]
【課題を解決するための手段】この発明に従う真空シー
ル用金属部材は、熱弾性型マルテンサイト変態を示し、
マルテンサイト相からオーステナイト相への変態開始温
度が使用温度より低い金属からなることを特徴とする。The metal member for vacuum seal according to the present invention exhibits thermoelastic martensitic transformation,
It is characterized by being composed of a metal whose transformation start temperature from the martensite phase to the austenite phase is lower than the operating temperature.
【０００６】この発明において、使用温度とは、真空を
達成するため真空機器において真空シール用部材が用い
られる際の温度であり、この発明は、この使用温度に応
じて、上記変態開始温度が使用温度よりも低い金属で真
空シール用部材を構成することを特徴とする。In the present invention, the operating temperature is a temperature at which a vacuum sealing member is used in a vacuum device to achieve a vacuum, and in the present invention, the above transformation start temperature is used depending on the operating temperature. The vacuum sealing member is made of a metal whose temperature is lower than the temperature.
【０００７】この発明において、使用温度は、典型的に
は、たとえば一般に２０±５°の範囲にとられる常温と
することができる。In the present invention, the operating temperature can be typically room temperature, which is typically in the range of 20 ± 5 °.
【０００８】この発明に従う真空シール用金属部材を形
成するための金属として、たとえば、Ａｌを１３．８〜
１５．０重量％、Ｎｉを２．０〜６．０重量％が含有
し、残部がＣｕおよび不可避的不純物からなる合金を用
いることが好ましい。As a metal for forming the metal member for vacuum sealing according to the present invention, for example, Al is 13.8 to.
It is preferable to use an alloy containing 15.0% by weight, Ni of 2.0 to 6.0% by weight, and the balance of Cu and inevitable impurities.
【０００９】さらに、上記金属は、一方向凝固体または
単結晶体であることが好ましい。Further, the metal is preferably a unidirectionally solidified body or a single crystal body.
【００１０】[0010]
【作用】熱弾性型マルテンサイト変態を示し、かつ、マ
ルテンサイトからオーステナイトへの変態開始温度（Ａ
ｓ点）が使用温度より低い金属は、使用温度においてそ
の金属を変形させても熱力学的に不安定であり、元の形
状に戻ろうとする。このような金属からなる真空シール
用金属部材を、シール部にあてがって締めつければ、元
の状態に戻ろうとする性質のため、該部材は使用に際し
てシール部へ良好に密着する。このため、本発明に従う
部材でシールを行なえば、超高真空を容易に達成かつ維
持することができる。[Function] A thermoelastic type martensitic transformation is shown, and the transformation start temperature (A
A metal whose s point) is lower than the operating temperature is thermodynamically unstable even when the metal is deformed at the operating temperature, and tries to return to its original shape. When a vacuum sealing metal member made of such a metal is applied to the seal portion and tightened, the member tends to return to its original state, so that the member adheres well to the seal portion during use. Therefore, if sealing is performed with the member according to the present invention, an ultrahigh vacuum can be easily achieved and maintained.
【００１１】また、このような性質を有する金属は、従
来よりシール部材として使用されてきた有機物および金
属よりも、耐熱性および耐放射線性について優れてい
る。Further, the metal having such properties is superior in heat resistance and radiation resistance to organic substances and metals which have been conventionally used as seal members.
【００１２】さらに、マルテンサイトからオーステナイ
トへの変態開始温度と使用温度（典型的には常温）との
差が、特に約７０℃以内であれば、本発明に従う金属は
比較的柔らかく、シーリングにおいて小さな力で締めつ
けることが可能である。Furthermore, if the difference between the transformation start temperature from martensite to austenite and the use temperature (typically normal temperature) is within about 70 ° C., the metal according to the present invention is relatively soft and has a small sealing. It can be tightened by force.
【００１３】熱弾性型マルテンサイトを示す金属の中で
も、特にＡｌを１３．８〜１５．０重量％、Ｎｉを２．
０〜６．０重量％含有し、残部がＣｕおよび不可避的不
純物からなる金属は、後述する実施例に示すようにシー
ル部材としてシール部への密着性に優れている。Among metals exhibiting thermoelastic martensite, Al is 13.8 to 15.0% by weight and Ni is 2.
The metal containing 0 to 6.0% by weight and the balance being Cu and unavoidable impurities has excellent adhesion to the seal portion as a seal member as shown in Examples described later.
【００１４】また、このような組成の金属中に含有する
ガスの量も少ないため、真空におけるガス放出量も少な
く、超高真空の達成および維持に適している。Further, since the amount of gas contained in the metal having such a composition is small, the amount of gas released in vacuum is small, which is suitable for achieving and maintaining an ultrahigh vacuum.
【００１５】また、これら熱弾性型マルテンサイト変態
を示す金属中、一方向凝固させたもの、または単結晶を
使用すると、より密なシールが可能であるとともに、ガ
ス放出量を少なくすることができる。さらに、一方向凝
固体および単結晶体は、耐熱性および耐放射線性等にお
いても優れている。Further, if a unidirectionally solidified one or a single crystal is used among these metals exhibiting the thermoelastic martensitic transformation, a tighter seal can be achieved and the amount of gas released can be reduced. . Furthermore, the unidirectionally solidified body and the single crystal body are also excellent in heat resistance and radiation resistance.
【００１６】[0016]
【実施例】細径横型鋳造装置により、表１に組成を示す
線径２．０ｍｍの金属線を得た。また、鋳型の温度Ｔ1
を変えることにより、所望の結晶組織を形成することが
できた。すなわち、Ｔ1 ≧鋳造金属の融点（Ｔ2 ）の場
合、単結晶、Ｔ2 ＞Ｔ1 ＞Ｔ2 −５０℃の場合、一方向
凝固体、Ｔ1 ＜Ｔ2 −１００℃の場合、多結晶体を得る
ことができた。Example A metal wire having a wire diameter of 2.0 mm and having a composition shown in Table 1 was obtained by a small diameter horizontal casting apparatus. Also, the mold temperature T 1
The desired crystal structure could be formed by changing That is, in the case of T 1 ≧ melting point of cast metal (T 2 ), single crystal, in the case of T 2 > T 1 > T 2 −50 ° C., unidirectionally solidified, in the case of T 1 <T 2 −100 ° C. A crystal could be obtained.
【００１７】[0017]
【表１】 [Table 1]
【００１８】これらの金属を溶接してリング状にし、そ
の状態で９５０℃で１時間処理後、水焼入れすることに
より溶体化処理をほどこしてＯリングを得た。These metals were welded into a ring shape, treated in that state at 950 ° C. for 1 hour, and then water-quenched for solution treatment to obtain an O-ring.
【００１９】得られた５種類のＯリングをそれぞれ真空
容器のシール部に用い、容器内を真空ポンプによって常
温で２４時間排気した後、真空容器内の圧力を測定し
た。５種類のＯリングについて圧力をそれぞれ測定した
結果を表２に示す。Each of the obtained five kinds of O-rings was used as a seal portion of a vacuum container, and the inside of the container was evacuated by a vacuum pump at room temperature for 24 hours, and then the pressure inside the vacuum container was measured. Table 2 shows the results of measuring the pressures of the five types of O-rings.
【００２０】一方、従来例として、シリコンゴム製で断
面が円形状（直径２．０ｍｍ）のＯリングを真空容器の
シール部に用い、常温で２４時間排気後の真空容器内の
圧力を測定した。測定圧力の結果を表２のＮｏ．6 に示
す。On the other hand, as a conventional example, an O-ring made of silicon rubber and having a circular cross section (diameter of 2.0 mm) was used for the seal portion of the vacuum container, and the pressure in the vacuum container after evacuation at room temperature for 24 hours was measured. . The measurement pressure results are shown in Table 2 as No. Shown in 6.
【００２１】また、同様の形状でフッ素ゴム製のＯリン
グをシール部に用いて、常温で２４時間排気した場合の
圧力測定値を表２のＮｏ．７に示す。No. 2 in Table 2 shows the measured pressure values when an O-ring made of fluororubber having the same shape was used for the seal portion and the gas was exhausted at room temperature for 24 hours. 7 shows.
【００２２】さらに、９９．９９％の無酸素銅を直径
２．０ｍｍの線材に鋳造後、溶接によってリング状にし
たＯリングを、真空容器のシール部に用いて常温で２４
時間排気した場合の圧力測定値を表２のＮｏ．８に示
す。Furthermore, 99.99% oxygen-free copper was cast on a wire rod having a diameter of 2.0 mm, and then an O-ring formed into a ring shape by welding was used at the room temperature at room temperature for 24 hours.
Table 2 shows the measured pressure values when exhausted for a certain period of time. 8 shows.
【００２３】[0023]
【表２】 [Table 2]
【００２４】表２に示すように、本発明例（Ｎｏ．１〜
５）の真空シール用金属部材を使用すれば、従来のシー
ル用部材に比べて高い真空度を達成かつ維持できること
がわかる。As shown in Table 2, examples of the present invention (No. 1 to No. 1)
It can be seen that by using the metal member for vacuum sealing of 5), a higher degree of vacuum can be achieved and maintained as compared with the conventional sealing member.
【００２５】また、本発明例のＯリングは、２００℃で
ベーキング処理してもシールの性能が劣化することもな
かった。The O-rings of the examples of the present invention did not deteriorate the sealing performance even if they were baked at 200 ° C.
【００２６】[0026]
【発明の効果】以上説明したように、この発明に従う真
空シール用金属部材は、高い真空度を達成かつ維持させ
ることができ、しかも耐熱性および耐放射線性において
優れているため、超高真空用のシール部材および高温や
放射線にさらされる特殊な条件下で使用されるシール部
材として有用である。As described above, the metal member for vacuum sealing according to the present invention can achieve and maintain a high degree of vacuum, and is excellent in heat resistance and radiation resistance, and therefore is suitable for ultra-high vacuum. It is useful as a seal member for the above and a seal member used under special conditions exposed to high temperatures and radiation.
Claims (3)
ルテンサイト相からオーステナイト相への変態開始温度
が使用温度より低い金属からなることを特徴とする、真
空シール用金属部材。1. A metal member for vacuum sealing, which comprises a metal exhibiting a thermoelastic martensitic transformation and having a transformation start temperature from a martensite phase to an austenite phase lower than a use temperature.
重量％、Ｎｉを２．０〜６．０重量％含有し、残部がＣ
ｕおよび不可避的不純物からなることを特徴とする、請
求項１の真空シール用金属部材。2. The metal contains Al in the range of 13.8 to 15.0.
% By weight, 2.0 to 6.0% by weight of Ni, and the balance C
The metal member for vacuum seal according to claim 1, which is composed of u and unavoidable impurities.
組織を有することを特徴とする、請求項１または２の真
空シール用金属部材。3. The vacuum sealing metal member according to claim 1, wherein the metal has a single crystal or unidirectionally solidified structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26155492A JPH06108183A (en) | 1992-09-30 | 1992-09-30 | Metal member for vacuum seal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26155492A JPH06108183A (en) | 1992-09-30 | 1992-09-30 | Metal member for vacuum seal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06108183A true JPH06108183A (en) | 1994-04-19 |
Family
ID=17363514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26155492A Withdrawn JPH06108183A (en) | 1992-09-30 | 1992-09-30 | Metal member for vacuum seal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06108183A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030027522A (en) * | 2001-09-29 | 2003-04-07 | 장우양 | Cu-Al-Ni based superelastic alloys wire with unidrectional structure and it's manufacturing method |
-
1992
- 1992-09-30 JP JP26155492A patent/JPH06108183A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030027522A (en) * | 2001-09-29 | 2003-04-07 | 장우양 | Cu-Al-Ni based superelastic alloys wire with unidrectional structure and it's manufacturing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991130 |