JPH0612361Y2 - レジスト処理装置用気液分離型熱交換器 - Google Patents

レジスト処理装置用気液分離型熱交換器

Info

Publication number
JPH0612361Y2
JPH0612361Y2 JP1987044243U JP4424387U JPH0612361Y2 JP H0612361 Y2 JPH0612361 Y2 JP H0612361Y2 JP 1987044243 U JP1987044243 U JP 1987044243U JP 4424387 U JP4424387 U JP 4424387U JP H0612361 Y2 JPH0612361 Y2 JP H0612361Y2
Authority
JP
Japan
Prior art keywords
gas
liquid
mixed fluid
heat exchanger
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987044243U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63154964U (2
Inventor
信二 鈴木
芳樹 三村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP1987044243U priority Critical patent/JPH0612361Y2/ja
Publication of JPS63154964U publication Critical patent/JPS63154964U/ja
Application granted granted Critical
Publication of JPH0612361Y2 publication Critical patent/JPH0612361Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
JP1987044243U 1987-03-27 1987-03-27 レジスト処理装置用気液分離型熱交換器 Expired - Lifetime JPH0612361Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987044243U JPH0612361Y2 (ja) 1987-03-27 1987-03-27 レジスト処理装置用気液分離型熱交換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987044243U JPH0612361Y2 (ja) 1987-03-27 1987-03-27 レジスト処理装置用気液分離型熱交換器

Publications (2)

Publication Number Publication Date
JPS63154964U JPS63154964U (2) 1988-10-12
JPH0612361Y2 true JPH0612361Y2 (ja) 1994-03-30

Family

ID=30861865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987044243U Expired - Lifetime JPH0612361Y2 (ja) 1987-03-27 1987-03-27 レジスト処理装置用気液分離型熱交換器

Country Status (1)

Country Link
JP (1) JPH0612361Y2 (2)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132588U (ja) * 1984-02-10 1985-09-04 オリオン機械株式会社 循環式液体冷却機の熱交換器のエア−抜き装置

Also Published As

Publication number Publication date
JPS63154964U (2) 1988-10-12

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