JPH0615224A - How to apply colored resin - Google Patents
How to apply colored resinInfo
- Publication number
- JPH0615224A JPH0615224A JP17356692A JP17356692A JPH0615224A JP H0615224 A JPH0615224 A JP H0615224A JP 17356692 A JP17356692 A JP 17356692A JP 17356692 A JP17356692 A JP 17356692A JP H0615224 A JPH0615224 A JP H0615224A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- colored resin
- resin film
- glass substrate
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
(57)【要約】
【目的】 流動性を有する着色樹脂の塗布方法に関し、
樹脂膜厚さの均一化を目的とする。
【構成】 回転円盤1に基板2を固定し、基板2の表面
の複数箇所に流動性着色樹脂滴4b を滴下し、回転円盤
1を回転させて基板2の表面に着色樹脂膜51を形成させ
る。回転円盤1に基板2を固定し、回転円盤1を回転さ
せながら基板2の表面に流動性着色樹脂滴4b を連続的
に滴下し、基板2の表面に着色樹脂膜51を形成させる。
回転円盤1に基板2を固定し、回転円盤1を回転させな
がら基板2の中心部から外方に向けてまたはその逆方向
に流動性着色樹脂滴下用ノズル3を移動させ、移動する
ノズル3から流動性着色樹脂滴4b を連続的に滴下せし
め、基板2の表面に着色樹脂膜51を形成させる。
(57) [Summary] [Purpose] Regarding a method for applying a colored resin having fluidity,
The purpose is to make the resin film thickness uniform. [Structure] The substrate 2 is fixed to the rotating disc 1, the fluid colored resin droplets 4b are dropped on a plurality of positions on the surface of the substrate 2, and the rotating disc 1 is rotated to form a colored resin film 51 on the surface of the substrate 2. . The substrate 2 is fixed to the rotating disk 1, and the fluid coloring resin droplets 4b are continuously dropped on the surface of the substrate 2 while rotating the rotating disk 1 to form a colored resin film 51 on the surface of the substrate 2.
The substrate 2 is fixed to the rotating disk 1, and the fluid coloring resin dropping nozzle 3 is moved from the center of the substrate 2 to the outside or the opposite direction while rotating the rotating disk 1, and from the moving nozzle 3. The fluid colored resin droplets 4b are continuously dropped to form a colored resin film 51 on the surface of the substrate 2.
Description
【0001】[0001]
【産業上の利用分野】本発明は流動性を有する着色樹脂
の塗布方法、特に、カラーフィルタを製造するためガラ
ス基板に均一厚さの着色樹脂膜を、スピンコートにより
塗布する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for applying a colored resin having fluidity, and more particularly to a method for applying a colored resin film having a uniform thickness to a glass substrate by spin coating to manufacture a color filter.
【0002】[0002]
【従来の技術】液晶表示パネルにおけるカラーフィルタ
の形成方法には、電着法,印刷法,フォトリソ法等があ
るが、画素パターン精度や均一膜厚を得るにはフォトリ
ソ法が最良であり、フォトリソ法における感光性着色樹
脂膜の形成にはスピンコート法が利用されている。2. Description of the Related Art As a method of forming a color filter in a liquid crystal display panel, there are an electrodeposition method, a printing method, a photolithography method and the like. The photolithography method is the best method for obtaining a pixel pattern accuracy and a uniform film thickness. The spin coating method is used for forming the photosensitive colored resin film in the method.
【0003】液晶表示パネルにおいて、カラーフィルタ
を形成したパネル基板は、ガラス基板にブラックマスク
パターンを形成し、赤色(R)画素,緑色(G)画素,
青色(B)画素を順次パターン形成し、多数の3色画素
形成に伴う凹凸をトップコート層によって平坦化し、ト
ップコート層の上に透明電極を形成する。In a liquid crystal display panel, a panel substrate on which a color filter is formed has a black mask pattern formed on a glass substrate, and a red (R) pixel, a green (G) pixel,
Blue (B) pixels are sequentially formed by patterning, unevenness due to formation of a large number of three-color pixels is flattened by a top coat layer, and a transparent electrode is formed on the top coat layer.
【0004】着色画素の厚さは1〜2μm であり、第1
の画素形成後の第2の画素用樹脂膜および、第1,第2
の画素形成後の第3の画素用樹脂膜は、1〜2μm の多
数の凹凸が形成された基板上に塗布することになる。The color pixel has a thickness of 1 to 2 μm.
Second pixel resin film after the pixel formation, and the first and second pixel films
The third pixel resin film after the pixel formation is applied on a substrate on which a large number of irregularities of 1 to 2 μm are formed.
【0005】図6は従来の着色樹脂塗布方法の説明図で
あり、回転円盤1にガラス基板2を固定し、ガラス基板
2の中心部にディスペンサーノズル3より適量の流動性
着色樹脂4を滴下したのち、回転円盤1を回転させる
と、ガラス基板2の表面には樹脂膜5が形成される。FIG. 6 is an explanatory view of a conventional method for applying a colored resin, in which a glass substrate 2 is fixed to a rotary disk 1 and an appropriate amount of a fluid colored resin 4 is dropped from a dispenser nozzle 3 at the center of the glass substrate 2. After that, when the rotating disk 1 is rotated, the resin film 5 is formed on the surface of the glass substrate 2.
【0006】[0006]
【発明が解決しようとする課題】図7は従来方法で塗布
した着色樹脂膜の問題点の説明図であり、(A) は大円と
呼ばれる円形薄肉部が形成された樹脂膜の平面図、(B)
は大円が形成された樹脂膜の断面図、(C) は第1または
第1,第2の画素が形成されたガラス基板に塗布した樹
脂膜の広がりを説明する平面図である。FIG. 7 is an explanatory view of a problem of a colored resin film applied by a conventional method, (A) is a plan view of a resin film in which a circular thin portion called a great circle is formed, (B)
FIG. 4C is a cross-sectional view of a resin film having a great circle formed therein, and FIG. 8C is a plan view illustrating the spread of the resin film applied to the glass substrate having the first or first and second pixels formed therein.
【0007】図7(A),(B) において、5a は樹脂膜の中
心部に発生した突起、5b は樹脂膜5に形成され一般に
大円と呼ばれる円形状の薄肉部である。形成され易いこ
とで問題となる突起5a と大円5b は、樹脂滴下前のノ
ズル3の開口部で樹脂が渇いて高粘度になり、その樹脂
が影響すると考えられる。即ち、ガラス基板2に着色樹
脂4を滴下したとき、図6に示す如く高粘度である最初
の樹脂滴4a はその後の滴下樹脂4で包まれるが、その
ため樹脂滴4a の一部がガラス基板2の中心部に残され
て突起5a となり、樹脂滴4a の他部は樹脂4と共に広
がる,換言すれば樹脂4によって広がりが阻害され大円
5b が形成されることになる。In FIGS. 7A and 7B, 5a is a protrusion formed in the central portion of the resin film, and 5b is a circular thin portion formed on the resin film 5 and generally called a great circle. It is considered that the protrusions 5a and the great circles 5b, which are problematic because they are easily formed, become dry and become highly viscous at the opening of the nozzle 3 before the resin is dropped, and the resin affects them. That is, when the colored resin 4 is dropped onto the glass substrate 2, the first resin droplet 4a having high viscosity is wrapped with the subsequent dropped resin 4 as shown in FIG. The protrusion 5a remains in the center of the resin, and the other portion of the resin droplet 4a spreads with the resin 4. In other words, the resin 4 hinders the spreading and a great circle 5b is formed.
【0008】図7(C) において、ガラス基板2の中心部
に滴下した樹脂4の広がりは、それ以前に形成され規則
的配列で突出する第1の画素または、第1,第2の画素
に邪魔され、図示するごとく半円状の広がりとなり、そ
の影響が樹脂膜の厚さむらとなる。In FIG. 7C, the spread of the resin 4 dropped on the central portion of the glass substrate 2 is caused by the first pixel or the first and second pixels which are formed before that and which protrude in a regular arrangement. It is disturbed and spreads in a semicircular shape as shown in the figure, and the effect thereof is unevenness in the thickness of the resin film.
【0009】以上説明した突起5a と大円5b および半
円状の厚さむらは、液晶表示パネルの色むらの一因とな
り、表示品質を低下させることになる。The projections 5a, the large circles 5b, and the semi-circular thickness unevenness described above contribute to the color unevenness of the liquid crystal display panel and deteriorate the display quality.
【0010】[0010]
【課題を解決するための手段】図1は本発明方法の基本
構成の説明図である。図1(A) において、回転円盤1に
ガラス基板2を固定し、ガラス基板2の表面の複数箇所
に流動性を有する着色樹脂滴4b を滴下し、しかるの
ち、回転円盤1を回転させるとガラス基板2の表面には
均一厚さの樹脂膜が形成される。FIG. 1 is an explanatory view of the basic constitution of the method of the present invention. In FIG. 1 (A), a glass substrate 2 is fixed to a rotating disk 1, colored resin droplets 4b having fluidity are dropped on a plurality of points on the surface of the glass substrate 2, and then the rotating disk 1 is rotated to rotate the glass. A resin film having a uniform thickness is formed on the surface of the substrate 2.
【0011】図1(B) において、回転円盤1にガラス基
板2を固定し、回転円盤1を回転させながら、ディスペ
ンサーノズル3より連続し複数の樹脂滴4b をガラス基
板2の中心部に滴下すると、ガラス基板2の表面には均
一厚さの樹脂膜が形成される。In FIG. 1 (B), the glass substrate 2 is fixed to the rotating disc 1, and while the rotating disc 1 is rotated, a plurality of resin droplets 4b are continuously dropped from the dispenser nozzle 3 onto the central portion of the glass substrate 2. A resin film having a uniform thickness is formed on the surface of the glass substrate 2.
【0012】図1(C) において、回転円盤1にガラス基
板2を固定し、回転円盤1を回転させると共に、ディス
ペンサーノズル3をガラス基板2の中心部から外方向に
向けて移動させる。ディスペンサーノズル3は、移動し
ながら複数の樹脂滴4b をガラス基板2に滴下すると、
ガラス基板2の表面には均一厚さの樹脂膜が形成され
る。In FIG. 1 (C), the glass substrate 2 is fixed to the rotary disc 1, the rotary disc 1 is rotated, and the dispenser nozzle 3 is moved outward from the center of the glass substrate 2. When the dispenser nozzle 3 drops a plurality of resin droplets 4b on the glass substrate 2 while moving,
A resin film having a uniform thickness is formed on the surface of the glass substrate 2.
【0013】図1(D) において、回転円盤1にガラス基
板2を固定し、回転円盤1を回転させると共に、ディス
ペンサーノズル3をガラス基板2の外方から基板2の中
心部に向けて移動させる。ディスペンサーノズル3は移
動しながら複数の樹脂滴4bをガラス基板2に滴下する
と、ガラス基板2の表面には均一厚さの樹脂膜が形成さ
れる。In FIG. 1D, the glass substrate 2 is fixed to the rotating disk 1, the rotating disk 1 is rotated, and the dispenser nozzle 3 is moved from the outside of the glass substrate 2 toward the center of the substrate 2. . When the dispenser nozzle 3 drops a plurality of resin droplets 4b onto the glass substrate 2 while moving, a resin film having a uniform thickness is formed on the surface of the glass substrate 2.
【0014】[0014]
【作用】上記手段において、図1(A) と図1(B) を用い
て説明した着色樹脂膜の形成方法は、平滑基板に樹脂膜
を形成する手段であり、ノズルから最初に滴下した樹脂
滴は、他の位置に滴下さた樹脂滴や後続の樹脂滴に災い
されることなく遠心力が作用し、大きく広がるようにな
る。In the above means, the method for forming a colored resin film described with reference to FIGS. 1 (A) and 1 (B) is a means for forming a resin film on a smooth substrate, and the resin dropped first from the nozzle Centrifugal force acts on the droplets without causing damage to the resin droplets dropped on other positions or the following resin droplets, and the droplets spread widely.
【0015】従って、図7(A),(B) に示す突起5a が解
消すると同時に、従来方法で問題となった大円が形成さ
れても、その大円は従来の大円5b より大径となり、樹
脂膜の所要領域例えば画素を形成する領域の外側に押し
広げることが可能になる。Accordingly, the protrusion 5a shown in FIGS. 7 (A) and 7 (B) is eliminated, and at the same time, even if a great circle which is a problem in the conventional method is formed, the great circle has a larger diameter than that of the conventional large circle 5b. Therefore, it is possible to spread the resin film outside a required region, for example, a region where pixels are formed.
【0016】上記手段において、図1(C) と図1(D) を
用いて説明した着色樹脂膜の形成方法は、図1(A) と図
1(B) を用いて説明した方法と同じ理由で従来の突起5
a を解消し大円を無害にする同時に、ノズルを回転円盤
の半径方向に移動させながら樹脂を滴下するため、ガラ
ス基板表面の凹凸による影響を抑制し、図7(C) に示す
樹脂の広がりむらをなくす効果がある。In the above means, the method of forming the colored resin film described with reference to FIGS. 1 (C) and 1 (D) is the same as the method described with reference to FIGS. 1 (A) and 1 (B). Conventional projection 5 for the reason
At the same time as eliminating a and making the great circle harmless, resin is dropped while moving the nozzle in the radial direction of the rotating disk, so the effect of unevenness on the glass substrate surface is suppressed, and the spread of resin shown in Fig. 7 (C) is suppressed. It has the effect of eliminating unevenness.
【0017】[0017]
【実施例】図2は本発明方法の第1の実施例の説明図、
図3は本発明方法の第2の実施例の平面図、図4は本発
明方法の第3の実施例の説明図、図5は本発明方法の第
4の実施例の説明図である。FIG. 2 is an explanatory view of the first embodiment of the method of the present invention,
FIG. 3 is a plan view of a second embodiment of the method of the present invention, FIG. 4 is an explanatory view of a third embodiment of the method of the present invention, and FIG. 5 is an explanatory view of a fourth embodiment of the method of the present invention.
【0018】図2(A) において、回転円盤1にガラス基
板2を固定し、ガラス基板2の表面の複数箇所に流動性
を有する着色樹脂滴4b を滴下する。しかるのち、回転
円盤1を所定速度で回転させると、樹脂滴4b には遠心
力が作用し、図2(B) に示す如く、ガラス基板2の表面
には均一厚さの樹脂膜51が形成される。In FIG. 2 (A), the glass substrate 2 is fixed to the rotating disk 1, and the colored resin droplets 4b having fluidity are dropped on a plurality of points on the surface of the glass substrate 2. Then, when the rotating disk 1 is rotated at a predetermined speed, a centrifugal force acts on the resin droplet 4b, and a resin film 51 having a uniform thickness is formed on the surface of the glass substrate 2 as shown in FIG. 2 (B). To be done.
【0019】図3(A) において、回転円盤1にガラス基
板2を固定し、回転円盤1を回転させることによってガ
ラス基板2が回転する。そこで、ガラス基板2を回転さ
せながら、ディスペンサーノズル3よりガラス基板2の
中心部に複数の樹脂滴4b を連続にまたは間欠に滴下す
ると、滴下した樹脂滴4b には遠心力が作用し、ガラス
基板2の表面には図3(B) に示す如く、均一厚さの樹脂
膜51が形成される。In FIG. 3A, the glass substrate 2 is rotated by fixing the glass substrate 2 to the rotating disc 1 and rotating the rotating disc 1. Therefore, when a plurality of resin droplets 4b are continuously or intermittently dropped from the dispenser nozzle 3 to the central portion of the glass substrate 2 while rotating the glass substrate 2, centrifugal force acts on the dropped resin droplets 4b, and the glass substrate 2 A resin film 51 having a uniform thickness is formed on the surface of No. 2 as shown in FIG.
【0020】図4(A) において、回円盤1にガラス基板
2を固定し、回転円盤1を回転させると共に、ガラス基
板2の中心部に位置したディスペンサーノズル3は、樹
脂滴4b を滴下しながらガラス基板2の外方に向けて移
動させる。In FIG. 4 (A), the glass substrate 2 is fixed to the rotating disc 1, the rotating disc 1 is rotated, and the dispenser nozzle 3 located at the center of the glass substrate 2 drops the resin droplet 4b. The glass substrate 2 is moved toward the outside.
【0021】すると、滴下された樹脂滴4b には遠心力
が作用し、ガラス基板2の表面には図4(B) に示す如
く、均一厚さの樹脂膜51が形成される。なお、図4を用
いて説明した本発明方法の第3の実施例において、ガラ
ス基板2には第1または第1,第2の画素が形成済みで
あり、2μm 程度の凹凸があるとき、該凹凸の影響を低
減させるため樹脂塗布の初期には樹脂液の乾燥を抑制す
ることが望ましい。Then, centrifugal force acts on the dropped resin droplet 4b, and a resin film 51 having a uniform thickness is formed on the surface of the glass substrate 2 as shown in FIG. 4 (B). In addition, in the third embodiment of the method of the present invention described with reference to FIG. 4, when the first or first and second pixels are already formed on the glass substrate 2 and there is unevenness of about 2 μm, In order to reduce the influence of unevenness, it is desirable to suppress the drying of the resin liquid at the initial stage of resin application.
【0022】そこで、回転円盤1の回転速度をスピンコ
ート時より低速にし、樹脂滴4b を滴下しながら移動す
るディスペンサーノズル3をガラス基板2の中心部から
樹脂膜所要領域の1/3 程度の距離まで移動させたのち、
回転円盤1の回転速度を樹脂膜形成に必要な高速回転に
切り換え、好結果が得られた。Therefore, the rotation speed of the rotary disk 1 is set to be slower than that during spin coating, and the dispenser nozzle 3 which moves while dropping the resin droplet 4b is separated from the center of the glass substrate 2 by a distance of about 1/3 of the required area of the resin film. After moving to
The rotation speed of the rotating disk 1 was switched to the high-speed rotation necessary for forming the resin film, and good results were obtained.
【0023】図5(A) において、回円盤1にガラス基板
2を固定し、回転円盤1を回転させると共に、ガラス基
板2の外方に位置したディスペンサーノズル3は、望ま
しくは最初の樹脂滴4b をガラス基板2より外位置に滴
下してから、樹脂滴4b を滴下しながらガラス基板2の
中心部に向けて移動する。In FIG. 5 (A), the glass substrate 2 is fixed to the rotary disk 1, the rotary disk 1 is rotated, and the dispenser nozzle 3 located outside the glass substrate 2 is preferably the first resin droplet 4b. Is dropped to a position outside the glass substrate 2, and then the resin droplet 4b is dropped and moved toward the center of the glass substrate 2.
【0024】すると、滴下された樹脂滴4b には遠心力
が作用し、ガラス基板2の表面には図5(B) に示す如
く、均一厚さの樹脂膜51が形成される。Then, a centrifugal force acts on the dropped resin droplet 4b, and a resin film 51 having a uniform thickness is formed on the surface of the glass substrate 2 as shown in FIG. 5 (B).
【0025】[0025]
【発明の効果】以上説明したように本発明方法によれ
ば、従来方法において基板の中心部に形成される突起を
なくし大円を無害にすると共に、樹脂の広がりむらによ
る影響をなくすことを可能とし、液晶表示パネルのカラ
ーフィルタの製造に適用して表示品質を改善した効果が
ある。As described above, according to the method of the present invention, it is possible to eliminate the protrusion formed in the central portion of the substrate in the conventional method, to make the great circle harmless, and to eliminate the influence of the uneven spread of the resin. The present invention has the effect of improving display quality when applied to the production of color filters for liquid crystal display panels.
【図1】 本発明方法の基本構成の説明図である。FIG. 1 is an explanatory diagram of a basic configuration of a method of the present invention.
【図2】 本発明方法の第1の実施例の説明図である。FIG. 2 is an explanatory diagram of the first embodiment of the method of the present invention.
【図3】 本発明方法の第2の実施例の平面図である。FIG. 3 is a plan view of a second embodiment of the method of the present invention.
【図4】 本発明方法の第3の実施例の説明図である。FIG. 4 is an explanatory diagram of a third embodiment of the method of the present invention.
【図5】 本発明方法の第4の実施例の説明図である。FIG. 5 is an explanatory diagram of a fourth embodiment of the method of the present invention.
【図6】 従来の着色樹脂塗布方法の説明図である。FIG. 6 is an explanatory view of a conventional colored resin coating method.
【図7】 従来方法で塗布した着色樹脂膜の問題点の説
明図である。FIG. 7 is an explanatory diagram of a problem of a colored resin film applied by a conventional method.
1はスピンコート用の回転円盤 2は着色樹脂膜を形成する基板 3は流動性着色樹脂を滴下するノズル 4b は流動性着色樹脂滴 51は着色樹脂膜 1 is a rotary disk for spin coating 2 is a substrate on which a colored resin film is formed 3 is a nozzle for dropping a fluid colored resin 4b is a fluid colored resin droplet 51 is a colored resin film
Claims (4)
板(2) の表面の複数箇所に流動性着色樹脂滴(4b)を滴下
し、該回転円盤(1) を回転させて該基板(2)の表面に着
色樹脂膜(51)を形成せしめることを特徴とする着色樹脂
の塗布方法。1. A substrate (2) is fixed to a rotating disc (1), a fluid colored resin droplet (4b) is dropped on a plurality of locations on the surface of the substrate (2), and the rotating disc (1) is rotated. A method for applying a colored resin, characterized in that the colored resin film (51) is formed on the surface of the substrate (2).
転円盤(1) を回転させながら該基板(2) の表面に流動性
着色樹脂滴(4b)を連続的に滴下し、該基板(2) の表面に
着色樹脂膜(51)を形成せしめることを特徴とする着色樹
脂の塗布方法。2. A substrate (2) is fixed to a rotating disc (1), and a fluid colored resin droplet (4b) is continuously dropped on the surface of the substrate (2) while rotating the rotating disc (1). Then, the colored resin coating method is characterized in that the colored resin film (51) is formed on the surface of the substrate (2).
転円盤(1) を回転させながら該基板(2) の中心部から外
方に向けて流動性着色樹脂滴下用ノズル(3)を移動さ
せ、移動する該ノズル(3) から流動性着色樹脂滴(4b)を
連続的に滴下せしめ、該基板(2) の表面に着色樹脂膜(5
1)を形成せしめることを特徴とする着色樹脂の塗布方
法。3. A nozzle for dropping a fluid coloring resin from a central portion of the substrate (2) outward while fixing the substrate (2) to the rotating disc (1) while rotating the rotating disc (1). (3) is moved, and a fluid colored resin droplet (4b) is continuously dropped from the moving nozzle (3), and a colored resin film (5) is formed on the surface of the substrate (2).
1. A method for applying a colored resin, which comprises forming 1).
転円盤(1) を回転させながら該基板(2) の外方から中心
部に向けて流動性着色樹脂滴下用ノズル(3)を移動さ
せ、移動する該ノズル(3) から着色樹脂滴(4b)を連続的
に滴下せしめ、該基板(2) の表面に着色樹脂膜(51)を形
成せしめることを特徴とする着色樹脂の塗布方法。4. A nozzle for dropping a fluid coloring resin from the outside of the substrate (2) toward the center while the substrate (2) is fixed to the rotating disc (1) while rotating the rotating disc (1). (3) is moved, and a colored resin droplet (4b) is continuously dropped from the moving nozzle (3) to form a colored resin film (51) on the surface of the substrate (2). Method of applying colored resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17356692A JPH0615224A (en) | 1992-07-01 | 1992-07-01 | How to apply colored resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17356692A JPH0615224A (en) | 1992-07-01 | 1992-07-01 | How to apply colored resin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0615224A true JPH0615224A (en) | 1994-01-25 |
Family
ID=15962934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17356692A Withdrawn JPH0615224A (en) | 1992-07-01 | 1992-07-01 | How to apply colored resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615224A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1157582A (en) * | 1997-08-19 | 1999-03-02 | Tokyo Electron Ltd | Coating film forming equipment |
| US7770535B2 (en) | 2005-06-10 | 2010-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Chemical solution application apparatus and chemical solution application method |
-
1992
- 1992-07-01 JP JP17356692A patent/JPH0615224A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1157582A (en) * | 1997-08-19 | 1999-03-02 | Tokyo Electron Ltd | Coating film forming equipment |
| US7770535B2 (en) | 2005-06-10 | 2010-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Chemical solution application apparatus and chemical solution application method |
| US8722135B2 (en) | 2005-06-10 | 2014-05-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for discharging chemical solution |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991005 |