JPH06159751A - Clean room system - Google Patents

Abstract

(57) [Abstract] [Purpose] Achieve high indoor cleanliness with a small amount of circulating air, reduce equipment costs, and save energy. [Composition] An air outlet 32 through which an air flow that wraps around the equipment 5 is blown out
Is arranged on the ceiling so as to face the device 5, and an intake port 41 through which the air flow is sucked is appropriately arranged on the access floor 39 around the device. A device-side suction port 60 is provided in the dust-generating part of the device 5, and air is sucked into the dust remover 45 below the underfloor foundation to release purified air to the underfloor.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room air conditioning system.

[0002]

2. Description of the Related Art As shown in FIG. 6, an air conditioning system in a clean room discharges dust and the like from equipment to the outside. In the air conditioning system shown in the figure, the ceiling 1 has H
A plurality of air outlets 3 with built-in EPA filters are provided, and the air outlets 3 blow out clean air into the room 7 in which the device 5 is installed. Access floor 9 in room 7
A grating type suction port 11 is attached at an arbitrary position of the above, and the grating type suction port 11 communicates with a return duct 13 arranged below the access floor 9. An air conditioner 1 provided outdoors at the end of the return duct 13
The suction port 5 is opened, and the air outlet of the air conditioner 15 is connected to the above-described air outlet 3 via the air outlet duct 17.

In the air-conditioning system configured as described above, when clean air is blown out from the air outlet 3, dust dust around the equipment 5 and exhaust heat are diffused into the room 7 by this clean airflow. It The diffused indoor air is sucked from the grating type suction port 11 of the access floor 9 and is sucked into the air conditioner 15 via the return duct 13. The room air sucked into the air conditioner 15 is adjusted to a predetermined temperature and humidity and then blown out as clean air again from the air outlet 3 having the HEPA filter built therein. In this type of air conditioning system, a clean air conditioning system can be realized with a relatively small amount of circulating air.

On the other hand, there is a so-called unidirectional flow system for an air conditioning system in which indoor air is not agitated. FIG. 7 is an explanatory diagram showing a one-way flow type air conditioning system. HEPA on the ceiling 1
A filter 21 is provided over the entire surface, and the HEPA filter 21 supplies clean air to the room 7 with a small wind speed, for example, 0.25.
It is designed to blow out at ~ 0.45 m / s. Room 7
The entire access floor has a grating 23, and the grating 23 communicates with a return duct 13 disposed below the access floor. An end portion of the return duct 13 is communicated with an air blow passage 25 provided outdoors, and the dry duct 27, the suction side silencer 29, the axial fan 31, from the return duct 13 side to the air blow passage 25,
The blowout-side silencer 33 is sequentially provided. An outlet duct 35 is connected to the outlet silencer 33, and the outlet duct 35 is connected to an outlet chamber 37 to which the above-mentioned HEPA filter 21 is attached.

In the one-way flow type air conditioning system configured as described above, when clean air is blown from the HEPA filter 21, dust dust and exhaust heat around the equipment 5 are diffused by the blown airflow. Instead, it flows in one direction and is sucked from the grating 23, which is the access floor. The indoor air sucked from the grating 23 is
The dry coil 27, the suction side silencer 29, and the axial fan 3 are guided to the air passage 25 through the return duct 13.
1. After passing through the blowout-side silencer 33, it is guided to the blowout chamber 37 through the blowout duct 35, and the HEPA
It becomes clean air from the filter 21 and is blown out again. In this one-way flow type air conditioning system, dusting dust and exhaust heat flow in one direction and are sucked in from the grating 23 without being diffused into the room 7.
High cleanliness can be secured.

[0006]

However, in the above-described air conditioning system, since the dust generation dust and the exhaust heat are diffused into the room 7 and sucked by the grating type suction port 11, the diffused dust generation remains in the room. However, it has a high influence on others, and it has been difficult to secure high cleanliness.
Further, in the one-way flow type air conditioning system, since the indoor air is sucked from the grating 23 without diffusing, a high cleanliness can be secured, but the HEPA filter 21
Must be provided over the entire ceiling, and the entire access floor must also be grating 23. Further, since the amount of circulating air is large, both the initial cost and running cost increase. there were.

The present invention has been made in view of the above circumstances, and provides a clean room system capable of ensuring a high degree of cleanliness with a small amount of circulating air and efficiently collecting and treating the clean room system.
Therefore, the purpose is to reduce the cost of equipment and save energy.

[0008]

A clean room system according to the present invention for achieving the above object is a local system for forcibly forming an air flow around a device and efficiently treating dust and exhaust heat of the device. It is a clean room system having a processing zone. The outlet that blows out the forced airflow that wraps the equipment is arranged so as to face the equipment, and the outlet consists of a central blowing area with a low wind speed and an outside blowing area with a high wind speed, and the outside blowing area is It is arranged so as to completely surround the central blowing area. Thus, the forced airflow formed from the air outlet has a low speed in the cross section and a high speed in the outer peripheral portion, and surrounds the entire device. Further, the suction port through which the forced air flow is sucked is arranged so as to face the blowout port and be arranged downstream of the device. Normally, the air containing the dust exhaust heat thus recovered is introduced into a path for filtering, temperature / humidity control, cleaned and conditioned, and then reused. ,
It is also characterized in that the dust remover installed in the frame of the equipment exclusively treats the dust generated by the equipment to enhance the dust removal efficiency. Further, in order to achieve a high degree of air conditioning and cleaning of the entire room, it is possible to additionally install a turbulent flow type air conditioning system or a unidirectional flow type air conditioning system that has been conventionally used to further enhance the effect. .

[0009]

Since the airflow blown from the center is blown from the outside, the entire device is surrounded by the forced airflow of the central low speed and the peripheral high speed. As a result, the exhaust heat of the equipment is shielded from the indoor air by the airflow flowing downwardly surrounding the equipment, and is directly sucked into the suction port without being diffused into the room, and is efficiently collected and treated. Furthermore, the dust remover installed under the floor collects dust from the equipment without diffusing it elsewhere.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the system for locally cleaning the present invention will be described in detail below with reference to the drawings. FIG. 1 is an explanatory diagram showing a local high-cleaning system according to the present invention. An outlet 32 is attached to the ceiling, and a HEPA filter 34 is built in the outlet 32. On the other hand, the device 5 is mounted on a pedestal 81 on a base 80 provided under the access floor 39. And this equipment 5
Is arranged so that the air outlet 32 is just above the device 5. That is, the outlet 32 is arranged so as to face the device 5. A punching hole 36 is formed in the lower surface, which is the blowing surface of the air outlet 32, and thus the punching hole 3 is formed.
From 6, clean air (hereinafter simply referred to as airflow) is forcibly blown toward the device 5. In addition, outlet 3
Around the lower surface of 2 is a grill 38 surrounding the punching holes 36.
Is provided. Punching holes 3 by this grill 38
Airflows having different wind speeds are blown from 6 so as to surround the airflow. That is, the center of the air outlet 32 is set as a low-speed blow-out section and the outer periphery is set as a high-speed blow-out section, so that the air flow is forcibly flown from the punching hole 36 at a wind speed of about 0.85 m / s. On the other hand, the grill 38 has a structure in which the airflow is forcibly flowed down at a wind speed of 2.5 m / s, which is faster than this.

Around the equipment 5 on the access floor 39, a grating suction port 41, which is a suction port, is arranged at a position substantially opposite to the air outlet 32, and the grating suction port 41 is provided under the access floor 39. Duct 43
Is in communication with. Therefore, the airflow that wraps the device 5 and flows toward the access floor 39 is sucked into the grating suction port 41. In other words, the air flow (so-called, so-called, “encloses” the device 5 between the air outlet 32 and the grating inlet 41).
The air curtain) is formed. Then, this air flow is cleaned, that is, pre-staged filtered by a dust remover 45 which is installed inside the pedestal of the equipment 5 and which has a HEPA filter and a blower integrated therein, and is discharged to the return duct 43.

A blower 47 is provided at the end of the return duct 43.
A duct 49 communicating with the above is connected, and a filter 51 and a cooling coil 53 are provided in the duct 49. The silencer 55 is attached to the suction port on the duct 49 side of the blower 47, while the supply chamber 57 is attached to the blowout side of the blower 47. A main duct 59 arranged in the ceiling is connected to the supply chamber 57, and the main duct 59 is connected to the air outlet 32. FIG. 2 is a view for explaining the placement state of the equipment 5 in the access floor 39 and the arrangement state of the dust remover 45, and FIG. 3 is a plan view showing the same state. As shown in the example
A pedestal 81 shown in FIG. 4 is arranged on the base 80 inside the access floor 39. Then, the device 5 is installed on the frame 81. The pedestal 81 has a so-called hollow table shape having four legs, and the dust remover 45 is provided in the hollow. As the dust remover 45, there are blowers 45a, H
The EPA filter 45b and the silencer 45c are integrally unitized. On the other hand, on the access floor 39,
Aside from the grating suction port 41, a device-side suction port 60 is provided near the device 5. Figure 5 shows access floor 39
It is a top view explaining each suction opening provided above. That is, the grating suction port 41 is provided around the device 5, and the device-side suction port 60 is provided at a position closer to the device 5 than that. The device-side suction port 60 is for collecting and removing the dust generated from the device 5 itself without diffusing, and the opening ratio is about double that of the grating suction port 41.
The air sucked from the device-side suction port 60 passes through the duct 45d and is discharged by the dust remover 45 from the outlet 45e to the return duct 43 (see FIG. 2). Then, it is cleaned in the same manner as described above and blown again into the room 7 from the outlet 31 of the ceiling.

In the clean room system thus constructed, when the blower 47 is driven, air is blown through the supply chamber 57 and the main duct 59, and the air flow is forcibly blown out from the outlet 31 toward the device 5. To be done. The airflow blown out from the air outlet 31 forms an airflow having a low speed inside and a high speed at the outer circumference, that is, an air curtain, which encloses the device 5 and is sucked into the grating suction port 41. When the device 5 is wrapped in the air curtain, dust and waste heat from the device 5 are cut off from the indoor air by the air curtain, and are directly sucked into the grating suction port 41 without being diffused into the room 7. In other words, the unidirectional flow environment is locally formed only around the device 5. The room air sucked into the grating suction port 41 passes through the return duct 43, the filter 51, and the cooling coil 53, is sucked into the blower 47, becomes a forced air flow again, and is blown out from the air outlet 31. On the other hand, in order to efficiently collect and remove dust generated from the device 5 itself, a pedestal 81 is provided below the access floor 39.
The blower 45a of the dust remover 45 disposed in the lower part of the is driven. Then, the dust around the device 5 is strongly sucked from the device-side suction port 60, passes through the duct 45d and the silencer 45c, and becomes H.
It is collected by the EPA filter 45b. That is, the air containing dust is cleaned by the pre-stage filtration process by the HEPA filter 45b and is discharged to the return duct 43. That is, both the dust inside the room 7 and the dust generated from the device 5 itself are collected and removed, and the airflow is again blown out from the outlet 3
1 will be released.

[0014]

As described in detail above, in the clean room system according to the present invention, the air outlets through which the air flow enclosing the equipment is blown out are formed in the low speed air flow blowing area in the center and the high speed air flow blowing area in the periphery. Moreover, since the air outlet is disposed on the ceiling so as to face the device, and the suction port through which the air flow is sucked is disposed on the floor below the device, the periphery of the device is shut off from the indoor air by a so-called air curtain, As a result, the dust can be directly sucked into the suction port without diffusing into the room. Furthermore, dust generated from the device itself can be efficiently collected without spreading to other parts. As a result, high cleanliness can be secured with a small amount of circulating air, and equipment costs and running costs can be significantly reduced.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a clean room system according to the present invention.

FIG. 2 is a side view showing each arrangement state in the access floor.

FIG. 3 is a plan view of the same.

FIG. 4 is an explanatory diagram of a pedestal.

FIG. 5 is a diagram illustrating a suction port provided on an access floor.

FIG. 6 is an explanatory diagram showing a turbulent flow type air conditioning system.

FIG. 7 is an explanatory diagram showing a one-way flow type air conditioning system.

[Explanation of symbols]

 5 Equipment 32 Air outlet 39 Floor (Access floor) 41 Suction port (Grating suction port) 45 Dust remover 60 Equipment side suction port 81 Frame

Front page continuation (72) Inventor Tsutomu widthda 150 Odaira, Odakura, Saigomura, Nishishirakawa-gun, Fukushima Prefecture Shirakawa factory, Shin-Etsu Semiconductor Co., Ltd. -116 (72) Inventor Yoshio Kozaki 2-9-14 Teraoka, Izumi-ku, Sendai-shi, Miyagi (72) Inventor Akira Mochizuki 1-2-7 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Invention Yoshio Nagaya 1-2-7 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Inventor Yasuo Ogawa 1-2-7 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction (72) Invention Author Muta Yoshiyoshi 1-2-7 Moto-Akasaka Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Inventor Isamu Ara 1-27 Fukkamachi, Aoba-ku, Sendai City, Miyagi Kashima Construction Co., Ltd. Tohoku Branch

Claims (3)

[Claims] 1. A clean room system having a local treatment zone in a high-ceiling clean room, forcibly forming an air flow around the equipment, and exhausting dust exhaust heat of the equipment by the air flow. A blowout port for blowing out a forced airflow that wraps the device is arranged so as to face the device, and the blowout port consists of a central blowing zone and an outer blowing zone that completely surrounds the central blowing zone. In the cross section surrounding the entire device, a high speed outer peripheral part, a forced airflow not exceeding the speed of the outer peripheral part is formed in the central part, and the suction port into which the forced airflow is sucked faces the blowout port, A clean room system, which is arranged around the equipment. 2. The device is mounted on a pedestal arranged at a lower part of an access floor, and a dust remover having a HEPA filter and a blower integrated therein is arranged inside the pedestal, and the device is 2. The clean room system according to claim 1, wherein air containing dust around the equipment is sucked in from an intake port on the access floor that is surrounded and is close to the equipment, and the pre-stage filtration processing is performed by the dust remover. 3. A turbulent flow type air conditioner in which indoor air is agitated to discharge indoor dust and exhaust heat, or a unidirectional flow system in which indoor air is exhausted indoor air and exhaust heat by a one-way air flow. The clean room system according to claim 1 or 2, wherein the system is installed together with the system.