JPH06172996A - Rotating and revolving holder device - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a compact and low-cost rotation holder device by enabling a significant reduction in the number of parts and a reduction in width. [Structure] A vertically extending support frame 52, an orbital disc 53 rotatably and vertically supported from the outer peripheral side by the support frame, and a circle centered on the central axis of the orbital disc 53. And a plurality of rotation shafts 59 that are rotatably supported in a state of penetrating the revolution disk 53 and each rotation shaft 59.
Holders 60 attached to both ends of the shaft and the shaft disc 53
Sun gear 65 rotatably supported on the central axis of
A planetary gear 64 fixed to each rotation shaft 59 in a one-to-one correspondence and meshing with the sun gear 65, and rotation driving means 69, 68, 67, 54a for rotating the revolution disk 53.
A rotation suppressing means 66 for suppressing the rotation of the sun gear 65 is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is mainly used for a substrate supporting auto-revolution holder device used for forming a film on the surface of a substrate in a sputtering apparatus.

[0002]

2. Description of the Related Art In recent years, the production of disk-shaped recording media such as optical disks and magneto-optical disks has increased.

These productions generally require continuous deposition of multilayer sputter films in vacuum.

Although a plurality of substrates are attached to the holder device, in order to further improve productivity, substrates are attached to both sides of the holder device, the holder device is erected vertically, and simultaneous film formation is performed on both side faces by side spatter. At this time, it is necessary to revolve the substrate within the side surface of the holder device in order to obtain uniform film thickness. Along with the demand for automation of production, there has been developed a device that drives a holder device having a mechanism for orbiting a substrate to rotate from outside the vacuum chamber to move between the vacuum chambers and to orbit the substrate.

An example of the above-described conventional rotation and revolution holder device will be described below with reference to the drawings.

FIG. 3 is a sectional view of a conventional rotation and revolution holder device. FIG. 4 shows a side view thereof. 1 is a carrier, 2 is a support, 3a and 3b are revolution disks,
5 is a rack, 6 is a support roller, 7 is a guide roller,
8 is a pinion. The support base 2 is fixed to the carrier base 1,
The revolution disks 3a and 3b are rotatably supported by the support base 2. The rack 5 is fixed to the carrier 1. The support roller 6 is rotatably supported to the outside, and holds the carrier 1 so that it can be horizontally carried. The guide roller 7 is rotatably supported by an external machine frame (not shown), and guides the carriage 1 so as not to skew when it is horizontally conveyed.
The pinion 8 is rotationally driven from the outside, meshes with the rack 5, and horizontally conveys the carrier 1. 9 is a rotation axis, 10 is a substrate holder, 11 is a substrate, 12 is an outer peripheral mask, 13 is an inner peripheral mask, 14 is a planetary gear, 15a and 15b are sun gears,
Reference numerals 16 and 17 are intermediate gears, 18 is a drive gear, 19 is a sputter gun, and 20 is a target.

The rotation shaft 9 is rotatably supported by the revolution disks 3a and 3b. The substrate holder 10 is fixed to one end outside the rotation shaft 9. The outer peripheral mask 12 and the inner peripheral mask 13 are fixed to the substrate holder 10 with the substrate 11 interposed therebetween. The planetary gear 14 is fixed to the rotation shaft 9. The pair of left and right sun gears 15 a and 15 b mesh with the four planetary gears 14 and are fixed to the support base 2. The intermediate gear 16 meshes with the teeth 3c cut around the revolution disk 3a and is rotatably supported by the support base 2. The intermediate gear 17 meshes with the intermediate gear 16 and is rotatably supported by the carrier 1. The drive gear 18 meshes with the intermediate gear 17 and is rotationally driven from the outside. Then, the rotational force is transmitted to the intermediate gear 17 and the intermediate gear 16, and the one revolution disk 3a is rotated. One revolution disk 3a and the other revolution disk 3b are fixed on the common shaft 32 and rotate at the same time. Then,
The four rotation shafts 9 supported by the left and right revolution discs 3a and 3b make revolution movements. At this time, each planetary gear 14
Since it revolves while meshing with the fixed sun gear 15, a revolving motion about the revolving shaft 9 is generated. Therefore, the substrate 11 fixed to the substrate holder 10 revolves around its axis, and the film thickness distribution of the film sputtered from the target 20 is made uniform.

[0008]

However, in the above structure, since the pair of left and right revolution disks 3a and 3b are supported by the support base 2 via the common shaft 32, the revolution disks 3a and 3b. , The support shaft 2 for supporting the rotation shaft 9 and the substrate holder 10
There is no choice but to separately dispose them on both sides, and the planetary motion mechanism for rotation and revolution and the rotation shaft rotation support mechanism will be constituted by two sets of substantially similar ones on both sides of the support base 2. Therefore, the number of parts is increased, and the manufacturing cost of the rotation holder device is increased. Also, because the width of the rotation holder device becomes wider,
In addition to enlarging the size of the entire system and occupying a large space, it is necessary to increase the capacity of the vacuum exhaust pump and increase the size of the vacuum chamber and the sluice valve for the vacuum space when using the sputtering system. The cost was also high.

In view of the above problems, the present invention has a set of planetary motion mechanisms of a revolving holder device, makes it possible to significantly reduce the number of parts and the width of the device, and to achieve cost reduction and compactness. It is an object of the present invention to provide a self-revolving holder device that does.

[0010]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a support frame which is erected in a vertical state, and an orbital disk which is rotatable from the outer peripheral side by the support frame and is supported in the vertical state. , A plurality of rotation shafts that are arranged on the circumference around the center axis of the revolution disk and are rotatably supported while penetrating the revolution disk, and holders attached to both ends of each rotation shaft. , A sun gear rotatably supported on the center axis of the revolution disc, a planetary gear fixed to each rotation shaft in a one-to-one correspondence and meshing with the sun gear, and rotation of the revolution disc. It is characterized in that it is provided with a rotation driving means for giving and a rotation suppressing means for suppressing the rotation of the sun gear.

[0011]

With the above-described structure, the present invention can reduce the number of parts of the rotation shaft of the rotation / revolution holder device and its rotation holding mechanism, the revolution disk, the planetary gear, the sun gear, etc., to half that of the conventional example. It is possible to significantly reduce the manufacturing cost of the rotation holder device itself. Also, the lateral width of the auto-revolution holder device can be greatly reduced.

When the present invention is applied to the auto-revolution holder device of the sputter device, the vacuum chamber of the sputtering device and the partition valve between the vacuum chambers can be made small, and the vacuum exhaust system and the entire device can be made small. The manufacturing cost of the entire device can also be reduced.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A rotation and revolution holder device according to an embodiment of the present invention will be described below with reference to FIGS.

FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a side view thereof. Reference numeral 51 is a carrier, 52 is a vertically-supported support frame, 53 is a revolving disk that is rotatable from the outer peripheral side and is vertically supported by the support frame 52, 54 is a V groove roller, and 55 is a rack.
Reference numeral 56 is a support roller, 57 is a guide roller, and 58 is a pinion. The support frame 52 is fixed to the carrier table 51, and
The groove roller 54 is rotatably supported by the support frame 52, and
Hold the outer circumference of the revolution disk 53 with one V-groove roller 54,
The revolution disk 53 is rotatably held. The rack 55 is fixed to the carrier table 51. Support roller 5
Reference numeral 6 is rotatably supported to the outside, and holds the transfer table 51 so that it can be transferred horizontally. The guide roller 57 is rotatably supported to the outside, and guides the conveyance table 51 so that it does not skew when it is conveyed horizontally. The pinion 58 is rotationally driven from the outside, meshes with the rack 55, horizontally conveys the conveyance table 51, moves the vacuum space, and brings the autorotation holder device to the film formation position. Reference numeral 59 is a rotation axis, 60 is a substrate holder (holder), 61 is a substrate, 62 is an outer peripheral mask, 63 is an inner peripheral mask, 64 is a planet gear, 65 is a sun gear, 66 is a weight, 67 and 68 are intermediate gears, 69 Is a drive gear, 70 is a sputter gun, and 71 is a target.

The four rotation shafts 59 are arranged on the circumference centering on the central axis P of the revolution disk 53 and are rotatably supported while penetrating the revolution disk 53. The substrate holders 60 are fixed to both ends of each rotation shaft 59, and the revolution disk 5
Located on both sides of 3. The outer peripheral mask 62 and the inner peripheral mask 63 are fixed to the substrate holder 60 with the substrate 61 interposed therebetween. The planetary gears 64 are fixed to the respective rotation shafts 59 in a one-to-one correspondence, and are fixed only to the right side of the revolution disk 53 as shown in FIG. The only sun gear 65 is 4
It meshes with one planetary gear 64 and is rotatably supported by the revolution disk 53 via a support shaft 90. The weight 66 is fixed to the revolution disk 53 at a position where the center of gravity is displaced from the central axis P of the revolution disk 53. The intermediate gear 67 is fixed to the V-groove roller 54a which also serves as a driving roller in the V-groove roller 54. The intermediate gear 68 meshes with the intermediate gear 67 and is rotatably supported by the carrier table 51. The drive gear 69 is externally supported so as to mesh with the intermediate gear 68 when the auto-revolution holder device comes to the film formation position, and is rotated by an external drive source. The sputter gun 70 and the target 71 are arranged on both sides of the auto-revolution holder device.

The operation of the auto-revolution holder device constructed as above will be described below.

When the auto-revolution holder device is conveyed to the film forming position by the rotation of the pinion 58 and stopped, the intermediate gear 6
8 meshes with the drive gear 69. When the drive gear 69 is rotationally driven from the outside, the rotational force is generated by the intermediate gear unit 68 and the intermediate gear 6.
7, the V-groove roller 54a for driving rotates. Then, the revolution disk 53 rotates due to the frictional force. Since the rotation shaft 59 is arranged on the circumference line of the revolution disc 53, the rotation shaft 59 revolves with the rotation of the revolution disc 53. At this time, a rotational moment is generated in the sun gear 65 by the frictional force between the revolution disk 53 and the rotation support mechanism and the frictional force of the rotation support mechanism of the rotation shaft 59, and the sun gear 65 rotates a little from the reference position, but When the sun gear 65 moves, a rotation moment is generated by the weight of the weight 66 fixed to the sun gear, which tends to return to its original position, and the sun gear 65 stops at a rotation position balanced with the rotation moment by the frictional force. Therefore, the sun gear 65
The planetary gear 64 meshing with the rotation rotates, and the rotation shaft 59 and the substrate holder 60 and the substrate 6 attached to both ends thereof.
1 rotates about the axis of rotation, and the rotation of the revolution disk 53 causes the rotation of the revolution disk 53. Although the weight 66 is separated from the sun gear 65 in this embodiment, the weight of the sun gear 65 itself may be deviated from the center of rotation as a unit.

[0018]

As described above, according to the present invention, it is possible to provide a compact and revolving holder device at a low cost by making it possible to greatly reduce the number of parts and the width.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention.

FIG. 2 is a side view thereof.

FIG. 3 is a sectional view of a conventional example.

FIG. 4 is a side view thereof.

[Explanation of symbols]

 52 Support Frame 53 Revolution Disc 59 Rotating Shaft 60 Holder 64 Planetary Gear 65 Sun Gear 66 Weight (Rotation Suppression Means) 54a, 67, 68, 69 Rotation Drive Means

Claims (2)

[Claims] 1. A vertical support frame, a revolving disc rotatably supported from the outer peripheral side in a vertical state by the support frame, and a revolving disc on a circumference centered on the central axis of the revolving disc. A plurality of rotating shafts that are arranged and rotatably supported while penetrating the revolution disk, holders attached to both ends of each rotation shaft, and rotatably supported on the center axis of the revolution disk. One sun gear, a planetary gear that is fixed to each rotation shaft in a one-to-one correspondence and meshes with the sun gear, a rotation drive unit that rotates the revolution disk, and a rotation suppression that suppresses rotation of the sun gear. A revolving holder device comprising: 2. The rotation suppressing means is a weight arranged on the sun gear at a position deviated from the central axis position thereof.
The described rotation holder device.