JPH0617954A - Valve - Google Patents

Abstract

PURPOSE:To enable washing of the inside of a clearance in a valve having a cylindrical or conical valve element having a fluid through hole by providing a housing with a wash solvent inlet and outlet, both of which communicate to the clearance between the housing and the valve element. CONSTITUTION:A cylindrical valve element 2 having a fluid through hole 6 is enclosed in a housing 1 having a fluid inlet 4 and outlet 5 while an operation for rotating the valve element 2 via a switching stem 3 is made possible. Sealing O-rings 8 for preventing fluids from flowing into the clearance 7 between the housing 1 and the valve 2 intervene near the fluid inlet 4 and outlet 5 of the housing 1. In such a valve, the housing 1 is provided with a wash solvent inlet 10 and outlet 11, both of which communicate with the clearance 7. A wash solvent is circulated from the inlet 10 toward the outlet 11 via a wash solvent circulating channel 12 and thereby other liquids flowing into the clearance 7 are ejected to the outside, together with the wash solvent, so as to wash the inside of the clearance.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve having a valve body having a cylindrical or conical shape having a fluid through hole or a shape similar thereto.

FIG. 2 is a view showing the structure of a conventional valve of this type, FIG. 2 (a) is a side sectional view, and FIG. 2 (b) is a sectional view taken along the line DD of FIG. The valve comprises a housing 1 and a valve body 2 rotatably accommodated in the housing 1 by a switching stem 3. Further, there is also one in which the switching stem and the valve body are integrally formed. The housing 1 is generally made of a resin material and is provided with a fluid inlet 4 and a fluid outlet 5.

The valve body 2 is provided with a fluid through hole 6. Further, an O-ring 8 for sealing is provided in the housing 1 to prevent the fluid from flowing from the fluid inlet 4 and the fluid outlet 5 into the clearance 7 between the housing 1 and the valve body 2 in the vicinity of the fluid inlet 4. It is provided near the fluid outlet 5. An "O" ring 9 for sealing is also provided on the inner peripheral surface of the hole through which the switching stem 3 of the housing 1 passes.

In the valve having the above structure, when the switching stem 3 is rotated in the direction of arrow a or in the opposite direction, the valve body 2 is interlocked.
Also rotates. Both ends of the fluid through hole 6 of the valve body 2 are fluid inlets 4
When it meets the fluid outlet 5, the fluid flowing in from the fluid inlet 4 passes through the fluid through hole 6 and flows out from the fluid outlet 5.

[0005]

In the valve having the above construction, when the valve is opened and closed, the housing 1 and the housing 1 are connected to each other while the fluid inlet 4 and the fluid outlet 5 are aligned as shown by arrows b and c in FIG. The fluid cannot be prevented from flowing into the clearance 7 between the valve body 2 and the valve body 2. Also, in the case of a three-way valve or a four-way valve (not shown), it is not possible to prevent fluid from flowing in during switching of the valve element.

In particular, when the liquid used in the semiconductor manufacturing process stays in the clearance 7 for a long time and solidifies or crystallizes, a problem may occur in the seal portion when the valve is opened or closed, or the liquid may be adversely affected. There is a problem such as. When the valve is a three-way valve, a four-way valve, etc., the residual liquid in the clearance portion is removed even if the liquid remaining in the fluid through hole 6 of the valve body is removed by blowing with air or nitrogen before switching the valve. Since it cannot be removed, there was an adverse effect such as a slight mixture of two liquids that should not be mixed when switching valves.

The present invention has been made in view of the above points, and an object thereof is to provide a valve having a cleaning port for cleaning the inside of the clearance between the housing and the valve body in order to eliminate the above problems. To do. It is another object of the present invention to provide a valve capable of replacing the liquid inside the clearance with another liquid or gas that does not pose a problem even if it is mixed with another main liquid using this port.

[0008]

In order to solve the above problems, according to the present invention, a cylinder having a fluid through hole, a cone or a valve body having a similar shape is used for switching in a housing having a fluid inlet and a fluid outlet. In a valve rotatably accommodated by a stem, a housing is provided with a cleaning liquid inlet and a cleaning liquid outlet which communicate with a clearance portion between the housing and the valve body.

[0009]

According to the present invention, as described above, the housing is provided with the cleaning liquid inlet and the cleaning liquid outlet communicating with the clearance between the housing and the valve body, and the cleaning liquid is flown from the cleaning liquid inlet to flow into the clearance. The liquid is pushed by the cleaning liquid or mixed with the cleaning liquid and discharged from the cleaning liquid outlet. As a result, the inside of the clearance is washed. When air or nitrogen is flown from the cleaning liquid inlet, the liquid remaining in the clearance is also discharged.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing the structure of the valve of the present invention.
1A is a plan view, FIG. 1B is a sectional view taken along the line AA in FIG.
1C is a sectional view taken along the line BB, and FIG. 1D is a sectional view taken along the line C-C. In the valve of the present invention, a cylindrical valve body 2 having a fluid through hole 6 is rotatably housed by a switching stem 3 in a housing 1 having a fluid inlet 4 and a fluid outlet 5. An O-ring 8 for sealing is provided near the fluid inlet 4 and the fluid outlet 5 of the housing 1 to prevent the fluid from flowing into the clearance 7 between the housing 1 and the valve 2. The O-ring 8 is inserted into the O-ring fitting groove of the protrusion 2b provided on the side portion of the valve body 2.
Further, an O-ring 9 for sealing is also provided on the inner peripheral surface of the hole through which the switching stem 3 of the housing penetrates, which is the same as the conventional valve shown in FIG.

The lower end of the valve body 2 is provided with a convex portion 2a which is inserted into a circular concave portion formed on the bottom of the housing. Further, the clearances 7a and 7b surrounded by the O-ring 8 on the side of the fluid inlet 4 and the O-ring 8 on the side of the fluid outlet 5 penetrate the cleaning liquid penetrating the convex portion 2a at the lower end of the valve body 2 in a cross shape. The groove 12 communicates with each other.

The difference between the valve of the present invention and the conventional valve is that, as shown in FIG. 1, the cleaning liquid inlet 10 and the cleaning liquid outlet 11 which communicate with the housing 1 through the clearance 7 between the housing 1 and the valve body 2. There is a point.

As described above, since the housing 1 is provided with the cleaning liquid inlet 10 and the cleaning liquid outlet 11 which communicate with the clearance between the housing 1 and the valve body 2, by flowing the cleaning liquid from the cleaning liquid inlet 10. The liquid flowing into the clearance is pushed by the cleaning liquid or mixed with the cleaning liquid and discharged to the outside through the cleaning liquid outlet 11. As a result, the inside of the clearance 7 is washed.

In the valve used in the semiconductor manufacturing process, generally, the housing 1 and the valve body 2 are often made of resin because of the corrosion caused by the chemical solution. Also in this embodiment, the housing 1 and the valve body 2 are made of resin. When the valve having the structure shown in FIG. 1 is used in the semiconductor manufacturing process, the housing 1 and the valve body 2 come into contact with various liquids, but some liquids have a long clearance in the clearance 7 between the housing 1 and the valve body 2. Some of them cause deterioration, solidification and crystallization by staying. As described above, if such alteration, solidification and crystallization occur, the seal portion (O-ring portion) may be defective or the liquid may be adversely affected. Therefore, such a problem can be solved by flowing the cleaning liquid from the cleaning liquid inlet 10 to clean the inside of the clearance 7.

In the above embodiment, a two-way valve having one fluid inlet 4 and one fluid outlet 5 in the housing 1 is shown, but the present invention is not limited to this and a three-way valve or a four-way valve is used. Of course, a one-way valve is also acceptable. Especially, in case of 3-way valve and 4-way valve, they should not be mixed when switching.
Since a small amount of liquid may be mixed, it is effective to provide the cleaning liquid inlet and the cleaning liquid outlet which communicate with the clearance 7 between the housing and the valve body.

In the above embodiment, the valve body 2 has a cylindrical shape, but the shape of the valve body is not limited to this, and may be a cone or a shape similar thereto.

[0017]

As described above, according to the present invention, the housing is provided with the cleaning liquid inlet and the cleaning liquid outlet communicating with the clearance portion between the housing and the valve body, so that the liquid retained in the clearance can be retained. An excellent effect that it can be discharged and washed, and it is possible to prevent adverse effects due to alteration, solidification, crystallization, etc. of the liquid staying in the clearance, and troubles such as mixing of other liquids into this liquid. Is obtained.

[Brief description of drawings]

1 is a diagram showing the structure of a valve of the present invention, FIG.
Is a plan view, FIG. 1B is a cross-sectional view taken along the line AA, and FIG.
Is a sectional view taken along the line BB, and FIG. 1D is a sectional view taken along the line C-C.

FIG. 2 is a view showing a structure of a conventional valve, FIG. 2 (a) is a side sectional view, and FIG. 2 (b) is a DD sectional view.

[Explanation of symbols]

 1 Housing 2 Valve Body 3 Switching Stem 4 Fluid Inlet 5 Fluid Outlet 6 Fluid Through Hole 7 Clearance 8 O Ring 9 O Ring 10 Cleaning Liquid Inlet 11 Cleaning Liquid Outlet 12 Cleaning Liquid Through Groove

Claims (2)

[Claims] 1. A valve in which a valve body having a cylindrical or conical shape having a fluid through hole or a shape similar thereto is rotatably accommodated by a switching stem in a housing having a fluid inlet and a fluid outlet. A valve comprising a cleaning liquid inlet and a cleaning liquid outlet, which communicate with a clearance portion between the housing and the valve body. 2. The valve according to claim 1, wherein the switching stem and the valve body are integrated.