JPH061802Y2 - Thermocompression bonding device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a thermocompression bonding apparatus that presses a resin film or the like while heating and fuses them.

(Prior Art) Conventionally, for example, a thermocompression bonding apparatus is used for fusing work such as resin films having a heat-fusing property, and the fusing parts such as films to be joined to each other are polymerized, The heater chip is pressed from above and the same portion is processed and heated to perform fusion treatment.

At this time, in order to properly fuse the joints, it is necessary to select the pressing force and the heating temperature according to the type and properties of the work. Japanese Patent Application Laid-Open No. 63-249437 and Japanese Patent Application Laid-Open No. 2-95827 propose a thermocompression bonding apparatus. In this device, a floating bar that holds a heater chip below is supported by upper and lower compression springs, and these springs are wound around a vertical rod to guide the expansion and contraction of the spring, while the lower end of the lower compression spring is fixed. It is supported by a stand. A pressure bar with adjustable compression force is attached to the upper end of the upper compression spring, the rod of the drive cylinder unit is connected to this pressure bar, and the pressure of the heater chip of the work is set with a preset compression spring. It is configured so as to be influential. Further, in this apparatus, since the heater chip whose lower surface has a flat contact portion is evenly brought into contact with the work surface, special consideration is given.

(Problems to be solved by the invention) However, in the above-mentioned device, since the floating bar for pressing the work surface is biased by the compression pressure of the compression spring, in order to compress the spring straightly, the expansion and contraction of the spring is required. However, there is a problem that a structure and an assembling property of the device are complicated. Further, once assembled, the replacement work of the spring becomes complicated, and the urging pressure is limited within a certain range, and the adjustment is made within a narrow range.

(Means for Solving the Problems) In order to solve the above problems, the present invention provides an elevating body on a vertical rail portion of a base, and is vertically slidably mounted on the elevating body and has a heater below. A floating body provided with a chip was provided, and a compression spring for urging the floating body upward and a tension spring for urging the floating body downward were arranged between the floating body and the lifting body.
The tension force of this tension spring is freely adjustable.

(Operation) Since the floating body that pressurizes the work is biased by the tension spring, it is not necessary to separately provide a guide member for expanding and contracting in such a tension spring. Further, the spring can be replaced or changed, and the adjustment range of the urging force can be expanded.

(Embodiment) An embodiment of the thermocompression bonding apparatus of the present invention will be described with reference to the attached drawings.

1 is a front view of the thermocompression bonding apparatus, FIG. 2 is a side view of the same,
FIG. 3 is a partial side view of a section taken along the line III in FIG.

As shown in FIGS. 1 and 2, in the present thermocompression bonding apparatus, a floating body 3 is attached via a spring to an elevating body 2 which is attached to the front surface of a base 1 so as to be vertically movable. The heater chip 5 to be fixed is configured to be attachable.

As shown in FIG. 2, the base 1 includes a workbench 11, a base 12 that stands up from the back of the workbench 11, and a support 13 that is mounted on the upper end of the base 12 so as to be height-adjustable. The support base 13 includes a fixed block portion 13a and a drive portion storage portion 13b. Then, the fixed block portion 13a is made so that the upper end of the base 12 is fitted in the receiving hole provided on the lower surface, and the height can be adjusted by the height adjusting screw 14 at the upper portion, and the base 12 can be fixed by the tightening handle 15 on the back. It is structured so that it can be firmly stopped. Further, the drive portion housing portion 13b integrally provided on the front surface of the fixed block portion 13a is provided with a pair of connecting portions 16 and 16 on its upper surface for supplying compressed air to the built-in cylinder unit, and on both side surfaces. Forms a vertical rail portion and supports an elevating body 2 described below so as to be movable up and down.

The elevating body 2 is provided with a sliding portion 21 that engages with the rail portion and is connected to the cylinder unit, and bulging portions 22 and 23 that protrude forward from the upper and lower portions of the front surface of the sliding portion 21, respectively, in a side view. It is formed in a U shape, and two guide rods 24 as shown in FIG. 1 are integrally mounted between the upper and lower protruding portions 22 and 23. Further, the lower spring receiving member 2 extending laterally is provided on the lower surface of the lower protruding portion 23.
In this embodiment, two plate-shaped members 25a and 25b having different lengths are overlapped with each other and the end portions are bent upward to form two spring attachment portions on each of the left and right sides. Further, a stopper (corresponding to the stopper 26 in the operation diagrams of FIGS. 4 and 5) protruding upward from the upper surface of the lower overhanging portion 23 is provided so that the upward protrusion amount thereof can be adjusted, which will be described below. The lower surface of the floating body 3 is abutted to regulate the lowered position.

The floating body 3 is the guide rod 2 of the lifting body 2.
4 is provided with a slidable floating block 31, a screw rod 32 is connected to the upper side of the floating block 31, and an upper spring receiving member 33 and a guide member 37 are screwed to the screw rod 32. Further, below the floating block 31, a heater chip holding member 34 is attached, and these together form the floating body 3.

That is, as shown in FIG. 3, the floating block 31 allows the guide rod 24 to be inserted through an insertion hole provided in the vertical direction, is slidable up and down through the bearing portion 35, and is attached to the lower end of the guide rod 24. It is supported on the lower overhanging portion 23 by a compression spring 6 which is interposed in a winding shape. A screw rod 32 shown in FIG. 1 is integrally connected to the upper surface of the floating block 31, and the connecting portion is configured to allow the screw rod 32 to freely rotate.

The screw rod 32 extends upward from the connecting portion, is screwed with the upper spring receiving member 33 and the guide member 37 on the upper side, and freely penetrates the upper protruding portion 22 of the elevating body 2 to extend the protruding portion 2.
The pressure adjusting screw 36 is provided on the upper end of the pressure adjusting screw 36.

The upper spring receiving member 33 is the lower spring receiving member 25.
Similarly, the two long and short plate-like members 33a and 33b are overlapped, and the ends of the plates are bent downward so that the left and right ends are respectively
In addition to forming a spring mounting portion at a place, the guide rod 24 is slidable by being inserted into a bearing portion 38 which is integrated with the lower guide member 37 and vertically penetrates the guide member 37 and the upper spring receiving member 33. In addition, the above-mentioned screw rod 32 is threaded in the center. A tension spring 7 is disposed between the upper and lower spring receiving members 33 and 25. The tension force of the tension spring 7 is generated by rotating the adjusting screw 36 at the upper end of the screw rod 32 to move the upper spring member 33 and the guide member 37. Move up and down to adjust.

On the other hand, on the lower surface of the front portion of the floating block 31, a groove is provided as shown in the partial sectional view of FIG.
A heater chip holding member 34 having an upper end loosely fitted in the groove is swingably supported by a shaft 39. A pair of left and right springs 40 are interposed between the heater chip holding member 34 and the upper surface of the inner surface of the concave groove to urge them downward. Further, in order to control the left and right tilt angles of the heater chip holding member 34, as shown in FIG.
1 is provided, and the lower end of the angle regulating screw 41 is projected into the groove so as to abut the upper surface of the heater chip holding member 34. This angle regulation is for finely correcting, for example, a mounting error when the heater chip 5 having a flat lower surface is mounted as described below, and is for fine adjustment for uniformly contacting the lower surface of the heater chip with the work. .

The heater chip 5 is fixed to the lower end of the heater chip holding member 34 with a plurality of screws 42, and is configured to be compatible depending on the nature of the work.

In addition, a pair of left and right flexible conductor plates 51 are provided between the heater chip holding member 34 and the fixed block portion 13a on the base 1 side to energize the heater chip 5, and the heater chip holding member 34 has A plurality of fins parallel to the vertical direction are formed on the front and rear surfaces to enhance heat dissipation.

Further, on the rear part of the heater chip holding member 34, a second
As shown in the figure, the cooling ventilation pipe 5 has a blowout hole in the lower part.
2 is provided, and cold air is blown to the fused portion after fusion to perform forced cooling. The blowing of the cold air and the vertical movement of the lifting body 2 are controlled by a separate controller, and a pair of sensors 53a, 53b are provided on the upper surface of the floating block 31 and the lifting body 2 for this control.

An outline of the operation of the apparatus configured as described above will be described with reference to FIGS. 4 and 5 as well. FIGS. 4 and 5 are operation diagrams of the main part of the present invention.
The figure shows a state in which the lifting body stands by above, and FIG. 5 shows a state in which it descends.

A table 8 arranged on the workbench 11 and movable left and right
When a work is placed on the work piece, the compressed air drives the cylinder unit via one of the connecting portions 16, and the lifting body 2 descends. Floating block 3 until then
As shown in FIG. 4, 1 is pulled toward the lower lower spring receiving member 25 by the tension spring 7, and the floating block 31 is pulled until it comes into contact with the lower stopper 26.

When the lifting body 2 descends and the lower surface of the heater chip 5 comes into contact with the work, and further only the lifting body 2 side descends, the floating block 31 becomes a floating state as shown in FIG. 5, and the tension spring 7 force adjusted in advance is used. Pressurize the work. When the heater chip 5 comes into contact with the work and becomes floating, the sensor 53 in FIG. 2 operates and the heater chip 5 is heated. When the heating is stopped after the set time, cooling air is blown from the cooling ventilation pipe 52 to forcibly cool the fused portion. When the temperature of the fusion portion is lowered to a predetermined temperature, the cylinder unit is again supplied with air, and the elevating body 2 rises.

Although the outline of the operation is as described above, it is already described that the pressing force to the work is set by the adjusting screw 36. At this time, since the tension spring 7 can be easily replaced or added, the pressing force can be adjusted in a wide range. In this embodiment, each of the left and right tension springs has two springs, and the lengths of the springs are different from each other. For example, when the applied pressure is weakened, only one of the springs can be pulled, and further two springs can be pulled. It is configured to obtain a large pressing force by pulling the spring of. As shown in FIG. 2, a weak pressure scale 19 is provided on the side surface of the lifting body 2.
2, a strong pressure scale is displayed on the side surface on the opposite side of FIG. 2, but of course, this spring is not limited to two.

(Effect of the Invention) As described above, since the book is configured to use the tension force of the tension spring to press the work, the structure can be greatly simplified. Further, since the spring can be easily replaced, the applied pressure can be adjusted over a wider range.

[Brief description of drawings]

1 is a front view of the thermocompression bonding apparatus, FIG. 2 is a side view of the same,
FIG. 3 is a partial side view of a section taken along the line III-III in FIG.
FIG. 4 and FIG. 5 are action diagrams, and FIG. 4 shows a state when the lifting body stands by above, and FIG. 5 shows a state when it descends and contacts the work. In the drawings, 1 is a base, 2 is a lifting body, 3 is a floating body, 5 is a heater chip, 7 is a tension spring, 24 is a guide rod, 25 is a lower spring receiving member, 31 is a floating block, 32 is a screw rod, 33 is an upper spring receiving member, 36 is an adjusting screw, 51 is a conductor plate, and 52 is a cooling ventilation pipe.

Claims (1)

[Scope of utility model registration request] 1. A thermocompression bonding apparatus in which a heater chip for heating a fusion-bonded portion of a workpiece while being heated is movable up and down with respect to a base. The thermocompression bonding apparatus is mounted on a vertical rail portion of a base. A body and a floating body that is vertically slidably attached to the lifting body, a heater chip is mounted below the floating body, and a floating body is provided between the floating body and the lifting body. A thermocompression bonding apparatus characterized in that a compression spring for urging the body upward and a tension spring for urging the floating body downward are provided, and the tension spring is capable of adjusting the tension force.