JPH06190227A - Mist or vapor condensation recovery device - Google Patents

Abstract

(57) [Summary] [Object] The present invention relates to a device for recovering exhaust mist or vapor in local exhaust, for example, and provides a mist or vapor condensing and recovering device that is simple and does not require power costs. [Structure] One end is connected to a mist or vapor generation source (etching device 11), and the other end is exhaust means (fan 6)
A throttle valve (9) is provided in a horizontal part of the exhaust pipe connected to the pipe or in a pipe (4) directed downward, and a liquid retaining part (5) is provided on the downstream side of the throttle valve, and the pipe is raised from the liquid retaining part. The liquid recovery means (valve 7) is provided in the liquid retaining section to recover the mist or vapor condensate. As described above, the present invention condenses into liquid by the temperature drop due to adiabatic expansion when exhaust gas passes through the throttle valve, and collects the liquid by collecting it in a liquid reservoir provided on the downstream side. Therefore, it is possible to provide a device that is simple and inexpensive to install, does not require power costs, and reduces carry-out by exhaust.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mist or vapor condensing / collecting device for local exhaust, for example.

[0002]

2. Description of the Related Art A conventional mist or vapor recovery device is
For example, an obstacle using fibers is installed in the exhaust pipe, and the mist or vapor that collides with the obstacle and is condensed is recovered.
Alternatively, a cooling mechanism is provided in the exhaust pipe to condense and collect mist or vapor.

[0003]

However, when an obstacle made of fiber or the like is used, it needs to be replaced periodically, and the cost including the treatment is incurred. Moreover, if it contains chemicals, dangerous work will occur. Further, when the cooling mechanism is provided, the structure is complicated, the cost is high, and the power cost is required.

Further, in the case where the mist collecting device is not provided, it is uneconomical that the amount of the chemical solution or the like is increased due to carrying out the mist.

An object of the present invention is to provide a device which can be installed easily and inexpensively, and which requires no power cost and reduces the carry-out of a chemical solution or the like due to exhaust.

[0006]

In order to solve the above problems, the recovery device according to the first aspect of the present invention is an exhaust gas having one end connected to a mist or a steam generation source and the other end connected to an exhaust means. A throttle valve is provided in the horizontal part of the pipe or in the downward pipe, a liquid retaining part is provided on the downstream side of the throttle valve, the pipe is raised from the liquid retaining part, and the liquid collecting means is provided in the liquid retaining part. It is provided to condense and recover mist or vapor.

Further, in the recovery apparatus of the second invention of the present invention, one end is connected to the mist or steam generating source, and the other end is connected to the exhaust means to the horizontal portion of the exhaust pipe or the throttle valve is connected to the downward pipe. Provided, a liquid reservoir is provided on the downstream side of the throttle valve, the pipe is raised from the liquid reservoir, the liquid recovery means is provided in the liquid retaining portion, and the pipe raised upward is Before joining the exhaust pipe, a trap liquid retaining portion is provided to prevent the liquid flowing from the joining portion into the pipe that has been started up, and the mist or vapor is condensed and recovered.

[0008]

According to the first aspect of the present invention, the exhaust flow containing the mist or steam taken into the exhaust pipe by the exhaust fan passes through the throttle valve provided in the pipe and has a temperature due to adiabatic expansion. When it descends, it condenses and becomes a liquid, and this liquid is carried in the horizontal or downward pipe by the exhaust flow and its own weight and is collected in the liquid retaining part and can be collected.

According to the second aspect of the present invention, the exhaust flow containing mist or steam taken into the exhaust pipe by the exhaust fan is adiabatically expanded when passing through the throttle valve provided in the pipe. Due to the temperature drop, it condenses into a liquid, and this liquid is exhausted in the pipe that is oriented horizontally or downwards, is carried by its own weight and can be collected in the liquid retaining part for recovery, and even if it merges with other exhaust pipes, Since it is possible to prevent the condensed liquid from another exhaust pipe from flowing into the liquid retaining portion, it is possible to recover a liquid having high purity.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A case where the present invention is applied to an Egging apparatus will be described below as an embodiment with reference to the drawings. 1 is an overall configuration diagram of an etching apparatus according to a first embodiment of the present invention.

In FIG. 1, 1, 2, and 4 are exhaust pipes for guiding an exhaust flow, 3 is a flange joint, 5 is a liquid retaining portion, and 6
Is an exhaust fan, 7 is a recovery valve, 8 is a recovery container, 9 is a throttle valve composed of, for example, a butterfly valve, 10 is an etching solution container, 11 is an etching apparatus body, 12 is a circulation pump, 13 is a heater, and 14 is a recovery solution. Is.

An exhaust flow (arrow A) containing mist or vapor heated by the heater 13 and drawn by the exhaust fan 6 is drawn by the exhaust fan 6 and reaches the throttle valve 9 through the exhaust pipe 4. Here, the exhaust flow containing mist or vapor has its temperature lowered and condensed due to adiabatic expansion when passing directly through the throttle valve 9, becomes a liquid and falls into the liquid retaining portion 5 and accumulates, and becomes a recovery liquid 14. The exhaust flow (arrow B) that has lost the mist or vapor content passes through the liquid retaining portion 5 and is guided to the exhaust pipe 2 (arrow D), and is exhausted by the fan 6. The liquid cooled and liquefied at the rising portion H1 of the pipe also falls along the wall surface of the pipe and accumulates in the liquid retaining portion 5. The recovery liquid 14 accumulated in the liquid retaining portion 5 can be taken out to the recovery container 8 by the valve 7.

FIG. 2 shows a second embodiment of the present invention. In addition, the same components as those in FIG. In FIG. 2, 15 is a recovery pipe, 16 is a hole for taking in the recovery pipe 15, and the throttle valve 9 is provided in the horizontal portion of the pipe 4. Throttle valve 9 as in the first embodiment
The recovery liquid 14 that has been condensed by the exhaust flow E and accumulated in the liquid retaining portion 5 is opened by opening the valve 7.
It is returned to the etching liquid container 10 via 5. By doing so, the structure of the piping is simpler than in the first embodiment, and the recovery liquid 14 can be directly returned to the etching liquid container 11.

FIG. 3 shows a third embodiment of the present invention. The same components as those in FIGS. 1 and 2 are designated by the same reference numerals and the description thereof will be omitted. In FIG. 3, 17 is an exhaust pipe for connection. The exhaust flow that has been recovered in the first stage passes through the connecting exhaust pipe 17 and enters the second stage. The liquid condensed by the action similar to that of the first stage is returned to the etching liquid container 10 through the pipe 15 by the valve 7. By thus connecting a plurality of condensation recovery devices in series, the recovery efficiency can be improved.

FIG. 4 shows a fourth embodiment of the present invention. The same components as those in FIGS. 1, 2 and 3 are designated by the same reference numerals. In FIG. 4, reference numeral 18 is a trap provided in the middle of the recovery pipe 15 for preventing the backflow of the known exhaust gas. The recovered liquid 14 returns from the liquid reservoir 5 to the etching liquid container 10 through the trap 18. This has the advantage that the valve can be recovered without opening the valve as in the above-described embodiments.

FIG. 5 shows a fifth embodiment of the present invention. The same components as those in FIGS. 1 to 5 are designated by the same reference numerals. In FIG. 5, 19 and 21 are exhaust pipes,
Reference numeral 20 is a trap liquid retaining portion, 22 is a drain valve, and 23 is a condensed liquid from the pipe 19. Exhaust of a chemical liquid containing water, for example, or a chemical liquid of another type from the other passes through the pipe 19. According to this configuration, even if the liquid condensed in the exhaust pipe 19 flows from the merging portion F of the pipes 19 and 21 as shown by the arrow G, the trap liquid retaining portion 20 is provided below the pipe 21. Since it is possible to prevent the liquid from flowing into the liquid retaining portion 5, it is possible to collect the recovery liquid 14 having high purity. Here, the condensate 23 may be drained by appropriately opening the drain valve 22.

As shown in FIG. 6, the trap liquid retaining portion 20 is provided in a large-diameter portion where the exhaust pipe 21 is coaxially connected to the exhaust pipe 2, and the condensate 23 accumulated is drained by a drain valve 22. You may do it. By doing so, the piping space can be made smaller than in the fifth embodiment.

In all of the above embodiments, the pipe rising from the liquid reservoir 5 is vertical, but it may be diagonally above.

In the above description, the heated etching solution is taken as an example, but it is effective for any mist or vapor generation source such as oil mist from a vacuum pump.

[0020]

As described above, according to the present invention, when the exhaust gas passes through the throttle valve, the throttle valve is provided in the horizontal portion of the exhaust pipe or in the downward pipe, and the liquid retaining portion is provided downstream of the throttle valve. Due to the temperature drop due to the adiabatic expansion of the liquid, it condenses into a liquid, and the liquid is collected and collected in the liquid retaining part provided on the downstream side, so it can be installed easily and inexpensively, and requires no power cost. Instead, it is possible to reduce the carry-out of the chemical liquid by exhausting.

[Brief description of drawings]

FIG. 1 is an overall configuration diagram showing a first embodiment of the present invention.

FIG. 2 is an overall configuration diagram showing a second embodiment of the present invention.

FIG. 3 is an overall configuration diagram showing a third embodiment of the present invention.

FIG. 4 is a configuration diagram of a main part showing a fourth embodiment of the present invention.

FIG. 5 is an overall configuration diagram showing a fifth embodiment of the present invention.

FIG. 6 is another configuration diagram of the trap liquid retaining portion in the fifth embodiment of the present invention.

[Explanation of symbols]

 1, 2, 4 Exhaust pipe 5 Liquid retaining part 6 Exhaust fan 7 Recovery valve 9 Throttle valve 10 Etching liquid container 11 Etching device main body

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number in the agency FI Technical indication location H01L 21/306 J 9278-4M (72) Inventor Kei Kuroda 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric Sangyo Co., Ltd.

Claims (3)

[Claims] 1. A throttle valve is provided in a horizontal portion of an exhaust pipe, one end of which is connected to a mist or vapor generation source, and the other end thereof is connected to an exhaust means, or a pipe directed downward, and a liquid reservoir is provided downstream of the throttle valve. A mist or vapor condensing / recovering device having a portion, a pipe rising from the liquid storage portion, and liquid recovery means provided in the liquid storage portion. 2. A throttle valve is provided in a horizontal portion of an exhaust pipe, one end of which is connected to a mist or vapor generation source, and the other end thereof is connected to an exhaust means, or a pipe directed downward, and a liquid reservoir is provided downstream of the throttle valve. Section is provided, the pipe is erected upward from the liquid storage portion, liquid recovery means is provided in the liquid storage portion, and the merging portion is provided before the upwardly erected pipe is joined with the exhaust pipe from another. A mist or vapor condensing and recovery device that is equipped with a trap liquid reservoir that blocks the liquid that flows into the pipe that has been set up. 3. The mist or vapor condensing and collecting apparatus according to claim 1, wherein the liquid collecting means is a pipe with an exhaust backflow prevention trap provided between the mist or vapor generating source and the liquid reservoir.