JPH06199418A - Carrier - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a carrier device that can keep products and other equipment clean without generating turbulence in the flow of clean air. [Structure] The transport device (A) has a substantially trapezoidal cross section,
The substantially trapezoidal parallel surface is parallel to the traveling direction of the transfer device, and the long side (A1) of the substantially trapezoidal parallel surface is the main loading / unloading side of the work. Further, a rounded portion (B2) is formed at the tip of the transport device (B) in the traveling direction. Further, the front surface and the rear surface with respect to the traveling direction of the transfer device (C) are the intake surfaces (C2), and the exhaust holes are provided in the lower part.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention cleans a work such as a cassette (hereinafter simply referred to as "work") for storing a semiconductor wafer or the like in a process of manufacturing a semiconductor wafer, a magnetic disk, an optical disk, a compact disk, a liquid crystal or the like. The present invention relates to a carrier device suitable for carrying under various environments.

[0002]

2. Description of the Related Art Conventionally, for example, a semiconductor wafer transfer apparatus used in a semiconductor factory comprises a traveling body, an arm portion connected to the traveling body, and a chuck portion for holding a cassette containing a semiconductor wafer. A function of gripping and opening a cassette containing semiconductor wafers at a delivery port provided in each manufacturing apparatus for multiple processes, and transporting a cassette containing a semiconductor wafer from a delivery port to a predetermined position of a manufacturing device in another process. It has a function to do. In addition, a so-called clean room in which the semiconductor wafer transfer device runs is
In general, clean air is ejected from the ceiling, flows down, and is exhausted from under the floor, so that the fine particles that have generated dust are quickly discharged by this air flow. However, when the semiconductor wafer transfer device itself has a complicated shape or travels at a high speed while the semiconductor wafer transfer device is running, a turbulent flow is generated in the clean air flow due to the running operation of the semiconductor wafer transfer device. Therefore, this turbulent flow has a disadvantage that dust adheres to the surface of the semiconductor wafer surface as well as the surface of the equipment near the traveling path.

[0003]

DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, and provides a conveying device capable of keeping products and other equipment clean without generating turbulence in the flow of clean air. The purpose is to do.

[0004]

In order to achieve the above object, the first aspect of the present invention is such that the cross-sectional shape of the transfer device is substantially trapezoidal, and the substantially trapezoidal parallel surface is parallel to the traveling direction of the transfer device. In addition, the gist is that the long side of the substantially trapezoidal parallel surface is configured as the main loading / unloading side of the work.

Further, the gist of the second invention is that, in the first invention, a rounded portion is formed at a tip end portion in the traveling direction of the conveying device.

Further, the gist of the third invention is that the front surface and the rear surface with respect to the traveling direction of the conveying device are the intake surfaces and the exhaust holes are provided in the lower part.

[0007]

According to the first aspect of the present invention, the cross-sectional shape of the transfer device is substantially trapezoidal, the parallel surfaces of the trapezoid are parallel to the traveling direction of the transfer device, and the long sides of the parallel trapezoidal parallel surfaces are set. Since the side is configured as the main loading and unloading side of the work, it is possible to reduce the occurrence of turbulence with respect to the flow of clean air on the main loading and unloading side of the work, and carry the work while keeping the product and other equipment clean.

Further, according to the second aspect of the present invention, since the rounded portion is formed at the front end of the transfer device in the traveling direction, the boundary layer peeling position at the front end of the transfer device deviates to the rear, so that the main part of the work is The turbulent flow with respect to the clean air flow on the carry-in and carry-out side is effectively prevented.

Further, according to the third aspect of the present invention, when the carrier device travels, air is sucked from the front surface and the rear surface of the carrier device to prevent the generation of turbulence with respect to the flow of the clean air.

The first to third aspects of the present invention are intended to prevent the generation of turbulence with respect to the flow of clean air, and do not conflict with each other. Therefore, it is possible to more effectively prevent the occurrence of turbulence with respect to the flow of clean air by using the inventions in combination as needed.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the illustrated embodiments. FIG. 1 is a conceptual diagram of a cross section of a carrier device according to the first to third inventions, and FIG. 2 shows an air flow simulation in the cross section direction of each carrier device. The analysis conditions of the air flow simulation shown in FIG. 2 are as follows. -Traveling device running speed: 1 m / s-Air suction speed from front and rear faces of the carrying device: 0.
4 m / s

FIGS. 1 and 2A show a carrying device A which is an embodiment of the present invention. The carrying device A has a substantially trapezoidal cross-sectional shape, and a substantially trapezoidal parallel surface is formed. The long side A1 of the substantially trapezoidal parallel surfaces is configured to be the main loading / unloading side of the work so as to be parallel to the traveling direction of the transfer device.
In this case, as shown in FIG. 2 (a), a slight separation of the boundary layer occurs at the tip, and the growth of the boundary layer causes the long side A1 of the substantially trapezoidal parallel surfaces, that is, the main loading / unloading side of the work. It can be seen that there is a turbulent flow region at a small amount. Needless to say, it is not necessary to limit the loading and unloading of the work to the long side A1 of the substantially trapezoidal parallel surfaces. For example, at a place where turbulence does not occur in the clean air flow. When carrying in and out a work, the carrying device can be configured to carry in and carry out the work from the other surface of the carrying device.

FIGS. 1 and 2B show a carrier device B which is an embodiment of the second invention. The carrier device A of the embodiment of the first invention is improved to a carrier device. A rounded portion B2 is formed at the tip of the traveling direction of B. Here, the main side of the work is loaded on the long side B1 of the substantially trapezoidal parallel surface,
The configuration on the unloading side is similar to the above example. In this case, as shown in FIG. 2B, the separation position of the boundary layer is shifted rearward as compared with the transfer device A, so that the long side B1 of the substantially trapezoidal parallel surfaces, that is, the main loading of the work,
It can be seen that the turbulent flow area on the unloading side is decreasing. The curvature of the rounded portion B2 is set in a range of about 0.2 to 3 times that shown in this embodiment, so that the long side B1 of the substantially trapezoidal parallel surfaces, that is, the main part of the work. It is possible to more effectively prevent the generation of turbulence with respect to the flow of clean air on the carry-in and carry-out sides.

FIGS. 1 and 2 (c) show a carrying device C which is an embodiment of the present invention. The front and rear surfaces of the carrying device C with respect to the running direction are intake surfaces C2, and the An exhaust hole (not shown) is provided. Here, it is similar to the above example that the long side C1 of the substantially trapezoidal parallel surface is configured as the main loading / unloading side of the work. In this case,
As shown in (c), it can be seen that the turbulent flow area on the long side C1 of the substantially trapezoidal parallel surfaces, that is, the main loading / unloading side of the work, is smaller than that of the transfer device B. It should be noted that this embodiment is based on the third embodiment of the carrier device B which is an embodiment of the second invention.
Although the invention is applied, the third invention alone is sufficiently effective to prevent the generation of turbulence with respect to the flow of clean air. For example, the transverse cross-sectional shape of the transfer device is substantially rectangular. It is also possible to apply to.

Next, FIGS. 3 to 5 show embodiments in which the first to third inventions are combined and embodied more concretely. FIG. 3 is an external perspective view of the transfer device as seen from the work loading / unloading side, that is, the side of various manufacturing devices (not shown), and FIG. 2 is an external perspective view as seen from the opposite side, and FIG. 3 is a robot. It is an external perspective view of a part. The transfer device covers the robot 1, a robot unit including a traveling unit 1, an elevating unit 2 provided on the upper portion of the traveling unit 1, an arm unit 3 connected to the elevating unit 2, and a chuck unit 5 for gripping a work 4, and the robot unit. , A cover 6 that forms the outline of the transport device.

The traveling unit 1 is guided on a rail 7 installed so as to connect facilities such as manufacturing apparatuses for a plurality of processes, and travels in the arrow direction by pulling a traveling drive unit (not shown). Is configured. The elevating part 2 is provided on the upper part of the traveling body 1 and includes an elevating part drive motor 21, a timing belt 22, a speed reducer 23, elevating part links 24 and 25, and an elevating frame 26. The arm portion 3 is connected to the elevating frame 26 of the elevating portion 2 and is composed of an arm driving motor 31, arm links 32 and 33, and a tilting motor 34. The chuck portion 5 for gripping the work 4 is provided at the tip of the arm portion 3 and includes a chuck member 51 and a locking claw 52. The cover 6 covers the entire robot unit including the lifting unit 2, the arm unit 3, and the chuck unit 5, and is integrated with the traveling unit 1.
On the top of the cover 6, a fan 61a with a top filter,
A front filter fan 61b and a rear filter fan 61c are provided, and exhaust holes 62a, 6 are provided at the bottom.
2b and 62c are provided. The cover 6 has a substantially trapezoidal cross-sectional shape with rounded corners, the parallel surface is parallel to the traveling direction of the transfer device, and the long side of the parallel surface is used for loading the work. By setting the loading / unloading side, the loading / unloading side of the work is made substantially flat, and the loading / unloading side of the work is provided with a door 63 which can be opened / closed by a slide method or the like. In addition,
Although FIG. 1 shows a state in which the door 63 is opened, the size of the opening 64 when the door 63 is opened depends on the size of the work 6
Can be appropriately changed according to the size and the like.

A case in which the transfer device configured as described above is used as a semiconductor wafer transfer device will be described below. In this case, as the work 4, a cassette in which a semiconductor wafer (not shown) is vertically inserted is used. Work 4
Are aligned in a state in which semiconductor wafers are housed in a delivery port provided in each manufacturing apparatus for a plurality of steps. The semiconductor wafer transfer device is stopped on the front surface of the delivery port, the door is opened, the lifting / lowering unit drive motor 21 is driven, and the arm unit 3 is moved through the timing belt 22, the speed reducer 23, the lifting / lowering unit links 24 and 25, and the lifting / lowering frame 26. Adjust the level of the arm drive motor 3
1 and the tilting motor 34 to drive the arm part link 3
The chuck portion 5 is moved to the delivery port of the work 4 via 2, 33, and the work 4 is moved by the chuck member 51 and the locking claw 52.
The arm drive motor 31 and the tilting motor 3
4 is driven to store the chuck portion 5, that is, the workpiece 4 inside the cover 6 via the arm portion links 32 and 33, and then the door is closed. After that, the semiconductor wafer transfer apparatus travels while being guided by the travel drive device while being guided on the rail 7 to the manufacturing apparatus for the next step, and the same operation as described above is repeated. In the above-mentioned usage, only the step of accommodating the works 4 aligned in the delivery port provided in the manufacturing apparatus inside the semiconductor wafer transfer device has been described. However, the work 4 housed inside the semiconductor wafer transfer device is explained. Even when the product is discharged to the delivery port provided in the manufacturing apparatus, it is carried out by sequentially operating the elevating part 2, the arm part 3, and the chuck part 5. This operation is almost the same as the step of accommodating the work 4. Therefore, the description is omitted.

In a so-called clean room in which the semiconductor wafer transfer apparatus runs, generally, clean air is blown out from the ceiling, flows down, and is exhausted from under the floor. The airflow is quickly discharged, but when the semiconductor wafer transfer apparatus travels, it is covered by the cover 6 and by the fans 61b and 61c with filters provided on the front and rear surfaces with respect to the traveling direction of the cover. By inhaling the air on the front and rear surfaces of the cover 6, the cover 6 has a substantially trapezoidal cross-sectional shape with rounded corners at the tip of the traveling direction, and the parallel surfaces are parallel to the traveling direction of the conveying device. In addition, by setting the long side of the parallel surface as the loading / unloading side of the work, the loading / unloading side of the work of the cover 6 is made substantially flat. Since, a semiconductor wafer carrier,
In particular, the air flow around the loading and unloading side of the work becomes a laminar flow state along the cover 6, and prevents the generation of turbulence with respect to the flow of clean air due to the traveling of the semiconductor wafer transfer apparatus.

Here, the case where the transfer apparatus of the present invention is used as a semiconductor wafer transfer apparatus has been described, but the object of the present invention is to manufacture not only semiconductor wafers but also magnetic disks, optical disks, compact disks, liquid crystals and the like. It can be used in a wide range to convey a work such as a cassette for accommodating a target product in a clean environment under a clean environment.

[0020]

According to the present invention, the cross-sectional shape of the carrier is substantially trapezoidal, the parallel surfaces of the trapezoid are parallel to the traveling direction of the carrier, and the long side of the substantially trapezoidal parallel surfaces. Since the side is configured as the main loading and unloading side of the work, it is possible to reduce the generation of turbulence with respect to the clean air flow on the main loading and unloading side of the work, while keeping the product and other equipment clean. Can be transported.

Further, according to the second aspect of the present invention, since the rounded portion is formed at the front end of the transfer device in the traveling direction, the boundary layer peeling position at the front end of the transfer device deviates to the rear, so that the main part of the work is moved. It is possible to more effectively prevent the occurrence of turbulence with respect to the clean air flow on the carry-in and carry-out sides.

Further, according to the third aspect of the present invention, when the carrier device travels, air is sucked from the front surface and the rear surface of the carrier device so that the air flow around the carrier device becomes substantially laminar along the carrier device. It is possible to prevent the generation of turbulence with respect to the flow of clean and clean air, and it is possible to convey a work while keeping products and other equipment clean.

[Brief description of drawings]

FIG. 1 is a conceptual diagram of a cross section of a carrying device of the present invention.

FIG. 2 is a diagram showing an air flow simulation in a cross-sectional direction of the transport device of the present invention.

FIG. 3 is an external perspective view of a carrying device embodying the present invention.

FIG. 4 is an external perspective view of the carrying device embodying the present invention seen from the other direction.

FIG. 5 is an external perspective view of a robot unit used in the transfer device embodying the present invention.

[Explanation of symbols]

 A transfer device A1 main loading and unloading side of work B transfer device B1 main loading and unloading side of work B2 rounded part C transfer device C1 main loading and unloading side of work C2 intake surface 1 traveling body 2 lifting part 3 arm 4 Work 5 Chuck 6 Cover 61a Fan with upper filter 61b Fan with front filter 61c Fan with rear filter 62a Exhaust hole 62b Exhaust hole 62c Exhaust hole

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tetsuo Ito 292 Yoshida-cho, Totsuka-ku, Yokohama, Kanagawa Prefecture Hitachi Imaging Information Systems (72) Inventor Mamoru Seki, 3-11-1, Shimozakabe, Amagasaki-shi, Hyogo Within Hitachi Kiden Kogyo Co., Ltd.

Claims (3)

[Claims] 1. A cross-sectional shape of a transfer device is substantially trapezoidal, a substantially trapezoidal parallel surface is parallel to the traveling direction of the transfer device, and the long side of the substantially trapezoidal parallel surface is the main part of the work. A carrying device characterized by being configured on the carry-in and carry-out side. 2. The carrier device according to claim 1, wherein a rounded portion is formed at a front end portion of the carrier device in a traveling direction. 3. A carrier device, wherein a front surface and a rear surface with respect to a traveling direction of the carrier device are intake surfaces, and an exhaust hole is provided in a lower portion.