JPH062004Y2 - Cylinder for vacuum equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a vacuum equipment cylinder for driving equipment in a vacuum chamber by liquid pressure such as air pressure or hydraulic pressure, and in particular, intermediately stops a piston at an arbitrary position. It relates to a cylinder that can.

(Prior Art) FIG. 2 is a schematic cross-sectional view showing the structure of a vacuum equipment cylinder provided with a conventional intermediate stop mechanism. A piston 33 is accommodated in the cylinder 35, and the compressed air is alternately sent from the air supply / exhaust port 34 and the air supply / exhaust port 36 to operate the piston 33 forward and backward (left and right in the figure). The piston rod 31 is kept airtight by the vacuum bellows 32, and moves forward and backward with the operation of the piston 33 to drive the equipment in the vacuum chamber. In such a vacuum equipment cylinder, since it is necessary to hold the piston rod 31 at an intermediate stop position, an annular permanent magnet 38 is attached to the piston 33, and a magnetic proximity switch 37 is installed at a desired intermediate stop position of the piston 33. It is attached to the outer circumference of 35. When stopping the piston rod 31 in the middle, the piston 3
When the permanent magnet 38 comes closest to the magnetic proximity switch 37 due to the movement of 3, the magnetic proximity switch 37 is turned on. Therefore, the signal is sent to the solenoid valves 39 and 40 to close the solenoid valve. When the inflow of air into the air supply / exhaust port 34 and the air supply / exhaust port 36 is cut off, the piston 33 is held at the equilibrium position, and as a result, the piston rod 31 stops at the intermediate position.

(Problems to be Solved by the Invention) Such a conventional intermediate stop mechanism for a vacuum equipment cylinder shuts off the inflow of air into the supply / exhaust ports 34 and 36,
Since the piston 33 is indirectly stopped in the middle by maintaining the air pressures in front of and behind the piston 33 in a balanced manner, a minute leak from the cylinder 35, the supply / exhaust ports 34, 36, etc. causes an accurate intermediate stop position for a long time. There was a problem that it was very difficult to hold.

Further, since the positioning of the intermediate stop position is an indirect method using the permanent magnet 38 attached to the piston 33 and the magnetic proximity switch 37, it is difficult to precisely position the intermediate stop position, and it takes a long time to adjust the position. There was also a problem.

(Object of the Invention) The present invention solves the problems of the prior art, stops the piston at a desired intermediate stop position with high accuracy, and even if it is stopped for a long time, the position does not change, and the intermediate stop It is an object of the present invention to obtain a vacuum equipment cylinder that can perform position adjustment very easily.

(Means for Solving Problems) Means for achieving the above-mentioned object are a main cylinder containing a main piston for driving a device in a vacuum chamber,
A sub-cylinder arranged in series behind the main cylinder and accommodating a sub-piston, and an intermediate shaft which penetrates the partition and is hermetically slidable in the axial direction of the main cylinder is provided in the rear partition of the main cylinder. , The sub-piston rod has an adjusting means at the tip end portion for finely adjusting the expansion and contraction in the rod axial direction, and one end of the intermediate shaft inside the main cylinder can contact the rear end of the main piston. An outer end of the end main cylinder has a structure capable of abutting the tip of the adjusting means.

(Operation) In the above configuration, when the sub-cylinder operates and the sub-piston is held at the forward position, the sub-piston causes the intermediate shaft (stopping means) to enter the main cylinder to restrict the retracted position of the main piston and to move the main piston to the intermediate position. Stop at the stop position. When the sub-cylinder holds the sub-piston at the retracted position, the restriction on the retracted position of the main piston is released. The adjusting means finely adjusts the amount of the intermediate shaft (stopping means) entering the main cylinder to accurately and precisely adjust the intermediate stop position of the main piston.

(Embodiment) FIG. 1 is a vertical sectional view of an embodiment of the present invention. The main piston 3 is housed in the main cylinder 5, and the compressed air is alternately sent from the air supply / exhaust port 4 and the air supply / exhaust port 6 to operate the main piston 3 forward and backward (left and right in the figure). The piston rod 1 is kept airtight by the vacuum bellows 2 and moves forward and backward according to the operation of the main piston 3 to drive the equipment in the vacuum chamber.

A sub-cylinder 13 accommodating the sub-piston 12 is provided in series behind the main cylinder 5, and the supply / exhaust port 1
4. By alternately sending compressed air to the air supply / exhaust port 15, the sub piston 12 is operated back and forth, and the sub piston rod 11 is moved back and forth. The inner diameter of the sub-cylinder 13 is wider than the inner diameter of the main cylinder 5,
Is larger than the diameter of the main piston 3, and the stroke in the forward / backward direction of the sub piston 12 is set smaller than that of the main piston 3. An intermediate shaft 9 for restricting the retracted position of the main piston 3 is installed in the center of the rear partition wall 17 of the main cylinder 5 so as to be slidable back and forth. The tip of the intermediate shaft 9 can come into contact with the rear end of the main piston 3, and the rear end of the intermediate shaft 9 has an adjusting bolt 1 provided at the tip of the sub-piston rod 11.
It is possible to contact the tip of 0. The O-ring 16 is a sealing material for keeping the main cylinder 5 airtight.
The adjusting bolt 10 is screwed into the tip portion of the sub-piston rod 11, and the entire length can be adjusted by screwing it into the sub-piston rod 11.

In the above configuration, when the intermediate stop of the piston rod 1 is not required, the sub-piston 12 is stopped at the end portion in the backward direction, and compressed air is alternately introduced into the supply / exhaust ports 4 and 6 to cause the main air to flow. The piston 3 is operated. First
The figure shows this state, and the main piston 3 can move forward and backward to the full stroke in the main cylinder 5.

When the piston rod 1 is to be stopped intermediately at a desired position, when the main piston 3 reaches the end portion in the forward direction, compressed air is introduced from the air supply / exhaust port 15 to stop the sub piston 12 at the end in the forward direction. Let At this time, the tip of the adjusting bolt 10 provided on the sub-piston rod 11 abuts on the intermediate shaft 9 and pushes it into the main cylinder 3 to advance it. When the main piston 3 is operated in the backward direction in this state, the main piston 3
The rear end portion contacts the front end portion of the intermediate shaft 9, and stops at that position. When releasing the intermediate stop, the sub-piston 12 is operated in the backward direction, and when the intermediate shaft 9 is released, the main piston 3 pushes the intermediate shaft 9 in the backward direction and reaches the end in the backward direction in the main cylinder 5. Stop.

In the above embodiments, the driving method using air pressure has been described, but the present invention can be applied to all other methods using fluid pressure such as hydraulic pressure.

(Effect of the Invention) In the present invention, the retraction of the main piston can be mechanically restricted by the stopping means such as the intermediate shaft provided between the main piston and the sub piston, and the intermediate stop can be performed at any position. Therefore, the piston rod can be stopped with high precision, and the intermediate stop position can be maintained for a long time, and the intermediate stop position can be finely adjusted by a simple operation, which has many advantages. .

[Brief description of drawings]

FIG. 1 is a vertical sectional view of an embodiment of the present invention, and FIG. 2 is a vertical sectional view of a conventional vacuum equipment cylinder. 1 ... Piston rod, 2 ... Vacuum bellows, 3 ...
Main piston, 4 ... Supply / exhaust port, 5 ... Main cylinder, 6 ... Supply / exhaust port, 9 ... Intermediate shaft, 10 ...
Adjustment bolt, 11 ... sub-piston rod, 12 ... sub-piston, 13 ... sub-cylinder, 14 ... supply / exhaust port, 15 ... supply / exhaust port, 16 ... O-ring.

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Nobuyuki Takahashi Nobuyuki Takahashi 5-8-1 Yotsuya, Fuchu-shi, Tokyo Nichiden Anelva Co., Ltd. (56) Reference JP-A-50-127071 (JP, A) JP-A-55 -94008 (JP, A)

Claims (1)

[Scope of utility model registration request] 1. A main cylinder containing a main piston for driving equipment in a vacuum chamber, and a sub-cylinder arranged in series behind the main cylinder and containing a sub-piston, wherein a rear partition wall of the main cylinder is provided. An intermediate shaft that penetrates the partition wall and is airtightly slidable in the axial direction of the main cylinder is provided, and a tip end portion of the sub-piston rod has an adjusting means capable of fine adjustment of expansion and contraction in the rod axial direction. A vacuum equipment having a structure in which an inner end of the main cylinder can contact a rear end of the main piston and an outer end of the other end of the main cylinder can contact a tip of the adjusting means. Cylinder.