JPH06201012A - 移送機構と、移送機構を備えた位置合わせ装置と、位置合わせ装置を備えたリソグラフィック装置 - Google Patents

移送機構と、移送機構を備えた位置合わせ装置と、位置合わせ装置を備えたリソグラフィック装置

Info

Publication number
JPH06201012A
JPH06201012A JP5220561A JP22056193A JPH06201012A JP H06201012 A JPH06201012 A JP H06201012A JP 5220561 A JP5220561 A JP 5220561A JP 22056193 A JP22056193 A JP 22056193A JP H06201012 A JPH06201012 A JP H06201012A
Authority
JP
Japan
Prior art keywords
transfer mechanism
coupling member
threads
thread
thread system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP5220561A
Other languages
English (en)
Japanese (ja)
Inventor
Adrianus G Bouwer
ゲラルドゥス バウウァー アドリアヌス
Frank B Sperling
ベルンハード スペールリング フランク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of JPH06201012A publication Critical patent/JPH06201012A/ja
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H15/00—Gearings for conveying rotary motion with variable gear ratio, or for reversing rotary motion, by friction between rotary members
    • F16H15/01—Gearings for conveying rotary motion with variable gear ratio, or for reversing rotary motion, by friction between rotary members characterised by the use of a magnetisable powder or liquid as friction medium between the rotary members
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K49/00—Dynamo-electric clutches; Dynamo-electric brakes
    • H02K49/10—Dynamo-electric clutches; Dynamo-electric brakes of the permanent-magnet type
    • H02K49/102—Magnetic gearings, i.e. assembly of gears, linear or rotary, by which motion is magnetically transferred without physical contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/08—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and reciprocating motion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2062—Arrangements for driving the actuator
    • F16H2025/2075—Coaxial drive motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S74/00—Machine element or mechanism
    • Y10S74/04—Magnetic gearing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/19—Gearing
    • Y10T74/19642—Directly cooperating gears
    • Y10T74/19698—Spiral
    • Y10T74/19702—Screw and nut
    • Y10T74/19712—Threadless
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements
    • Y10T74/20354—Planar surface with orthogonal movement only

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Transmission Devices (AREA)
  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
JP5220561A 1992-08-12 1993-08-12 移送機構と、移送機構を備えた位置合わせ装置と、位置合わせ装置を備えたリソグラフィック装置 Withdrawn JPH06201012A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL92202483.1 1992-08-12
EP92202483 1992-08-12

Publications (1)

Publication Number Publication Date
JPH06201012A true JPH06201012A (ja) 1994-07-19

Family

ID=8210844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5220561A Withdrawn JPH06201012A (ja) 1992-08-12 1993-08-12 移送機構と、移送機構を備えた位置合わせ装置と、位置合わせ装置を備えたリソグラフィック装置

Country Status (5)

Country Link
US (1) US5456134A (2)
JP (1) JPH06201012A (2)
KR (1) KR950003660A (2)
DE (1) DE69306192T2 (2)
TW (1) TW235275B (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018521619A (ja) * 2015-06-16 2018-08-02 スカイトラン インコーポレイテッド 磁気リニア駆動装置およびシステム

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19512080C2 (de) * 1994-04-05 1997-07-03 Smc Kk Elektrisches Stellglied
DE19527005A1 (de) * 1994-09-26 1996-03-28 Koyo Machine Ind Co Ltd Magnetische Bewegungsspindeleinrichtung
US5634390A (en) * 1994-11-19 1997-06-03 Ckd Corporation Rotary actuator
EP0903003B1 (en) * 1996-04-30 2005-03-30 Foster-Miller, Inc. Rotary torque-to-axial force energy conversion apparatus
JPH1131615A (ja) * 1997-05-12 1999-02-02 Sumitomo Special Metals Co Ltd 磁気ねじ
US6129704A (en) 1997-06-12 2000-10-10 Schneider (Usa) Inc. Perfusion balloon catheter having a magnetically driven impeller
JPH11300557A (ja) * 1998-04-15 1999-11-02 Thk Co Ltd 移動テーブル装置
US6279490B1 (en) * 1999-10-08 2001-08-28 Etec Systems, Inc. Epicyclic stage
EP1283385A1 (en) * 2000-05-05 2003-02-12 Amphora Limited Liability Company Contactless magnetic spiral gear and variants thereof
DE10040277C2 (de) * 2000-08-14 2003-08-28 Lat Suhl Ag Kreuztisch zur Bereitstellung von Bewegungen in einem zweidimensionalen Koordinatensystem
CA2508450A1 (en) * 2002-12-12 2004-06-24 A.K. Technical Laboratory, Inc. Elongation drive device of stretch rod in stretch blow molding machine and bottom-type lifting drive device
WO2006113855A2 (en) * 2005-04-19 2006-10-26 State Of Oregon Acting By & Through The State Board Of Higher Edu. On Behalf Of Oregon State Univ. Methods and apparatus for power generation
US20100117366A1 (en) * 2007-03-02 2010-05-13 Kenneth Rhinefrank Methods and apparatus for power generation
US20090251258A1 (en) * 2008-04-08 2009-10-08 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Magnetic helical screw drive
US9010205B2 (en) * 2011-01-20 2015-04-21 Pacific Bearing Company Linear slide having integral carriage and nut assembly
US11598400B2 (en) 2020-11-19 2023-03-07 Pacific Bearing Corporation Nut with flexible fingers and self-aligning members
WO2022218524A1 (en) * 2021-04-14 2022-10-20 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. Magnetically coupled drive arrangement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7003056A (2) * 1970-03-04 1971-09-07
JPS5449458A (en) * 1978-09-04 1979-04-18 Toshiba Corp Feed apparatus
SU1219850A1 (ru) * 1983-02-15 1986-03-23 Всесоюзный научно-исследовательский институт электромеханики Магнитна винтова передача
NL8601095A (nl) * 1986-04-29 1987-11-16 Philips Nv Positioneerinrichting.
JP2777131B2 (ja) * 1987-11-09 1998-07-16 旭精工株式会社 回転運動を直線運動に変換する機構
US4995277A (en) * 1988-05-31 1991-02-26 Ken Yanagisawa Two dimensional drive system
SU1620743A1 (ru) * 1988-09-29 1991-01-15 Московский Институт Электронного Машиностроения Винтова магнитна передача
NL8902471A (nl) * 1989-10-05 1991-05-01 Philips Nv Tweetraps positioneerinrichting.
JPH0552248A (ja) * 1990-12-10 1993-03-02 Ebara Corp 送りねじ機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018521619A (ja) * 2015-06-16 2018-08-02 スカイトラン インコーポレイテッド 磁気リニア駆動装置およびシステム
US11532977B2 (en) 2015-06-16 2022-12-20 Skytran, Inc. Magnetic linear drive device and system

Also Published As

Publication number Publication date
TW235275B (2) 1994-12-01
DE69306192D1 (de) 1997-01-09
DE69306192T2 (de) 1997-05-28
KR950003660A (ko) 1995-02-17
US5456134A (en) 1995-10-10

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Legal Events

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Effective date: 20001031