JPH06201623A - Method and apparatus for inspecting defect at joint of different materials - Google Patents
Method and apparatus for inspecting defect at joint of different materialsInfo
- Publication number
- JPH06201623A JPH06201623A JP5001138A JP113893A JPH06201623A JP H06201623 A JPH06201623 A JP H06201623A JP 5001138 A JP5001138 A JP 5001138A JP 113893 A JP113893 A JP 113893A JP H06201623 A JPH06201623 A JP H06201623A
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- metal
- monitor
- defective
- inspection object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
(57)【要約】
【目的】 簡単な構成で、検査対象物の接合不良部を検
出する方法及び装置を得る。
【構成】 金属3と金属3より熱伝導の悪い金属4の接
合面6に接合不良部7があるか否かを検査するに際し、
金属4の側から高輝度光源10により対象部位を加熱
し、対象部位を赤外線撮像装置1、2により撮像し、モ
ニタ8に対象部位の温度分布像を得る。モニタ8の像に
は、接合不良部7に相当する位置に他と温度分布の異な
る領域7aが現われる。
(57) [Abstract] [Purpose] To obtain a method and device for detecting a defective joint portion of an inspection object with a simple configuration. [Structure] When inspecting whether or not there is a defective joint portion 7 on the joint surface 6 of the metal 3 and the metal 4 having poorer thermal conductivity than the metal 3,
The target site is heated from the metal 4 side by the high-intensity light source 10, the target site is imaged by the infrared imaging devices 1 and 2, and a temperature distribution image of the target site is obtained on the monitor 8. In the image of the monitor 8, a region 7a having a different temperature distribution from the other appears at the position corresponding to the defective bonding portion 7.
Description
【0001】[0001]
【産業上の利用分野】本発明は、異種材料を接合した検
査対象物の接合不良部を、非破壊で検出する接合不良検
査方法及び接合不良検査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bonding failure inspection method and a bonding failure inspection apparatus for nondestructively detecting a bonding failure portion of an inspection object to which different materials are bonded.
【0002】[0002]
【従来の技術】従来の非破壊による検査方法には、超音
波探傷法、磁気探傷法、放射線透過法などが行われてい
る。このうち、接合不良部を正確に検出する場合は、放
射線透過法が主に行われている。放射線透過法は、一様
な強さの放射線を検査対象物に照射し、対象物の接合不
良部または構造により生ずる放射線吸収の差を利用し、
透過線量の変化を対象物の後方に置いたフィルムに記録
して、検査対象物の接合不良部を調べる方法である。2. Description of the Related Art Conventional non-destructive inspection methods include ultrasonic flaw detection, magnetic flaw detection and radiation transmission. Of these, the radiation transmission method is mainly used to accurately detect a defective joint. The radiation transmission method irradiates the inspection object with radiation of uniform intensity and utilizes the difference in radiation absorption caused by the defective joint or structure of the object,
It is a method of recording the change in the transmitted dose on a film placed behind the object and examining the defective joint portion of the object to be inspected.
【0003】[0003]
【発明が解決しようとする課題】このような放射線透過
法は、検査の際に放射線を用いるために放射線障害防止
設備が必要である。そして1断面毎に、フィルムに記録
するため、検査対象物の接合不良部を詳細に検査するた
めには、ぼう大な量のフィルムと検査に要する時間が必
要であり、また、場合によっては、検査もれの事態も起
こり得る。Such a radiation transmission method requires radiation damage prevention equipment to use radiation during inspection. Since each cross section is recorded on a film, a large amount of film and a time required for the inspection are necessary for inspecting the joint failure portion of the inspection object in detail, and in some cases, The situation of missing inspection may occur.
【0004】そこで本発明は、上記従来技術の問題点を
解決するために成されたもので、簡単な構成で、検査対
象物の接合不良部を検出する方法及び装置を提供するも
のである。Therefore, the present invention has been made to solve the above-mentioned problems of the prior art, and provides a method and apparatus for detecting a defective joint portion of an inspection object with a simple structure.
【0005】[0005]
【課題を解決するための手段】本発明は熱源により検査
対象物を加熱し、異種材料の熱伝導率の違いを利用し
て、接合不良部を赤外線撮像装置で検出し、モニタに表
示するものである。According to the present invention, an object to be inspected is heated by a heat source, and by utilizing the difference in thermal conductivity of different materials, a defective bonding portion is detected by an infrared imaging device and displayed on a monitor. Is.
【0006】[0006]
【作用】熱源により加熱中の検査対象物はほぼ一様な温
度分布になる。また、加熱後の熱伝導過程においては、
検査対象物は、一様な温度分布をもつことになる。とこ
ろが、検査対象物に接合不良部が存在すると接合不良部
のところで、熱伝導が悪くなり、一様な温度分布でなく
なる。The object to be inspected being heated by the heat source has a substantially uniform temperature distribution. Also, in the heat conduction process after heating,
The inspection object will have a uniform temperature distribution. However, if there is a defective joint in the inspection object, the heat conduction becomes poor at the defective joint, and the temperature distribution is not uniform.
【0007】本発明はこのような現象を利用し、加熱後
の検査対象物から放射される赤外線を赤外線撮像装置で
撮像し、赤外映像をモニタ上に表示することによって、
モニタ上の画像から検査対象物の接合不良状態を検出す
るようにしたものである。By utilizing such a phenomenon, the present invention takes an image of infrared rays radiated from an object to be inspected after heating with an infrared imaging device and displays an infrared image on a monitor.
It is configured to detect the defective joint state of the inspection object from the image on the monitor.
【0008】[0008]
【実施例】図1は、本発明の実施例である。検査対象物
3〜7は、金属3と金属3より熱伝導の悪い金属4の接
合面6に接合不良部7があるものとする。このような検
査対象物3〜7を検査する場合、必要により、検査面に
赤外線反射防止膜5を設ける。赤外線反射防止膜5とし
ては、例えば、黒体塗料や、黒体テープ等を用いること
ができる。黒体テープとは、放射率の高い膜に、粘着物
を塗布してテープ状にしたもので、塗料など直接検査対
象物に塗布できない場合などに使われる。接合不良検査
装置は、検査対象物3〜7を加熱する高輝度光源10を
有する。高輝度光源10で加熱された検査対象物3〜7
の表面は、赤外線撮像装置本体1と撮像レンズ2とによ
り撮像されてモニタ8にその温度分布が表示される。光
源10により、検査対象物3〜7を加熱すると、金属3
は、金属4より熱伝導率が良いので光源10により加熱
された金属4の熱は、金属3にすみやかに熱伝導する。
この際、光源10により検査対象物3〜7の表面はほぼ
均一に熱せられているので、モニタ8には一様な温度分
布の表面の像が現われる。光源10による所定時間の加
熱後光源10を消灯する。この際、検査対象物3〜7に
接合不良部7が存在すると、金属4の接合不良部7の周
囲で熱伝導が悪くなり、同周囲だけが接合不良部7の存
在しないところに対して温度が高くなり、一様な温度分
布でなくなる。したがって、加熱後の検査対象物3〜7
から放射される赤外線を赤外線撮像装置本体1とレンズ
2で撮像し、赤外映像をモニタ8上に表示していると、
接合不良部7に相当した領域が領域7aのように周囲と
区別されて表示される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the present invention. It is assumed that the inspection objects 3 to 7 have a defective joint portion 7 on the joint surface 6 of the metal 3 and the metal 4 having poorer thermal conductivity than the metal 3. When inspecting such inspection objects 3 to 7, if necessary, an infrared reflection preventing film 5 is provided on the inspection surface. As the infrared reflection preventing film 5, for example, a black body paint, a black body tape or the like can be used. A black body tape is a tape with a high emissivity film coated with an adhesive, and is used when it cannot be directly applied to the inspection target such as paint. The bonding failure inspection device has a high-intensity light source 10 that heats the inspection objects 3 to 7. Inspection object 3 to 7 heated by high-intensity light source 10
The surface of is imaged by the infrared imaging device body 1 and the imaging lens 2, and its temperature distribution is displayed on the monitor 8. When the inspection object 3 to 7 is heated by the light source 10, the metal 3
Has a better thermal conductivity than the metal 4, so that the heat of the metal 4 heated by the light source 10 is quickly conducted to the metal 3.
At this time, since the surfaces of the inspection objects 3 to 7 are heated almost uniformly by the light source 10, an image of the surface having a uniform temperature distribution appears on the monitor 8. After heating by the light source 10 for a predetermined time, the light source 10 is turned off. At this time, if the defective bonding portion 7 exists in the inspection objects 3 to 7, the heat conduction is deteriorated around the defective bonding portion 7 of the metal 4, and only the surrounding area has a temperature lower than that where the defective bonding portion 7 does not exist. Becomes higher and the temperature distribution is not uniform. Therefore, the inspection object 3 to 7 after heating
When infrared rays radiated from the infrared imaging device main body 1 and the lens 2 are imaged and an infrared image is displayed on the monitor 8,
A region corresponding to the defective joint portion 7 is displayed separately from the surroundings like a region 7a.
【0009】観察者は、モニタ8に表示された画像の異
常(領域7aの現出)により、検査対象物3〜7に接合
不良部7のあることを知ることができる。接合不良部7
のないときには、検査対象物3〜7の表面は一様な温度
分布のまま冷えていくので、モニタ8に表示された画像
に異常は見当らない。このように、上記実施例によれ
ば、簡単な構成で、検査対象物3〜7の接合不良部7を
検出することができる。An observer can know that there is a defective joint 7 in the inspection objects 3 to 7 by the abnormality of the image displayed on the monitor 8 (the appearance of the area 7a). Bad joint 7
When there is not, since the surfaces of the inspection objects 3 to 7 are cooled with a uniform temperature distribution, no abnormality is found in the image displayed on the monitor 8. As described above, according to the above-described embodiment, the defective joint portion 7 of the inspection objects 3 to 7 can be detected with a simple configuration.
【0010】なお、検査対象物3〜7の加熱のための光
源10は、上記実施例のように、所定時間の加熱後消灯
してもよいが、検査対象物3〜7の加熱後、検査対象物
3〜7から遠ざけてもよい。要は、金属4の加熱の度合
よりも金属4の放熱の度合が大きければ良いので、光源
10の輝度を減少させても同様である。また、加熱のた
めの光源10は、他の熱源、例えばドライヤーの如きも
のに置き換えることができる。The light source 10 for heating the inspection objects 3 to 7 may be turned off after heating for a predetermined time as in the above embodiment, but after the inspection objects 3 to 7 are heated, the inspection is performed. You may keep away from the objects 3-7. The point is that the degree of heat radiation of the metal 4 is larger than the degree of heating of the metal 4, and the same applies even if the brightness of the light source 10 is reduced. Further, the light source 10 for heating can be replaced with another heat source, for example, a dryer.
【0011】さらに、あらかじめ検査対象物3〜7の種
類がわかっているときは、光源10の照射時間をタイマ
ーで制御することにより、検査対象物3〜7が十分に加
熱される最低の時間に自動的に設定するようにできる。
勿論、検査対象物3〜7と光源10との距離もパラメー
タになるので、上記自動設定される時間が一つの場合に
は、光源10は検査対象物3〜7から所定の距離に置か
なければならないが、光源10と検査対象物3〜7の距
離に応じて上記自動設定される時間が変化するように構
成することもできる。Further, when the types of the inspection objects 3 to 7 are known in advance, the irradiation time of the light source 10 is controlled by a timer so that the inspection objects 3 to 7 can be heated to the minimum time. It can be set automatically.
Of course, since the distance between the inspection object 3 to 7 and the light source 10 is also a parameter, if the above-mentioned automatically set time is one, the light source 10 must be placed at a predetermined distance from the inspection object 3 to 7. Although not required, the automatically set time may be changed according to the distance between the light source 10 and the inspection objects 3 to 7.
【0012】また、モニタ8による赤外映像の表示は、
温度に対応した白黒の濃淡で表わしたり、温度に対応し
た色で表わしたりできる。そして、モニタ8による観察
は、検査対象物3〜7の加熱が終了して、金属4から金
属3への放熱が開始されてから行なうので、加熱が終了
した時点でその旨のメッセージをモニタ8内に表示する
ことが好ましい。The display of the infrared image on the monitor 8 is
It can be represented by black and white light and shade corresponding to temperature, or by color corresponding to temperature. Since the observation by the monitor 8 is performed after the heating of the inspection objects 3 to 7 is finished and the heat radiation from the metal 4 to the metal 3 is started, a message to that effect is displayed on the monitor 8 when the heating is finished. It is preferable to display inside.
【0013】さらに、以上の実施例ではモニタ8の像を
観察することで接合不良部を検出していたが、赤外線映
像信号を画像処理することにより接合部を検出するよう
にすれば、検査を自動化することもできる。このとき
は、検査対象物3〜7と接合不良検査装置1、2、10
とを相対的に2次元的にステップ移動することにより、
検査対象物3〜7の接合不良部を2次元的に検査するこ
ともできる。ステップ移動による撮像レンズ2の光軸の
検査対象物3〜7上での位置を位置検出器で検出してお
くことにより(ステップ移動する部材の絶対位置をモニ
タしたり、駆動系のモータの基準位置からの回転量をモ
ニタすることで可能)、画像処理によって見つけた接合
不良部をそのときの上記光軸の位置とを対応させること
により、2次元的な接合不良部のマップを作成すること
ができる。Further, in the above-described embodiments, the defective joint portion is detected by observing the image on the monitor 8. However, if the joint portion is detected by image processing the infrared image signal, the inspection can be performed. It can also be automated. At this time, the inspection objects 3 to 7 and the bonding failure inspection devices 1, 2, 10
By relatively and stepwise moving two and
It is also possible to two-dimensionally inspect the defective joint portions of the inspection objects 3 to 7. By detecting the position of the optical axis of the imaging lens 2 on the inspection object 3 to 7 by the step movement with the position detector (the absolute position of the member moving in the step can be monitored, or the reference of the drive system motor can be used). It is possible by monitoring the amount of rotation from the position), and a two-dimensional map of the defective bonding portion is created by associating the defective bonding portion found by image processing with the position of the optical axis at that time. You can
【0014】以上の説明より明らかなように、本発明の
実施例においては、接合不良検査装置側の金属が他の金
属よりも熱伝導が悪い(熱が伝わりにくい)ことが必要
であるが、本発明は、この熱伝導に係る条件が満足され
れば、検査対象物は異種金属以外にも、金属とガラス
(ガラスの方が金属よりも熱伝導が低いから、ガラスが
接合不良検査装置側にくる必要がある)、金属とプラス
テック等にも十分適用可能である。As is clear from the above description, in the embodiment of the present invention, it is necessary that the metal on the side of the bonding failure inspection device has poorer heat conduction than other metals (heat is hard to be transmitted). According to the present invention, if the condition related to the heat conduction is satisfied, the inspection object is not only the dissimilar metal but also the metal and the glass (the glass has a lower heat conduction than the metal, so that the glass has a bonding failure inspection device side). It is also applicable to metals and plastics.
【0015】[0015]
【発明の効果】以上のように、本発明によれば、熱源に
より、検査対象物を加熱し、異種材料の熱伝導率の違い
を利用して、接合不良部を検出することが出来、短時間
で容易かつ安価で検査をすることができる。As described above, according to the present invention, the object to be inspected can be heated by the heat source, and the bonding defect can be detected by utilizing the difference in thermal conductivity of different materials. The inspection can be done easily and inexpensively in time.
【図1】本発明による装置の実施例を示す図である。FIG. 1 shows an embodiment of the device according to the invention.
1 赤外線撮像装置本体 2 撮像レンズ 3 金属A 4 金属B 5 赤外線反射防止膜 6 接合部 7 接合不良部 8 モニタ 10 光輝度光源 DESCRIPTION OF SYMBOLS 1 Infrared imaging device main body 2 Imaging lens 3 Metal A 4 Metal B 5 Infrared antireflection film 6 Bonding part 7 Bonding failure part 8 Monitor 10 Light intensity light source
Claims (2)
導の悪い材料の側から熱源により加熱し、異種材料の熱
伝導率の違いを利用して接合不良部を赤外線撮像装置で
検出することを特徴とする接合不良検査方法。1. An infrared imaging device detects a defective joint by utilizing a difference in thermal conductivity of different materials by heating an inspection object to which different kinds of materials are joined from the side of a material having poor heat conduction. A bonding failure inspection method characterized by the above.
する熱源と、前記熱源により加熱された検査対象物を撮
像する赤外線撮像装置と、前記赤外線撮像装置により撮
像された赤外線映像を表示するモニタとを備え、前記検
査対象物の異種材料の熱伝導率の違いを利用して接合不
良部を前記モニタに表示することを特徴とする接合不良
検査装置。2. A heat source for heating an inspection object to which different kinds of materials are joined, an infrared imaging device for imaging the inspection object heated by the heat source, and an infrared image taken by the infrared imaging device is displayed. A bonding failure inspection apparatus, comprising: a monitor, wherein the bonding failure portion is displayed on the monitor by utilizing a difference in thermal conductivity between different materials of the inspection object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5001138A JPH06201623A (en) | 1993-01-07 | 1993-01-07 | Method and apparatus for inspecting defect at joint of different materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5001138A JPH06201623A (en) | 1993-01-07 | 1993-01-07 | Method and apparatus for inspecting defect at joint of different materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06201623A true JPH06201623A (en) | 1994-07-22 |
Family
ID=11493092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5001138A Pending JPH06201623A (en) | 1993-01-07 | 1993-01-07 | Method and apparatus for inspecting defect at joint of different materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06201623A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013122414A (en) * | 2011-12-12 | 2013-06-20 | Honda Motor Co Ltd | Nondestructive inspection system |
| JP2017215258A (en) * | 2016-06-01 | 2017-12-07 | 新日鐵住金株式会社 | Method for measuring stress distribution |
| JP2025137319A (en) * | 2024-03-07 | 2025-09-19 | 梭特科技股▲分▼有限公司 | Semiconductor defect detection method using temperature difference contrast |
-
1993
- 1993-01-07 JP JP5001138A patent/JPH06201623A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013122414A (en) * | 2011-12-12 | 2013-06-20 | Honda Motor Co Ltd | Nondestructive inspection system |
| JP2017215258A (en) * | 2016-06-01 | 2017-12-07 | 新日鐵住金株式会社 | Method for measuring stress distribution |
| JP2025137319A (en) * | 2024-03-07 | 2025-09-19 | 梭特科技股▲分▼有限公司 | Semiconductor defect detection method using temperature difference contrast |
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