JPH062199U - Leak detection device for ceiling in clean room - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a scanning device for a clean room filter that reduces the number of workers, is easy to operate, and can be handled by anyone, and does not cause scanning omissions. [Structure] An inflow side opening 5a that opens to the filter F side with an opening area substantially equivalent to one section of a clean room ceiling having filters F, F ... Inflow side opening 5a
An air guide tube 5 having a discharge side opening 5c for discharging the air that has flowed in from it; and dust counters 7 and 7 that take in part of the air that has flowed in from the inflow side opening 5a and measure dust. The air guide tube 5 has an elevating part 5b, and can be vertically moved up and down by the pillar cylinders 4, 4, ....

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention is a clean room for investigating leaks caused by defective products of the high-performance / ultra-high-performance filters themselves installed in the ceiling of clean rooms and process defects such as mounting of filters and mounting of frames. Leakage detection device for ceiling.

[0002]

[Prior art]

 In a wide range of fields from the latest technological fields such as electronics and biotechnology to the fields of pharmaceuticals and food manufacturing, clean rooms that maintain high cleanliness by removing dust up to ultrafine particles are used. In order to maintain a high degree of cleanliness in the clean room, a leak test is conducted manually before the start of service in order to find out product defects of the filter itself, damaged parts due to construction installation, or construction defects. Conventionally, in the leak test, a scaffold such as a stepladder is installed in a clean room, and a conical dust intake tube with an inner diameter of about 10 mm connected to a dust counter (particle counter) is used. With the filter facing the front side of the filter, we manually searched for it on the zigzag at a speed of about 5 cm per second to find the defective part or the damaged part of the filter. In this case, when the leak test at one point in a narrow area is completed, it is necessary to re-establish a stepladder at the adjacent point and perform the leak test at the adjacent point.

Since the above-described scanning scan is performed in an upward posture, it requires a severe labor for the worker, and at the present time, it takes a lot of time for setup such as stepping up each time. Therefore, scanning with a self-propelled scanning robot is also performed in order to reduce the scanning work for the leak test. In this case, the suction tube used was substantially the same as that used manually.

[0004]

[Problems to be solved by the device]

 However, in the case of the above-mentioned manual scanning, at least two persons, that is, the person who scans and the person who monitors the dust meter, are required. It is impossible to perform 100% scanning, and there are problems such as partial scanning remaining. Further, even if scanning is performed using a scanning robot, the labor of workers is reduced, but the time required for scanning is not necessarily shortened because humans are replaced by robots. On the other hand, in addition to requiring specialized knowledge to operate the robot, it may take more time and effort than manpower for input operation for planned movement. In addition, since the manufacturing cost is high, the number of manufactured units is naturally limited, which requires a great deal of trouble in handling and maintenance in the event of a failure. In addition, robot supervisors were always needed to prevent scanning malfunctions.

On the other hand, in the conventional example, it takes a long time to detect a leak due to an improper mounting of the lighting or the sprinkler to the support frame between the support frame and the filter that partition one section of the ceiling.

Therefore, the main problem of the present invention is to reduce the number of workers, the operation is simple and can be handled by anyone, and the scanning device can perform reliable and efficient scanning with no scanning residue, and the manufacturing cost is low. Is provided.

[0007]

[Means for Solving the Problems]

 The above-mentioned problem is on a trolley that is movable on the floor surface; an inflow-side opening that opens to the filter side with an opening area that substantially corresponds to one section of a clean room ceiling having a filter group, and this inflow-side opening. This can be solved by providing an air guide tube having a discharge side opening that discharges air that has flowed in from the opening; and a dust counter that takes in part of the air that has flowed in from the inflow side opening and that measures dust. In this case, it is desirable to provide an elevating part that can move up and down in the upper part of the body of the air guide tube. Also, a measurement management data logger connected to the dust counter can be mounted on the trolley.

[0008]

[Action]

 In the present invention, the air is introduced through the filter panel to be measured by an air guide tube having an inflow side opening that opens to the filter side with an opening area substantially equivalent to one section of the clean room ceiling having the filter group. The clean air is taken into the air guide tube, a part of this clean air taken in is taken in by the dust intake tube, and the number of dust in the clean air is counted by the dust counter. The inflowing air is discharged from the discharge side opening at the other end of the air guide tube. In the present invention, in particular, since the inflow side opening is formed by opening to the filter side with an opening area substantially corresponding to one section of the clean room ceiling, one filter of clean air is blown into the air guide tube at a time. The work efficiency is increased because the leak is detected by taking into account. In terms of equipment, the trolley is basically provided with an air guide tube with a large opening area, so the manufacturing cost is low because it is simple, and the trolley travels along a certain traveling path. It can be handled by anyone without requiring complicated operations, and from a personnel perspective, by mounting a dust counter on the dolly, the trolley can be run and the dust counter can be monitored by itself. It can be carried out.

Further, by providing an elevating part which can be raised and lowered at the upper part of the body of the air guide tube, it is convenient when the device of the present invention is carried into the measurement target room through the door. In addition, by equipping the trolley with a data logger for measurement management that is connected to the dust counter, it is possible to later identify the section where leakage has occurred during traveling.

[0010]

【Example】

 Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the drawings. In FIG. 1, a leak detection device 1 according to the present invention is mounted on a trolley 2 having wheels 3, 3, ..., And is movable on the floor surface. When the floor surface is grating, the wheels 3, 3 ... Are preferably made of resin in order to reduce traveling vibration, and the wheels have a large diameter and are wide in order to cope with the gap in grating. Used. Four pillar cylinders 4, 4, ... Are erected on the carriage 2, and a baffle tube 5 is supported by the pillar cylinders 4, 4 ,. On the other hand, in the clean room ceiling, as shown in FIG. 3, a support frame 32 is suspended from a frame 30 via a frame suspension member 31, and the filters F, F are supported by the support frames 32, 32 ... A group is arranged. In this case, as shown in FIG. 4, the filter F is sealed with respect to the support filter 32 by the seal member 33, but leakage may occur due to improper construction of the sealing portion. Further, an illumination 34 and a sprinkler 35 are attached to the support frame 32. Even in this case, there is a possibility that leakage may occur from the installation location due to poor construction.

Therefore, the inflow side opening 5a of the air guide tube 5 in the present invention has an opening area substantially corresponding to one section of the clean room ceiling having the filters F, F ... Group, as shown in FIG. 3 in the embodiment. The support frame 32, 32 has an opening area corresponding to the area surrounded by the center lines of the support frames 32. The opening area can be configured to be larger than that of the example of FIG. 3, and as shown in FIG. 4, the opening area is narrowed so that the inflow side opening 5a of the air guide tube 5 can be formed. The size can be accommodated within the inner size L of the support frame 32, 32 so that it can directly contact the filter F. Therefore, the opening areas do not have to be exactly the same in relation to one section to be measured, and an area of the same degree is sufficient. Here, the size of the filter F is generally about 600 mm × 600 mm or 600 mm × 1200 mm, and the area of one filter usually constitutes “one section” in the present invention. The upper part of the body of the air guide tube 5 has a bellows structure covered with canvas or synthetic rubber to form an elevating part 5b. On the other hand, the air guide tube 5 has a discharge side opening 5c for discharging the air flowing in from the inflow side opening 5a at the other end side.

The strut cylinders 4, 4, ... Are driven by hydraulic pressure, air pressure, etc., respectively, and the tip end 4 of the cylinder is connected to the inflow side opening 5a and the elevating part 5b of the air guide tube 5 is formed. Therefore, the upper air guide tube 5A moves up and down.

In use, when the inflow side opening 5a of the air guide tube 5 is brought into contact with the lower surface of the support frame 32, lighting, or the like, the edge of the inflow side opening 5a is brought into contact with the support frame 32. A cushioning member such as resin or rubber may be provided in order to soften the contact and enhance the airtightness.

On the other hand, the lower air guide tube 5B below the elevating part 5b of the air guide tube 5 is bent into an arc shape, and the opening area is gradually narrowed toward the discharge opening 5c so that the incoming air is converged. . The discharge opening 5c is provided with dust intake tubes 6, 6 facing the suction air 6a facing the flow of the clean air flowing in from the inflow side opening 5a. The dust intake tubes 6, 6 are mounted on the carriage 2 Are connected to the dust counters (particle counters) 7 mounted on the. Part of the inflow air is collected by the dust intake tubes 6 and 6, and the number of dust particles in the inflow air is counted by the dust counter 7. The number of counters 7 to be installed may be one, but it is desirable to install two or more to improve accuracy. Further, the particle size to be measured of dust of each of the counters 7, 7 installed in plural units can be changed. Further, the counters 7 and 7 are connected to the data logger 8, convert the signals from the counters 7 and 7 and print and record them on a paper sheet, and the measured value exceeds the set upper limit value. In this case, an alarm can be issued to notify the worker and this abnormal section can be recorded.

Reference numeral 9 is a handle for pushing the carriage 2 and 10 is a control panel for the column cylinders 4, 4, ..., Dust counters 7, 7 and the data logger 8, and the dust count value and control state. It has a monitor to display.

When measuring dust, an operator moves the leakage detection device 1 to a measurement target position via the handle 9, and then operates the support cylinders 4, 4, ... to operate the inflow side opening 5a of the air guide tube 5. Is raised and the measurement for one section is performed in the state where it is brought close to or in contact with the support frame 32. When this measurement is completed, move to the next adjacent section to be measured and perform the measurement in that section.

In addition, at the time of measurement, as shown in FIG. 3, the measurement can be performed in a state in which the illumination 34 and the sprinkler 35 protruding from the surface of the filter F toward the room are separated to some extent (hereinafter, indirect measurement). Inhalation method). As described above, even when the air is separated from the filter F surface to some extent, the clean air flowing into the air guide tube 5 is narrowed by the discharge side opening 5c of the air guide tube 5, and the inflow side opening of the air guide tube 5 is reduced. Since the air resistance is increased as compared with 5a, the amount of air discharged from the outlet side opening 5c is smaller than the amount of air entering the air guide tube 5 from the inlet side opening 5a. Therefore, the air amount of the difference between the inflow air amount and the exhaust air amount comes to leak to the outside from the inflow side opening 5a as shown by the arrow, and forms a kind of air curtain, so that the adjacent filters F, F The dust measurement of the one section can be performed without any interference with. The separation distance between the filter F and the inflow side opening 5a is set within 200 mm.

Next, another example according to the present invention will be described in detail. FIG. 5 shows an example in which the indirect suction system is basically used, and the air guide tubes can be vertically moved up and down to correspond to the respective clean rooms having different ceiling heights. In FIG. 5, the carriage 12 is movable by wheels 13 mounted on the lower surface thereof, and a filter scanning device is mounted on the carriage 12. A support frame is assembled by the columns 14, 14 ... Standing on the carriage 12 and the cross members 18, 18 ..., and the air guide tube 15 is provided inside the support frame. The baffle tube 15 has an opening area substantially corresponding to one filter area (one section) of the filter groups F, F, ... Strung on the clean room ceiling, and opens toward the filter F on the ceiling. It has an inflow-side opening 15a and a discharge-side opening 15c for discharging the air that has flowed in from this inflow-side opening, and also has a self-standing elevating part 15b above the air guide tube 15. As the structure of the elevating part 15b, for example, an appropriate structure that is usually adopted can be adopted, such as a structure in which the link type elevating metal fittings are covered with canvas or resin. Although the discharge side opening 15c is discharged sideways in the illustrated example, the discharge side opening 15c may be opened in the inflow direction of clean air, that is, in the downward direction.

A dust intake tube 16 having a suction hole 16a facing the flow of the clean air flowing in from the inflow side opening 15a at the upper end is provided in the lower part of the air guide tube 15. The dust intake tube 16 is , Is connected to a counter (particle counter) 17 mounted on the carriage 12.

In the actual measurement, the elevating part 15b of the air guide tube 15 is adjusted up and down according to the ceiling height of the clean room, and the height position of the inflow side opening 15a at the upper end of the air guide tube 15 is set to the filter F. Positioned to have a distance from the surface. The spacing is 10 to 200 mm, preferably 30 to 100 mm. Once the air duct 15 has been adjusted up and down, the operator moves and scans the carriage 12 so that the inflow side opening 15a of the air duct 15 is sequentially moved to a predetermined position covering one filter on the ceiling for measurement. Is done.

[Example] A zigzag at a speed of about 5 cm per second with a dust intake tube having an inner diameter of about 10 mm, which is a conventional method, with its suction hole side facing the surface side of the high performance filter. The time required for measurement was compared between the method of measuring by scanning (scanning) above and the method of measuring by the scanning device according to the present invention. In the case of the conventional method, it took 4 to 5 minutes to measure one filter of 600 mm x 600 mm, but according to the device of the present invention, it can be shortened to 1 to 2 minutes. .

[0022]

[Effect of device]

 As described above in detail, according to the present invention, the handling is easy and anyone can operate, and the number of workers is sufficient. In addition, leakage of measurement is eliminated, and the dust measurement efficiency is significantly improved. In addition, it is advantageous in terms of equipment compared to a self-propelled scanning robot.

[Brief description of drawings]

FIG. 1 is an overall view of a scanning device according to the present invention.

FIG. 2 is an enlarged view of a main part of a discharge side opening of the air guide tube.

FIG. 3 is an explanatory view of one measurement mode according to the present invention.

FIG. 4 is an enlarged view of a main part in an example in which the inflow side opening size of the air guide tube is changed.

FIG. 5 is another example of the scanning device according to the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Scanning device, 2 ... Bogie, 3 ... Wheels, 4 ... Strut cylinder, 5 ... Air guide pipe, 5a ... Inflow side opening, 5b ... Elevating part, 5c ... Discharge side opening, 6 ... Dust intake tube, 7
… Dust counter, 8… Data logger

Claims (3)

[Scope of utility model registration request] 1. An inflow side opening that opens to the filter side with an opening area substantially corresponding to one section of a clean room ceiling having a filter group, and an inflow side from this inflow side opening on a trolley that is movable on the floor surface. Leakage of a ceiling in a clean room, characterized in that a wind guide tube having a discharge side opening for discharging the generated air; and a dust counter for taking a part of the air flowing in from the inflow side opening and measuring the dust are provided. Detection device. 2. The ceiling leak detecting device in a clean room according to claim 1, wherein an elevating part is provided at an upper part of the body of the air guide tube. 3. A ceiling leak detecting apparatus in a clean room according to claim 1, wherein a measurement management data logger connected to a dust counter is mounted on the carriage.