JPH06222013A - Surface optical inspection equipment - Google Patents

Abstract

PURPOSE: To provide a visible light inspecting apparatus which can detect and distinguish various kinds of cracks on the surface of an object. CONSTITUTION: This optically inspecting apparatus has three inspection channels to detect cracks of the surface in a selected region. A first optically inspecting channel 30 irradiates first light beam to the selected region of the surface at small incident angle to form a dark field reflected image and detect the scratches and fine particles. The second optically inspecting channel 80 irradiates diffused second light beam to the selected region to form a bright field reflected image to detect stains. The third optically inspecting channel 120 irradiates third light beam to the selected region at large incident angle to form a bright field reflected image to detect recesses and unevenness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the inspection of scratches on the surface of objects, and more particularly to a visible light inspection system for identifying a wide variety of scratches on a surface.

[0002]

The properties of the surface of an object play an important role in using the object in a wide variety of applications. perhaps,
Perhaps the most prominent example of surface scratches is the mirror. When light reflects off a flat, intact surface, the reflected image is identical to the incident image except that it is inverted. However, if there are scratches, ridges, or other visible scratches on the surface, the reflected image is distorted by those scratches. If the mirror is used in a less important place such as a medicine chest door, these small scratches are not a problem.
However, when the mirror is used in a very important place such as a mirror of a telescope, it is a problem even if the scratch is small. Therefore, mirror manufacturers, regardless of their use, strive to manufacture the mirrors so that the surface is not scratched.

Surface properties are very important, as are many other applications. For example, computers have magnetic hard disks used to store information. This magnetic hard disk is made by preparing a disk-shaped aluminum substrate and coating the surface thereof with a magnetic recording medium. The magnetic recording disk is mounted in an evacuated chamber mounted on a rotary drive. A magnetic read / write head is provided adjacent to the surface of the magnetic recording disk, and the disk is rotated to write information to the magnetic recording disk and read information from the disk.

Small scratches on the surface of a magnetic recording disk adversely affect its performance because the surface and the magnetic field adjacent to it are physically distorted. Types of scratches include, for example, surface waviness, depressions or bumps, scratches, particles and spots on the surface. These scratches may be due to the structure of the underlying aluminum disk and its method of manufacture, or due to the quality of the magnetic recording media coating on the aluminum disk. These scratches, even small ones, can significantly affect the read / write characteristics and the dynamic performance at rotation of the magnetic recording disk.

Manufacturers of magnetic recording disks carefully inspect the disks for the presence of surface scratches. The inspection is done not only to identify disks that need to be repaired or discarded, but also to improve manufacturing and process control schemes. Although direct visual inspection can identify some flaws, it is not always possible to always successfully identify all flaws that can adversely affect operational performance. For example, more advanced inspection systems such as the reflected light inspection system have been developed as disclosed in US Pat. No. 4,547,073.

Despite the importance of the problems associated with surface flaw detection and efforts made to solve them, current approaches do not provide a complete understanding of the surface and its flaws. Experience has shown that the system of the above U.S. patent can successfully detect undulations, small depressions and small ridges on the surface of a magnetic recording disk. However, most of the scratches, fine particles and stains cannot be satisfactorily detected. Some of these wounds are visible to the naked eye, but others are invisible. Moreover, the future of inspection technology depends on automating the tedious inspection with the naked eye, and it is not desirable to rely on the inspection with the naked eye.

Therefore, regarding other points, there is a demand for an improved inspection method for detecting scratches on a surface which is almost flat. This method must be able to identify all significant injuries. Such methods are preferably used by human inspectors or in conjunction with automated equipment. The present invention fulfills this need and has related advantages as well.

[0008]

SUMMARY OF THE INVENTION The present invention provides a surface inspection apparatus and method capable of identifying a wide variety of significant scratches in selected areas of a surface. The apparatus according to the preferred embodiment of the present invention incorporates all inspection functions into a single unit, allowing identification of all flaws in a selected area and recording of the relative position between them. The inspection method is based on optical inspection. The light source used in the preferred embodiment is a conventional broadband light source that is inexpensive and easy to use. There is no need for a coherent light source such as a laser, nor is it necessary to use expensive and complex image analyzers to form the basic image. On the other hand, the results obtained with the device according to the invention are suitable for real-time image formation and can also be recorded on videotape for later analysis. The versatility of the method of the present invention is very high.

The optical surface inspection apparatus according to the present invention comprises 3
It includes a unit having two inspection means. The first optical inspecting means injects the first light beam into the selected area of the surface at a low incident angle to form a dark field reflection image thereof and examines it.
The second optical inspection means makes the diffused second light beam incident on the selected region to form a bright-field reflection image and examines it. The third optical inspecting means injects the third light beam into the selected area at a high incident angle to form a bright field reflection image and examines it.

The first optical inspection means or channel preferably comprises a first illumination source for directing the spatially uniform first light beam to a selected area of the surface at a low angle of incidence, and the first light source. A first sensor, preferably a light sensitive camera, which forms a dark field reflection image of the light scattered by the beam. A first illumination source that produces a first light beam, preferably a xenon lamp, and a first illumination source that directs the first light beam to a selected area at a low angle of incidence. And an optical integrator that uniformly disperses the first light beam over the selected area.

The first illumination source optics is preferably the first
An end of the first light source receives the first light beam from the first light source and a second end of the first light waveguide directs the first light beam to the optical integrator; A mirror for focusing the second end of the one optical waveguide and an optical filter for filtering the first light beam to pass a selected wavelength of light. The optical integrator can be formed by arranging a plurality of lenses in an array in the first light beam, and each of the lenses forms a part of the first light beam in a part of the selection area. Focus on top. The second optical inspection means or channel includes a second illumination source for directing the spatially diffused second light beam to the selected area;
A second sensor for forming a bright field reflection image by the second light beam. The second illumination source is a second light source, preferably a xenon lamp, which produces a second light beam;
Includes second illumination source optics for directing the second light beam toward the selected area and an optical diffuser for diffusing the second light beam. The first and second light sources may be constituted by the same lamp by providing a mirror and an appropriate shutter. The incident angle of diffused light is preferably relatively high, and may be vertical. However, it is desirable that the second illumination source be tiltable over a range of tilt angles to optimize visibility of the scratches due to diffused light.

The second illumination source optics is preferably the first
A second end for directing the second light beam from the second light source and a second end for directing the second light beam to the optical diffuser.
Of the second optical waveguide and the second optical beam of the first optical waveguide of the second optical waveguide.
A mirror for focusing at the end of the optical path and an optical filter for filtering the second light beam to pass selected wavelengths of light. The second sensor is preferably a photosensitive camera, preferably arranged along a vertical line with respect to the selected area. In the preferred method, the first sensor and the second sensor are the same camera or other type of sensor, but this typically uses the first and second channels sequentially rather than simultaneously. Because. However, in other embodiments, separate sensors may be provided and the first and second channels may be active at the same time. In this case, the wavelengths of the light sources used are different in order to avoid interference between the first and second channels.

The third optical inspection means or channel includes a third illumination source that directs the third light beam to the selected area at a high angle of incidence, and a third bright field reflection image formed by the third light beam. 3 sensors. The third optical inspection means is preferably that disclosed in US Pat. No. 4,547,073, which is incorporated herein by reference.

The optical inspection channel is preferably incorporated into a single unit capable of inspecting selected areas of the surface with all three channels. The three channels are arranged such that each optical inspection means can inspect the selected area sequentially or simultaneously without moving the position of the selected area. The first channel is particularly useful for detecting scratches and fine particles. The second channel is useful for detecting stains on the surface. The third channel is useful for detecting surface waviness, depressions and ridges. The surface to be inspected is preferably mounted on a turntable below the unit so that the turntable can be rotated slowly during inspection. Examination of the dark field with the first examination channel produces particularly useful results when the selected area passes through the field of view.

The present invention represents an important advance in the field of surface inspection technology. The present invention conveniently tests for the presence of a wide variety of scratches on a surface.

The present invention will be described in detail below with reference to the accompanying drawings.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT FIG. 1 shows an optical inspection apparatus 20 in the form of a unit used to inspect an area 22 on a surface 24. Surface 2
The body of 4 is preferably supported on a turntable 26 so that this area 22 can be passed in a controlled manner through the field of view of the inspection device. The inspection device 20 incorporates three optical inspection means or channels, the structure of these three channels being shown in FIG. This configuration will be described first, and then the mode of operation of the optical inspection channel.

First optical inspection means or channel 3
0 utilizes dark field reflection of a light beam incident on surface 24 at a low angle of incidence. First preferably a xenon lamp
Light source 32 generates light. A xenon lamp is preferred because it can produce a wide range of light output from the ultraviolet to the infrared. Therefore, a wide range of illumination light wavelengths can be generated by selecting an appropriate filter.
The light from the first light source 32 is reflected by the elliptical mirror 34.
Directed to a light energy splitter that selectively controls the intensity of two different light beams. A half mirror 36 is preferable as the optical energy splitter. Various techniques can be used to control the amount of energy into the reflected and transmitted light beam, including the use of non-reflective coatings and gray filters.

A part of the light is reflected by the half mirror 36 as the first light beam 38 and reaches the first end 40 of the first optical waveguide 42. This first end is located at the focal point of the ellipse defined by the half mirror 34. The first optical waveguide 42 is preferably a light pipe formed of a plurality of optical fibers. The intersection of the first light beam 38 between the half mirror 36 and the first optical waveguide 42 is
An optical filter 44 for selecting a wavelength for illuminating a selected region, a shutter 46 for opening and closing the first optical inspection channel 30, and an optical for optimizing the sensitivity of the first light beam 38. Attenuator 48.
Select area 22 via first optical inspection channel 30
The wavelength and intensity of the light that illuminates the wound affects the visibility of the wound, and the present invention allows control and selection of these parameters.

Since the transmission of the first light beam 38 inside the optical inspection device 20 is performed by the first optical waveguide 42,
It is not necessary to place the light source near the illuminated area. At the second end of the first optical waveguide 42, the first light beam 38 is directed to an optical integrator 52, which is also mounted within the housing 54. The optical integrator 52 and the housing 54 are arranged such that the first light beam 38 is incident on the surface 24 at a low angle of incidence, preferably about 17 ° to about 25 °. If the incident angle is large, the dark field effect cannot be maintained. At small angles of incidence, it is impossible to maintain illumination uniformity due to the cosine effect.

As described above, since the incident angle of the first light beam 38 is small, without the optical integrator 52, the intensity of light passing through the selected area 22 is non-uniform due to the cosine effect and the difference in the focal position of the light beam. Becomes That is, the housing 5
4, the light intensity is relatively high in the region 22 closest to 4, while the light intensity is relatively low in the region 22 farthest from the housing 54. This non-uniformity of light intensity is not preferable because it hinders the evaluation of surface scratches.

The optical integrator 52 includes the optical waveguide 4
By splitting the light beam emanating from two into a plurality of individual beams of equal intensity, the spatial uniformity of the first light beam 38 reaching the selected area 22 is improved. Collimating lens 5
6, the individual light beams are focused together towards the selected area 22. Optical integrator 52 is preferably a plurality of individual lenses arranged in an array within first light beam 38. Each lens focuses a relevant portion of the first light beam 38 at a respective location on the array, and each array is focused by collimating lens 56 onto selected area 22.
In the presently preferred embodiment, optical integrator 52 is a 3 × 3 array of nine lenses. As a result, the intensity of the light beam 38 that illuminates the selected area 22 is much more uniform than if the optical integrator 52 were not used. The preferred optical integrator uses the well known "fly eye" lens.

The first light beam 38 is directed to the surface 24 of the region 22.
As it interacts with, it reflects most of its light at an angle equal to the angle of incidence. If there are no scratches on the surface,
All light is reflected. However, if there are scratches on the surface, those scratches will scatter a small portion of the light at a scattering angle that differs from the angle of incidence. This measurement of scattered light is called dark field measurement. In the case of the present invention, a first sensor 58, which is preferably a camera using a charge coupled device, is arranged to receive this dark field image. Focusing means is provided if necessary. In this case, the collimating / focusing lens 59 focuses the dark field image and the lens 60 focuses the dark field image on the sensor 58.

Second optical inspection means or channel 8
0 illuminates surface 24 (in an embodiment of the invention) with a normal angle of incidence using diffused light. However, the angle of incidence can be any value. The second optical inspection channel 80 includes a second light source 82. In this design, the second light source 82 is the same as the first light source 32, but it is more common to use a separate light source. The second light source 82 is preferably a xenon lamp. The light from the second light source 82 is directed by the elliptical mirror 34 to a light energy splitter, here a half mirror 36. The portion of the light that passes through the half mirror 36 becomes the second light beam 84. An optical filter 86 and a shutter 88 are arranged in the optical path of the second light beam 84 to have the same function as the optical filter 44 and the shutter 46 with respect to the first light beam 38.

By locating the first end 90 of the second optical waveguide 92 at the focal point of the elliptical mirror 34, the second
Of the light beam 84 of the first end 90. The second light beam 84 passes through the optical waveguide 92 and exits the second end 94 within the diffused light source housing 96. In the example shown, this second end 94 is arranged parallel to the surface 24 and travels in a direction perpendicular to the surface 24 when the second light beam 84 is reflected by the prism 98 at an angle of 90 °. . (A light pipe, an optical fiber or a mirror can be equivalently used instead of the prism 98). Second
Light beam 84 of the diffuser, in this case two diffusers 10.
Pass 0,102. The resulting diffused second
Light beam 84 is incident on region 22 of surface 94 under inspection.

When the diffused second light beam 84 is reflected by the surface 24, a portion of the reflected light is sensed by the second sensor. In this preferred embodiment, the second sensor is the same camera as the first sensor 58. This same camera can be used for both the first channel 30 and the second channel 80, since the two channels are used at different times. Of course, the second sensor can be provided separately if the channels are activated simultaneously.

Third optical inspection means or channel 1
20 illuminates surface 24 with focused light at high angles of incidence, typically about 80 to 90 degrees. This third
Optical inspection channel 120 of U.S. Pat.
It is preferably that disclosed in 7,073, which is known in the art. The components of this third optical inspection channel are briefly described below, but for a complete description of these components and their operation, see this patent. The third optical inspection channel 120 includes a third light source 122. Third light source 12
The third light beam 124 from 2 is focused on the surface 24 by the lenses 126, 59, so that the third light beam 12
4 enters at a high incident angle. A high angle of incidence is preferred because the reflected image is distorted by the viewing angle. If the image is distorted too much, it will be impossible to determine the exact location of the flaw on the surface.

The third light beam 124 is reflected from the surface 24 at the same angle as the angle of incidence to form a bright field image and the lens 5
Pass through 9, 126, 128. This light beam passes through a controllable spatial filter lens 128 and is detected by a third sensor, which is preferably a third camera 130. While it is easy to combine the functionality of the first and second sensors, it is preferred that the third sensor be a separate sensor.

The outputs of the sensors 58 and 130 are sent to the controller 150. The operator uses this controller 15
0 selects which of the first, second or third channels, or their combination, is activated at any given moment, and thus the output of any of the sensors 58, 130 to the monitor 152. Select whether to display. The controller 150 also controls the operating functions of the inventive device 20, such as shutter position, light intensity, angle of incidence, turntable 26 and spatial filter.

2-4 show the components of the first optical inspection channel 30 in connection with a contrast mechanism for visualizing scratches on the surface 24, in this case the magnetic recording disk 28. With reference to FIG. 2, most of the energy of the first light beam 38 reflects off the surface 24 to form a first reflected light beam 38 '. Some of this energy is scattered by small scratches, such as a scratch, to form a scattered beam 62. The scattered beam 62 has lenses 59, 6
It passes 0 and is detected by the first sensor 58.

FIG. 3 is a plan view showing the relationship between the first light beam 38 and the magnetic recording disk 28. The first light beam 38 is collimated to simultaneously illuminate half of the magnetic recording disk 28. The other part of the magnetic recording disk 28 is the magnetic recording disk 2 on the turntable 26.
It can be seen by rotating 8.

The contrast mechanism for visualizing the flaw by the first optical inspection channel 38 is shown in FIG. The scratches on the surface 24 show maximum contrast when illuminated at low angles of incidence such that they are at right angles to the uniform collimated light beam 38. Turn the turntable 26 to rotate the surface 2
4 is illuminated by a stationary light beam 38, the scratch mark A at its particular rotational position.
(Or a portion of the curved scratch) is perpendicular to the first light beam 38, as can be seen from the plan view. In FIG. 4, the scratch A is not perpendicular to the first light beam 38,
As indicated by the vector S, the contrast in the night vision is relatively low. Further rotation causes the scratch A to come to position A ', where it is at right angles (or nearly right) to the light beam 38. At this position, the scratch A'is illuminated by the light beam 38 at a low angle of incidence, so that the best visible vector S'in the dark field image is obtained.

Since the scratches on surface 24 are oriented in any direction, it is important to illuminate and check a large field of view, which in the preferred embodiment is close to approximately half the disk area. It is necessary to illuminate the large area uniformly, not because of the non-uniformity of the illumination, but because of the scratch-like nature of the feature, it causes a change in the light intensity. Optical integrator 52 assists in providing this uniform low incidence angle illumination over a large area.

Looking at the output signal of the first optical inspection channel 30 through the first sensor 58, a region 22 of the surface
The background is dark because most of them have no significant scratches that scatter the incident light. Therefore, it is called the dark field. Even if the scratch A rotates into the field of view, it cannot be clearly seen if the angle formed by the first light beam 38 is significantly different from 90 °. When it further rotates to approach the right-angled position A ', the scratch becomes clear and can be visually recognized. Upon further rotation, the scratches again become non-orthogonal with respect to the light beam 38 and are obscured. Thus, part of the method of observing flaws involves manipulating the changes in contrast by rotating or changing the direction of various portions of the surface within the illuminated area. It is often easier for human vision to perceive changes in features than constant intensity light, and moving the illuminated area makes the observable scratches clearer by illuminating the first channel. Will help you.

A texture line 66 may be visible on the surface 24 of the magnetic recording disk 28, but it is important to distinguish the scratch A from the texture line. This texture line is a fine feature of the surface created by the metallization of the disc and is visible through the coating of the disc. As shown in FIG. 3, since the texture line 66 extends substantially in the circumferential direction, it is substantially parallel to the light beam 38 at the center of the visual field. The use of optical integrator 52 and lens 56 helps to form an image in which the texture lines are not visible but the scratches appear.
The optical integrator 52 has multiple beams, this 3 × 3
The preferred example of optical integrator 52 in FIG. 2 forms nine beams, but their directions are slightly offset from each other. Lens 56 aligns these individual beams to form beam 38. However, as a result of this slight misalignment still present, the texture line 66 is obscured in the dark field over the entire half of the illuminated disc, as schematically illustrated by some of the beams in FIG.

The second optical inspection channel 82 illuminates the surface 24 with diffused light. FIG. 5 illustrates a contrast mechanism that visualizes otherwise dark stain-like flaws that are otherwise transparent. Diffused light enters the illuminated region 22. Unlike the collimated light beam 38, this diffused light is not in the collimated state. The optical diffusers 100, 102 diffuse the light so as to illuminate the surface 24 uniformly. Diffuse light exhibits high reflectivity when a perfectly reflective surface is present, as indicated by numeral 104, for example. Assuming, for example, that there are specks that exhibit some spectral absorption, such as the dark specks shown by numeral 106, their reflectivity is low. Therefore, due to this stain, the image formed by the surface has a contrast due to the reflection of diffused light.

The third optical inspection channel 120 forms a contrast image of scratches such as surface waviness, depressions and ridges by the mechanism shown in US Pat. No. 4,547,073. The embodiment of FIG. 1 is intended to operate the first and second channels sequentially rather than simultaneously. Figure 7
And 8 show a variant in which three optical test channels are activated simultaneously. FIG. 7 is more schematic in that the details of the various optical inspection channels have been omitted except for their modifications, and corresponds to FIG.

Referring to the elevation view of FIG. 7 and the plan view of FIG. 8, the first light source 32 illuminates the surface 24 and the dark field image is passed by the first sensor 58 via the wavelength bandpass filter 64. To be seen. A second light source within the housing 96 illuminates the surface 24 with diffused light, the image of which is viewed by the second sensor 110 through the second wavelength bandpass filter 112. (The second sensor 110 and filter 112 are not shown in this figure as they are behind the first sensor 58 and filter 64 of FIG. 7, but are shown in the plan view of FIG. 8). Since it is not possible for both sensors 58, 110 to be exactly vertical with respect to the area under examination, there will be slight distortion due to defocusing of the image. However, this slight distortion is acceptable if simultaneous observation is desired.

The wavelength bandpass filters 64, 112 are selected to pass different wavelengths so that the first sensor 58 produces a dark field reflection image of one wavelength and the second sensor 110 produces another. A reflected image of diffused light of a wavelength is formed. A wavelength band pass filter 132 that passes another wavelength band is arranged in front of the third sensor 130. Filters 64, 112, 132 isolate their respective sensors from the light of other parts of the optical system. In this way, three channels can be activated simultaneously if desired.

The present invention was implemented as a unit having the components shown in FIG. 1 and a general configuration. Observing the surface of a magnetic recording disk placed on a rotating turntable in any of the three inspection modes at the operator's discretion by activating or deactivating a light source and opening and closing a shutter. Is possible. As a result of extensive research, it has been found that the device is operable as described above and that each optical inspection means is sensitive to the various scratches often found on such discs. The use of the third channel at high angles of incidence allows successful formation of images of surface undulations, depressions and ridges, but this alone results in images of other significant scratches such as scratches, particles on the surface and spots. Is impossible to form. The first and second optical inspection means enable the detection of these other flaws, while the first optical inspection means allows the formation of images of scratches and fine particles, and also the second optical inspection. The means most successfully forms the image of the blot. All three of these optical inspection means can be used on the same area without moving the disc from one device to another, thus facilitating registration of scratches and general features of the disc. Can be done.

Although the present invention has been described in detail with reference to specific embodiments, various modifications and changes in design can be made by those skilled in the art without departing from the spirit and scope of the present invention. Therefore, the present invention should not be limited by the description other than the appended claims.

[0042]

[Brief description of drawings]

FIG. 1 is a schematic elevational view of an optical inspection device according to the present invention.

FIG. 2 is a schematic elevational view showing a portion of a first optical inspection channel.

FIG. 3 is a schematic plan view showing a part of the first optical inspection channel shown in FIG.

FIG. 4 is a schematic diagram of a contrast mechanism of a first optical inspection channel.

FIG. 5 is a schematic elevational view showing a portion of a second optical inspection channel.

6 is a graph for explaining the operation of the apparatus of FIG.

FIG. 7 is a schematic elevational view showing another embodiment of the optical inspection device of the invention.

FIG. 8 is a plan view of the embodiment of FIG.

[Explanation of symbols]

 20 optical inspection device 22 selected area 24 surface 26 turntable 30 first optical inspection means or channel 32 first light source 34 elliptical mirror 36 half mirror 38 first light beam 42 first optical waveguide 44 Optical filter 46 Shutter 52 Optical integrator 54 Housing 58 First sensor 60 Lens 69 Collimating / focusing lens 80 Second optical inspection means or channel 82 Second light source 84 Second light beam 86 Optical filter 88 Shutter 92 Second optical waveguide 42 98 Prism 100, 102 Light diffuser 120 Third optical inspection means or channel 122 Third light source 124 Third light beam 128 Spatial filter lens 130 Third camera 150 Controller

Claims (21)

[Claims] 1. An optical inspection device for a surface, comprising: first optical inspection means for forming a first light beam incident on a selected region of the surface at a low incident angle and examining its dark field reflection; and a selected region. A second optical inspection means for forming a second diffused light beam incident on and checking its bright field reflection and a third optical beam incident on the selected region at a high incident angle and checking its bright field reflection. An optical inspection device comprising a third optical inspection means. 2. The first optical inspection means comprises a first illumination source for directing a spatially uniform first light beam to a selected area at a low incident angle, and scattering by the first light beam. The apparatus of claim 1 comprising a first sensor for sensing a dark field reflection image. 3. The first illumination source comprises a first light source for generating a first light beam, and a first light source for directing the first light beam to a selected region at a low incident angle.
The illumination source optics of claim 1 and an optical integrator that uniformly disperses the first light beam over a selected area. 4. The apparatus of claim 2, wherein the first sensor is a photosensitive camera. 5. The apparatus of claim 4, wherein the camera is located along a vertical line with respect to the selected area. 6. The optical integrator includes a plurality of lenses arranged in an array within a first light beam,
The apparatus of claim 3, wherein each lens focuses a portion of the first light beam onto a portion of the selected area. 7. The second optical inspection means detects a second illumination source for directing a spatially diffused second light beam to a selected area, and a bright-field reflection image by the second light beam. The device of claim 1 comprising a second sensor that operates. 8. The second illumination source comprises a second light source for forming a second light beam, a second illumination source optical system for directing the second light beam toward the selected area, and 8. The apparatus of claim 7, comprising an optical diffuser for diffusing the two light beams. 9. The apparatus of claim 7, wherein the second sensor is a photosensitive camera. 10. The apparatus of claim 9, wherein the camera is positioned along a vertical line with respect to the selected area. 11. The third optical inspecting means directs a third light beam to a selected area at a high incident angle.
2. The apparatus according to claim 1, further comprising: an illumination source and a third sensor for sensing a bright field reflection image by the third light beam. 12. An optical inspection device for a surface, the first illumination source directing a spatially uniform first light beam to a selected area of the surface at a low angle of incidence and scattering by the first light beam. A first inspection channel comprising a first sensor for forming a dark field reflection image, a second illumination source for directing a spatially diffused second light beam to a selected area and a second light beam for illumination. A second inspection channel consisting of a second sensor forming a field reflection image, and a third for directing a third light beam to the selected area at a high angle of incidence.
Optical inspection apparatus, which comprises a third inspection channel consisting of an illumination source and a third sensor for forming a bright field reflection image by the third light beam. 13. The first illumination source comprises a first light source for generating a first light beam, and a first light source for directing the first light beam to a selected region at a low incident angle.
13. The apparatus of claim 12, comprising: the illumination source optics of claim 1, and an optical integrator that uniformly disperses the first light beam over the selected area. 14. The apparatus of claim 13, wherein the first light source is a xenon lamp. 15. The first illumination source optics has a first end receiving a first light beam from a first light source and a second end receiving the first light beam to an optical integrator. A directed first optical waveguide, a mirror for focusing the first optical beam at a second end of the first optical waveguide, and a filtering of the first optical beam to pass selected wavelengths of light 14. The device of claim 13, comprising an optical filter. 16. The optical integrator includes a plurality of lenses arranged in an array within a first light beam, each lens having a portion of the first light beam over a portion of a selected area. 14. The device of claim 13 for focusing. 17. The apparatus of claim 12, wherein the first sensor is a photosensitive camera arranged along a vertical line with respect to the selected area. 18. The second illumination source comprises a second light source for forming a second light beam, a second illumination source optical system for directing the second light beam toward the selected area, and 13. The apparatus of claim 12, comprising an optical diffuser that diffuses the two light beams. 19. The second illumination source optics has a first end receiving a second light beam from a second light source and a second end optically spreading the second light beam. A second optical waveguide that is directed to the mirror, a mirror that focuses the second optical beam at the second end of the second optical waveguide, and a second optical beam that filters the second optical beam to pass a selected wavelength of light. 19. The apparatus of claim 18, comprising an optical filter that allows 20. The apparatus of claim 4, wherein the second sensor is a photosensitive camera arranged along a vertical line with respect to the selected area. 21. The apparatus of claim 12, comprising a turntable on which is placed an article having a surface that includes a selected area.